Method of manufacturing substrate
    4.
    发明授权
    Method of manufacturing substrate 有权
    制造基板的方法

    公开(公告)号:US07795140B2

    公开(公告)日:2010-09-14

    申请号:US12247496

    申请日:2008-10-08

    IPC分类号: H01L21/44

    摘要: A method of manufacturing a substrate, includes: (a) forming the through hole by etching the silicon substrate from a first surface of the silicon substrate by a Bosch process; (b) forming a thermal oxide film such that the thermal oxide film covers the first surface of the silicon substrate, a second surface of the silicon substrate opposite to the first surface, and a surface of the silicon substrate corresponding to a side surface of the through hole, by thermally oxidizing the silicon substrate where the through hole is formed; (c) removing the thermal oxide film; (d) forming an insulating film such that the insulating film covers the first and second surfaces of the silicon substrate and the surface of the silicon substrate corresponding to the side surface of the through hole; and (e) forming the through electrode in the through hole on which the insulating film is formed.

    摘要翻译: 一种制造衬底的方法,包括:(a)通过使用Bosch工艺从硅衬底的第一表面上蚀刻硅衬底形成通孔; (b)形成热氧化膜,使得热氧化膜覆盖硅衬底的第一表面,与第一表面相对的硅衬底的第二表面和与衬底的侧表面相对应的硅衬底的表面 通孔,通过热氧化形成通孔的硅衬底; (c)去除热氧化膜; (d)形成绝缘膜,使得所述绝缘膜覆盖所述硅衬底的所述第一表面和所述第二表面以及所述硅衬底的与所述通孔的侧表面相对应的表面; 和(e)在其上形成有绝缘膜的通孔中形成通孔。

    Lighting apparatus
    5.
    发明授权
    Lighting apparatus 有权
    照明设备

    公开(公告)号:US07794112B2

    公开(公告)日:2010-09-14

    申请号:US11984930

    申请日:2007-11-26

    IPC分类号: F21V1/00

    摘要: It is a lighting apparatus 10 that has a light emitting element 16, a light emitting element housing 15 having a concave portion 28 that accommodates the light emitting element 16, and an optically transparent member 18 that airproofs a space B formed by the concave portion 28 and transmits light emitted from the light emitting element 16. The concave portion 28 is shaped to become wider toward the optically transparent member 18 from the bottom surface 28A of the concave portion 28. The lighting apparatus 10 is provided with a light shielding member 12 for shielding a part of light emitted from the light emitting element 16 is provided on the optically transparent member 18.

    摘要翻译: 它是具有发光元件16,具有容纳发光元件16的凹部28的发光元件壳体15的照明装置10以及对由凹部28形成的空间B进行空气隔绝的光学透明构件18 并且透射从发光元件16发射的光。凹部28从凹部28的底面28A朝向光学透明构件18变宽。照明装置10设置有遮光构件12, 屏蔽从发光元件16发射的光的一部分设置在光学透明构件18上。