摘要:
An method of providing defect enhanced CoSi2 formation and improved silicided junctions in deep submicron MOSFETs. A silicon wafer having a diffusion window is first precleaned with hydrofluoric acid. After the HF precleaning, the silicon wafer is transferred to a conventional cobalt sputtering tool where it is sputter cleaned by bombardment with low energy Ar+ ions so as to form an ultra-shallow damage region. After the sputter cleaning, and without removing the wafer from the sputtering tool, Cobalt metal is deposited on the silicon wafer at room temperature and a CoSi2 layer is formed in the diffusion window.
摘要:
Deep submicran mosfets with defect enhanced CoSi2 formation and improved silicided junctions. A silicon wafer having a diffusion window is first precleaned with hydrofluoric acid. After the HF precleaning, the silicon wafer is transferred to a conventional cobalt sputtering tool where it is sputter cleaned by bombardment with low energy Ar+ions so as to form an ultra-shallow damage region. After the sputter cleaning, and without removing the wafer from the sputtering tool, Cobalt metal is deposited on the silicon wafer at room temperature and a CoSi2 layer is formed in the diffusion window.
摘要:
The printing template (2) of an SMT process includes a metallic template body (2a) with clearances (3) corresponding to a desired printing structure. A printing material is to be applied through these clearances (3) to a plate that is to be joined onto the printing template from below. To prevent the printing material from adhering in the region of the clearances (3), the metallic template body (2a) is to be provided with a thin coating (6) of a metal-alkoxide coating material, the surface energy of which is reduced by chemical bonding of at least one organic component. The coating may be performed in particular by means of a sol-gel process.
摘要:
A device for detecting at least one substance of a fluid includes at least one piezo-acoustic resonator with at least one piezo layer, an electrode arranged on the piezo-electric layer, at least one other electrode arranged on the piezo-electric layer and a surface section used for sorption of the substance of the fluid. The piezo-electric layer, the electrodes and the surface section are disposed in such a way that electric control of the electrodes leads to an oscillation of the resonator at a resonance frequency which depends upon the amount of the substance which is sorbed on the surface section. The thickness of the pioelectric layer is in the region of 0.5 to 20 μm and the resonance frequency of the oscillation ranges from 500 MHz to 2 GHz. The device is a mass sensor with a piezo-acoustic high-frequency thin film resonator.
摘要:
A method for producing a condenser for a thermal power plant is provided. First, the production method includes fitting a condenser tube in a carrier for a condenser tube bundle of the condenser. Then, the fitted condenser tube is coated with a hydrophobic coating. Coating the fitted condenser tube includes positioning a spray mechanism on the carrier, spraying on the hydrophobic coating using a spray mechanism, and moving the spray mechanism during spraying at a uniform rate. In another aspect, a device is provided. Also, a condenser is provided in an aspect.
摘要:
A system and method is provided for using sunlight to convert an atmospheric gas to an output product and capture that output product. A photocatalytic element is encapsulated within a chamber of a photocatalytic panel in which the chamber is light transmissive, and is substantially permeable to the atmospheric gas and substantially impermeable to the output product. Water may be provided to the photocatalytic element to react with the atmospheric gas. A system is provided for withdrawing the output product for storage.
摘要:
A substrate for a field emitter suitable for use in computed tomography has a coating with carbon hybrid structures based on the allotropes graphite, graphene and nanotubes. The field emitters are based on graphite layer structures. A substrate for field emitters is achieved for the first time that uses “graphite combs” protruding and aligned essentially perpendicular to the substrate as well as hybrid materials from these combs with CNTs supported between them on a conductive substrate.
摘要:
A condenser tube has a superhydrophobic surface. The superhydrophobic surface is produced on steam condenser tubes to achieve an improved runoff of condensation drops. These condenser tubes may be used in steam power generation. The surface of the condenser tube is textured so that the drops of condensation formed can run off well.
摘要:
A coating for containers and pipes of, for example, metal, glass, plastic, or ceramic, particularly for condenser pipes, for reducing or avoiding the formation of a biofilm is provided. Further, a method for producing the coating is provided.