利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

23 条记录 (耗时 0.022 秒)

    Fabrication method of fine structures
    2.
    发明授权
    Fabrication method of fine structures 失效
    精细结构的制造方法

    公开(公告)号：US5381753A

    公开(公告)日：1995-01-17

    申请号：US55728

    申请日：1993-04-30

    申请人： Michio Okajima ,  Osamu Kusumoto ,  Takao Tohda ,  Kazuo Yokoyama ,  Motoshi Shibata

    发明人： Michio Okajima ,  Osamu Kusumoto ,  Takao Tohda ,  Kazuo Yokoyama ,  Motoshi Shibata

    IPC分类号： C30B29/62 ,  C30B11/00 ,  C30B11/12 ,  H01L29/06 ,  C30B23/00

    CPC分类号： B82Y30/00 ,  B82Y10/00 ,  C30B11/00 ,  C30B11/12 ,  C30B29/60

    摘要： A fabrication method provides fine structures which have few carrier trap centers and light absorption levels and find applications in quantum wires and quantum boxes having arbitrary configurations at least within a two-dimensional plane. The fabrication method comprises the steps of having a sharp tip held in close proximity to the surface of a substrate 1 and having a metal constituting the tip evaporated from the top. Alternatively, a metal contained in ambient vapor or a solution decomposed by a tunnel current or the like is provided. The metal is deposited locally on the substrate surface. A finely structured crystal is grown on the locally deposited region by a vapor phase-liquid phase-solid phase reaction.

    摘要翻译： 制造方法提供了具有很少的载流子阱中心和光吸收水平的精细结构，并且在至少在二维平面内具有任意构型的量子线和量子盒中得到应用。 该制造方法包括以下步骤：将锋利的尖端保持在靠近基板1的表面并且具有构成从顶部蒸发的尖端的金属。 或者，提供包含在环境蒸气中的金属或由隧道电流等分解的溶液。 金属在衬底表面局部沉积。 通过气相 - 液相 - 固相反应在局部沉积区域上生长精细结晶的晶体。

    Scanning probe microscope and method for measuring surfaces by using this microscope
    4.
    发明授权
    Scanning probe microscope and method for measuring surfaces by using this microscope 失效
    扫描探针显微镜和使用该显微镜测量表面的方法

    公开(公告)号：US5468959A

    公开(公告)日：1995-11-21

    申请号：US210397

    申请日：1994-03-18

    申请人： Takao Tohda ,  Hiroyuki Kado ,  Shinichi Yamamoto

    发明人： Takao Tohda ,  Hiroyuki Kado ,  Shinichi Yamamoto

    IPC分类号： G01B5/28 ,  G01B7/34 ,  G01B21/30 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q30/04 ,  G01Q60/04 ,  G01Q60/10 ,  G01Q60/24 ,  G11B9/14 ,  H01J37/28

    CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01Q60/04 ,  Y10S977/851

    摘要： A microscope comprises a cantilever having a distal end equipped with an electrically conductive probe allowing current to flow and having a fine tip whose voltage is controllable, a position control mechanism for controlling position of a sample with respect to a base end of the cantilever, a small displacement measuring mechanism for measuring a deflection amount of the cantilever, and a deflection control mechanism for controlling deflection of the cantilever so as to adjust a distance between the fine tip of the probe and the sample. A method for measuring surfaces using this novel microscope comprises steps of: maintaining deflection of the cantilever at a constant value by using the small displacement measuring mechanism and the deflection control mechanism; applying a constant voltage between the electrically conductive probe and the sample; scanning the sample along surface of the sample with the probe, while a tunneling current is maintained at a constant value by using the position control mechanism; and measuring a control amount of the position control mechanism in a direction vertical to the sample and a control amount of the deflection control mechanism.

