公开(公告)号：US6093930A

公开(公告)日：2000-07-25

申请号：US54013

申请日：1998-04-02

申请人： James Edward Boyette, Jr. ,  James Michael Hammond ,  Salvatore R. Riggio, Jr. ,  Michael Servedio

发明人： James Edward Boyette, Jr. ,  James Michael Hammond ,  Salvatore R. Riggio, Jr. ,  Michael Servedio

IPC分类号： G01Q70/02 ,  G01Q70/14 ,  H01J37/067

CPC分类号： G01Q70/02 ,  B82Y35/00 ,  Y10S977/86

摘要： A scanning probe microscope having a probe attachment fixture, to which a probe assembly is removably attached during measurements, driven in an engagement direction, and a sample stage driven in scanning directions perpendicular to the engagement direction includes a buffer with a number of buffer stations within the sample stage. When the stage is driven so that one of the buffer stations is in alignment with the attachment fixture, and when the attachment fixture is driven in the engagement direction to be in proximity to the buffer station, the probe assembly is selectively transferred in either direction between the attachment fixture and the buffer station. In a preferred embodiment, probe assemblies are transferred on transfer pallets, and a stationary magazine is provided for storing these pallets, which are transferred in either direction between the magazine and the buffer.

摘要翻译： 一种扫描探针显微镜，其具有探针附接固定装置，探测器组件在测量期间以接合方向被驱动而可移除地附接到该探针附件，并且沿垂直于接合方向的扫描方向驱动的样本台包括具有多个缓冲站的缓冲器， 样品阶段。 当舞台被驱动使得缓冲站中的一个与附接夹具对准时，并且当附接夹具沿接合方向被驱动以接近缓冲站时，探针组件选择性地在 附件夹具和缓冲站。 在优选实施例中，探针组件被转移到转移托盘上，并且提供固定盒以存储这些托盘，这些托盘在盒和缓冲器之间沿任一方向传送。

公开(公告)号：US5804982A

公开(公告)日：1998-09-08

申请号：US451634

申请日：1995-05-26

申请人： Jiann-Chang Lo ,  Michael Servedio ,  James Michael Hammond

发明人： Jiann-Chang Lo ,  Michael Servedio ,  James Michael Hammond

IPC分类号： G01L1/00 ,  G01R1/06 ,  G01R1/067 ,  G01R31/28 ,  G05D3/00 ,  H01L21/66

CPC分类号： G01R1/06705

摘要： Disclosed is a Mini Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging. The probe positioning actuator is composed of a pair of substantially parallel cantilevered beams, each beam being comprised of flexible, signal carrying cable formed of a polyimide composition which allows for the probe tip to be suspended from and form part of the armature of the actuator. The armature also includes a pair of oppositely wound coils intermediate the beams, which coils coact electromagnetically with a pair of spaced apart but fixedly positioned (relative to the coils/armature) magnets forming a motor for effecting armature and thus probe tip movement. The light mass of the coils and armature and the dual functional purpose of the suspension beams serves to make the probe actuator highly accurate and sensitive while allowing for reliable operation.

摘要翻译： 公开了一种小型探头定位致动器，其成本和质量低，能够高加速度，相对较长的行程和紧凑的包装。 探针定位致动器由一对基本上平行的悬臂梁组成，每个梁由柔性的由聚酰亚胺组合物形成的信号承载电缆组成，其允许探针尖端悬挂在驱动器的电枢上并形成其一部分。 电枢还包括一对相对缠绕的线圈，该线圈在电磁线圈共同电磁地与一对间隔开但固定地定位（相对于线圈/电枢）磁体形成用于实现电枢并因此探测尖端运动的电动机。 线圈和电枢的轻质量以及悬挂梁的双重功能用于使探头致动器高度精确和灵敏，同时允许可靠的操作。

公开(公告)号：US5626276A

公开(公告)日：1997-05-06

申请号：US616127

申请日：1996-03-14

申请人： Jiann-Chang Lo ,  Michael Servedio

发明人： Jiann-Chang Lo ,  Michael Servedio

IPC分类号： B23K20/00 ,  H01L21/603

CPC分类号： H01L24/85 ,  B23K20/005 ,  H01L24/78 ,  H01L2224/45014 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48472 ,  H01L2224/78302 ,  H01L2224/85181 ,  H01L2224/85203 ,  H01L2224/85205 ,  H01L24/45 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01023 ,  H01L2924/01028 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043

