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1.发明申请公开(公告)号：US20200266603A1
公开(公告)日：2020-08-20
申请号：US16865803
申请日：2020-05-04
Applicant: Gigaphoton Inc.
Inventor： Seiji NOGIWA
IPC: H01S3/131 , H05G2/00 , H01S3/0941 , H01S3/13
Abstract: A laser apparatus according to the present disclosure includes an excitation light source configured to output excitation light, a laser crystal disposed on an optical path of the excitation light, a first monitor device disposed on an optical path of transmitted excitation light after having transmitted through the laser crystal to monitor the transmitted excitation light, a temperature adjustment device configured to adjust a temperature of the excitation light source to a constant temperature based on a temperature command value, and a controller configured to change the temperature command value based on a result of monitoring by the first monitor device.
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2.发明公开公开(公告)号：US20240291220A1
公开(公告)日：2024-08-29
申请号：US18658286
申请日：2024-05-08
Applicant: Gigaphoton Inc.
Inventor： Seiji NOGIWA , Takayuki OSANAI
CPC classification number: H01S3/0092 , G02F1/3507 , G02F1/3534 , G02F1/3551 , G02F1/392 , G03F7/2002 , G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S5/0085 , G02B27/141 , G02F2203/11
Abstract: A laser system includes a first laser outputting first laser light, an optical intensity changer outputting first pulse laser light, a modulator widening spectral linewidth of the first laser light or the first pulse laser light, an optical fiber amplifier amplifying the first pulse laser light and outputting second pulse laser light, a second laser outputting second laser light, an optical parametric amplifier amplifying the second laser light and outputting third pulse laser light, a wavelength converter outputting fourth pulse laser light using the second and third pulse laser light, an amplification section amplifying the fourth pulse laser light and outputting fifth pulse laser light, and a processor controlling a modulation signal such that the fifth pulse laser light having target spectral linewidth is generated, and controlling the center wavelength of the second laser light such that the fifth pulse laser light having a target center wavelength is generated.
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公开(公告)号：US20160336713A1
公开(公告)日：2016-11-17
申请号：US15218294
申请日：2016-07-25
Applicant: Gigaphoton Inc.
Inventor： Seiji NOGIWA , Osamu WAKABAYASHI
CPC classification number: H01S3/1305 , G02B19/0095 , G03F7/70033 , H01S3/13 , H01S3/1307 , H01S3/2232 , H01S3/2316 , H01S3/2366 , H05G2/003 , H05G2/008
Abstract: A laser apparatus may include a beam splitter configured to split a pulse laser beam into a first beam path and a second beam path, an optical sensor provided in the first beam path, an amplifier including an amplification region provided in the second beam path and being configured to amplify and emit the pulse laser beam incident thereon along the second beam path, a wavefront controller provided in the second beam path between the beam splitter and the amplifier, and a processor configured to receive an output signal from the optical sensor and transmit a control signal to the wavefront controller.
Abstract translation: 激光装置可以包括分束器，其被配置为将脉冲激光束分成第一光束路径和第二光束路径，设置在第一光束路径中的光学传感器，放大器，包括设置在第二光束路径中的放大区域， 被配置为放大并发射沿着第二光束路径入射到其上的脉冲激光束，设置在分束器和放大器之间的第二光束路径中的波前控制器，以及被配置为从光学传感器接收输出信号并发送 控制信号到波前控制器。
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公开(公告)号：US20240429679A1
公开(公告)日：2024-12-26
申请号：US18827321
申请日：2024-09-06
Applicant: Gigaphoton Inc.
Inventor： Seiji NOGIWA , Osamu WAKABAYASHI
IPC: H01S5/0625 , H01S5/00 , H01S5/06 , H01S5/125
Abstract: A laser apparatus includes a first wavelength variable semiconductor laser that outputs first continuous-wave laser light; a first amplifier that pulses and amplifies the first laser light and outputs first pulse laser light; a wavelength conversion system that converts a wavelength of the first pulse laser light and outputs second pulse laser light; an excimer amplifier that amplifies the second pulse laser light and outputs third pulse laser light; a monitor module that measures a wavelength of the third pulse laser light; and a processor that periodically changes a target wavelength of the third pulse laser light and controls a current for changing the wavelength of the laser light from the first semiconductor laser such that the wavelength of the third pulse laser light becomes the target wavelength based on a measured value of the wavelength of the third pulse laser light output at the same target wavelength.
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Patent Agency Ranking
公开(公告)号：US20180342849A1
公开(公告)日：2018-11-29
申请号：US16052659
申请日：2018-08-02
Applicant: Gigaphoton Inc.