    摘要翻译： 显微镜包括具有远端的悬臂，其具有允许电流流动并具有可控电压的细尖端的导电探针，用于控制样品相对于悬臂的基端的位置的位置控制机构， 用于测量悬臂的偏转量的小位移测量机构，以及用于控制悬臂的偏转的偏转控制机构，以调节探针的细尖端与样品之间的距离。 使用这种新型显微镜测量表面的方法包括以下步骤：通过使用小位移测量机构和偏转控制机构来将悬臂的偏转维持在恒定值; 在导电探针和样品之间施加恒定电压; 用探头沿着样品的表面扫描样品，同时通过使用位置控制机构将隧道电流维持在恒定值; 并且在垂直于样品的方向和偏转控制机构的控制量中测量位置控制机构的控制量。

    Method of making a cantilever stylus for an atomic force microscope
    5.
    发明授权
    Method of making a cantilever stylus for an atomic force microscope 失效
    制作原子力显微镜的悬臂式触针的方法

    公开(公告)号：US5336369A

    公开(公告)日：1994-08-09

    申请号：US67612

    申请日：1993-05-27

    申请人： Hiroyuki Kado ,  Takao Tohda

    发明人： Hiroyuki Kado ,  Takao Tohda

    IPC分类号： G01B21/30 ,  C23F1/02 ,  G01B7/34 ,  G01N37/00 ,  G01Q60/38 ,  G01Q60/40 ,  G01Q60/42 ,  G01R3/00 ,  H01J37/20 ,  H01J37/28 ,  H01L21/465 ,  H05K3/06

    CPC分类号： G01Q60/38 ,  B82Y35/00 ,  Y10S977/878 ,  Y10T29/49007

    摘要： A method of making a cantilever stylus for an atomic force microscope comprises forming a film on a surface of a substrate, the film comprising a stylus material that is different from the material of the substrate. A resist thin film of a material different from the stylus material is formed on the surface of the stylus material so as to have a tip. The stylus material is then etched with an isotropic etching technique to a depth of etching greater than the radius of curvature of the tip of the resist film so that the stylus material, having two opposite principal surfaces, has a tip formed on one of the principal surfaces with a radius of curvature less than 0.1 .mu.m which protrudes beyond a tip of the other principal surface. At least the resist thin film and the substrate at the tips of the principal surfaces of the stylus material are then removed.

    摘要翻译： 制造用于原子力显微镜的悬臂触针的方法包括在基板的表面上形成膜，所述膜包括不同于所述基板的材料的触针材料。 在触针材料的表面上形成具有与触针材料不同的材料的抗蚀剂薄膜以具有尖端。 然后用各向同性蚀刻技术将触针材料蚀刻到蚀刻深度大于抗蚀剂膜的尖端的曲率半径，使得具有两个相对主表面的触笔材料具有形成在主体之一上的尖端 具有小于0.1μm的曲率半径的表面突出超过另一主表面的尖端。 然后去除至少抗蚀剂薄膜和触针材料主表面顶端的基底。

    Method of measuring a surface profile using an atomic force microscope
    8.
    发明授权
    Method of measuring a surface profile using an atomic force microscope 失效
    使用原子力显微镜测量表面轮廓的方法

