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公开(公告)号：US07929269B2
公开(公告)日：2011-04-19
申请号：US12204079
申请日：2008-09-04
IPC分类号： H01T23/00
CPC分类号： H01L21/683 , H01L21/6831 , H01L21/6833
摘要： An article with an etch resistant coating is disclosed. The article is a heating element, wafer carrier, or electrostatic chuck. The article has a base substrate made of a ceramic or other material, and further has one or more electrodes for resistance heating or electromagnetic chucking or both. The eth resistant coating has a plurality of regions made from materials having different electrical volume resistivities, such that the overall coating has a bulk resistivity that can be tailored by varying the relative size of each region.
摘要翻译： 公开了具有耐蚀刻涂层的物品。 该物品是加热元件，晶片载体或静电卡盘。 该制品具有由陶瓷或其他材料制成的基底，并且还具有用于电阻加热或电磁夹持的两个或更多个电极。 耐腐蚀涂层具有由具有不同电体积电阻率的材料制成的多个区域，使得整个涂层具有可以通过改变每个区域的相对尺寸来调整的体电阻率。
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公开(公告)号：US20100053841A1
公开(公告)日：2010-03-04
申请号：US12204079
申请日：2008-09-04
IPC分类号： H01L21/683
CPC分类号： H01L21/683 , H01L21/6831 , H01L21/6833
摘要： An article with an etch resistant coating is disclosed. The article is a heating element, wafer carrier, or electrostatic chuck. The article has a base substrate made of a ceramic or other material, and further has one or more electrodes for resistance heating or electromagnetic chucking or both. The eth resistant coating has a plurality of regions made from materials having different electrical volume resistivities, such that the overall coating has a bulk resistivity that can be tailored by varying the relative size of each region.
摘要翻译： 公开了具有耐蚀刻涂层的物品。 该物品是加热元件，晶片载体或静电卡盘。 该制品具有由陶瓷或其他材料制成的基底，并且还具有用于电阻加热或电磁夹持的两个或更多个电极。 耐腐蚀涂层具有由具有不同电体积电阻率的材料制成的多个区域，使得整个涂层具有可以通过改变每个区域的相对尺寸来调整的体电阻率。
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3.发明授权公开(公告)号：US08940397B2
公开(公告)日：2015-01-27
申请号：US13036348
申请日：2011-02-28
申请人： Honnaiah Mallesha , Anantharaman Dhanabalan , Robert F. Hayes , Narayana Padmanabha Iyer , Marc Schaepkens
发明人： Honnaiah Mallesha , Anantharaman Dhanabalan , Robert F. Hayes , Narayana Padmanabha Iyer , Marc Schaepkens
IPC分类号： C08K3/22 , C09D7/12 , C09D169/00 , C08L75/08 , C09D175/08 , C08G18/10 , C08G18/44 , C08J7/04 , C09D175/06 , B05D1/00 , B05D5/00 , B05D7/02 , B05D7/00 , C08L75/04 , C08K3/00 , C08K3/20
CPC分类号： C09D169/00 , B05D1/62 , B05D5/00 , B05D7/02 , B05D7/52 , C08G18/10 , C08G18/44 , C08J7/042 , C08J2469/00 , C08J2475/04 , C08K3/014 , C08K3/20 , C08K3/22 , C08K2003/2213 , C08K2003/2241 , C08K2003/2244 , C08K2003/2296 , C08L75/04 , C08L75/08 , C09D7/61 , C09D175/06 , C09D175/08 , Y10T428/31507 , C08G18/718
摘要： Disclosed herein is a primer composition comprising an inorganic UV absorbing agent and a polymer selected from (i) a copolycarbonate, and (ii) a polyurethane obtained by reaction of a polyisocyanate and a copolycarbonate diol. Also disclosed is a coated article comprising a polymeric substrate, a primer layer disposed on at least one surface of said substrate, and an abrasion-resistant layer disposed on said primer layer, where the primer layer is made from the primer composition of the invention.
