公开(公告)号：US06836029B2

公开(公告)日：2004-12-28

申请号：US09996148

申请日：2001-11-28

申请人： David R. Greenberg ,  Hariklia Deligianni ,  Robert A. Groves ,  Christopher V. Jahnes ,  Jennifer L. Lund ,  Katherine L. Saenger ,  Richard P. Volant

发明人： David R. Greenberg ,  Hariklia Deligianni ,  Robert A. Groves ,  Christopher V. Jahnes ,  Jennifer L. Lund ,  Katherine L. Saenger ,  Richard P. Volant

IPC分类号： H01H300

CPC分类号： B81B3/0016 ,  B81C2201/112 ,  H01H1/24 ,  H01H59/0009 ,  H01H2001/0089 ,  Y10T307/826 ,  Y10T307/911 ,  Y10T307/937

摘要： A micro-electro mechanical switch having a restoring force sufficiently large to overcome stiction is described. The switch is provided with a deflectable conductive beam and multiple electrodes coated with an elastically deformable conductive layer. A restoring force which is initially generated by a single spring constant k0 upon the application of a control voltage between the deflectable beam and a control electrode coplanar to the contact electrodes is supplemented by adding to k0 additional spring constants k1, . . . , kn provided by the deformable layers, once the switch nears closure and the layers compress. In another embodiment, deformable, spring-like elements are used in lieu of the deformable layers. In an additional embodiment, the compressible layers or deformable spring-like elements are affixed to the deflecting beam facing the switch electrodes

摘要翻译： 描述了具有足够大以克服静止的恢复力的微电机械开关。 开关设置有可偏转的导电束和涂覆有可弹性变形的导电层的多个电极。 在施加可调光束和与接触电极共面的控制电极之间的控制电压时，初始由单个弹簧常数k0产生的恢复力通过增加k0个额外的弹簧常数k1来补充。 。 。 由可变形层提供的，一旦开关接近闭合并且层压缩。 在另一个实施例中，使用可变形的弹簧状元件代替可变形层。 在另外的实施例中，可压缩层或可变形的弹簧状元件固定到面向开关电极的偏转梁

公开(公告)号：US06977569B2

公开(公告)日：2005-12-20

申请号：US10915742

申请日：2004-08-11

申请人： Hariklia Deligianni ,  Christopher V. Jahnes ,  Jennifer L. Lund ,  Lawrence E. Larson

发明人： Hariklia Deligianni ,  Christopher V. Jahnes ,  Jennifer L. Lund ,  Lawrence E. Larson

IPC分类号： H01H59/00 ,  H01H51/22

CPC分类号： H01H59/0009 ,  H01H2001/0068 ,  H01H2001/0078

摘要： A switch comprising a substrate, an elongated movable part, a pair of electrical contacts disposed at one side of said part, an actuation electrode disposed at the one side of the part and separated from the pair of electrical contacts, wherein the part, the contacts and the electrode are disposed on the substrate, wherein the elongated movable part is arranged and dimensioned such that the part is movable in a generally lateral direction toward the contacts; the movable part includes a central elongated member fixed to a head having an electrical contact disposed at the one side. One end of the movable part is attached to the substrate by means of various anchoring arrangements.

公开(公告)号：US06917268B2

公开(公告)日：2005-07-12

申请号：US10035840

申请日：2001-12-31

申请人： Hariklia Deligianni ,  Christopher V. Jahnes ,  Jennifer L. Lund ,  Lawrence E. Larson

发明人： Hariklia Deligianni ,  Christopher V. Jahnes ,  Jennifer L. Lund ,  Lawrence E. Larson

IPC分类号： H01H59/00 ,  H01H51/22

CPC分类号： H01H59/0009 ,  H01H2001/0068 ,  H01H2001/0078

摘要： A switch comprising a substrate, an elongated movable part, a pair of electrical contacts disposed at one side of said part, an actuation electrode disposed at the one side of the part and separated from the pair of electrical contacts, wherein the part, the contacts and the electrode are disposed on the substrate, wherein the elongated movable part is arranged and dimensioned such that the part is movable in a generally lateral direction toward the contacts; the movable part includes a central elongated member fixed to a head having an electrical contact disposed at the one side. One end of the movable part is attached to the substrate by means of various anchoring arrangements.

