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1.发明申请METHOD AND APPARATUS UTILIZING A SINGLE LIFT MECHANISM FOR PROCESSING AND TRANSFER OF SUBSTRATES 审中-公开使用单个提升机械的方法和装置，用于处理和转移基板公开(公告)号：US20120234243A1
公开(公告)日：2012-09-20
申请号：US13413744
申请日：2012-03-07
IPC分类号： C23C16/458 , H01L21/00
CPC分类号： H01L21/67115 , C23C16/4584 , C23C16/54 , H01L21/68742
摘要： Embodiments of the present invention relate to apparatus and methods for loading substrates into processing chambers, processing the substrates in the processing chamber, and transferring the substrates out of the processing chamber using a single lift and rotational mechanism. One embodiment of the present invention provides a method for processing one or more substrates. The method includes transferring a substrate carrier, having one or more substrates disposed thereon, to a chamber volume, supporting the substrate carrier within the chamber volume using a set of lift pins, transferring the substrate carrier from the set of lift pins to an edge ring within the chamber volume, and contacting the edge ring with the set of lift pins to control the position of the substrate carrier within the chamber volume.
摘要翻译： 本发明的实施例涉及将基板装载到处理室中的装置和方法，处理处理室中的基板，以及使用单个提升和旋转机构将基板转移到处理室之外。 本发明的一个实施例提供了一种用于处理一个或多个基底的方法。 该方法包括将其上设置有一个或多个衬底的衬底载体转移到室体积，使用一组提升销将衬底载体支撑在室体内，将衬垫载体从该组提升销传送到边缘环 并且使边缘环与该组提升销接触，以控制基板载体在室容积内的位置。
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2.发明授权公开(公告)号：US08449950B2
公开(公告)日：2013-05-28
申请号：US12862244
申请日：2010-08-24
申请人： Quanyuan Shang , Lu Yang , Karl M. Brown , Donald J. K. Olgado , Victor Pebenito , Hooman Bolandi , Tetsuya Ishikawa , Robert Z. Bachrach , Liang-Yuh Chen
发明人： Quanyuan Shang , Lu Yang , Karl M. Brown , Donald J. K. Olgado , Victor Pebenito , Hooman Bolandi , Tetsuya Ishikawa , Robert Z. Bachrach , Liang-Yuh Chen
CPC分类号： H01M4/0419 , H01M4/1391
摘要： A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.
摘要翻译： 提供一种用于形成薄膜电池的电化学层的方法和装置。 包含分散在携带介质中的前体颗粒的前体混合物通过施加电场在活化室中活化，以电离至少一部分前体混合物。 然后将活化的前体混合物与可燃气体混合物混合，以向前体颗粒添加热能，将其转化成沉积在基材上的纳米晶体。 当第二前体沉积在表面上以增强粘附性和导电性时，可与纳米晶体共混。
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公开(公告)号：US07114693B1
公开(公告)日：2006-10-03
申请号：US09676362
申请日：2000-09-29
IPC分类号： F16M13/00
CPC分类号： H01L21/67126 , C25D7/12 , G05B2219/40351 , G05B2219/41457 , H01L21/2885 , H01L21/67051 , H01L21/67742 , H01L21/68707 , H05K3/241
摘要： A stable platform supports a cell, the stable platform comprises a lower mainframe, an upper mainframe, and a dampener system. The upper mainframe includes a plurality of recesses. Each recess is configured to receive a cell. The dampener system connects the lower mainframe to the upper mainframe. In one embodiment, the dampener system comprises a dampener element, such as sand, to dampen vibrations between the lower mainframe and the lower mainframe.
摘要翻译： 稳定的平台支持电池，稳定的平台包括下主机，上主机和减振器系统。 上主机包括多个凹槽。 每个凹槽被配置成接收单元。 阻尼器系统将下主机连接到上主机。 在一个实施例中，阻尼器系统包括阻尼器元件，例如沙子，以阻尼下主机和下主机之间的振动。
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公开(公告)号：US06770565B2
公开(公告)日：2004-08-03
申请号：US10043561
申请日：2002-01-08
IPC分类号： H01L2302
CPC分类号： H01L21/6708 , C23F1/18 , H01L21/32115 , H01L21/32134 , H01L21/32136 , H01L21/7684
摘要： A method of planarizing a metal conductive layer on a substrate is provided. In one embodiment, a substrate having a metal conductive layer disposed on a top surface of the substrate is provided on a substrate support. The substrate support is rotated and the top surface of the substrate is contacted with a liquid etching composition. The metal conductive layer is then exposed to an etchant gas in order to planarize the top surface of the metal conductive layer. Also provided is an apparatus for etching a metal conductive layer on a substrate. The apparatus comprises a container, a substrate support disposed in the container, a rotation actuator attached to the substrate support, and a fluid delivery assembly disposed in the container.
