公开(公告)号：US06438243B1

公开(公告)日：2002-08-20

申请号：US09085047

申请日：1998-05-27

申请人： Naoki Ikeuchi ,  Muneo Harada ,  Shoichi Fukui ,  Takahiko Oasa ,  Shigeru Ando ,  Kenji Tanaka

发明人： Naoki Ikeuchi ,  Muneo Harada ,  Shoichi Fukui ,  Takahiko Oasa ,  Shigeru Ando ,  Kenji Tanaka

IPC分类号： H04R2500

CPC分类号： H04R15/02

摘要： A vibration wave detector having a first diaphragm for receiving vibration waves, such as sound waves and so on, to be propagated in a medium, a resonant unit having a plurality of cantilever resonators each having such a length as to resonate at an individual predetermined frequency, a retaining rod for retaining the resonant unit, a second diaphragm positioned on the opposite side of the first diaphragm with respect to the retaining rod, and a vibration intensity detector for detecting the vibration intensity, for each predetermined frequency, of each of the resonators, by the vibration waves received by the first diaphragm and propagated to the resonant unit through the retaining rod.

摘要翻译： 一种振动波检测器，具有用于接收诸如声波等的振动波在介质中传播的第一振动膜，具有多个悬臂谐振器的谐振单元，每个悬臂谐振器具有以各个预定频率谐振的长度 ，用于保持谐振单元的保持杆，相对于保持杆定位在第一隔膜相对侧的第二隔膜，以及用于检测每个谐振器的每个预定频率的振动强度的振动强度检测器 通过由第一隔膜接收的振动波并通过保持杆传播到谐振单元。

公开(公告)号：US6079274A

公开(公告)日：2000-06-27

申请号：US316586

申请日：1999-05-21

申请人： Shigeru Ando ,  Muneo Harada

发明人： Shigeru Ando ,  Muneo Harada

IPC分类号： G01H1/06 ,  G01H11/08 ,  G01H11/00

CPC分类号： G01H11/08 ,  G01H1/06

摘要： A vibration wave detector in which: a plurality of resonator beams, each having a different length and being allowed to resonate at a specific frequency, are provided; a piezoresistor is installed in each resonator beam; and the piezoresistors are parallel-connected so that vibration is converted to an electric signal by the piezoresistors so as to output the sum of vibration waveforms at the respective resonator beams. It is possible to control a gain of a specific frequency band by changing a voltage to be applied to the parallel circuit or changing the resistance value of each piezoresistor.

摘要翻译： 一种振动波检测器，其特征在于：提供多个具有不同长度并被允许以特定频率谐振的谐振器束; 每个谐振器梁中安装一个压敏电阻; 并且压电电阻器并联连接，从而通过压阻电阻器将振动转换成电信号，以输出各个谐振器波束的振动波形之和。 可以通过改变施加到并联电路的电压或改变每个压敏电阻器的电阻值来控制特定频带的增益。

公开(公告)号：US06227054B1

公开(公告)日：2001-05-08

申请号：US09384202

申请日：1999-08-27

申请人： Shigeru Ando ,  Takaya Miyano ,  Toshiyuki Matsumoto ,  Muneo Harada

发明人： Shigeru Ando ,  Takaya Miyano ,  Toshiyuki Matsumoto ,  Muneo Harada

IPC分类号： G01D2100

CPC分类号： G01H11/06 ,  G01H3/08

摘要： A vibration wave detector, having a receiver for receiving vibration waves such as sound waves and so on to be propagated in a medium, a resonant unit having a plurality of cantilever resonators each having such a length as to resonate at an individual predetermined frequency, a retaining rod for retaining the resonant unit, a vibration intensity detector for detecting the vibration intensity, for each predetermined frequency, of each of the resonators, by the vibration waves received by the receiver and propagated to the resonant unit by way of the retaining rod.

摘要翻译： 一种振动波检测器，具有用于接收在介质中传播的诸如声波等的振动波的接收器，具有多个悬臂谐振器的谐振单元，每个悬臂谐振器具有以各个预定频率谐振的长度; 用于保持谐振单元的保持杆，振动强度检测器，用于通过接收器接收的振动波，通过保持杆传播到谐振单元，检测每个谐振器的每个预定频率的振动强度。

公开(公告)号：US6012334A

公开(公告)日：2000-01-11

申请号：US84096

申请日：1998-05-26

申请人： Shigeru Ando ,  Takaya Miyano ,  Toshiyuki Matsumoto ,  Muneo Harada

发明人： Shigeru Ando ,  Takaya Miyano ,  Toshiyuki Matsumoto ,  Muneo Harada

IPC分类号： B81B3/00 ,  G01H3/08 ,  G01H11/06 ,  G10L15/28 ,  G01D21/00 ,  G01H1/00

CPC分类号： G01H11/06 ,  G01H3/08

摘要： A vibration wave detector, having a receiver for receiving vibration waves such as sound waves and so on to be propagated in a medium, a resonant unit having a plurality of cantilever resonators each having such a length as to resonate at an individual predetermined frequency, a retaining rod for retaining the resonant unit, a vibration intensity detector for detecting the vibration intensity, for each predetermined frequency, of each of the resonators, by the vibration waves received by the receiver and propagated to the resonant unit by way of the retaining rod.