公开(公告)号：US07602265B2

公开(公告)日：2009-10-13

申请号：US11163485

申请日：2005-10-20

申请人： Hariklia Deligianni ,  Robert D. Edwards ,  Thomas J. Fleischman ,  Robert A. Groves ,  Charles J. Montrose ,  Richard P. Volant ,  Ping-Chuan Wang

发明人： Hariklia Deligianni ,  Robert D. Edwards ,  Thomas J. Fleischman ,  Robert A. Groves ,  Charles J. Montrose ,  Richard P. Volant ,  Ping-Chuan Wang

IPC分类号： H01H51/22

CPC分类号： H01H59/0009

摘要： The present invention provides multiple test structures for performing reliability and qualification tests on MEMS switch devices. A Test structure for contact and gap characteristic measurements is employed having a serpentine layout simulates rows of upper and lower actuation electrodes. A cascaded switch chain test is used to monitor process defects with large sample sizes. A ring oscillator is used to measure switch speed and switch lifetime. A resistor ladder test structure is configured having each resistor in series with a switch to be tested, and having each switch-resistor pair electrically connected in parallel. Serial/parallel test structures are proposed with MEMS switches working in tandem with switches of established technology. A shift register is used to monitor the open and close state of the MEMS switches. Pull-in voltage, drop-out voltage, activation leakage current, and switch lifetime measurements are performed using the shift register.

摘要翻译： 本发明提供用于在MEMS开关装置上执行可靠性和鉴定测试的多个测试结构。 采用具有蛇形布局的接触和间隙特性测量的测试结构来模拟上下驱动电极的行。 级联交换链测试用于监控大样本量的过程缺陷。 环形振荡器用于测量开关速度和开关寿命。 电阻梯形测试结构被配置为具有与要测试的开关串联的每个电阻器，并且每个开关电阻器对并联电连接。 提出了串联/并联测试结构，其中MEMS开关与成熟技术的开关串联工作。 移位寄存器用于监测MEMS开关的开启和关闭状态。 使用移位寄存器执行拉入电压，掉电电压，启动漏电流和开关寿命测量。

公开(公告)号：US07212091B2

公开(公告)日：2007-05-01

申请号：US11053732

申请日：2005-02-08

申请人： Panayotis Constantinou Andricacos ,  L. Paivikki Buchwalter ,  Hariklia Deligianni ,  Robert A. Groves ,  Christopher Jahnes ,  Jennifer L. Lund ,  Michael Meixner ,  David Earle Seeger ,  Timothy D. Sullivan ,  Ping-Chuan Wang

发明人： Panayotis Constantinou Andricacos ,  L. Paivikki Buchwalter ,  Hariklia Deligianni ,  Robert A. Groves ,  Christopher Jahnes ,  Jennifer L. Lund ,  Michael Meixner ,  David Earle Seeger ,  Timothy D. Sullivan ,  Ping-Chuan Wang

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H2001/0078

摘要： A microelectromechanical switch including: at least one pair of actuator electrodes; at least one input electrode and at least one output electrode for input and output, respectively, of a radio frequency signal; and a beam movable by an attraction between the at least one pair of actuator electrodes, the movable beam having at least a portion electrically connected to the at least one input electrode and to the at least one output electrode when moved by the attraction between the at least one pair of actuator electrodes to make an electrical connection between the at least one input and output electrodes; wherein the at least one pair of actuator electrodes are electrically isolated from each of the at least one input and output electrodes. The microelectromechanical switch can be configured in single or multiple-poles and/or single or multiple throws.

摘要翻译： 一种微机电开关，包括：至少一对致动器电极; 分别输入和输出射频信号的至少一个输入电极和至少一个输出电极; 以及可由所述至少一对致动器电极之间的吸引部移动的光束，所述可移动光束具有至少一部分电连接到所述至少一个输入电极，并且当所述至少一个输入电极在所述至少一个输入电极之间被所述吸引力移动时， 至少一对致动器电极，用于在所述至少一个输入和输出电极之间形成电连接; 其中所述至少一对致动器电极与所述至少一个输入和输出电极中的每一个电隔离。 微机电开关可以配置为单极或多极和/或单掷或多掷。

公开(公告)号：US06876282B2

公开(公告)日：2005-04-05

申请号：US10150285

申请日：2002-05-17

申请人： Panayotis Constantinou Andricacos ,  L. Paivikki Buchwalter ,  Hariklia Deligianni ,  Robert A. Groves ,  Christopher Jahnes ,  Jennifer L. Lund ,  Michael Meixner ,  David Earle Seeger ,  Timothy D. Sullivan ,  Ping-Chuan Wang

发明人： Panayotis Constantinou Andricacos ,  L. Paivikki Buchwalter ,  Hariklia Deligianni ,  Robert A. Groves ,  Christopher Jahnes ,  Jennifer L. Lund ,  Michael Meixner ,  David Earle Seeger ,  Timothy D. Sullivan ,  Ping-Chuan Wang