Inventor： Seiji NOGIWA , Yasufumi KAWASUJI
IPC: H01S3/131 , H05G2/00 , H01S3/13 , H01S3/04 , H01S3/042 , H01S3/0941 , H01S3/00 , H01S3/16 , G02F1/01
CPC classification number: H01S3/1312 , G02F1/0136 , G02F2203/48 , H01S3/005 , H01S3/0085 , H01S3/0405 , H01S3/0407 , H01S3/042 , H01S3/0941 , H01S3/10069 , H01S3/1301 , H01S3/1305 , H01S3/1306 , H01S3/1611 , H01S3/1673 , H01S5/02423 , H01S5/06804 , H05G2/008
Abstract: A laser apparatus includes a light source configured to output excitation light, an optical resonator in which laser medium. is excited by the excitation light, the optical resonator being configured to output laser beam, a temperature regulator configured to adjust temperature of the light source to a standard temperature, an optical detector configured to detect output power of the laser beam, and a controller configured to change the standard temperature based on the detected output power of the laser beam.
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公开(公告)号：US20170373461A1
公开(公告)日：2017-12-28
申请号：US15698412
申请日：2017-09-07
Applicant: GIGAPHOTON INC.
Inventor： Seiji NOGIWA , Yasufumi KAWASUJI
Abstract: A laser apparatus may include: a quantum cascade laser outputting, based on a supplied current, laser light at an oscillation start timing when a first delay time elapses from a current rising timing of the supplied current: an amplifier disposed in a laser light optical path, and selectively amplifying light of a predetermined wavelength to output the amplified laser light to a chamber including a plasma generation region into which a target is fed; and a laser controller controlling a third delay time, from an output timing of a laser output instruction to the current rising timing, to cause a laser light wavelength to be equal to the predetermined wavelength at an aimed timing when a second delay time elapses from the oscillation start timing, based on oscillation parameters including the first delay time, a supplied current waveform, and a device temperature of the quantum cascade laser.
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公开(公告)号：US20240429672A1
公开(公告)日：2024-12-26
申请号：US18827268
申请日：2024-09-06
Applicant: Gigaphoton Inc.
Inventor： Seiji NOGIWA , Osamu WAKABAYASHI
Abstract: A laser apparatus includes a first semiconductor laser outputting first continuous-wave laser light; a first amplifier a wavelength conversion system outputting second pulse laser light; an excimer amplifier amplifying the second pulse laser light; a monitor module; and a processor calculating a center wavelength being an average of a measured value of the wavelength of the third pulse laser light output at the first target wavelength and a measured value of the wavelength thereof output at the second target wavelength, calculating a wavelength difference of the measurement values, calculating an average current value of a current flowing through the first semiconductor laser, calculating a current value difference such that a difference between a target wavelength difference and the wavelength difference decreases, and calculating a first current value at the first target wavelength and a second current value at the second target wavelength to control the first semiconductor laser.
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公开(公告)号：US20170181259A1
公开(公告)日：2017-06-22
申请号：US15454027
申请日：2017-03-09
Applicant: Gigaphoton Inc.
Inventor： Seiji NOGIWA
CPC classification number: H05G2/008 , G03F7/70025 , G03F7/70033 , H01L21/027 , H01S3/2232 , H01S3/2316 , H01S3/235 , H01S3/2366 , H01S5/02415 , H01S5/042 , H01S5/0617 , H01S5/12 , H01S5/3402 , H01S5/4012 , H01S5/50 , H05G2/003
Abstract: A laser beam having desired properties is output at desired timings. A laser apparatus is a laser apparatus for use with an extreme ultraviolet light generating apparatus that generates extreme ultraviolet light at a repetition frequency which is set in advance, and may be equipped with: a semiconductor laser that outputs a laser beam when a trigger signal is input thereto; an optical switch that switches between a state in which the laser beam passes therethrough and a state in which the laser beam does not pass therethrough, provided along the optical path of the laser beam; and a control unit configured to output the trigger signal to the semiconductor laser at a frequency which is an integer multiple of the repetition frequency, and to control the optical switch such that the laser beam passes therethrough at the repetition frequency.
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公开(公告)号：US20160285222A1
公开(公告)日：2016-09-29
申请号：US15172757
申请日：2016-06-03
Applicant: GIGAPHOTON INC.
Inventor： Takashi SUGANUMA , Takayuki YABU , Osamu WAKABAYASHI , Seiji NOGIWA
CPC classification number: H01S3/005 , H01S3/2232 , H01S3/2316 , H01S3/2366 , H05G2/005 , H05G2/008
Abstract: There is provided a laser unit that may include a master oscillator, a laser amplifier, and an adjuster. The master oscillator may be configured to output a laser light beam. The laser amplifier may be disposed in a light path of the laser light beam outputted from the master oscillator. The adjuster may be disposed in the light path of the laser light beam, and may be configured to adjust a beam cross-sectional shape of the laser light beam amplified by the laser amplifier to be a substantially circular shape. The beam cross-sectional shape may be at a beam waist of the laser light beam or in the vicinity of the beam waist of the laser light beam, and may be in a plane orthogonal to a light path axis.
Abstract translation: 提供了可以包括主振荡器，激光放大器和调节器的激光单元。 主振荡器可以被配置为输出激光束。 激光放大器可以设置在从主振荡器输出的激光束的光路中。 调整器可以设置在激光束的光路中，并且可以被配置为将由激光放大器放大的激光束的光束横截面形状调整为大致圆形。 光束横截面形状可以在激光束的束腰处或激光束的束腰附近，并且可以在与光路轴线正交的平面中。
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