摘要翻译： 一种振动波检测器，具有用于接收在介质中传播的诸如声波等的振动波的接收器，具有多个悬臂谐振器的谐振单元，每个悬臂谐振器具有以各个预定频率谐振的长度; 用于保持谐振单元的保持杆，振动强度检测器，用于通过接收器接收的振动波，通过保持杆传播到谐振单元，检测每个谐振器的每个预定频率的振动强度。

公开(公告)号：US20150214088A1

公开(公告)日：2015-07-30

申请号：US13819033

申请日：2011-06-30

申请人： Ken Nakao ,  Michikazu Nakamura ,  Itaru Iida ,  Muneo Harada

发明人： Ken Nakao ,  Michikazu Nakamura ,  Itaru Iida ,  Muneo Harada

IPC分类号： H01L21/683 ,  B32B43/00 ,  H01L21/67 ,  B25J15/06

CPC分类号： H01L21/6835 ,  B25J15/0616 ,  B32B43/006 ,  H01L21/67011 ,  H01L21/67132 ,  H01L21/6836 ,  H01L21/6838 ,  H01L2221/68327 ,  Y10T156/1132 ,  Y10T156/1933

摘要： Disclosed is a pickup method in which a first suction unit is caused to approach and come into contact with a chip adhered to an adhesive sheet, and a second suction unit which is formed with a concavity on a contact surface configured to come into contact with the adhesive sheet is caused to approach and come into contact with the adhesive sheet in such a manner as to be opposite to the first suction unit. The adhesive sheet is sucked by the second suction unit that is in contact with the adhesive sheet, and a fluid is injected between the adhesive sheet and the chip by an injection unit. As a result, the adhesive sheet is detached from a portion of the chip opposite to the concavity, and in the state where the chip is being sucked by the first suction unit, the first suction unit is caused to be spaced away from the adhesive sheet that is being sucked by the second suction unit. In this manner, the chip is detached and picked up from the adhesive sheet.

摘要翻译： 公开了一种拾取方法，其中使第一吸引单元接近并与粘附到粘合片上的芯片接触;以及第二抽吸单元，其形成在接触表面上的与凹部接触的接触表面上的凹部 使粘合片以与第一抽吸单元相对的方式接近并与粘合片接触。 通过与粘合片接触的第二抽吸单元吸附粘合片，并且通过注射单元将流体注入粘合片和芯片之间。 结果，粘合片与芯片的与凹部相反的部分分离，并且在芯片被第一吸引单元吸附的状态下，使第一吸引单元与粘合片隔开 其被第二抽吸单元吸入。 以这种方式，将芯片从粘合片上分离并拾取。

公开(公告)号：US08470720B2

公开(公告)日：2013-06-25

申请号：US12934165

申请日：2009-03-16

申请人： Ken Nakao ,  Muneo Harada

发明人： Ken Nakao ,  Muneo Harada

IPC分类号： H01L21/31 ,  H01L21/469

CPC分类号： C23C14/12 ,  B05D1/60 ,  B05D3/0473 ,  B05D3/0493 ,  C23C14/243 ,  H01L21/02126 ,  H01L21/02312 ,  H01L21/312

摘要： A wall surface of a film forming container is heated to or above a vaporization temperature of a material monomer, which is used to form an organic film, by using an external heater formed along the wall surface of the film forming container, substrates are heated to a thermal polymerization reaction temperature by using an internal heater that is disposed apart from the external heater and near a substrate-supporting container in which the substrates are received, and the organic film is formed through thermal polymerization occurring on the substrates by supplying the material monomer into the film forming container.

摘要翻译： 通过使用沿着成膜容器的壁面形成的外部加热器将成膜容器的壁面加热至或高于用于形成有机膜的材料单体的蒸发温度，将基板加热至 通过使用与外部加热器隔离的内部加热器和接收基板的基板支撑容器附近的内部加热器，形成热聚合反应温度，并且通过在基板上进行热聚合而形成有机膜，所述热聚合通过供给材料单体 进入成膜容器。

公开(公告)号：US20070259506A1

公开(公告)日：2007-11-08

申请号：US11661349

申请日：2005-08-29

申请人： Tomohisa Hoshino ,  Hiroyuki Hashimoto ,  Muneo Harada

发明人： Tomohisa Hoshino ,  Hiroyuki Hashimoto ,  Muneo Harada

IPC分类号： G01R1/067 ,  H01L21/76

CPC分类号： G01R1/06716 ,  G01R1/06727 ,  Y10T29/49002

摘要： A method for manufacturing a probe needle having beams and a contactor placed on tips of the beams comprises preparing a Si wafer 20, forming a seed layer 21 on the Si wafer 20, and forming grooves in a desired shape of the beams on the seed layer 21 by patterning a photoresist 23. Subsequently, the grooves are filled up with metal-plated layers 24a, 24b to form the desired shape of beams.