    公开(公告)号：US5497656A

    公开(公告)日：1996-03-12

    申请号：US393029

    申请日：1995-02-23

    申请人： Hiroyuki Kado ,  Takao Tohda

    发明人： Hiroyuki Kado ,  Takao Tohda

    IPC分类号： G01B21/30 ,  G01Q60/00 ,  G01B7/34 ,  G01Q10/06 ,  G01Q60/24 ,  H01J37/28

    CPC分类号： G01Q10/065 ,  B82Y35/00 ,  Y10S977/851 ,  Y10S977/852

    摘要： An atomic force microscope is preferably used to observe a sample surface and measure a surface profile of a sample by making use of interatomic forces existing between a probing tip and the sample surface. The atomic force microscope includes a cantilever having a probing tip, a laser diode for emitting a laser beam, a lens for focusing the laser beam emitted from the laser diode on the cantilever, and a photodiode for detecting a light beam reflected from the cantilever to thereby detect the amount of deflection of the cantilever. The atomic force microscope further includes a mechanism for finely moving one of a sample and the cantilever in three different directions, and a controller or computer for controlling the mechanism and for imaging the sample surface based on the amount of deflection of the cantilever at a plurality of locations of the sample surface. By this construction, after measurement of the sample surface at a first location thereof, the sample is moved away from the probing tip by a given length and is further moved relative to the probing tip so that the probing tip is positioned above a second location of the sample. Thereafter, the sample is further moved towards the probing tip at the second location by a length substantially equal to the given length. The movement of the sample is repeated until measurements of the sample surface at the plurality of locations thereof are completed.

    摘要翻译： 优选使用原子力显微镜来观察样品表面并通过利用探测尖端和样品表面之间存在的原子力来测量样品的表面轮廓。 原子力显微镜包括具有探测尖端的悬臂，用于发射激光束的激光二极管，用于将从激光二极管发射的激光束聚焦在悬臂上的透镜，以及用于检测从悬臂反射的光束的光电二极管 从而检测悬臂的偏转量。 原子力显微镜还包括用于在三个不同方向上微细地移动样品和悬臂中的一个的机构，以及控制器或计算机，用于控制机构并基于多个悬臂的偏转量来对样品表面进行成像 的样品表面的位置。 通过这种结构，在样品表面的第一位置测量之后，将样品从探测尖端移动给定长度，并且相对于探测尖端进一步移动，使得探测尖端位于第二位置的第二位置 例子。 此后，样品进一步在第二位置处朝向探测尖端移动基本上等于给定长度的长度。 重复样品的移动，直到其多个位置处的样品表面的测量完成。

    Cantilever stylus for use in an atomic force microscope and method of making same
    9.
    发明授权
    Cantilever stylus for use in an atomic force microscope and method of making same 失效
    用于原子力显微镜的CANTILEVER STYLUS及其制造方法

    公开(公告)号：US5239863A

    公开(公告)日：1993-08-31

    申请号：US699951

    申请日：1991-05-14

    申请人： Hiroyuki Kado ,  Takao Tohda

    发明人： Hiroyuki Kado ,  Takao Tohda

    IPC分类号： G01B21/30 ,  C23F1/02 ,  G01B7/34 ,  G01N37/00 ,  G01Q60/38 ,  G01Q60/40 ,  G01Q60/42 ,  G01R3/00 ,  H01J37/20 ,  H01J37/28 ,  H01L21/465 ,  H05K3/06

    CPC分类号： G01Q60/38 ,  B82Y35/00 ,  Y10S977/878 ,  Y10T29/49007

    摘要： An atomic force microscope for observing a sample surface (7) is internally provided with a cantilever stylus (1, 14, 23) and makes use of atomic forces acting between the cantilever stylus (1, 14, 23) and the sample surface. The cantilever stylus (1, 14, 23) includes a cantilever (2, 15, 22) having a fixed end and a free end and having two principal surfaces. The cantilever stylus (1, 14, 23) further includes two tip portions formed in the principal surfaces of the free end, respectively. One of the two tip portions has a radius of curvature less than 0.1 .mu.m and protrudes beyond the other tip portion so that the former may be used to observe the sample surface (7).

    摘要翻译： 用于观察样品表面（7）的原子力显微镜在内部设置有悬臂触针（1,14,23），并利用作用在悬臂测针（1,14,23）和样品表面之间的原子力。 悬臂触针（1,14,23）包括具有固定端和自由端并具有两个主表面的悬臂（2,15,22）。 悬臂触针（1,14,23）还包括分别形成在自由端的主表面中的两个尖端部分。 两个尖端部分中的一个具有小于0.1μm的曲率半径并且突出超过另一个尖端部分，使得前者可以用于观察样品表面（7）。