摘要:
A method for manufacturing a capacitor of a semiconductor element including: forming a bottom electrode of the capacitor on a semiconductor substrate; performing rapid thermal nitrification (RTN) on the upper surface of the bottom electrode; performing a thermal process on the obtained structure having the bottom electrode in a furnace under a nitride atmosphere to eliminate stress generated by the RTN; forming Al2O3 and HfO2 dielectric films on the nitrified bottom electrode; and forming a plate electrode of the capacitor on the Al2O3 and HfO2 dielectric films. The thermal process is performed after the RTN performed on the surface of the bottom electrode, so that stress, generated from the RTN, is alleviated, thereby allowing the capacitor to obtain a high capacitance and lowering leakage current.
摘要翻译:一种制造半导体元件的电容器的方法,包括:在半导体衬底上形成电容器的底部电极; 在底电极的上表面进行快速热硝化(RTN); 对所获得的在氮化物气氛下的炉中具有底部电极的结构进行热处理以消除由RTN产生的应力; 在硝化的底部电极上形成Al 2 O 3 N 3和HfO 2 N 2电介质膜; 以及在Al 2 O 3和HfO 2 N 2电介质膜上形成电容器的平板电极。 在底电极表面进行RTN之后进行热处理,从而可以减轻由RTN产生的应力,从而使电容器获得高电容,降低漏电流。
摘要:
Disclosed herein is a method for forming a gate structure of a semiconductor device. The method comprises forming a plurality of gates including a first gate dielectric film, a first gate conductive film, and a gate silicide film sequentially stacked on a silicon substrate having a field oxide film, forming a thermal oxide film on a side of the first gate conductive film, etching the silicon substrate exposed between the plurality of gates to a predetermined depth to form a plurality of trenches, forming a second gate oxide film on the interior wall of the trenches, and forming a second gate conductive film in a spacer shape on a predetermined region of the second gate oxide film, and on a side of the first gate conductive film, the gate silicide film, and the thermal oxide film.
摘要:
A method for manufacturing gate electrode of semiconductor device using an aluminium nitride film is provided, the method including cleaning a surface of a semiconductor substrate, nitriding the surface of the substrate, forming a gate dielectric film comprising an aluminium nitride film on the surface of a semiconductor substrate, depositing a gate conductive layer and a hard mask layer on the gate dielectric film, and etching the hard mask layer, the gate conductive layer, the gate dielectric film to form a gate electrode.
摘要:
Disclosed is a method of bonding upper and lower substrates for manufacturing a plastic micro chip comprising the upper substrate, the lower substrate and a sample filling space having a predetermined height for filling a sample between the upper and lower substrates. According to the method, the upper and lower substrates are bonded by introducing an organic solvent between the upper and lower substrates. In addition, the invention provides a method of manufacturing a micro chip using the method and a micro chip manufactured according to the method. According to the invention, it is possible to easily and precisely bond the upper and lower substrates of the plastic micro chip.
摘要:
Disclosed is a vaccine composition including a pathogenic antigen and IL-12 encapsulated in controlled release microspheres. Also, the present invention discloses a method of enhancing the adjuvant effect of IL-12 by employing an IL-12 adjuvant encapsulated in controlled release microspheres. IL-12, used as an adjuvant for a co-administered vaccine antigen in the vaccine composition, is released in vivo for a prolonged period of time by being encapsulated in controlled release microspheres, thereby maximizing its adjuvant effect.
摘要:
An on-chip network interfacing apparatus and method are provided. The apparatus includes a plurality of on-chip network ports; a switch receiving data from a first on-chip network port of the on-chip network ports and transmitting the received data to a second on-chip network port of the on-chip network ports; and an interface unit interfacing an advanced microcontroller bus architecture (AMBA) signal received from an Internet protocol module, which is designed according to an AMBA on-chip bus protocol, and outputting the interfacing result to the first on-chip network port; and interfacing the on-chip network signal received from the first on-chip network port, and outputting the interfacing result to the Internet protocol module. Accordingly, it is possible to establish communications at increased speeds by interfacing a signal according to the AMBA 2.0 on-chip bus protocol with a signal according to the on-chip network protocol.
摘要:
The present invention relates to the IL-12p40 subunit mutant gene which can produce IL-12 (interleukin 12) of human and mouse origin with high activity, the expression vector including above mutant gene and the use of them to DNA vaccine adjuvant. Particularly, it relates to IL-12p40 mutant gene which inhibits the secretion of IL-12p40 but normally secretes active IL-12p70 by making mutation at Asn-222 (human) or Asn-220 (mouse) amino acid of IL-12p40, which acts as a competitive inhibitor of active form of IL-12, IL-12p70. Therefore, the IL-12p40 mutant gene of the present invention can be useful for DNA vaccination and gene therapy against various diseases, for example, AIDS, hepatitis C or hepatitis B, cancer, influenza, tuberculosis and malaria, which essentially require cellular immune responses for their therapy.
摘要:
The present invention relates to the IL-12p40 subunit mutant gene which can produce IL-12(interleukin 12) of human and mouse origin with high activity, the expression vector including above mutant gene and the use of them to DNA vaccine adjuvant. Particularly, it relates to IL-12p40 mutant gene which inhibits the secretion of IL-12p40 but normally secretes active IL-12p70 by making mutation at Asn-222(human) or Asn-220(mouse) amino acid of IL-12p40, which acts as a competitive inhibitor of active form of IL-12, IL-12p70. Therefore, the IL-12p40 mutant gene of the present invention can be useful for DNA vaccination and gene therapy against various diseases, for example, AIDS, hepatitis C or hepatitis B, cancer, influenza, tuberculosis and malaria, which essentially require cellular immune responses for their therapy.
摘要:
Disclosed herein is an integrated-type polarizer comprising a polarizing film provided with a biaxial retardation film as a protective film on a first side thereof, the polarizing film having an absorption axis perpendicular to the optical axis of the biaxial retardation film. Also is provided a vertically aligned liquid crystal display comprising a liquid crystal cell filled with liquid crystal molecules of negative dielectric anisotropy between a first and a second polarizer, the respective absorption axes of which are perpendicular to each other, wherein the integrated-type polarizer acts as the first polarizer.
摘要:
An IPS-LCD, in which the direction of an optical axis and retardation values are adjusted according to the disposition of a phase retardation film replacing one protective film, obtains a contrast ratio similar to that of an IPS-LCD having upper and lower protective films, and has a small thickness. The IPS-LCD includes first and second polarizing plates (1, 2), an IPS panel (3), and a first protective film. Absorption axes (4, 5) of the first and second polarizing plates (1, 2) are orthogonal to each other, and an optical axis of a liquid crystal in the IPS panel (3) and the absorption axis (4) are parallel with each other. A second phase retardation film, obtained by coating a biaxial film (17) with a uniaxial C film (11), is disposed between the second polarizing plate (2) and the IPS panel (3) and is used as a second protective film.