Nanogap in-between noble metals
    8.
    发明授权
    Nanogap in-between noble metals 有权
    贵金属之间的纳米胶

    公开(公告)号:US09012329B2

    公开(公告)日:2015-04-21

    申请号:US13856471

    申请日:2013-04-04

    Abstract: A nanogap of controlled width in-between noble metals is produced using sidewall techniques and chemical-mechanical-polishing. Electrical connections are provided to enable current measurements across the nanogap for analytical purposes. The nanogap in-between noble metals may also be formed inside a Damascene trench. The nanogap in-between noble metals may also be inserted into a crossed slit nanopore framework. A noble metal layer on the side of the nanogap may have sub-layers serving the purpose of multiple simultaneous electrical measurements.

    Abstract translation: 使用侧壁技术和化学机械抛光产生在贵金属之间的受控宽度的纳米隙。 提供电连接以实现跨越纳米隙的电流测量用于分析目的。 贵金属之间的纳米隙也可以形成在镶嵌槽内。 贵金属之间的纳米隙也可以插入交叉的狭缝纳米孔框架中。 在纳米隙侧面上的贵金属层可以具有用于多次同时电测量的子层。

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