Silicon wafer for epitaxial wafer, epitaxial wafer, and method of manufacture thereof
    1.
    发明授权
    Silicon wafer for epitaxial wafer, epitaxial wafer, and method of manufacture thereof 有权
    用于外延晶片的硅晶片,外延晶片及其制造方法

    公开(公告)号:US06626994B1

    公开(公告)日:2003-09-30

    申请号:US09890007

    申请日:2001-07-24

    IPC分类号: C30B2500

    摘要: There are provided a silicon wafer for epitaxial growth wherein a void type defect is not exposed on the surface where an epitaxial layer is grown, and a method for producing an epitaxial wafer comprising measuring the number of the void type defects exposed on the surface of a silicon wafer and/or the number of the void type defects which exist in the part to the depth of at least 10 nm from the surface of the silicon wafer, choosing the silicon wafer wherein the number of these void type defects is smaller than the predetermined value, and growing an epitaxial layer on the surface of the chosen silicon wafer. Thereby, there can be provided a silicon wafer for epitaxial growth wherein generation of SF is reduced and epitaxial wafer, and a method for producing it.

    摘要翻译: 提供了一种用于外延生长的硅晶片,其中空隙型缺陷不暴露在外延层生长的表面上,以及一种用于制造外延晶片的方法,包括测量暴露在外表面上的空穴型缺陷的数量 硅晶片和/或从硅晶片表面到深度至少为10nm的部分中存在的空隙型缺陷的数量,选择硅晶片,其中这些空隙型缺陷的数量小于预定的 值,并且在所选硅晶片的表面上生长外延层。 因此,可以提供一种用于外延生长的硅晶片,其中SF的产生被减少,并且外延晶片及其制造方法。

    Silicon wafer
    2.
    发明授权
    Silicon wafer 有权
    硅晶片

    公开(公告)号:US06599603B1

    公开(公告)日:2003-07-29

    申请号:US09673955

    申请日:2000-10-24

    IPC分类号: C30B2906

    摘要: The present invention provides a CZ silicon wafer, wherein the wafer includes rod-like void defects and/or plate-like void defects inside thereof, and a CZ silicon wafer, wherein the silicon wafer includes void defects inside the wafer, a maximum value of a ratio between long side length L1 and short side length L2 (L1/L2) in an optional rectangle circumscribed the void defect image projected on an optional {110} plane is 2.5 or more, and the silicon wafer including rod-like void defects and/or plate-like void defects inside the wafer, wherein a void defect density of the silicon wafer at a depth of from the wafer surface to at least 0.5 &mgr;m after the heat treatment is ½ or less than that of inside the wafer. According to this, the silicon wafer, which is suitable for expanding reducing effect of void defects by heat treatment up to a deeper region, can be obtained.

    摘要翻译: 本发明提供了一种CZ硅晶片,其中晶片在其内部包括棒状空隙缺陷和/或板状空隙缺陷,以及CZ硅晶片,其中硅晶片包括晶片内的空隙,其最大值 在可选择的{110}平面上投影的空隙缺陷图像的任意矩形中的长边长L1和短边长L2之间的比率(L1 / L2)为2.5以上,硅晶片包括棒状空隙, /或晶片内的板状空隙缺陷,其中在晶片表面的深度处的硅晶片的空隙缺陷密度在热处理之后至少为0.5微米的半孔缺陷密度为晶片内部的1/2以下。 据此,可以获得适合于通过热处理直到更深的区域来减少空隙缺陷的效果的硅晶片。

    Silicon single crystal wafer and method for producing silicon single crystal wafer
    3.
    发明授权
    Silicon single crystal wafer and method for producing silicon single crystal wafer 有权
    硅单晶晶片和硅单晶晶片的制造方法

    公开(公告)号:US06299982B1

    公开(公告)日:2001-10-09

    申请号:US09313856

    申请日:1999-05-18

    IPC分类号: C03B1529

    摘要: There is disclosed a silicon single crystal wafer produced by processing a silicon single crystal ingot grown by Czochralski method with doping nitrogen, wherein a size of grown-in defects in the silicon single crystal wafer is 70 nm or less, a silicon single crystal wafer produced by processing a silicon single crystal ingot grown by Czochralski method with doping nitrogen, the silicon single crystal ingot is grown with controlling a rate of cooling from 1150 to 1080° C. to be 2.3° C./min or more, and a method for producing a silicon single crystal wafer wherein a silicon single crystal ingot is grown with doping nitrogen and controlling a rate of cooling from 1150 to 1080° C. to be 2.3° C./min or more, and is then processed to provide a silicon single crystal wafer. The silicon single crystal wafer for device wherein growth of the crystal defects is suppressed can be produced by CZ method in high productivity.

    摘要翻译: 公开了通过用掺杂氮处理通过Czochralski法生长的硅单晶锭制造的硅单晶晶片,其中硅单晶晶片中的长期缺陷的尺寸为70nm以下,制造的硅单晶晶片 通过处理通过掺杂氮气的切克劳斯基法生长的硅单晶锭,生长硅单晶锭,控制冷却速率为1150℃至1080℃,为2.3℃/分钟以上, 制造硅单晶晶片,其中使用掺杂氮气生长硅单晶锭,并将冷却速率控制在1150至1080℃至2.3℃/分钟以上,然后进行处理以提供硅单晶 晶圆。 可以通过CZ法以高生产率制造晶体缺陷生长被抑制的器件用硅单晶晶片。

    Control apparatus for vehicle
    6.
    发明授权
    Control apparatus for vehicle 有权
    车辆控制装置

    公开(公告)号:US08954248B2

    公开(公告)日:2015-02-10

    申请号:US14164346

    申请日:2014-01-27

    IPC分类号: G06F19/00 B60W10/12 B60W10/04

    摘要: A control apparatus for a vehicle including a differential section having a first rotating element coupled to a prime mover and a second rotating element connected to drive wheels via an engaging and disengaging apparatus, including: a controller configured to control connection of the engaging and disengaging apparatus, the controller being configured to adjust a power of the prime mover, the controller being configured to reduce the power of the prime mover when performing connection of the engaging and disengaging apparatus, and the controller being configured to reduce more power of the prime mover as a speed of rotation of the first rotating element is lower.

