公开(公告)号：US09636675B2

公开(公告)日：2017-05-02

申请号：US14697095

申请日：2015-04-27

Applicant: International Business Machines Corporation

Inventor： Yann A. Astier ,  Robert L. Bruce ,  Joshua T. Smith ,  Chao Wang ,  Benjamin H. Wunsch

IPC: B81C1/00 ,  B01L3/00 ,  B03B5/48 ,  B81B1/00 ,  G01N15/10 ,  G01N15/00

CPC classification number: G01N15/10 ,  B01L3/502707 ,  B01L3/502715 ,  B01L3/502753 ,  B01L2200/0652 ,  B01L2200/12 ,  B01L2300/0809 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2300/12 ,  B01L2400/086 ,  B03B5/48 ,  B81B1/006 ,  B81B2201/058 ,  B81B2203/0361 ,  B81C1/00111 ,  B81C2201/0132 ,  B82B3/0014 ,  G01N2015/0065 ,  G01N2015/1006 ,  G01N2015/1081 ,  G03F7/0002 ,  G03F7/2037

Abstract: A technique related to sorting entities is provided. An inlet is configured to receive a fluid, and an outlet is configured to exit the fluid. A nanopillar array, connected to the inlet and the outlet, is configured to allow the fluid to flow from the inlet to the outlet. The nanopillar array includes nanopillars arranged to separate entities by size. The nanopillars are arranged to have a gap separating one nanopillar from another nanopillar. The gap is constructed to be in a nanoscale range.

公开(公告)号：US20160146717A1

公开(公告)日：2016-05-26

申请号：US14697095

申请日：2015-04-27

Applicant: International Business Machines Corporation

Inventor： Yann A. Astier ,  Robert L. Bruce ,  Joshua T. Smith ,  Chao Wang ,  Benjamin H. Wunsch

IPC: G01N15/10 ,  B01L3/00 ,  B03B5/48 ,  B81C1/00 ,  B81B1/00

CPC classification number: G01N15/10 ,  B01L3/502707 ,  B01L3/502715 ,  B01L3/502753 ,  B01L2200/0652 ,  B01L2200/12 ,  B01L2300/0809 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2300/12 ,  B01L2400/086 ,  B03B5/48 ,  B81B1/006 ,  B81B2201/058 ,  B81B2203/0361 ,  B81C1/00111 ,  B81C2201/0132 ,  B82B3/0014 ,  G01N2015/0065 ,  G01N2015/1006 ,  G01N2015/1081 ,  G03F7/0002 ,  G03F7/2037

Abstract: A technique related to sorting entities is provided. An inlet is configured to receive a fluid, and an outlet is configured to exit the fluid. A nanopillar array, connected to the inlet and the outlet, is configured to allow the fluid to flow from the inlet to the outlet. The nanopillar array includes nanopillars arranged to separate entities by size. The nanopillars are arranged to have a gap separating one nanopillar from another nanopillar. The gap is constructed to be in a nanoscale range.

公开(公告)号：US20160144361A1

公开(公告)日：2016-05-26

申请号：US14749123

申请日：2015-06-24

Applicant: International Business Machines Corporation

Inventor： Yann A. Astier ,  Robert L. Bruce ,  Joshua T. Smith ,  Chao Wang ,  Benjamin H. Wunsch

IPC: B01L3/00

CPC classification number: G01N15/10 ,  B01L3/502707 ,  B01L3/502715 ,  B01L3/502753 ,  B01L2200/0652 ,  B01L2200/12 ,  B01L2300/0809 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2300/12 ,  B01L2400/086 ,  B03B5/48 ,  B81B1/006 ,  B81B2201/058 ,  B81B2203/0361 ,  B81C1/00111 ,  B81C2201/0132 ,  B82B3/0014 ,  G01N2015/0065 ,  G01N2015/1006 ,  G01N2015/1081 ,  G03F7/0002 ,  G03F7/2037

Abstract: A technique related to sorting entities is provided. An inlet is configured to receive a fluid, and an outlet is configured to exit the fluid. A nanopillar array, connected to the inlet and the outlet, is configured to allow the fluid to flow from the inlet to the outlet. The nanopillar array includes nanopillars arranged to separate entities by size. The nanopillars are arranged to have a gap separating one nanopillar from another nanopillar. The gap is constructed to be in a nanoscale range.

