Test board and a test method using the same providing improved
electrical connection
    1.
    发明授权
    Test board and a test method using the same providing improved electrical connection 失效
    测试板和使用该测试方法的测试方法提供改进的电气连接

    公开(公告)号:US6046598A

    公开(公告)日:2000-04-04

    申请号:US852159

    申请日:1997-05-06

    CPC分类号: H05K3/326 G01R1/0408

    摘要: A test board includes an insulating part provided to face a semiconductor device when the semiconductor device is mounted on the test board, a sloped connection hole formed in the insulating part for accepting a projection electrode when the semiconductor device is mounted on the test board, and a conductive part formed in the insulating part so as to be in contact with and electrically connected to the projection electrode. When the semiconductor device is mounted on the test board, the semiconductor device or the projection electrode is supported by the insulating part.

    摘要翻译: 测试板包括当半导体器件安装在测试板上时面向半导体器件的绝缘部分,当半导体器件安装在测试板上时用于接受投影电极的绝缘部分中形成的倾斜连接孔,以及 导电部分形成在绝缘部分中以与突起电极接触并电连接。 当半导体器件安装在测试板上时,半导体器件或突起电极由绝缘部分支撑。

    Integrated circuit testing device
    4.
    发明授权
    Integrated circuit testing device 有权
    集成电路测试装置

    公开(公告)号:US06191604B1

    公开(公告)日:2001-02-20

    申请号:US09238172

    申请日:1999-01-28

    IPC分类号: G01R3102

    CPC分类号: G01R31/2886 G01R1/07357

    摘要: An integrated circuit testing device includes a flexible base of an insulating material, the base having a first surface and a second surface opposite to each other, an integrated circuit to be tested being bonded to the first surface. A conductive wiring layer is provided on the first or second surface of the base, the wiring layer including a plurality of projecting contacts over the first surface at positions which electrodes of the integrated circuit are connected to. An elastic member is provided beneath the second surface of the base opposite to the first surface, the elastic member having a first level of hardness. A flexible film member is provided between the second surface of the base and the elastic member, the film member having a second level of hardness higher than the first level of hardness of the elastic member.

    摘要翻译: 集成电路测试装置包括绝缘材料的柔性基座,该基座具有彼此相对的第一表面和第二表面,待测试的集成电路与第一表面接合。 在基座的第一或第二表面上设置有导电布线层,布线层包括在集成电路的电极连接的位置上的第一表面上的多个突出接点。 弹性构件设置在基座的与第一表面相对的第二表面下方,弹性构件具有第一水平的硬度。 柔性膜构件设置在基座的第二表面和弹性构件之间,膜构件具有比弹性构件的第一硬度高的第二硬度水平。

    Method for processing substrates
    7.
    发明授权
    Method for processing substrates 有权
    处理基板的方法

    公开(公告)号:US07955044B2

    公开(公告)日:2011-06-07

    申请号:US11900650

    申请日:2007-09-12

    IPC分类号: B65H1/00

    摘要: A method for processing substrates for a substrate processing facility includes the steps of: performing ventilation of a container with a fan filter unit while a lid of the container is in a closed state, when the container is stored in a storage shelf, and when the container is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.

    摘要翻译: 一种用于处理基板处理设备的基板的方法包括以下步骤:当容器的盖子处于关闭状态时,当容器存储在存放架中时,执行具有风扇过滤器单元的容器的通风,并且当 容器用基板输送装置转印,并且当基板在基板装载/卸载部分中被转移到基板传送装置时,通过容器的盖子将风扇过滤器的容器换向打开状态。

    Plate-shaped work piece transporting apparatus
    9.
    发明授权
    Plate-shaped work piece transporting apparatus 有权
    板状工件输送装置

    公开(公告)号:US07329299B2

    公开(公告)日:2008-02-12

    申请号:US10885210

    申请日:2004-07-06

    IPC分类号: B65G49/07

    摘要: It is an object of the present invention to provide a plate-shaped work piece transporting apparatus that has a fan, a dust-removal filter disposed above this fan, and a plate-shape porous member disposed above the dust-removal filter. By forming a chamber in which air can accumulate between the porous member and the dust-removal filter, it is possible to suppress air pulsations. Further, by providing support members on the porous member, the plate-shaped work piece can be supported and damage thereto can be avoided when the plate-shaped work piece, which is supported by air from the fan, drops to below a set height.

    摘要翻译: 本发明的目的是提供一种板状工件输送装置,其具有设置在风扇上方的风扇,除尘过滤器和设置在除尘过滤器上方的板状多孔体。 通过形成空气可以在多孔构件和除尘过滤器之间积聚的室,可以抑制空气脉动。 此外,通过在多孔构件上设置支撑构件,当由来自风扇的空气支撑的板状工件下降到设定高度以下时,可以支撑板状工件并且可以避免板损坏。