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公开(公告)号：US20060030179A1
公开(公告)日：2006-02-09
申请号：US10913904
申请日：2004-08-05
IPC分类号： H01R12/00
CPC分类号： H01L24/72 , G01R1/06716 , G01R1/06727 , G01R1/06761 , G01R1/06772 , H01L2924/01005 , H01L2924/01006 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01042 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01327 , H01L2924/14 , H01L2924/19041 , H01L2924/30107 , H01L2924/3011 , H01L2924/3025 , H01P3/081 , H01P3/085 , H01R12/718 , H01R13/24 , H01R13/6461 , H01R13/6477 , H05K1/0218 , H05K3/4092
摘要： A curved transmission-line spring structure formed by self-bending materials (e.g., stress-engineered materials, intermetallic compounds and/or bimorphs) that are layered to form a stripline or microstrip transmission line. A dielectric layer is sandwiched between two conductive layers, which form the signal and ground lines of the structure. The various layers are etched to form an elongated spring structure, and then one end of the spring structure is released from the underlying substrate, causing the tip of the released end to bend away from the substrate for contact with a second device. One or both of the conductive layers is fabricated using self-bending spring metals to facilitate the bending process, and plated metal is utilized for conductivity. Alternatively, or in addition, the dielectric layer is formed using a stress-engineered dielectric material. Two-tip and three-tip structures are used to facilitate connection of both the ground and signal lines.
摘要翻译： 通过层叠以形成带状线或微带传输线的自弯曲材料（例如，应力工程材料，金属间化合物和/或双压电晶片）形成的弯曲传输线弹簧结构。 介电层夹在两个导电层之间，形成结构的信号和接地线。 蚀刻各种层以形成细长的弹簧结构，然后弹簧结构的一端从下面的基底释放，使得释放端的尖端远离基板弯曲以与第二装置接触。 使用自弯曲弹簧金属制造一个或两个导电层以促进弯曲过程，并且将电镀金属用于导电性。 或者或另外，使用应力工程介电材料形成电介质层。 两端和三端结构用于促进接地和信号线的连接。
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公开(公告)号：US20050130462A1
公开(公告)日：2005-06-16
申请号：US10737272
申请日：2003-12-15
IPC分类号： H01R12/00
CPC分类号： H01R13/2407
摘要： An electrical interconnect structure that includes a spring portion that extends out of a plane. The electrical interconnect including curved regions to improve the lateral compliance of the interconnect. The curved region may be incorporated into a release region of the spring. The release region may include either or both an uplifted region and a planar region. The curves in the release region are arranged to improve the spring contact with a mating surface and also improve lateral compliance compared to prior art spring designs.
摘要翻译： 一种电互连结构，其包括从平面延伸的弹簧部分。 电互连包括弯曲区域，以改善互连的横向顺应性。 弯曲区域可以结合到弹簧的释放区域中。 释放区域可以包括隆起区域和平坦区域中的一个或两个。 释放区域中的曲线布置成改进与配合表面的弹簧接触，并且与现有技术的弹簧设计相比，还改善了侧向顺从性。
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公开(公告)号：US20080095996A1
公开(公告)日：2008-04-24
申请号：US11959813
申请日：2007-12-19
IPC分类号： B32B7/02
CPC分类号： B81C1/0015 , Y10T428/24942
摘要： A method and structure for forming a spring structure that avoids undesirable kinks in the spring is described. The method converts a portion of a release layer such that the converted portion resists etching. The converted portion then serves as an anchor region for a spring structure deposited over the release layer. When the non-converted portions of the release layer are etched, the spring curls out of the plane of a plane.