摘要： An ultrasonic wirebonding assembly, consisting of an actuator producing vibrations at an ultrasonic frequency and a tip transmitting such vibrations to a bonding wire atop a terminal to which the wire is to be bonded, is moved among positions on a circuit chip where wirebonding operations are to occur by means of a linkage. The linkage consists of first and second drive arms, each of which is pivoted on a single stationary shaft, a drive link pivoted on the second drive arm, and a connecting link extending between the drive link and the first drive arm, being pivoted at each end. Each arm is independently driven using a motor having a coil moving over an arcuate permanent magnet. The wirebonding assembly is driven vertically, downward in a direction of engagement with the workpiece and upward in a direction of disengagement with the workpiece, on the drive link by means of a linear motor. The rapid movements available from this linkage facilitate the use of an incrementally moving conveyer holding a number of circuit chips on which wirebonding operations are to be performed.

摘要翻译： 超声波引线接合组件，其由产生超声频率的振动的致动器和将这种振动传递到端子上的接合线的尖端在导线接合操作的电路芯片上的位置之间移动， 通过联动发生。 连杆由第一和第二驱动臂组成，每个驱动臂在单个固定轴上枢转，在第二驱动臂上枢转的驱动连杆和在驱动连杆与第一驱动臂之间延伸的连接连杆， 结束。 每个臂使用具有在弓形永磁体上移动的线圈的电动机独立地驱动。 引线接合组件沿着与工件接合的方向向下垂直地驱动，并且在与工件脱离的方向上，通过线性电动机在驱动连杆上向上驱动。 从这种连接可以获得的快速运动便于使用保持多个电路芯片的递增移动的输送机，在该输送机上进行引线键合操作。

公开(公告)号：US5775567A

公开(公告)日：1998-07-07

申请号：US616128

申请日：1996-03-14

申请人： Jiann-Chang Lo ,  Michael Servedio

发明人： Jiann-Chang Lo ,  Michael Servedio

IPC分类号： B23K20/00 ,  B23K20/10

CPC分类号： H01L24/85 ,  B23K20/005 ,  H01L24/78 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48472 ,  H01L2224/78302 ,  H01L2224/78347 ,  H01L2224/85203 ,  H01L2224/85205 ,  H01L24/45 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01023 ,  H01L2924/01028 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/19043

摘要： In ultrasonic wirebonding apparatus, vibrations produced using a tubular piezoelectric (piezoceramic) actuator, driven by electrical current at an ultrasonic frequency, are used to provide energy for the wirebonding process. An assembly including means for mounting the actuator at a proximal end, the actuator itself, and a bonding tip extending from a distal end of the actuator, are moved by a carrier between the various points at which wirebonding is to occur. The bonding wire is fed through a passageway in this assembly. The carrier slides on a first carriage for movement into engagement with the workpiece. The first carriage slides in a first direction on a second carriage, which in turn slides in a second direction, to move between points at which wirebonding is to occur. The workpieces, such as circuit chips being manufactured, are moved into a workspace for wirebonding, are held therein during processing, and are subsequently removed from the workspace.

摘要翻译： 在超声波引线接合装置中，使用由超声频率的电流驱动的管状压电（压电陶瓷）致动器产生的振动用于为引线接合工艺提供能量。 包括用于将致动器安装在近端的装置，致动器本身以及从致动器的远端延伸的接合末端通过载体在要发生引线接合的各个点之间移动。 接合线通过该组件中的通道进给。 载体在第一滑架上滑动以与工件接合。 第一托架在第二托架上沿第一方向滑动，第二托架又沿第二方向滑动，以在要进行引线接合的点之间移动。 工件（例如制造的电路芯片）被移动到用于引线接合的工作空间中，在处理期间被保持在其中，并随后从工作空间中移除。