Abstract translation: 提供了与排序实体相关的技术。 入口构造成接收流体，并且出口构造成离开流体。 连接到入口和出口的纳米柱阵列被构造成允许流体从入口流到出口。 纳米柱阵列包括布置成按尺寸分离实体的纳米柱。 纳米柱被布置成具有将一个纳米柱与另一个纳米柱分离的间隙。 间隙被构造成在纳米级范围内。

公开(公告)号：US10058895B2

公开(公告)日：2018-08-28

申请号：US14697072

申请日：2015-04-27

Applicant: International Business Machines Corporation

Inventor： Yann A. Astier ,  Joshua T. Smith ,  Gustavo A. Stolovitzky ,  Chao Wang ,  Benjamin H. Wunsch

IPC: B07B1/00 ,  B07B13/04 ,  B07B1/46 ,  G01N15/00 ,  B82Y30/00 ,  G01N15/02

CPC classification number: B07B13/04 ,  B07B1/4609 ,  B82Y30/00 ,  G01N15/02 ,  G01N30/6095 ,  G01N2015/0065 ,  G01N2015/0288 ,  Y10S977/84

Abstract: A technique relates sorting entities. The entities are introduced into a nanopillar array. The entities include a first population and a second population, and the nanopillar array includes nanopillars arranged to have a gap separating one from another. The nanopillars are ordered to have an array angle relative to a fluid flow direction. The entities are sorted through the nanopillar array by transporting the first population of the entities less than a predetermined size in a first direction and by transporting the second population of the entities at least the predetermined size in a second direction different from the first direction. The nanopillar array is configured to employ the gap with a gap size less than 300 nanometers in order to sort the entities having a sub-100 nanometer size.

公开(公告)号：US20170205329A1

公开(公告)日：2017-07-20

申请号：US15474118

申请日：2017-03-30

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Yann A. Astier ,  Robert L. Bruce ,  Joshua T. Smith ,  Chao Wang ,  Benjamin H. Wunsch

IPC: G01N15/10 ,  B82B3/00 ,  B01L3/00 ,  G03F7/20 ,  G03F7/00

CPC classification number: G01N15/10 ,  B01L3/502707 ,  B01L3/502715 ,  B01L3/502753 ,  B01L2200/0652 ,  B01L2200/12 ,  B01L2300/0809 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2300/12 ,  B01L2400/086 ,  B03B5/48 ,  B81B1/006 ,  B81B2201/058 ,  B81B2203/0361 ,  B81C1/00111 ,  B81C2201/0132 ,  B82B3/0014 ,  G01N2015/0065 ,  G01N2015/1006 ,  G01N2015/1081 ,  G03F7/0002 ,  G03F7/2037

Abstract: A technique related to sorting entities is provided. An inlet is configured to receive a fluid, and an outlet is configured to exit the fluid. A nanopillar array, connected to the inlet and the outlet, is configured to allow the fluid to flow from the inlet to the outlet. The nanopillar array includes nanopillars arranged to separate entities by size. The nanopillars are arranged to have a gap separating one nanopillar from another nanopillar. The gap is constructed to be in a nanoscale range.

公开(公告)号：US20160144406A1

公开(公告)日：2016-05-26

申请号：US14749309

申请日：2015-06-24

Applicant: International Business Machines Corporation

Inventor： Yann A. Astier ,  Joshua T. Smith ,  Gustavo A. Stolovitzky ,  Chao Wang ,  Benjamin H. Wunsch

IPC: B07B13/04

CPC classification number: B07B13/04 ,  B07B1/4609 ,  B82Y30/00 ,  G01N15/02 ,  G01N2015/0065 ,  G01N2015/0288 ,  Y10S977/84

Abstract: A technique relates sorting entities. The entities are introduced into a nanopillar array. The entities include a first population and a second population, and the nanopillar array includes nanopillars arranged to have a gap separating one from another. The nanopillars are ordered to have an array angle relative to a fluid flow direction. The entities are sorted through the nanopillar array by transporting the first population of the entities less than a predetermined size in a first direction and by transporting the second population of the entities at least the predetermined size in a second direction different from the first direction. The nanopillar array is configured to employ the gap with a gap size less than 300 nanometers in order to sort the entities having a sub-100 nanometer size.

Abstract translation: 一种技术涉及排序实体。 实体被引入纳米柱阵列。 实体包括第一群体和第二群体，并且纳米柱阵列包括布置成具有彼此分离的间隙的纳米柱。 纳米柱被命令相对于流体流动方向具有阵列角度。 通过在第一方向上传送小于预定尺寸的实体的第一群体并且通过在与第一方向不同的第二方向上传送至少预定大小的至少预定大小的实体，通过纳米柱阵列排序实体。 纳米柱阵列被配置为采用具有小于300纳米的间隙尺寸的间隙，以便对具有亚100纳米尺寸的实体进行分类。

公开(公告)号：US09975147B2

公开(公告)日：2018-05-22

申请号：US14749309

申请日：2015-06-24

Applicant: International Business Machines Corporation

Inventor： Yann A. Astier ,  Joshua T. Smith ,  Gustavo A. Stolovitzky ,  Chao Wang ,  Benjamin H. Wunsch

IPC: B07B1/00 ,  B07B13/04 ,  B07B1/46 ,  G01N15/00 ,  B82Y30/00 ,  G01N15/02

CPC classification number: B07B13/04 ,  B07B1/4609 ,  B82Y30/00 ,  G01N15/02 ,  G01N2015/0065 ,  G01N2015/0288 ,  Y10S977/84

Abstract: A technique relates sorting entities. The entities are introduced into a nanopillar array. The entities include a first population and a second population, and the nanopillar array includes nanopillars arranged to have a gap separating one from another. The nanopillars are ordered to have an array angle relative to a fluid flow direction. The entities are sorted through the nanopillar array by transporting the first population of the entities less than a predetermined size in a first direction and by transporting the second population of the entities at least the predetermined size in a second direction different from the first direction. The nanopillar array is configured to employ the gap with a gap size less than 300 nanometers in order to sort the entities having a sub-100 nanometer size.

