公开(公告)号：US20240103336A1

公开(公告)日：2024-03-28

申请号：US18533238

申请日：2023-12-08

Applicant: Gigaphoton Inc.

Inventor： Yasufumi KAWASUJI

IPC: G02F1/33 ,  H01L21/48 ,  H01L23/00

CPC classification number: G02F1/33 ,  H01L21/486 ,  H01L24/81 ,  G02F2201/305 ,  H01L2224/81

Abstract: A laser processing device includes a diffractive optical element dividing laser light into a plurality of beams of laser light and output the beams of laser light; a first acousto-optic element on which the beams of laser light from the diffractive optical element are incident, and which shifts, in accordance with a frequency of a voltage applied thereto, an optical path of the beams of laser light output therefrom along a first direction perpendicular to an irradiation direction of the beams of laser light; a first voltage application circuit applying a voltage of a desired frequency to the first acousto-optic element; a light concentrating optical system concentrating the beams of laser light output from the first acousto-optic element and radiate the beams of laser light to a workpiece; and a processor controlling the first voltage application circuit to adjust the frequency of the voltage applied to the first acousto-optic element.

公开(公告)号：US20240100631A1

公开(公告)日：2024-03-28

申请号：US18533239

申请日：2023-12-08

Applicant: Gigaphoton Inc.

Inventor： Yasufumi KAWASUJI

IPC: B23K26/402 ,  B23K26/382

CPC classification number: B23K26/402 ,  B23K26/389 ,  B23K2101/001

Abstract: A composite component includes a plurality of first fibers extending in a first direction, a plurality of second fibers extending in a second direction different from the first direction, and a matrix material with which gaps between the first fibers and the second fibers are filled, in which a plurality of holes are provided in each of at least one first row along the first direction and at least one second row along the second direction.

公开(公告)号：US20230219171A1

公开(公告)日：2023-07-13

申请号：US18180495

申请日：2023-03-08

Applicant: Gigaphoton Inc.

Inventor： Yasufumi KAWASUJI ,  Akira SUWA ,  Yasuhiro ADACHI

IPC: B23K26/382 ,  H01S3/225 ,  G02F1/35 ,  H01S3/109 ,  H01S3/00 ,  B23K26/0622 ,  B23K26/402 ,  C03B33/08

CPC classification number: B23K26/382 ,  H01S3/2256 ,  G02F1/354 ,  H01S3/109 ,  H01S3/0057 ,  B23K26/0622 ,  B23K26/402 ,  C03B33/082 ,  B23K2103/54

Abstract: A glass processing method according to a viewpoint of the present disclosure includes generating a pulse laser beam by using a laser oscillator, and irradiating alkali-free glass to be processed with the pulse laser beam. The wavelength of the pulse laser beam ranges from 248 nm to 266 nm, and the pulse laser beam has an energy ratio greater than or equal to 91% but smaller than or equal to 99% in the region from 5 ns after a pulse rises to 400 ns.

公开(公告)号：US20150188277A1

公开(公告)日：2015-07-02

申请号：US14657640

申请日：2015-03-13

Applicant: Gigaphoton Inc.

Inventor： Krzysztof NOWAK ,  Takashi SUGANUMA ,  Takashi SAITO ,  Yasufumi KAWASUJI

IPC: H01S3/034 ,  H01S3/23 ,  H01S3/223

CPC classification number: H01S3/034 ,  H01S3/03 ,  H01S3/076 ,  H01S3/0971 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2325 ,  H01S3/2366 ,  H01S3/2375 ,  H01S2301/02 ,  H05G2/008

Abstract: There is provided a slab amplifier including an optical system (48, 51) provided in a chamber (47) to allow a seed beam having entered from a first window into the space between a pair of electrodes (42, 43) to be repeatedly reflected between the space so that the seed beam is amplified to be an amplified beam; a first aperture plate (61) provided between the first window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the seed beam and equal to or smaller than a dimension of the first window; and a second aperture plate (62) provided between the second window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the amplified beam and equal to or smaller than a dimension of the second window.

