摘要:
The invention discloses an SiO2—TiO2 glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.
摘要:
The invention discloses an SiO2—TiO2 glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.
摘要:
A fluorine-doped at least ternary silicate glass is disclosed which contains in particular TiO2. It can advantageously be used as a material having a low thermal expansion, wherein the slope of the coefficient of thermal expansion dCTE/T is ±2·109/K2 in the temperature range from −50° C. to 100° C. This material is particularly suited for micro-lithography, in particular for EUV-lithography.
摘要翻译:公开了一种掺氟的至少三元硅酸盐玻璃,其特别包含TiO 2。 它可以有利地用作具有低热膨胀性的材料,其中热膨胀系数dCTE / T的斜率在±2.10℃/ K 2℃的温度 范围为-50℃至100℃。该材料特别适用于微光刻,特别适用于EUV光刻。
摘要:
A substrate with a sol-gel layer and to a method for producing a composite material wherein a barrier layer is placed between the sol-gel layer and the substrate are provided.
摘要:
A composite is provided that has a structured sol-gel layer on a substrate. The sol-gel layer is extremely resistant against mechanical stress and other influences from outside due to its production method. The composite is suitable for use in a lot of technical fields, since the sol-gel layer can be provided with nearly any arbitrary structure. For example, the structure may result in optical effects and may be used in optical systems.
摘要:
In order to provide a decorative coating (9) which exhibits improved temperature resistance and strength on glass and glass-ceramic and which also has no strength-reducing effect on the substrate (3), or at least no longer has any substantially strength-reducing effect on the substrate, the invention envisions a process for producing glass or glass-ceramic articles having a decorative layer in which at least one decorative pigment (13) is mixed with a sol-gel binder (11), and the pigment mixed with the sol-gel binder is cured on the glass or glass-ceramic substrate of the article by annealing, to form a decorative layer having a porous ceramiclike structure.
摘要:
A method for producing a pane of a household appliance or a viewing window of an oven is provided. The method includes the steps of: providing a substrate; applying a sol-gel layer to the substrate; embossing a haptically perceptible pattern using an embossing tool in the sol-gel layer; and curing the sol-gel layer. A pane of a household appliance or piece of furniture is also provided that includes a glass or glass-ceramic substrate with a patterned sol-gel layer which has a haptically perceptible pattern.
摘要:
In order to provide a decorative coating (9) which exhibits improved temperature resistance and strength on glass and glass-ceramic and which also has no strength-reducing effect on the substrate (3), or at least no longer has any substantially strength-reducing effect on the substrate, the invention envisions a process for producing glass or glass-ceramic articles having a decorative layer in which at least one decorative pigment (13) is mixed with a sol-gel binder (11), and the pigment mixed with the sol-gel binder is cured on the glass or glass-ceramic substrate of the article by annealing, to form a decorative layer having a porous ceramiclike structure.
摘要:
A composite is provided that has a structured sol-gel layer on a substrate. The sol-gel layer is extremely resistant against mechanical stress and other influences from outside due to its production method. The composite is suitable for use in a lot of technical fields, since the sol-gel layer can be provided with nearly any arbitrary structure. For example, the structure may result in optical effects and may be used in optical systems.