公开(公告)号：US5543726A

公开(公告)日：1996-08-06

申请号：US176810

申请日：1994-01-03

申请人： James E. Boyette, Jr. ,  Jiann-Chang Lo ,  Michael Servedio

发明人： James E. Boyette, Jr. ,  Jiann-Chang Lo ,  Michael Servedio

IPC分类号： G01R31/28 ,  G01R1/06 ,  G01R1/073 ,  G01R31/02

CPC分类号： G01R1/07335

摘要： A system for probing both sides of a high density printed circuit board includes an open frame extending around the circuit board when it is held in a test position by a circuit board carrier. The frame includes two parallel rail structures extending above, and at opposite ends of, the circuit board in the test position. The frame also includes another two parallel rail structures extending below, and at opposite ends of, the circuit board. The upper and lower rail structures extend perpendicularly to one another, and are fastened together at the corners of the frame by means of compression bolt assemblies. Two gantry structures are moved in a first direction between the upper rail structures, while two other gantry structures are moved in a direction perpendicular to the first direction between the lower rail structures. A carriage moves along each gantry structure, and a probe is mounted on each carriage to be moved toward and away from the adjacent surface of the circuit board. The circuit board is moved by a board carrier between a position, outside the frame, in which it is loaded and unloaded, and the test position.

摘要翻译： 用于探测高密度印刷电路板的两侧的系统包括当通过电路板载体保持在测试位置时围绕电路板延伸的开放框架。 该框架包括在测试位置的电路​​板的上方和相对两端延伸的两个平行的轨道结构。 框架还包括在电路板的下方和相对端延伸的另外两个平行的轨道结构。 上下轨道结构彼此垂直延伸，并通过压缩螺栓组件在框架的角部处紧固在一起。 两个龙门结构在上轨道结构之间沿第一方向移动，而两个其他机架结构在垂直于下轨道结构之间的第一方向的方向上移动。 托架沿着每个机架结构移动，并且探针安装在每个托架上以朝向和远离电路板的相邻表面移动。 电路板由板载体在框架外部位于其装载和卸载位置之间的位置和测试位置之间移动。

公开(公告)号：US5461324A

公开(公告)日：1995-10-24

申请号：US287313

申请日：1994-08-08

申请人： James E. Boyette ,  Christopher M. Fleck ,  James C. Mahlbacher ,  Michael Servedio

发明人： James E. Boyette ,  Christopher M. Fleck ,  James C. Mahlbacher ,  Michael Servedio

IPC分类号： G01R27/02 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  H05K3/00

CPC分类号： G01R1/07328

摘要： A fixture is provided for locating open conditions within circuits and short conditions between adjacent circuits on a flexible substrate having circuits extending along each side, as well as individual circuits extending along both sides. In one station of the fixture, the flexible circuit extends against a conductive backing plate, and conductivity measurements, to detect open conditions, are made between two probes moving among test points on the first side of the substrate, which is opposite the backing plate, and between one of these probes and the conductive backing plate. The latter type of measurement is used particularly to detect an open condition in a via extending through the substrate. In another station of the fixture, the first side of the flexible circuit extends against a conductive backing plate having an insulating sheet adjacent to the substrate, conductivity measurements, to detect open conditions, are made between two test probes moving along a side of the substrate opposite this insulated conductive backing plate, and capacitance measurements, to detect short circuit conditions, are made between one of these probes and the insulated conductive backing plate.

摘要翻译： 提供了一种夹具，用于在柔性基板上的相邻电路之间的电路内和短路条件下定位开放状态，并具有沿着每一侧延伸的电路以及沿着两侧延伸的各个电路。 在固定装置的一个工位中，柔性电路相对于导电背板延伸，并且在两个探针之间进行电导率测量，以检测开放状态，这两个探头在与背板相对的基板的第一侧上的测试点之间移动， 并且在这些探针中的一个和导电背板之间。 后一类型的测量特别用于检测延伸穿过衬底的通孔中的开路状态。 在固定装置的另一工位中，柔性电路的第一侧相对于具有与衬底相邻的绝缘片的导电背板延伸，用于检测开放状态的电导率测量在沿衬底侧移动的两个测试探针之间进行 与该绝缘导电背板相反，并且在这些探针之一和绝缘导电背板之间进行电容测量以检测短路状况。

公开(公告)号：US5635849A

公开(公告)日：1997-06-03

申请号：US643523

申请日：1996-05-06

申请人： Jiann-Chang Lo ,  Michael Servedio ,  James M. Hammond ,  James E. Boyette, Jr. ,  Hans-George H. Kolan

发明人： Jiann-Chang Lo ,  Michael Servedio ,  James M. Hammond ,  James E. Boyette, Jr. ,  Hans-George H. Kolan