Abstract translation: 提供了一种平板放大器，包括设置在室（47）中的光学系统（48,51），以允许从第一窗口进入的种子束进入一对电极（42,43）之间的空间中，以反复反射 在空间之间，使得种子束被放大为放大的光束; 设置在所述第一窗口和所述电极之间并且具有等于或大于所述种子束的横截面的尺寸的开口并且等于或小于所述第一窗口的尺寸的第一孔板（61） 以及设置在第二窗口和电极之间并具有等于或大于放大光束的横截面的尺寸的开口并且等于或小于第二窗口的尺寸的第二孔板（62）。

公开(公告)号：US20240272444A1

公开(公告)日：2024-08-15

申请号：US18636475

申请日：2024-04-16

Applicant: Gigaphoton Inc.

Inventor： Yasufumi KAWASUJI ,  Osamu WAKABAYASHI ,  Akiyoshi SUZUKI

IPC: G02B27/09 ,  B23K26/06 ,  B23K26/0622 ,  B23K26/067 ,  B23K26/324 ,  B23K26/70 ,  B23K101/36 ,  B23K103/00 ,  H01L21/48 ,  H01L23/00

CPC classification number: G02B27/0988 ,  B23K26/0622 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/067 ,  B23K26/324 ,  B23K26/705 ,  G02B27/0944 ,  H01L21/486 ,  B23K2101/36 ,  B23K2103/42 ,  B23K2103/54 ,  H01L24/16 ,  H01L2224/16227

Abstract: A laser processing system includes a laser apparatus configured to output a pulse laser beam, a divergence adjuster configured to adjust a first beam divergence in a first direction of the pulse laser beam and a second beam divergence in a second direction which intersects the first direction, a measuring instrument configured to measure the first and second beam divergences of the pulse laser beam having passed through the divergence adjuster, a diffractive optical element configured to branch the pulse laser beam having passed through the measuring instrument, and a processor configured to control the divergence adjuster such that the first and second beam divergences approach respective target values based on measurement results of the first and second beam divergences by the measuring instrument.

公开(公告)号：US20230071592A1

公开(公告)日：2023-03-09

申请号：US18053737

申请日：2022-11-08

Applicant: Gigaphoton Inc.

Inventor： Akira SUWA ,  Kouji KAKIZAKI ,  Masakazu KOBAYASHI ,  Junichi FUJIMOTO ,  Yasufumi KAWASUJI

IPC: H05K3/46 ,  H05K3/40 ,  B23K26/066

Abstract: A laser processing method according to a viewpoint of the present disclosure includes radiating ultraviolet pulse laser light onto a workpiece having a stacked structure in which a conductor layer, an insulating layer, and a sacrificial layer are stacked on each other in the presented order, the pulse laser light radiated from the side facing the sacrificial layer, to change a laser ablation processing mode in the sacrificial layer and form a through hole in the sacrificial layer, radiating the pulse laser light onto the insulating layer through the through hole to form an opening in the insulating layer, and removing the sacrificial layer after the formation of the opening.

公开(公告)号：US20160365694A1

公开(公告)日：2016-12-15

申请号：US14455719

申请日：2014-08-08

Applicant: GIGAPHOTON INC.

Inventor： Yasufumi KAWASUJI ,  Hideo HOSHINO

IPC: H01S3/02 ,  G03F7/20 ,  F16B7/18 ,  F16B41/00 ,  H05G2/00 ,  F16B5/02

CPC classification number: H01S3/02 ,  F16B5/02 ,  F16B7/18 ,  F16B41/002 ,  G03F7/70008 ,  G03F7/70025 ,  G03F7/70833 ,  G03F7/70975 ,  H01S3/2316 ,  H05G2/005 ,  H05G2/008

Abstract: A laser apparatus may include, a first frame and a second frame, a sleeve through-hole provided in the second frame, a sleeve insertion hole provided in the first frame, a bolt, a positioning sleeve that is formed in an approximately cylindrical shape into which the bolt can be inserted and that positions the first frame and the second frame by passing through the sleeve through-hole and being inserted into the sleeve insertion hole, a nut that is provided in the first frame and into which the bolt is screwed, and a fall prevention unit that is provided in the second frame and that prevents the bolt and the positioning sleeve from falling.