    摘要翻译: 一种用于车辆的控制装置,包括具有联接到原动机的第一旋转元件和经由接合和分离装置连接到驱动轮的第二旋转元件的差速部分,包括:控制器,被配置为控制接合和分离装置的连接 所述控制器被配置为调节所述原动机的功率,所述控制器被配置为在执行所述接合和分离设备的连接时减小所述原动机的功率,并且所述控制器被配置为将所述原动机的更多功率降低为 第一旋转元件的旋转速度较低。

    Vehicle
    7.
    发明授权
    Vehicle 有权
    车辆

    公开(公告)号:US08932178B2

    公开(公告)日:2015-01-13

    申请号:US14134706

    申请日:2013-12-19

    摘要: A vehicle includes a transmission between an engine and a drive wheel and includes a differential mechanism (planetary gear mechanism) between the engine and an engagement device (transmission). A controller (ECU) included in the vehicle calculates a variation rate in the whole rotation energy of the planetary gear mechanism when it is in the inertia phase of a shift. The ECU increasingly corrects an engine generated power and decreasingly corrects a transmission transfer power when the variation rate is higher than 0. The ECU decreasingly corrects the engine generated power and increasingly correct the transmission transfer power when the variation rate is lower than 0.

    摘要翻译: 车辆包括在发动机和驱动轮之间的变速器,并且包括在发动机和接合装置(变速器)之间的差速机构(行星齿轮机构)。 包括在车辆中的控制器(ECU)当处于换档的惯性阶段时,计算行星齿轮机构的整个旋转能量的变化率。 ECU越来越多地校正发动机发电量,并且当变化率高于0时,逐渐校正传动传递功率。当减小发动机发电功率并在变化率低于0时越来越多地校正传输传递功率。

    Bearing apparatus, spindle motor, and disk drive apparatus
    8.
    发明授权
    Bearing apparatus, spindle motor, and disk drive apparatus 有权
    轴承装置,主轴电机和磁盘驱动装置

    公开(公告)号:US08794839B2

    公开(公告)日:2014-08-05

    申请号:US13602348

    申请日:2012-09-04

    IPC分类号: F16C32/06

    摘要: A bearing apparatus includes a stationary shaft, a first annular member, and a rotating member. The rotating member includes a first inner circumferential surface arranged opposite to the outer circumferential surface of the stationary shaft, and a second inner circumferential surface arranged opposite to an outer circumferential surface of the first annular member. A lubricating oil is arranged in a gap between a surface of a stationary member and the rotating member. On an upper side of an upper surface of the lubricating oil, the first annular member and the rotating member are arranged radially opposite to each other with a slight gap defined therebetween, so that a labyrinth seal is defined. The labyrinth seal and a fixing range over which the stationary shaft and the first annular member are fixed to each other are arranged to overlap with each other in a radial direction.

    摘要翻译: 轴承装置包括固定轴,第一环形构件和旋转构件。 旋转构件包括与固定轴的外周面相对配置的第一内周面和与第一环状构件的外周面相对设置的第二内周面。 润滑油布置在固定件的表面和旋转件之间的间隙中。 在润滑油的上表面的上侧,第一环形构件和旋转构件彼此径向相对设置,在其间限定了微小的间隙,从而限定了迷宫式密封。 迷宫式密封件和固定轴和第一环形构件彼此固定的固定范围被布置成在径向方向上彼此重叠。

    Power slider
    9.
    发明授权
    Power slider 有权
    电源滑块

    公开(公告)号:US08733725B2

    公开(公告)日:2014-05-27

    申请号:US13114095

    申请日:2011-05-24

    IPC分类号: F16M13/00

    摘要: A power slider includes a lower rail and an upper rail which are engaged with each other so as to be mutually slidable along each other, a screw rod which is rotatably supported on one of the lower rail and the upper rail, a feed nut which is supported on the other of the lower rail and the upper rail and is screw-engaged with the screw rod, and a gearbox which is supported on the one of the lower rail and the upper rail via a holder and which rotatably drives the screw rod. The gearbox is provided with a mounting bolt through-hole and is supported by the holder via a mounting bolt that is inserted through the mounting bolt through-hole. A resilient member is positioned in a space defined between the mounting bolt through-hole of the gearbox and the mounting bolt.

    摘要翻译: 电动滑块包括彼此接合以便彼此相互滑动的下轨道和上轨道,可旋转地支撑在下轨道和上轨道之一上的螺杆,进给螺母,其是 支撑在下轨道和上轨道中的另一个上,并且与螺杆螺纹接合;以及齿轮箱,其经由保持器支撑在下轨道和上轨道中的一个上,并且可旋转地驱动螺杆。 齿轮箱设有安装螺栓通孔,并通过安装螺栓通过安装螺栓通孔插入支架。 弹性构件定位在齿轮箱的安装螺栓通孔和安装螺栓之间的空间中。