IPC分类号： G01R31/26 ,  G01R1/067 ,  G01R1/073 ,  G01R31/28 ,  H01L21/66 ,  H02K41/03 ,  G01R31/22

CPC分类号： G01R1/06705

摘要： Disclosed is a Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging, as well as high in efficiency. The actuator assembly comprises a frame, and at least one pair of spaced apart, laterally extending, conductor carrying, flexible beams attached to the frame. A non-magnetic armature, substantially U-shaped in cross section, is attached adjacent or approximate the extended terminal ends of the beams, and a probe is attached to the base of the "U" of the armature for contacting selected points in the electrical circuit associated with the device being tested. The heart of the actuator includes a coil mounted on the upstanding legs of the U-shaped armature and arranged so that the axis of the coil is perpendicular to the base of the armature but substantially parallel to the probe tip. This arrangement places the `motor` portion of the actuator adjacent the probe and permits accurate and repeatable, fast control of not only probe tip position but probe tip movement. To complete the motor portion of the actuator, means, carried by the frame create a magnetic field across the coil, whereby upon energization of the coil, deflection of the armature (and thus the beams) occurs, effecting movement of the probe tip into contact with selected portions of the device being tested.

摘要翻译： 公开了一种探头定位致动器，其成本和质量低，能够具有高加速度，相对长的行程和紧凑的包装以及高的效率。 致动器组件包括框架，以及连接到框架的至少一对间隔开的横向延伸的导体承载的柔性梁。 基本上U形的横截面的非磁性衔铁被安装在梁的延伸的末端附近或近似的位置，并且探头附接到电枢的“U”的底部，用于接触电气中的选定点 与被测设备相关的电路。 致动器的心脏包括安装在U形衔铁的直立腿上的线圈，并被布置成使得线圈的轴线垂直于电枢的基部，但基本上平行于探针尖端。 这种布置使致动器的“电动机”部分邻近探头，并且允许精确和可重复地，快速地控制探针尖端位置，但是探针尖端运动。 为了完成致动器的电动机部分，由框架承载的装置在线圈上产生磁场，由此在线圈通电时，发生电枢（以及因此的梁）的偏转，使探针尖端移动到接触 该设备的选定部分被测试。

公开(公告)号：US5635848A

公开(公告)日：1997-06-03

申请号：US402417

申请日：1995-03-10

申请人： James M. Hammond ,  James C. Mahlbacher ,  Kenneth G. Roessler ,  Michael Servedio ,  Li-Cheng R. Zai

发明人： James M. Hammond ,  James C. Mahlbacher ,  Kenneth G. Roessler ,  Michael Servedio ,  Li-Cheng R. Zai

IPC分类号： G01R1/067 ,  G01R1/073

CPC分类号： G01R1/06705

摘要： A digital and analog controller for controlling a high-speed probe actuator is disclosed. This method and system provide the probe actuator system with improved damping ratio and reduced impact force, so the throughput of the tester is increased with fast settling actuator armature. With this method and system, the steady-state probe force is less sensitive to the servo system, test probe and variation in the probing distance d. An electronic circuit, which consists of analog operational amplifiers, monostable multivibrators, and D flip-flops, is presented for low-cost applications.

摘要翻译： 公开了一种用于控制高速探头致动器的数字和模拟控制器。 该方法和系统为探头致动器系统提供了改进的阻尼比和减小的冲击力，因此测试仪的生产量随着快速沉降执行器电枢而增加。 利用这种方法和系统，稳态探头力对伺服系统，测试探头和探测距离d的变化敏感度较低。 一个电子电路由模拟运算放大器，单稳态多谐振荡器和D触发器组成，用于低成本应用。

公开(公告)号：US5550483A

公开(公告)日：1996-08-27

申请号：US342433

申请日：1994-11-18

申请人： James E. Boyette, Jr. ,  James M. Hammond ,  Jiann-Chang Lo ,  James C. Mahlbacher ,  Michael Servedio ,  Ali R. Taheri

发明人： James E. Boyette, Jr. ,  James M. Hammond ,  Jiann-Chang Lo ,  James C. Mahlbacher ,  Michael Servedio ,  Ali R. Taheri