摘要翻译： 提供了在基板上平面化金属导电层的方法。 在一个实施例中，在衬底支架上设置具有设置在衬底顶表面上的金属导电层的衬底。 衬底支撑件旋转并且衬底的顶表面与液体蚀刻组合物接触。 然后将金属导电层暴露于蚀刻剂气体，以平坦化金属导电层的顶表面。 还提供了一种用于在基板上蚀刻金属导电层的装置。 该装置包括容器，设置在容器中的基板支撑件，附接到基板支撑件的旋转致动器以及设置在容器中的流体输送组件。
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公开(公告)号：US06662673B1
公开(公告)日：2003-12-16
申请号：US09684500
申请日：2000-10-06
申请人： Donald J. K. Olgado
发明人： Donald J. K. Olgado
IPC分类号： B25J1800
CPC分类号： C25D7/123 , C25D17/001 , C25D21/00 , H01L21/2885 , H01L21/67028 , H01L21/67051 , H01L21/6708 , H01L21/67126 , H01L21/6723 , H05K3/241 , Y10T29/49826 , Y10T74/20305
摘要： A guide apparatus comprising a plurality of guide linkages. Each one of the plurality of guide linkages comprises a pair of linkage members, each pair of the linkage members are rotatably connected about a guide pivot axis. The guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages. In one aspect, each guide linkage is arranged between a robot platform or a cassette and a base such that extending each of the plurality of guide linkages acts to linearly displace the robot platform relative to the base while limiting tilting of the robot platform or the cassette. In another aspect a robot can extend its end effectors while limiting tilting of the end effectors.
摘要翻译： 一种引导装置，包括多个引导连杆。 多个引导连杆中的每一个包括一对连杆构件，每对连杆构件围绕导向枢转轴线可旋转地连接。 每个引导连杆的引导枢转轴线布置在与引导连杆的其余部分的引导枢转轴线的方向相反的方向上。 在一个方面，每个引导联动装置被布置在机器人平台或盒和基座之间，使得延伸多个引导连接件中的每个引导连杆起作用以使机器人平台相对于基座线性移位，同时限制机器人平台或盒的倾斜 。 在另一方面，机器人可以延伸其末端执行器，同时限制末端执行器的倾斜。
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公开(公告)号：US06557237B1
公开(公告)日：2003-05-06
申请号：US09663814
申请日：2000-09-15
申请人： Donald J. K. Olgado
发明人： Donald J. K. Olgado
IPC分类号： H01S400
CPC分类号： H01L21/67167 , C25D7/123 , C25D17/001 , C25D17/004 , H01L21/2885 , H01L21/67028 , H01L21/67051 , H01L21/6708 , H01L21/67126 , H01L21/6719 , H01L21/6723 , H05K3/241 , Y10T29/49002
摘要： The present invention relates to a method and apparatus for depositing metal on a substrate. More particularly, one embodiment of the metal deposition cell comprising a cell base, an anode, and a cell top. The cell base at least partially defines an interior recess. The anode mounted within the interior recess to the cell base. The cell top is removably mounted to the cell base. In one embodiment, a method of removing a modular metal deposition cell from a deposition cell mount is provided. The modular metal deposition cell comprises a cell top and a cell bottom. The method comprises: unfastening a fastener that secures the cell top to the cell bottom, and also fastens the cell top and the cell bottom to the deposition cell mount. The cell top or the cell bottom are then removed from the deposition cell mount.
摘要翻译： 本发明涉及一种在衬底上沉积金属的方法和装置。 更具体地，包括电池基底，阳极和电池顶部的金属沉积电池的一个实施例。 细胞基底至少部分地限定内部凹部。 阳极安装在内部凹槽内到达电池基座。 细胞顶部可拆卸地安装到细胞基底。 在一个实施例中，提供了从沉积电池座移除模块化金属沉积池的方法。 模块化金属沉积池包括电池顶部和电池底部。 该方法包括：松开将细胞顶部固定到细胞底部的紧固件，并且还将细胞顶部和细胞底部紧固到沉积细胞座。 然后将细胞顶部或细胞底部从沉积单元底座移除。
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公开(公告)号：US06440261B1
公开(公告)日：2002-08-27
申请号：US09318233
申请日：1999-05-25
IPC分类号： H01L2100
CPC分类号： H01L21/67161 , H01L21/67167 , H01L21/67184 , Y10S414/135 , Y10S414/137 , Y10S414/139
摘要： Apparatus for multi-chambered semiconductor wafer processing comprising a polygonal structure having at least two semiconductor process chambers disposed on one side. An area between the process chambers provides a maintenance access to the semiconductor processing equipment. Additionally, the apparatus may be clustered or daisy-chained together to enable a wafer to access additional processing chambers without leaving the controlled environment of the semiconductor wafer processing equipment.