摘要翻译： 本文公开了包含无机UV吸收剂和选自（i）共聚碳酸酯和（ii）通过多异氰酸酯和共聚碳酸酯二醇反应获得的聚氨酯的聚合物的底漆组合物。 还公开了一种涂覆制品，其包括聚合物基材，设置在所述基材的至少一个表面上的底漆层和设置在所述底漆层上的耐磨层，其中底漆层由本发明的底漆组合物制成。
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4.发明授权Multilayer coating package on flexible substrates for electro-optical devices 有权用于电光器件的柔性基板上的多层涂层封装公开(公告)号：US08236424B2
公开(公告)日：2012-08-07
申请号：US12352386
申请日：2009-01-12
CPC分类号： H01L31/0203 , C23C14/022 , C23C14/06 , H01L31/0216 , H01L31/0392 , H01L31/03926 , H01L33/44 , H01L51/5256 , H01L2251/5338 , Y02E10/50 , Y10T428/31507 , Y10T428/31663 , Y10T428/31855
摘要： An electro-optical device having at least one base and a multilayer coating surface disposed on at least one surface of the base. The at least one base may comprise either an optically or electronically active portion or a flexible polymeric material. The multilayer coating set comprises at least one organic layer and at least one inorganic layer. The base and multilayer coating set are transparent. The multilayer coating set provides a barrier to moisture and oxygen and provides chemical resistance. The multilayer coating set is also mechanically flexible and thermally stable up to a glass transition temperature of the base.
摘要翻译： 一种具有至少一个基底和设置在基底的至少一个表面上的多层涂层表面的电光装置。 所述至少一个基底可以包括光学或电子活性部分或柔性聚合材料。 多层涂层组包括至少一个有机层和至少一个无机层。 基底和多层涂层是透明的。 多层涂层提供了水分和氧气的屏障，并提供耐化学性。 该多层涂层组合也是机械柔性且热稳定的，直到基底的玻璃化转变温度。
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公开(公告)号：US07777160B2
公开(公告)日：2010-08-17
申请号：US12002381
申请日：2007-12-17
申请人： Wei Fan , Benjamin J. Olechnowicz , Marc Schaepkens , David M. Rusinko, Jr. , Xiang Liu , John T. Mariner
发明人： Wei Fan , Benjamin J. Olechnowicz , Marc Schaepkens , David M. Rusinko, Jr. , Xiang Liu , John T. Mariner
CPC分类号： H01L21/68735 , H01L21/67103 , H05B3/143
摘要： A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.
摘要翻译： 提供了包括电极层和用于高精度地调谐层状加热器结构的电极层的局部调谐方法的层状加热器结构。 局部调谐方法将电极层调整到其适当的局部电阻以最小化加热器表面上的温度偏移，并因此提供期望的热分布，其与基于厚度修整实践的常规非局部电阻调谐方法形成鲜明对比，例如 研磨或爆破，或电阻率调整，如局部热处理。
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公开(公告)号：US20090021150A1
公开(公告)日：2009-01-22
申请号：US12124548
申请日：2008-05-21
CPC分类号： H01L51/5256 , Y10T428/31504 , Y10T428/31667 , Y10T428/31928
摘要： A barrier coating of organic-inorganic composition, the barrier coating having optical properties that are substantially uniform along an axis of light transmission, said axis oriented substantially perpendicular to the surface of the coating.
摘要翻译： 有机 - 无机组合物的阻挡涂层，所述阻挡涂层具有沿着光透射轴线基本均匀的光学性质，所述轴线基本上垂直于所述涂层的表面定向。
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公开(公告)号：US20080009417A1
公开(公告)日：2008-01-10
申请号：US11560953
申请日：2006-11-17
IPC分类号： H01L39/24
CPC分类号： H01L21/68757 , C03C3/062 , C03C3/095 , C03C4/20
摘要： A processing apparatus for use in a corrosive operating environment at a temperature range of 25-1500° C. is provided. The apparatus has protective coating structure that includes a glassy material. The glassy material includes at least one of yttrium, cerium, or gadolinium; and aluminum and silicon. The coating composition resists etching by a harsh environment.
