Method of making an electronic device cooling system
    8.
    发明授权
    Method of making an electronic device cooling system 失效
    制造电子设备冷却系统的方法

    公开(公告)号:US07427566B2

    公开(公告)日:2008-09-23

    申请号:US11297868

    申请日:2005-12-09

    IPC分类号: H01L21/302

    摘要: A method is provided. The method includes forming a conductive layer on an inner surface of a substrate and providing a sacrificial layer over the conductive layer. The method includes forming a plurality of channels in the sacrificial layer and plating the sacrificial layer to substantially fill the plurality of channels with a plating material comprising conducting material. The method also includes etching the sacrificial layer to form a conducting structure having fins where conducting material remains separated by microchannels where the sacrificial layer is etched.

    摘要翻译: 提供了一种方法。 该方法包括在衬底的内表面上形成导电层并在导电层上提供牺牲层。 该方法包括在牺牲层中形成多个通道,并且使牺牲层电镀以使包含导电材料的镀覆材料基本上填充多个通道。 该方法还包括蚀刻牺牲层以形成具有翅片的导电结构,其中导电材料保持由其中蚀刻牺牲层的微通道分离。

    Method of making an electronic device cooling system
    9.
    发明申请
    Method of making an electronic device cooling system 失效
    制造电子设备冷却系统的方法

    公开(公告)号:US20070131645A1

    公开(公告)日:2007-06-14

    申请号:US11297868

    申请日:2005-12-09

    IPC分类号: C23F1/00 H01L21/302

    摘要: A method is provided. The method includes forming a conductive layer on an inner surface of a substrate and providing a sacrificial layer over the conductive layer. The method includes forming a plurality of channels in the sacrificial layer and plating the sacrificial layer to substantially fill the plurality of channels with a plating material comprising conducting material. The method also includes etching the sacrificial layer to form a conducting structure having fins where conducting material remains separated by microchannels where the sacrificial layer is etched.

    摘要翻译: 提供了一种方法。 该方法包括在衬底的内表面上形成导电层并在导电层上提供牺牲层。 该方法包括在牺牲层中形成多个通道,并且使牺牲层电镀以使包含导电材料的镀覆材料基本上填充多个通道。 该方法还包括蚀刻牺牲层以形成具有翅片的导电结构,其中导电材料保持由其中蚀刻牺牲层的微通道分离。