摘要:
There are provided a silicon wafer for epitaxial growth wherein a void type defect is not exposed on the surface where an epitaxial layer is grown, and a method for producing an epitaxial wafer comprising measuring the number of the void type defects exposed on the surface of a silicon wafer and/or the number of the void type defects which exist in the part to the depth of at least 10 nm from the surface of the silicon wafer, choosing the silicon wafer wherein the number of these void type defects is smaller than the predetermined value, and growing an epitaxial layer on the surface of the chosen silicon wafer. Thereby, there can be provided a silicon wafer for epitaxial growth wherein generation of SF is reduced and epitaxial wafer, and a method for producing it.
摘要:
The present invention provides a CZ silicon wafer, wherein the wafer includes rod-like void defects and/or plate-like void defects inside thereof, and a CZ silicon wafer, wherein the silicon wafer includes void defects inside the wafer, a maximum value of a ratio between long side length L1 and short side length L2 (L1/L2) in an optional rectangle circumscribed the void defect image projected on an optional {110} plane is 2.5 or more, and the silicon wafer including rod-like void defects and/or plate-like void defects inside the wafer, wherein a void defect density of the silicon wafer at a depth of from the wafer surface to at least 0.5 &mgr;m after the heat treatment is ½ or less than that of inside the wafer. According to this, the silicon wafer, which is suitable for expanding reducing effect of void defects by heat treatment up to a deeper region, can be obtained.
摘要:
There is disclosed a silicon single crystal wafer produced by processing a silicon single crystal ingot grown by Czochralski method with doping nitrogen, wherein a size of grown-in defects in the silicon single crystal wafer is 70 nm or less, a silicon single crystal wafer produced by processing a silicon single crystal ingot grown by Czochralski method with doping nitrogen, the silicon single crystal ingot is grown with controlling a rate of cooling from 1150 to 1080° C. to be 2.3° C./min or more, and a method for producing a silicon single crystal wafer wherein a silicon single crystal ingot is grown with doping nitrogen and controlling a rate of cooling from 1150 to 1080° C. to be 2.3° C./min or more, and is then processed to provide a silicon single crystal wafer. The silicon single crystal wafer for device wherein growth of the crystal defects is suppressed can be produced by CZ method in high productivity.
摘要:
A sprung vibration damping for suppressing sprung vibration which is generated to a vehicle by an input from a road surface to wheels provided with the vehicle by controlling a torque of a motor, and the sprung vibration damping is subjected to a restriction including a prohibition in response to a state of battery, which supplies power to the motor, such as a voltage and a temperature of the battery or a state of a control, which affects the power of the battery, such as a charge/discharge amount feedback control and the like.
摘要:
A first seal portion having a surface of a lubricating oil defined therein is defined between a sleeve portion and a bearing housing. A side communicating channel arranged to bring a first seal gap and a thrust gap into communication with each other is defined either between a sleeve portion and a bearing housing or in an outer circumferential portion of a sleeve portion. A second seal portion having another surface of a lubricating oil defined therein is defined in a gap constituted by a side minute gap between a thrust plate and a bearing housing and a lower minute gap between a thrust plate and a cap member.
摘要:
A control apparatus for a vehicle including a differential section having a first rotating element coupled to a prime mover and a second rotating element connected to drive wheels via an engaging and disengaging apparatus, including: a controller configured to control connection of the engaging and disengaging apparatus, the controller being configured to adjust a power of the prime mover, the controller being configured to reduce the power of the prime mover when performing connection of the engaging and disengaging apparatus, and the controller being configured to reduce more power of the prime mover as a speed of rotation of the first rotating element is lower.
摘要:
A vehicle includes a transmission between an engine and a drive wheel and includes a differential mechanism (planetary gear mechanism) between the engine and an engagement device (transmission). A controller (ECU) included in the vehicle calculates a variation rate in the whole rotation energy of the planetary gear mechanism when it is in the inertia phase of a shift. The ECU increasingly corrects an engine generated power and decreasingly corrects a transmission transfer power when the variation rate is higher than 0. The ECU decreasingly corrects the engine generated power and increasingly correct the transmission transfer power when the variation rate is lower than 0.
摘要:
A bearing apparatus includes a stationary shaft, a first annular member, and a rotating member. The rotating member includes a first inner circumferential surface arranged opposite to the outer circumferential surface of the stationary shaft, and a second inner circumferential surface arranged opposite to an outer circumferential surface of the first annular member. A lubricating oil is arranged in a gap between a surface of a stationary member and the rotating member. On an upper side of an upper surface of the lubricating oil, the first annular member and the rotating member are arranged radially opposite to each other with a slight gap defined therebetween, so that a labyrinth seal is defined. The labyrinth seal and a fixing range over which the stationary shaft and the first annular member are fixed to each other are arranged to overlap with each other in a radial direction.
摘要:
A power slider includes a lower rail and an upper rail which are engaged with each other so as to be mutually slidable along each other, a screw rod which is rotatably supported on one of the lower rail and the upper rail, a feed nut which is supported on the other of the lower rail and the upper rail and is screw-engaged with the screw rod, and a gearbox which is supported on the one of the lower rail and the upper rail via a holder and which rotatably drives the screw rod. The gearbox is provided with a mounting bolt through-hole and is supported by the holder via a mounting bolt that is inserted through the mounting bolt through-hole. A resilient member is positioned in a space defined between the mounting bolt through-hole of the gearbox and the mounting bolt.
摘要:
A semiconductor device is provided with a semiconductor element having a plurality of electrodes, a plurality of terminals electrically connected to the plurality of electrodes, and a sealing resin covering the semiconductor element. The sealing resin covers the plurality of terminals such that a bottom surface of the semiconductor element in a thickness direction is exposed. A first terminal, which is one of the plurality of terminals, is disposed in a position that overlaps a first electrode, which is one of the plurality of electrodes, when viewed in the thickness direction. The semiconductor device is provided with a conductive connection member that contacts both the first terminal and the first electrode.