摘要翻译： 描述了形成弹簧结构的方法和结构，其避免了弹簧中不希望的扭结。 该方法将释放层的一部分转换成转换部分抵抗蚀刻。 转换的部分然后用作沉积在释放层上的弹簧结构的锚定区域。 当剥离层的未转化部分被蚀刻时，弹簧卷曲在平面的平面之外。
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公开(公告)号：US20060286832A1
公开(公告)日：2006-12-21
申请号：US11463283
申请日：2006-08-08
IPC分类号： H01R13/44
CPC分类号： H01L24/72 , G01R1/06716 , G01R1/06727 , G01R1/06761 , G01R1/06772 , H01L2924/01005 , H01L2924/01006 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01042 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01327 , H01L2924/14 , H01L2924/19041 , H01L2924/30107 , H01L2924/3011 , H01L2924/3025 , H01P3/081 , H01P3/085 , H01R12/718 , H01R13/24 , H01R13/6461 , H01R13/6477 , H05K1/0218 , H05K3/4092
摘要： A curved transmission-line spring structure formed by self-bending materials (e.g., stress-engineered materials, intermetallic compounds and/or bimorphs) that are layered to form a stripline or microstrip transmission line. A dielectric layer is sandwiched between two conductive layers, which form the signal and ground lines of the structure. The various layers are etched to form an elongated spring structure, and then one end of the spring structure is released from the underlying substrate, causing the tip of the released end to bend away from the substrate for contact with a second device. One or both of the conductive layers is fabricated using self-bending spring metals to facilitate the bending process, and plated metal is utilized for conductivity. Alternatively, or in addition, the dielectric layer is formed using a stress-engineered dielectric material. Two-tip and three-tip structures are used to facilitate connection of both the ground and signal lines.
摘要翻译： 通过层叠以形成带状线或微带传输线的自弯曲材料（例如，应力工程材料，金属间化合物和/或双压电晶片）形成的弯曲传输线弹簧结构。 介电层夹在两个导电层之间，形成结构的信号和接地线。 蚀刻各种层以形成细长的弹簧结构，然后弹簧结构的一端从下面的基底释放，使得释放端的尖端远离基板弯曲以与第二装置接触。 使用自弯曲弹簧金属制造一个或两个导电层以促进弯曲过程，并且将电镀金属用于导电性。 或者或另外，使用应力工程介电材料形成电介质层。 两端和三端结构用于促进接地和信号线的连接。
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公开(公告)号：US20050006829A1
公开(公告)日：2005-01-13
申请号：US10615653
申请日：2003-07-08
IPC分类号： F16F1/02 , H01L27/148 , F16F1/00 , F16F9/00 , H01L29/768
CPC分类号： F16F1/027
摘要： Lithographically defined and etched spring structures are produced by various methods such that they avoid the formation of a plated metal wedge on an underside of the spring structure after release. A post is utilized to offset the spring from an underlying substrate by a distance greater than the thickness of the plated metal. A trench is etched into the substrate below the spring to provide clearance during deflection of the spring. Another spring includes a knee (bend) that provides the necessary clearance during deflection. A plating process is limited to the upper side of another spring. A released spring is used as a shadow mask for patterning resist that prevents wedge formation during plating. Various tip arrangements are disclosed that can be utilized with each spring structure
摘要翻译： 通过各种方法制造光刻定义和蚀刻的弹簧结构，使得它们在释放之后避免在弹簧结构的下侧上形成电镀金属楔。 使用柱子将弹簧从下面的衬底偏移大于电镀金属的厚度的距离。 在弹簧下方的衬底中蚀刻沟槽，以在弹簧偏转期间提供间隙。 另一个弹簧包括在偏转期间提供必要的间隙的膝盖（弯头）。 电镀工艺限于另一弹簧的上侧。 释放的弹簧用作用于图案化抗蚀剂的荫罩，其防止电镀期间的楔形成。 公开了可以与每个弹簧结构一起使用的各种尖端装置
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公开(公告)号：US20070202310A1
公开(公告)日：2007-08-30
申请号：US11364111
申请日：2006-02-27
IPC分类号： B32B7/02
CPC分类号： C23C30/00 , B81B2203/0118 , B81B2203/019 , B81C1/00007 , B81C1/0019 , C23C28/00 , C23C28/021 , C23C28/023 , C25D1/003 , C25D1/20 , C25D5/022 , C25D5/10 , C25D5/50 , H01F17/0006 , H01L27/08 , Y10T428/24942
摘要： A structure has at least one structure component formed of a first material residing on a substrate, such that the structure is out of a plane of the substrate. A first coating of a second material then coats the structure. A second coating of a non-oxidizing material coats the structure at a thickness less than a thickness of the second material.