IPC分类号： G01R1/067 ,  G01R31/02

CPC分类号： G01R1/06705

摘要： Probing system performance is improved by dynamically positioning a test probe at a test site during the gantry settling interval using a high performance secondary positioner to compensate for the inherent moving mass oscillational displacements. A primary positioner positions the gantry and its associated test probe to within a predetermined axis distance of the test site and a secondary positioner dynamically maintains the test probe at a target position corresponding to the test site during the settling interval by imparting compensating displacements to the test probe to counteract the displacement errors incurred as the primary positioner attempts to settle the gantry at the test site. Similarly, automatic machine tool performance is improved by dynamically positioning a work tool at a work site during the gantry settling interval using a high performance secondary positioner to compensate for the inherent moving mass oscillational displacements. A primary positioner positions the gantry and its associated work tool to within a predetermined axis distance of the work site and a secondary positioner dynamically maintains the work tool at a target position corresponding to the work site during the settling interval by imparting compensating displacements to the work tool to counteract the displacement errors incurred as the primary positioner attempts to settle the gantry at the work site.

摘要翻译： 通过使用高性能辅助定位器在机架沉降间隔期间在测试位置处动态定位测试探头来补偿固有的移动质量振荡位移，来提高系统性能。 主要定位器将机架及其相关联的测试探针定位在测试位置的预定轴距离内，并且辅助定位器通过赋予测试的补偿位移在静止间隔期间将测试探针动态地维持在对应于测试位置的目标位置 探测器可以抵消由于主要定位器试图在测试现场安装龙门架时发生的位移误差。 类似地，通过使用高性能二次定位器在机架沉降间隔期间通过在工作现场的动态定位工作工具来补偿固有的移动质量振荡位移，从而提高了自动机床性能。 主要定位器将机架及其相关联的工作工具定位在工作现场的预定轴距离内，并且辅助定位器通过向工件施加补偿位移来将工作工具在对应于工作现场的目标位置处动态地维持在工作位置 作为主要定位者试图在工地上定位龙门架时发生的位移错误的工具。

公开(公告)号：US5532611A

公开(公告)日：1996-07-02

申请号：US451635

申请日：1995-05-26

申请人： Jiann-Chang Lo ,  Michael Servedio ,  James M. Hammond ,  James E. Boyette, Jr. ,  Hans-George H. Kolan

发明人： Jiann-Chang Lo ,  Michael Servedio ,  James M. Hammond ,  James E. Boyette, Jr. ,  Hans-George H. Kolan

IPC分类号： G01R31/26 ,  G01R1/067 ,  G01R1/073 ,  G01R31/28 ,  H01L21/66 ,  H02K41/03 ,  G01R31/22

CPC分类号： G01R1/06705

摘要： Disclosed is a Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging, as well as high in efficiency. The actuator assembly comprises a frame, and at least one pair of spaced apart, laterally extending, conductor carrying, flexible beams attached to the frame. A non-magnetic armature, substantially U-shaped in cross section, is attached adjacent or approximate the extended terminal ends of the beams, and a probe is attached to the base of the "U" of the armature for contacting selected points in the electrical circuit associated with the device being tested. The heart of the actuator includes a coil mounted on the upstanding legs of the U-shaped armature and arranged so that the axis of the coil is perpendicular to the base of the armature but substantially parallel to the probe tip. This arrangement places the `motor` portion of the actuator adjacent the probe and permits accurate and repeatable, fast control of not only probe tip position but probe tip movement. To complete the motor portion of the actuator, means, carried by the frame create a magnetic field across the coil, whereby upon energization of the coil, deflection of the armature (and thus the beams) occurs, effecting movement of the prob into contact with selected portions of the device being tested.

摘要翻译： 公开了一种探头定位致动器，其成本和质量低，能够具有高加速度，相对长的行程和紧凑的包装以及高的效率。 致动器组件包括框架，以及连接到框架的至少一对间隔开的横向延伸的导体承载的柔性梁。 基本上U形的横截面的非磁性衔铁被安装在梁的延伸的末端附近或近似的位置，并且探头附接到电枢的“U”的底部，用于接触电气中的选定点 与被测设备相关的电路。 致动器的心脏包括安装在U形衔铁的直立腿上的线圈，并被布置成使得线圈的轴线垂直于电枢的基部，但基本上平行于探针尖端。 这种布置使致动器的“电动机”部分邻近探头，并且允许精确和可重复地，快速地控制探针尖端位置，但是探针尖端运动。 为了完成致动器的电动机部分，由框架承载的装置在线圈上产生磁场，由此在线圈通电时，发生电枢（以及因此的梁）的偏转，从而实现与该 正在测试的设备的所选部分。