摘要翻译： 提供一种用于在25-1500℃的温度范围内的腐蚀性操作环境中的加工设备。 该装置具有包括玻璃状材料的保护涂层结构。 玻璃状材料包括钇，铈或钆中的至少一种; 和铝和硅。 涂料组合物可以抵抗恶劣环境的蚀刻。
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公开(公告)号：US20070053168A1
公开(公告)日：2007-03-08
申请号：US11555681
申请日：2006-11-01
申请人： Haluk Sayir , Arik Mehmet , Evan Cooper , Tunc Icoz , Marc Schaepkens , Xiang Liu
发明人： Haluk Sayir , Arik Mehmet , Evan Cooper , Tunc Icoz , Marc Schaepkens , Xiang Liu
IPC分类号： H05K7/20
CPC分类号： H01L23/3672 , B32B18/00 , B32B2315/02 , C04B35/522 , C04B35/645 , C04B2235/9607 , C04B2237/086 , C04B2237/32 , C04B2237/363 , C04B2237/66 , C04B2237/704 , C04B2237/82 , C04B2237/84 , F28F3/02 , F28F3/022 , F28F3/025 , F28F13/18 , F28F21/02 , G06F1/20 , H01L23/367 , H01L23/3677 , H01L23/373 , H01L23/3735 , H01L23/467 , H01L2924/0002 , H01L2924/00
摘要： A heat sink assembly for an electronic device or a heat generating device(s) is constructed from an ultra-thin graphite layer. The ultra-thin graphite layer exhibits thermal conductivity which is anisotropic in nature and is greater than 500 W/m° C. in at least one plane and comprises at least a graphene layer. The ultra-thin graphite layer is structurally supported by a layer comprising at least one of a metal, a polymeric resin, a ceramic, and a mixture thereof, which is disposed on at least one surface of the graphite layer.
摘要翻译： 用于电子装置或发热装置的散热器组件由超薄石墨层构成。 超薄石墨层本质上具有各向异性的热导率，并且在至少一个平面中大于500W / m℃，并且至少包括石墨烯层。 超薄石墨层在结构上由包含金属，聚合物树脂，陶瓷及其混合物中的至少一种的层支撑，该层设置在石墨层的至少一个表面上。
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9.发明申请Diffusion barrier coatings having graded compositions and devices incorporating the same 审中-公开具有分级组成的扩散阻隔涂层和包含其的装置公开(公告)号：US20060208634A1
公开(公告)日：2006-09-21
申请号：US11378480
申请日：2006-03-20
申请人： Marc Schaepkens , Kevin Flanagan
发明人： Marc Schaepkens , Kevin Flanagan
IPC分类号： H01J1/62
CPC分类号： H01L51/5268 , B82Y20/00 , B82Y30/00 , C23C16/30 , C23C16/45523 , C23C16/50 , G02F1/133305 , G02F2201/50 , H01L51/5036 , H01L51/5253 , H01L2251/5338 , H01L2251/5346 , H01L2251/5369
摘要： Disclosed is a composite article and methods for making a composite article where the composite article includes a coating material formed from an organic material having a first refractive index and an inorganic material having a second refractive index where the refractive indexes match. The methods may include depositing the coating using a plasma-enhanced chemical-vapor deposition technique. The methods may further include varying the deposition rate of one or both of the organic and inorganic material so as to match the refractive indexes.
摘要翻译： 公开了一种复合制品和复合制品的制造方法，其中复合制品包括由具有第一折射率的有机材料形成的涂层材料和具有折射率匹配的第二折射率的无机材料。 所述方法可以包括使用等离子体增强化学气相沉积技术沉积涂层。 所述方法还可以包括改变有机材料和无机材料中的一种或两种的沉积速率，以便匹配折射率。
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公开(公告)号：US20060096946A1
公开(公告)日：2006-05-11
申请号：US11262279
申请日：2005-10-28
申请人： Marc Schaepkens , Takayuki Togawa
发明人： Marc Schaepkens , Takayuki Togawa
CPC分类号： H01L21/6833 , H01L21/67103 , H01L21/67109 , H01L21/6831
摘要： A wafer processing device for use in semiconductor wafer processing applications as an Electro-Static Chuck (ESC) comprising a graphite substrate and at least one electrode pattern, wherein the grooves in the electrode pattern are filled with insulating or semiconducting material selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof, forming a substantially planar surface. The substantially planar surface is then coated with at least a semiconducting layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof.
摘要翻译： 一种晶片处理装置，用于半导体晶片处理应用中，作为包含石墨基片和至少一个电极图案的静电卡盘（ESC），其中电极图案中的凹槽填充有绝缘或半导体材料，绝缘或半导体材料选自 B，Al，Si，Ga，难熔硬金属，过渡金属和稀土金属，或其复合物和/或其组合，形成基本平坦的表面。 然后用至少一个半导体层涂覆基本平坦的表面，该半导体层包括选自由B，Al，Si，Ga，耐火硬金属，过渡金属和过渡金属组成的组中的元素的氮化物，碳化物，碳氮化物或氮氧化物中的至少一种 稀土金属或其配合物和/或其组合。
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