摘要翻译： 结构具有由驻留在基板上的第一材料形成的至少一个结构部件，使得该结构在基板的平面之外。 然后第二材料的第一涂层然后涂覆该结构。 非氧化材料的第二涂层以小于第二材料厚度的厚度涂覆结构。
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7.发明申请公开(公告)号：US20050270135A1
公开(公告)日：2005-12-08
申请号：US11197675
申请日：2005-08-04
申请人： Christopher Chua , Francesco Lemmi , Koenraad Van Schuylenbergh , Jeng Lu , David Fork , Eric Peeters , Decai Sun , Donald Smith , Linda Romano
发明人： Christopher Chua , Francesco Lemmi , Koenraad Van Schuylenbergh , Jeng Lu , David Fork , Eric Peeters , Decai Sun , Donald Smith , Linda Romano
IPC分类号： H01F41/04 , G01R1/067 , G01R3/00 , G03C5/00 , H01F17/00 , H01F17/02 , H01F27/29 , H01L21/02 , H01L21/60 , H01L21/768 , H01L23/485 , H01L23/49 , H01L23/498 , H01L23/522 , H01R9/03 , H05K7/02
CPC分类号： H01L24/13 , G01R1/06727 , G01R3/00 , H01F17/0033 , H01F17/02 , H01F41/041 , H01L21/76838 , H01L21/7688 , H01L23/498 , H01L23/49811 , H01L23/5227 , H01L24/11 , H01L24/16 , H01L24/48 , H01L28/10 , H01L2224/05568 , H01L2224/05573 , H01L2224/05624 , H01L2224/13099 , H01L2224/4847 , H01L2224/8592 , H01L2924/0001 , H01L2924/00014 , H01L2924/00015 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/0104 , H01L2924/01042 , H01L2924/01047 , H01L2924/01057 , H01L2924/01058 , H01L2924/01061 , H01L2924/01068 , H01L2924/01072 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01084 , H01L2924/014 , H01L2924/10253 , H01L2924/10329 , H01L2924/12034 , H01L2924/14 , H01L2924/181 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/30105 , H01L2924/30107 , H01L2924/3011 , Y10T29/4902 , Y10T29/49071 , Y10T29/49147 , Y10T29/49204 , Y10T29/49208 , Y10T29/4921 , Y10T29/49218 , H01L2924/00 , H01L2224/05599 , H01L2224/85399 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要： An out-of-plane micro-structure which can be used for on-chip integration of high-Q inductors and transformers places the magnetic field direction parallel to the substrate plane without requiring high aspect ratio processing. The photolithographically patterned coil structure includes an elastic member having an intrinsic stress profile. The intrinsic stress profile biases a free portion away from the substrate forming a loop winding. An anchor portion remains fixed to the substrate. The free portion end becomes a second anchor portion which may be connected to the substrate via soldering or plating. A series of individual coil structures can be joined via their anchor portions to form inductors and transformers.
摘要翻译： 可以用于高Q电感和变压器的片上集成的平面外微结构使得磁场方向平行于衬底平面而不需要高纵横比处理。 光刻图案的线圈结构包括具有固有应力分布的弹性构件。 固有的应力分布使形成环绕的基板远离基板偏移。 锚固部分保持固定到基底上。 自由部分端部成为可以通过焊接或电镀而连接到基板的第二锚固部分。 一系列单独的线圈结构可以通过它们的锚定部分接合以形成电感器和变压器。
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公开(公告)号：US20070139150A1
公开(公告)日：2007-06-21
申请号：US11300860
申请日：2005-12-15
IPC分类号： H01F5/00
CPC分类号： H05K3/4092 , H01F17/0006 , H01F17/0033 , H01F17/02 , H01F41/041 , H01F2027/2814 , H05K3/243 , H05K2201/0166 , H05K2201/0317 , H05K2201/0397 , H05K2203/0597 , H05K2203/0783
摘要： A method of reflowing a polymer to form a spring or coil structure is described. A polymer is deposited over stress engineered thin film with an internal stress gradient. The polymer serves as a loading prevent release of the internal stress until a solvent vapor softens and reflows the polymer. As the polymer softens, the internal stress within the thin film is gradually released allowing controlled curling of the thin film out of a substrate plane. In one embodiment, the thin film forms the windings of a coil structure.