公开(公告)号：US09914118B2

公开(公告)日：2018-03-13

申请号：US14824518

申请日：2015-08-12

Applicant: International Business Machines Corporation

Inventor： Yann A. Astier ,  Markus Brink ,  Michael F. Lofaro ,  Joshua T. Smith

IPC: G01N27/447 ,  B01L3/00 ,  G01N33/487 ,  B81C1/00 ,  B24B37/04 ,  G01N30/74 ,  G01N30/60 ,  G01N30/88

CPC classification number: B01L3/502707 ,  B01L3/502753 ,  B01L3/502761 ,  B01L2200/0652 ,  B01L2200/12 ,  B01L2300/0681 ,  B01L2300/0858 ,  B01L2300/0887 ,  B01L2300/0896 ,  B24B37/042 ,  B81C1/00087 ,  B81C2201/0104 ,  B81C2201/013 ,  G01N27/44791 ,  G01N30/6039 ,  G01N30/74 ,  G01N33/48721 ,  G01N2030/885

Abstract: A technique relates to a nanogap array. A substrate has been anisotropically etched with trenches that have tapered sidewalls. A sacrificial layer is on bottoms and the tapered sidewalls of the trenches. A filling material is formed on top of the sacrificial layer in the trenches. Nanogaps are formed where at least a portion of the sacrificial layer has been removed from the tapered sidewalls of the trenches while the sacrificial layer remains on the bottoms of the trenches. Each of the nanogaps is formed between one tapered sidewall of the substrate and a corresponding tapered sidewall of the filling material. The one tapered sidewall of the substrate opposes the corresponding tapered sidewall. A capping layer is disposed on top of the substrate and the filling material, such that the nanogaps are covered but not filled in.

公开(公告)号：US09782773B2

公开(公告)日：2017-10-10

申请号：US14950320

申请日：2015-11-24

Applicant: International Business Machines Corporation

Inventor： Yann A. Astier ,  Markus Brink ,  Michael F. Lofaro ,  Joshua T. Smith

IPC: H01L21/311 ,  B01L3/00 ,  B81C1/00 ,  B24B37/04 ,  G01N27/447 ,  G01N33/487 ,  G01N30/74 ,  G01N30/60 ,  G01N30/88

CPC classification number: B01L3/502707 ,  B01L3/502753 ,  B01L3/502761 ,  B01L2200/0652 ,  B01L2200/12 ,  B01L2300/0681 ,  B01L2300/0858 ,  B01L2300/0887 ,  B01L2300/0896 ,  B24B37/042 ,  B81C1/00087 ,  B81C2201/0104 ,  B81C2201/013 ,  G01N27/44791 ,  G01N30/6039 ,  G01N30/74 ,  G01N33/48721 ,  G01N2030/885

Abstract: A technique relates to a nanogap array. A substrate has been anisotropically etched with trenches that have tapered sidewalls. A sacrificial layer is on bottoms and the tapered sidewalls of the trenches. A filling material is formed on top of the sacrificial layer in the trenches. Nanogaps are formed where at least a portion of the sacrificial layer has been removed from the tapered sidewalls of the trenches while the sacrificial layer remains on the bottoms of the trenches. Each of the nanogaps is formed between one tapered sidewall of the substrate and a corresponding tapered sidewall of the filling material. The one tapered sidewall of the substrate opposes the corresponding tapered sidewall. A capping layer is disposed on top of the substrate and the filling material, such that the nanogaps are covered but not filled in.

公开(公告)号：US20160144405A1

公开(公告)日：2016-05-26

申请号：US14697072

申请日：2015-04-27

Applicant: International Business Machines Corporation

Inventor： Yann A. Astier ,  Joshua T. Smith ,  Gustavo A. Stolovitzky ,  Chao Wang ,  Benjamin H. Wunsch

IPC: B07B13/04 ,  G01N15/10

CPC classification number: B07B13/04 ,  B07B1/4609 ,  B82Y30/00 ,  G01N15/02 ,  G01N2015/0065 ,  G01N2015/0288 ,  Y10S977/84

Abstract: A technique relates sorting entities. The entities are introduced into a nanopillar array. The entities include a first population and a second population, and the nanopillar array includes nanopillars arranged to have a gap separating one from another. The nanopillars are ordered to have an array angle relative to a fluid flow direction. The entities are sorted through the nanopillar array by transporting the first population of the entities less than a predetermined size in a first direction and by transporting the second population of the entities at least the predetermined size in a second direction different from the first direction. The nanopillar array is configured to employ the gap with a gap size less than 300 nanometers in order to sort the entities having a sub-100 nanometer size.