Abstract:
In a sense amplifier circuit, a first transistor is electrically connected between a first bitline and a first node, a first inverter includes a first input terminal and a first output terminal connected to the first node, and a second inverter includes a second input terminal connected to a second node and a second output terminal. A second transistor is electrically connected between the first output terminal and the second node, and a third transistor is electrically connected between the second output terminal and the first node. A precharge circuit transfers a first voltage to the first and second nodes during a first period, and transfers a second voltage higher than the first voltage to the first and second nodes during a second period.
Abstract:
Disclosed is a method of fabricating a semiconductor device. The method comprises stacking an etching target layer, a first mask layer, an under layer, and a photoresist layer on a substrate, irradiating extreme ultraviolet (EUV) radiation on the photoresist layer to form a photoresist pattern, and performing a nitrogen plasma treatment on the photoresist pattern while using the first mask layer as an etching stop layer, the performing continuing until a top surface of the first mask layer is exposed. During the performing, the under layer is etched to form an under pattern below the photoresist pattern.
Abstract:
A memory device including a memory cell array region, includes, column selection signal lines formed in a first column conduction layer of the memory cell array region and extending in a column direction, global input-output data lines formed in a second column conduction layer of the memory cell array region different from the first column conduction layer and extending in the column direction and power lines formed in a shield conduction layer of the memory cell array region between the first column conduction layer and the second column conduction layer. The noises in the signal lines and the power lines may be reduced and performance of the memory device may be enhanced by forming the column selection signal lines and the global input-output data lines in different column conduction layers and forming the power lines in the shield conduction layer between the column conduction layers.
Abstract:
A semiconductor memory device is provided. A cell array includes a DRAM cell connected to one of a pair of bit lines. A bit line sense amplifier is coupled to the pair of bit lines. The bit line sense amplifier discharges a low-level bit line of the pair of bit lines toward a ground level and clamps the low-level bit line to a boosted sense ground voltage in response to a control signal. A sense amplifier control logic generates the control signal having a pulse interval. The low-level bit line is discharged toward the ground level for the pulse interval and after the pulse interval ends, the low-level bit line is clamped to the boosted sense ground voltage.
Abstract:
A semiconductor memory device includes active sections that include first and second impurity regions and are defined by a device isolation layer. Word lines extend in a first direction on the active sections. Intermediate dielectric patterns cover top surfaces of the word lines. Bit-line structures extend on the word lines in a second direction intersecting the first direction. Contact plugs are disposed between the bit-line structures and are connected to the second impurity regions. Data storage elements are disposed on the contact plugs. The intermediate dielectric pattern includes a capping part that covers the top surfaces of the word lines and is buried in the substrate. Fence parts extend between the bit-line structures from the capping part.
Abstract:
A semiconductor device having a cell area and a peripheral area includes a semiconductor substrate, a cell insulating isolation region delimiting a cell active region of the semiconductor substrate in the cell area, a word line disposed within the semiconductor substrate in the cell area, a bit line contact plug disposed on the cell active region, a bit line disposed on the bit line contact plug, a peripheral insulating isolation region delimiting a peripheral active region of the semiconductor substrate in the peripheral area, and a peripheral transistor including a peripheral transistor lower electrode and a peripheral transistor upper electrode. The bit line contact plug is formed at the same level in the semiconductor device as the peripheral transistor lower electrode, and the bit line electrode is formed at the same level in the semiconductor device as the peripheral transistor upper electrode.
Abstract:
The present disclosure relates to memory devices. An example memory device includes a memory cell region including a memory cell array is configured to store data, and an antifuse cell array including a plurality of antifuse bit lines, a plurality of antifuse word lines, and a plurality of program transistors that is electrically coupled to a first antifuse bit line among the plurality of antifuse bit lines and that are coupled in parallel with one another. The memory device includes a peripheral circuit region including an antifuse sense amplifier is configured to output one-time programmable (OTP) data stored in the plurality of program transistors.
Abstract:
In a sense amplifier circuit, a first transistor is electrically connected between a first bitline and a first node, a first inverter includes a first input terminal and a first output terminal connected to the first node, and a second inverter includes a second input terminal connected to a second node and a second output terminal. A second transistor is electrically connected between the first output terminal and the second node, and a third transistor is electrically connected between the second output terminal and the first node. A precharge circuit transfers a first voltage to the first and second nodes during a first period, and transfers a second voltage higher than the first voltage to the first and second nodes during a second period.
Abstract:
Disclosed are semiconductor devices and their fabrication methods. The method includes forming an etching target on a substrate including cell and key regions, forming lower and upper mask layers on the etching target, performing photolithography to form an upper mask pattern including a hole on the cell region, a preliminary key pattern on the key region, a bar pattern on the key region, and a trench between the preliminary key pattern and the bar pattern, forming pillar and dam patterns filling the hole and the trench, performing photolithography to remove the upper mask pattern except for the bar pattern, using the pillar pattern, the dam pattern, and the bar pattern as an etching mask to form a lower mask pattern, and using the lower mask pattern as an etching mask to form an etching target pattern on the cell region and a key pattern on the key region.
Abstract:
A semiconductor memory device includes a memory cell array and a refresh control circuit. The refresh circuit is configured to: perform a second burst refresh operation on the memory cell rows after the memory cell rows exit from a self refresh operation, and not perform the second burst refresh operation on the memory cell rows after the memory cell rows exit from a self refresh operation. Whether the refresh control circuit performs or does not perform the second burst refresh operation is based on a comparison between an entering time for the self refresh operation of the memory cell rows and a reference time.