Abstract translation: 激光装置可以包括第一框架和第二框架，设置在第二框架中的套筒通孔，设置在第一框架中的套筒插入孔，螺栓，形成为大致圆筒形的定位套筒 螺栓可以插入，并且通过穿过套筒通孔定位第一框架和第二框架并插入到套筒插入孔中，设置在第一框架中并且螺栓被拧入的螺母， 以及设置在第二框架中并防止螺栓和定位套筒掉落的防跌落单元。

公开(公告)号：US20160248213A1

公开(公告)日：2016-08-25

申请号：US15146259

申请日：2016-05-04

Applicant: Gigaphoton Inc.

Inventor： Yasufumi KAWASUJI

IPC: H01S3/02 ,  H01S3/00 ,  H01S3/23 ,  H05G2/00

CPC classification number: H01S3/02 ,  H01S3/005 ,  H01S3/0071 ,  H01S3/2308 ,  H05G2/003 ,  H05G2/008

Abstract: A laser apparatus of the present disclosure may include: a frame; a first amplifier positioned to the frame; a first input optical system positioned to the frame and configured to cause a pulse laser beam generated by an external device to enter the first amplifier; and a first output optical system positioned to the frame and configured to cause a pulse laser beam having exited from the first amplifier in a first direction to exit in a second direction that is different from the first direction.

Abstract translation: 本公开的激光装置可以包括：框架; 定位在所述框架上的第一放大器; 第一输入光学系统，定位于所述框架并且被配置为使由外部设备产生的脉冲激光束进入所述第一放大器; 以及第一输出光学系统，其定位到所述框架并且被配置为使得在第一方向上从所述第一放大器退出的脉冲激光束在与所述第一方向不同的第二方向上退出。

公开(公告)号：US20190326722A1

公开(公告)日：2019-10-24

申请号：US16502053

申请日：2019-07-03

Applicant: Gigaphoton Inc.

Inventor： Yasufumi KAWASUJI

IPC: H01S3/10 ,  H01S3/034

Abstract: A laser apparatus of the present disclosure includes: a master oscillator configured to emit a laser beam; a laser amplifier disposed on an optical path of the laser beam; a propagation optical system disposed on an optical path between the laser amplifier and a target supplied into an EUV chamber in which EUV light is generated; and a polarization isolator disposed on an optical path between the laser amplifier and the propagation optical system. The polarization isolator includes: a polarizer configured to emit, selecting from the laser beam incident on the polarizer, a laser beam linearly polarized in a predetermined polarization direction; and a reflection retarder disposed on an optical path between the polarizer and the propagation optical system to convert, through reflection, the laser beam linearly polarized in the predetermined polarization direction into an elliptically polarized laser beam having retardation that reduces retardation occurring at the propagation optical system.

公开(公告)号：US20180342849A1

公开(公告)日：2018-11-29

申请号：US16052659

申请日：2018-08-02

Applicant: Gigaphoton Inc.

Inventor： Seiji NOGIWA ,  Yasufumi KAWASUJI

IPC: H01S3/131 ,  H05G2/00 ,  H01S3/13 ,  H01S3/04 ,  H01S3/042 ,  H01S3/0941 ,  H01S3/00 ,  H01S3/16 ,  G02F1/01

CPC classification number: H01S3/1312 ,  G02F1/0136 ,  G02F2203/48 ,  H01S3/005 ,  H01S3/0085 ,  H01S3/0405 ,  H01S3/0407 ,  H01S3/042 ,  H01S3/0941 ,  H01S3/10069 ,  H01S3/1301 ,  H01S3/1305 ,  H01S3/1306 ,  H01S3/1611 ,  H01S3/1673 ,  H01S5/02423 ,  H01S5/06804 ,  H05G2/008

Abstract: A laser apparatus includes a light source configured to output excitation light, an optical resonator in which laser medium. is excited by the excitation light, the optical resonator being configured to output laser beam, a temperature regulator configured to adjust temperature of the light source to a standard temperature, an optical detector configured to detect output power of the laser beam, and a controller configured to change the standard temperature based on the detected output power of the laser beam.