摘要翻译： 用于多室半导体晶片处理的装置，包括具有设置在一侧上的至少两个半导体处理室的多边形结构。 处理室之间的区域提供对半导体处理设备的维护访问。 另外，该装置可以被集群或菊花链连接在一起，以使得晶片能够访问附加的处理室而不会离开半导体晶片处理设备的受控环境。
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8.发明授权公开(公告)号：US08399065B2
公开(公告)日：2013-03-19
申请号：US12862265
申请日：2010-08-24
申请人： Quanyuan Shang , Lu Yang , Karl M. Brown , Donald J. K. Olgado , Victor Pebenito , Hooman Bolandi , Tetsuya Ishikawa , Robert Z. Bachrach , Liang-Yuh Chen
发明人： Quanyuan Shang , Lu Yang , Karl M. Brown , Donald J. K. Olgado , Victor Pebenito , Hooman Bolandi , Tetsuya Ishikawa , Robert Z. Bachrach , Liang-Yuh Chen
CPC分类号： H01M4/0419 , H01M4/1391
摘要： A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising electrochemically active precursor particles dispersed in a carrying medium is provided to a processing chamber and thermally treated using a combustible gas mixture also provided to the chamber. The precursor is converted to nanocrystals by the thermal energy, and the nanocrystals are deposited on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.
摘要翻译： 提供一种用于形成薄膜电池的电化学层的方法和装置。 将包含分散在载运介质中的电化学活性前体颗粒的前体混合物提供到处理室，并使用也提供给室的可燃气体混合物进行热处理。 通过热能将前体转化成纳米晶体，并将纳米晶体沉积在基底上。 当第二前体沉积在表面上以增强粘附性和导电性时，可与纳米晶体共混。
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公开(公告)号：US20100093263A1
公开(公告)日：2010-04-15
申请号：US12636326
申请日：2009-12-11
IPC分类号： B24B53/02
CPC分类号： B24B53/017 , B24B53/005 , B24B53/12
摘要： Apparatus and methods for conditioning a polishing pad include an arm adapted to support a conditioning disk; a drive mechanism coupled to the arm; and a flexible coupling between the drive mechanism and the conditioning disk adapted to allow the conditioning disk to tilt while transmitting rotary motion from the drive mechanism to the conditioning disk. Numerous other aspects are disclosed.
摘要翻译： 用于调理抛光垫的装置和方法包括适于支撑调节盘的臂; 联接到所述臂的驱动机构; 以及驱动机构和调节盘之间的柔性联接件，其适于允许调节盘在将驱动机构的旋转运动传递到调节盘的同时倾斜。 公开了许多其他方面。
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公开(公告)号：US20090036039A1
公开(公告)日：2009-02-05
申请号：US12239720
申请日：2008-09-26
申请人： Ho Seon Shin , Gary C. Ettinger , Donald J. K. Olgado , Erik C. Wasinger , Sen-Hour Ko , Yufei Chen , Charles I. Dodds , Wei-Yung Hsu
发明人： Ho Seon Shin , Gary C. Ettinger , Donald J. K. Olgado , Erik C. Wasinger , Sen-Hour Ko , Yufei Chen , Charles I. Dodds , Wei-Yung Hsu
IPC分类号： B24B7/00
CPC分类号： B24B9/065 , B24B21/002 , B24B41/067 , B24B49/16 , B24B57/02
摘要： Methods of and systems for polishing an edge of a substrate are provided. The invention includes a substrate rotation driver adapted to rotate the edge of a substrate against a polishing film; and a first sensor coupled to the rotation driver adapted to detect one of an energy and torque exerted by the substrate rotation driver as it rotates the substrate against the polishing film. Numerous other aspects are provided.
摘要翻译： 提供了抛光衬底边缘的方法和系统。 本发明包括一个衬底旋转驱动器，其适于使衬底的边缘抵靠抛光膜旋转; 以及耦合到所述旋转驱动器的第一传感器，其适于检测由所述基板旋转驱动器在基板旋转所述抛光膜时施加的能量和扭矩中的一个。 提供了许多其他方面。
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