IPC分类号： H01H59/00 ,  H01H51/22

CPC分类号： H01H59/0009 ,  H01H2001/0078

摘要： A microelectromechanical switch including: at least one pair of actuator electrodes; at least one input electrode and at least one output electrode for input and output, respectively, of a radio frequency signal; and a beam movable by an attraction between the at least one pair of actuator electrodes, the movable beam having at least a portion electrically connected to the at least one input electrode and to the at least one output electrode when moved by the attraction between the at least one pair of actuator electrodes to make an electrical connection between the at least one input and output electrodes; wherein the at least one pair of actuator electrodes are electrically isolated from each of the at least one input and output electrodes. The microelectromechanical switch can be configured in single or multiple-poles and/or single or multiple throws.

摘要翻译： 一种微机电开关，包括：至少一对致动器电极; 分别输入和输出射频信号的至少一个输入电极和至少一个输出电极; 以及可由所述至少一对致动器电极之间的吸引部移动的光束，所述可移动光束具有至少一部分电连接到所述至少一个输入电极，并且当所述至少一个输入电极在所述至少一个输入电极之间被所述吸引力移动时， 至少一对致动器电极，用于在所述至少一个输入和输出电极之间形成电连接; 其中所述至少一对致动器电极与所述至少一个输入和输出电极中的每一个电隔离。 微机电开关可以配置为单极或多极和/或单掷或多掷。

公开(公告)号：US07785982B2

公开(公告)日：2010-08-31

申请号：US11620224

申请日：2007-01-05

申请人： Stephen W. Bedell ,  Hariklia Deligianni ,  Qiang Huang ,  Lubomyr T. Romankiw ,  Devendra K. Sadana ,  Katherine L. Saenger

发明人： Stephen W. Bedell ,  Hariklia Deligianni ,  Qiang Huang ,  Lubomyr T. Romankiw ,  Devendra K. Sadana ,  Katherine L. Saenger

IPC分类号： H01L21/76

CPC分类号： H01L21/823807 ,  H01L21/0237 ,  H01L21/02532 ,  H01L21/02628 ,  H01L21/02636 ,  H01L21/02639 ,  H01L21/28255 ,  H01L29/1054 ,  H01L29/78

摘要： Methods for electrodepositing germanium on various semiconductor substrates such as Si, Ge, SiGe, and GaAs are provided. The electrodeposited germanium can be formed as a blanket or patterned film, and may be crystallized by solid phase epitaxy to the orientation of the underlying semiconductor substrate by subsequent annealing. These plated germanium layers may be used as the channel regions of high-mobility channel field effect transistors (FETs) in complementary metal oxide semiconductor (CMOS) circuits.

摘要翻译： 提供了在诸如Si，Ge，SiGe和GaAs的各种半导体衬底上电沉积锗的方法。 电沉积锗可以形成为覆盖或图案化的膜，并且可以通过后续退火使固相外延结晶到下面的半导体衬底的取向。 这些电镀锗层可以用作互补金属氧化物半导体（CMOS）电路中的高迁移率沟道场效应晶体管（FET）的沟道区。

公开(公告)号：US20080142894A1

公开(公告)日：2008-06-19

申请号：US12040350

申请日：2008-02-29

申请人： Philippe M. Vereecken ,  Veeraraghavan S. Basker ,  Cyril Cabral ,  Emanuel I. Cooper ,  Hariklia Deligianni ,  Martin M. Frank ,  Rajarao Jammy ,  Vamsi Krishna Paruchuri ,  Katherine L. Saenger ,  Xiaoyan Shao

发明人： Philippe M. Vereecken ,  Veeraraghavan S. Basker ,  Cyril Cabral ,  Emanuel I. Cooper ,  Hariklia Deligianni ,  Martin M. Frank ,  Rajarao Jammy ,  Vamsi Krishna Paruchuri ,  Katherine L. Saenger ,  Xiaoyan Shao

IPC分类号： H01L27/088 ,  H01L29/423

CPC分类号： H01L21/2885 ,  C25D3/50 ,  C25D5/02 ,  C25D5/024 ,  C25D5/54 ,  C25D7/123 ,  C25D9/04 ,  C25F3/14 ,  H01L21/28079 ,  H01L21/28114 ,  H01L21/76885 ,  H01L29/513 ,  H01L29/517 ,  H01L29/78648

摘要： A method is provided for electroplating a gate metal or other conducting or semiconducting material directly on a dielectric such as a gate dielectric. The method involves selecting a substrate, dielectric layer, and electrolyte solution or melt, wherein the combination of the substrate, dielectric layer, and electrolyte solution or melt allow an electrochemical current to be passed from the substrate through the dielectric layer into the electrolyte solution or melt. Methods are also provided for electrochemical modification of dielectrics utilizing through-dielectric current flow.