摘要翻译： 描述了一种回流聚合物以形成弹簧或线圈结构的方法。 聚合物沉积在具有内应力梯度的应力工程薄膜上。 聚合物用作负载，防止释放内部应力，直到溶剂蒸气软化和回流聚合物。 当聚合物软化时，薄膜内的内部应力逐渐释放，从而允许薄膜从基板平面受到控制的卷曲。 在一个实施例中，薄膜形成线圈结构的绕组。
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公开(公告)号：US20070141742A1
公开(公告)日：2007-06-21
申请号：US11300872
申请日：2005-12-15
IPC分类号： H01L21/00
CPC分类号： B81C1/0015 , Y10T428/24942
摘要： A method and structure for forming a spring structure that avoids undesirable kinks in the spring is described. The method converts a portion of a release layer such that the converted portion resists etching. The converted portion then serves as an anchor region for a spring structure deposited over the release layer. When the non-converted portions of the release layer are etched, the spring curls out of the plane of a plane.
摘要翻译： 描述了形成弹簧结构的方法和结构，其避免了弹簧中不希望的扭结。 该方法将释放层的一部分转换成转换部分抵抗蚀刻。 转换的部分然后用作沉积在释放层上的弹簧结构的锚定区域。 当剥离层的未转化部分被蚀刻时，弹簧卷曲在平面的平面之外。
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10.发明申请RELEASE HEIGHT ADJUSTMENT OF STRESSY METAL DEVICES BY ANNEALING BEFORE AND AFTER RELEASE 有权通过在发布之前和之后通过退火释放强度金属器件的高度调整公开(公告)号：US20050102833A1
公开(公告)日：2005-05-19
申请号：US10715978
申请日：2003-11-17
申请人： Thomas Hantschel , David Fork , Dirk De Bruyker , Chinnwen Shih , Jeng Lu , Christopher Chua , Raj Apte , Brent Krusor
发明人： Thomas Hantschel , David Fork , Dirk De Bruyker , Chinnwen Shih , Jeng Lu , Christopher Chua , Raj Apte , Brent Krusor
CPC分类号： G01R1/06744 , G01R1/06727 , G01R3/00 , H05K3/4092 , Y10T29/49204 , Y10T29/49208 , Y10T29/49218 , Y10T29/49222
摘要： Spring structures are subjected to pre-release and post-release annealing to tune their tip height to match a specified target. Post-release annealing increases tip height, and pre-release annealing decreases tip height. The amount of tuning is related to the annealing temperature and/or time. Annealing schedules are determined for a pre-fabricated cache of unreleased spring structures such that finished spring structures having a variety of target heights can be economically produced by releasing/annealing the cache according to associated annealing schedules. Selective annealing is performed using lasers and heat absorbing/reflecting materials. Localized annealing is used to generate various spring structure shapes. Both stress-engineered and strain-engineered spring structures are tuned by annealing.
摘要翻译： 弹簧结构经受预释放和后释放退火以调节其尖端高度以匹配指定的靶。 后释放退火增加尖端高度，并且预释放退火使尖端高度降低。 调谐量与退火温度和/或时间有关。 对于未发布的弹簧结构的预制缓存来确定退火计划，使得可以通过根据相关联的退火计划释放/退火高速缓存来经济地产生具有各种目标高度的成品弹簧结构。 使用激光和吸热/反射材料进行选择性退火。 定位退火用于产生各种弹簧结构形状。 应力设计和应变工程弹簧结构都通过退火进行调整。
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