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    Closed-loop control of X-ray knife edge
    82.
    发明申请
    Closed-loop control of X-ray knife edge 审中-公开

    公开(公告)号：US20180088062A1

    公开(公告)日：2018-03-29

    申请号：US15717961

    申请日：2017-09-28

    Applicant: BRUKER JV ISRAEL LTD.

    Inventor： Isaac Mazor ,  Yuri Vinshtein ,  Matthew Wormington ,  Nikolai Kasper

    IPC: G01N23/20 ,  G01S17/08

    CPC classification number: G01N23/20091 ,  G01N23/20008 ,  G01N23/201 ,  G01N2223/0563 ,  G01S17/08 ,  G01S17/48 ,  G01S17/88

    Abstract: Apparatus for X-ray scatterometry includes an X-ray source, which directs an X-ray beam to be incident at a grazing angle on an area of a surface of a sample, and an X-ray detector measures X-rays scattered from the area. A knife edge is arranged parallel to the surface of the sample in a location adjacent to the area so as to define a gap between the surface and the knife edge and to block a portion of the X-ray beam that does not pass through the gap. A motor moves the knife edge perpendicular to the surface so as to control a size of the gap. An optical rangefinder receives optical radiation reflected from the surface and outputs a signal indicative of a distance of the knife edge from the surface. Control circuitry drives the motor responsively to the signal in order to regulate the size of the gap.

    Differential phase-contrast imaging
    88.
    发明授权
    Differential phase-contrast imaging 有权

    公开(公告)号：US09861330B2

    公开(公告)日：2018-01-09

    申请号：US13878841

    申请日：2011-10-17

    Applicant: Ewald Rössl

    Inventor： Ewald Rössl

    IPC: A61B6/00 ,  G21K1/06 ,  G01N23/04 ,  A61B6/03 ,  G01N23/20 ,  A61B6/06

    CPC classification number: A61B6/484 ,  A61B6/032 ,  A61B6/06 ,  A61B6/4035 ,  A61B6/4291 ,  G01N23/046 ,  G01N23/20075 ,  G21K1/06 ,  G21K1/067

    Abstract: The present invention relates to differential phase-contrast imaging, in particular to a structure of a diffraction grating, e.g. an analyzer grating and a phase grating, for X-ray differential phase-contrast imaging. In order to provide enhanced phase-gradient based image data, a diffraction grating (14, 15) for X-ray differential phase-contrast imaging, is provided with a first sub-area (23) comprising at least one portion (24) of a first grating structure (26) and at least one portion (28) of a second grating structure (30). The first grating structure comprises a plurality of bars (34) and gaps (36) with a first grating orientation GO1 (37), being arranged periodically, wherein the bars are arranged such that they change the phase and/or amplitude of an X-ray radiation and wherein the gaps are X-ray transparent. The second grating structure comprises a plurality of bars (40) and gaps (42) with a second grating orientation GO2 (44), being arranged periodically, wherein the bars are arranged such that they change the phase and/or amplitude of an X-ray radiation and wherein the gaps are X-ray transparent. The first grating orientation GO1 is different than the second grating orientation GO2. Thus, phase-gradient based image information can be acquired for different directions without the necessity to rotate or pivot any of the respective gratings between the acquisition steps, for example.

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