摘要翻译： 提供了一种用于将栅极金属或其它导电或半导体材料直接电镀在诸如栅极电介质的电介质上的方法。 该方法包括选择衬底，电介质层和电解质溶液或熔体，其中衬底，电介质层和电解质溶液或熔体的组合允许电化学电流从衬底通过电介质层进入电解质溶液或 熔化。 还提供了利用电介质电流流动的电介质电化学修饰方法。

公开(公告)号：US20090302353A1

公开(公告)日：2009-12-10

申请号：US12541499

申请日：2009-08-14

申请人： Stephen W. Bedell ,  Hariklia Deligianni ,  Qiang Huang ,  Lubomyr T. Romankiw ,  Devendra K. Sadana ,  Katherine L. Saenger

发明人： Stephen W. Bedell ,  Hariklia Deligianni ,  Qiang Huang ,  Lubomyr T. Romankiw ,  Devendra K. Sadana ,  Katherine L. Saenger

IPC分类号： H01L29/165 ,  H01L29/16 ,  H01L29/78 ,  H01L27/092 ,  H01L29/12

CPC分类号： H01L21/823807 ,  H01L21/0237 ,  H01L21/02532 ,  H01L21/02628 ,  H01L21/02636 ,  H01L21/02639 ,  H01L21/28255 ,  H01L29/1054 ,  H01L29/78

摘要： Methods for electrodepositing germanium on various semiconductor substrates such as Si, Ge, SiGe, and GaAs are provided. The electrodeposited germanium can be formed as a blanket or patterned film, and may be crystallized by solid phase epitaxy to the orientation of the underlying semiconductor substrate by subsequent annealing. These plated germanium layers may be used as the channel regions of high-mobility channel field effect transistors (FETs) in complementary metal oxide semiconductor (CMOS) circuits.

摘要翻译： 提供了在诸如Si，Ge，SiGe和GaAs的各种半导体衬底上电沉积锗的方法。 电沉积锗可以形成为覆盖或图案化的膜，并且可以通过后续退火使固相外延结晶到下面的半导体衬底的取向。 这些电镀锗层可以用作互补金属氧化物半导体（CMOS）电路中的高迁移率沟道场效应晶体管（FET）的沟道区。

公开(公告)号：US07868410B2

公开(公告)日：2011-01-11

申请号：US12040350

申请日：2008-02-29

申请人： Philippe M. Vereecken ,  Veeraraghavan S. Basker ,  Cyril Cabral, Jr. ,  Emanuel I. Cooper ,  Hariklia Deligianni ,  Martin M. Frank ,  Rajarao Jammy ,  Vamsi Krishna Paruchuri ,  Katherine L. Saenger ,  Xiaoyan Shao

发明人： Philippe M. Vereecken ,  Veeraraghavan S. Basker ,  Cyril Cabral, Jr. ,  Emanuel I. Cooper ,  Hariklia Deligianni ,  Martin M. Frank ,  Rajarao Jammy ,  Vamsi Krishna Paruchuri ,  Katherine L. Saenger ,  Xiaoyan Shao

IPC分类号： H01L21/70

CPC分类号： H01L21/2885 ,  C25D3/50 ,  C25D5/02 ,  C25D5/024 ,  C25D5/54 ,  C25D7/123 ,  C25D9/04 ,  C25F3/14 ,  H01L21/28079 ,  H01L21/28114 ,  H01L21/76885 ,  H01L29/513 ,  H01L29/517 ,  H01L29/78648

摘要： A method is provided for electroplating a gate metal or other conducting or semiconducting material directly on a dielectric such as a gate dielectric. The method involves selecting a substrate, dielectric layer, and electrolyte solution or melt, wherein the combination of the substrate, dielectric layer, and electrolyte solution or melt allow an electrochemical current to be passed from the substrate through the dielectric layer into the electrolyte solution or melt. Methods are also provided for electrochemical modification of dielectrics utilizing through-dielectric current flow.

摘要翻译： 提供了一种用于将栅极金属或其它导电或半导体材料直接电镀在诸如栅极电介质的电介质上的方法。 该方法包括选择衬底，电介质层和电解质溶液或熔体，其中衬底，电介质层和电解质溶液或熔体的组合允许电化学电流从衬底通过电介质层进入电解质溶液或 熔化。 还提供了利用电介质电流流动的电介质电化学修饰方法。