摘要翻译： 用于制造具有光束的探针的方法和放置在光束的尖端上的接触器包括准备Si晶片20，在Si晶片20上形成晶种层21，并且在晶种层上形成期望形状的光束的凹槽 通过图案化光致抗蚀剂23。 随后，用金属镀层24a，24b填充凹槽以形成所需的梁形状。

公开(公告)号：US20070181928A1

公开(公告)日：2007-08-09

申请号：US11508141

申请日：2006-08-23

申请人： Yoshiki Yamanishi ,  Muneo Harada ,  Takahiro Kitano ,  Tatsuzo Kawaguchi ,  Yoshihiro Hirota ,  Kinji Yamada ,  Tomotaka Shinoda ,  Katsuya Okumura ,  Shuichi Kawano

发明人： Yoshiki Yamanishi ,  Muneo Harada ,  Takahiro Kitano ,  Tatsuzo Kawaguchi ,  Yoshihiro Hirota ,  Kinji Yamada ,  Tomotaka Shinoda ,  Katsuya Okumura ,  Shuichi Kawano

IPC分类号： H01L29/94

CPC分类号： H01L23/50 ,  H01G4/228 ,  H01G4/33 ,  H01L23/481 ,  H01L24/81 ,  H01L2224/81801 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01056 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/30105 ,  H05K1/162 ,  H05K3/002 ,  H05K2201/09509 ,  H05K2201/096 ,  H05K2201/10378

摘要： A capacitor having a high quality and a manufacturing method of the same are provided. A capacitor has a lower electrode formed on an oxide film, a dielectric layer formed on the lower electrode, an upper electrode formed so as to face the lower electrode with the dielectric layer between, and an upper electrode formed so as to cover the upper electrode, an opening portion of the upper electrode and an opening portion of the dielectric layer. By forming the upper electrode on the dielectric layer, it is possible to pattern the dielectric layer by using the upper electrode as a mask, and provide a capacitor having a high-quality dielectric layer by preventing impurity diffusion into the dielectric layer. By forming the upper electrode on the dielectric layer, it is possible to prevent the dielectric layer from being exposed to etching liquid, liquid developer, etc.

摘要翻译： 提供了具有高质量的电容器及其制造方法。 电容器具有形成在氧化膜上的下电极，形成在下电极上的电介质层，形成为与电极之间介电层相对的下电极的上电极和形成为覆盖上电极的上电极 ，上电极的开口部分和电介质层的开口部分。 通过在电介质层上形成上电极，可以通过使用上电极作为掩模对电介质层进行图案化，并且通过防止杂质扩散到电介质层中来提供具有高质量电介质层的电容器。 通过在电介质层上形成上部电极，可以防止电介质层暴露于蚀刻液体，液体显影剂等

公开(公告)号：US20070126041A1

公开(公告)日：2007-06-07

申请号：US11508204

申请日：2006-08-23

申请人： Tomotaka Shinoda ,  Kinji Yamada ,  Takahiro Kitano ,  Yoshiki Yamanishi ,  Muneo Harada ,  Tatsuzo Kawaguchi ,  Yoshihiro Hirota ,  Katsuya Okumura ,  Shuichi Kawano

发明人： Tomotaka Shinoda ,  Kinji Yamada ,  Takahiro Kitano ,  Yoshiki Yamanishi ,  Muneo Harada ,  Tatsuzo Kawaguchi ,  Yoshihiro Hirota ,  Katsuya Okumura ,  Shuichi Kawano

IPC分类号： H01L29/94 ,  H01L21/00

CPC分类号： H01L28/65 ,  H01L27/11507 ,  H01L28/55 ,  Y10T29/435

摘要： A dielectric film capacitor includes a lower electrode having an opening and formed of a material including platinum, a dielectric film provided over the lower electrode and including an oxide having an ABOx crystal structure, and an upper electrode provided over the dielectric film. The planar area of the lower electrode is 50% or more of the area of a formation region of the dielectric film. A dielectric film capacitor includes a lower electrode formed of a material including platinum and having a thickness of 10 to 100 nm, a dielectric film provided over the lower electrode and including an oxide having an ABOx crystal structure, and an upper electrode provided over the dielectric film.

摘要翻译： 电介质膜电容器包括具有开口并由包括铂的材料形成的下电极，设置在下电极上并包括具有ABOx晶体结构的氧化物的电介质膜和设置在电介质膜上的上电极。 下部电极的平面面积为电介质膜的形成区域的面积的50％以上。 电介质膜电容器包括由包括铂的材料形成的厚度为10至100nm的下电极，设置在下电极上并包括具有ABOx晶体结构的氧化物的电介质膜，以及设置在电介质上的上电极 电影。

公开(公告)号：US08716130B2

公开(公告)日：2014-05-06

申请号：US13643102

申请日：2011-04-04

申请人： Kippei Sugita ,  Kenji Matsuda ,  Hiroyuki Hashimoto ,  Muneo Harada

发明人： Kippei Sugita ,  Kenji Matsuda ,  Hiroyuki Hashimoto ,  Muneo Harada

IPC分类号： H01L21/44

CPC分类号： H01L21/283 ,  H01L21/0206 ,  H01L21/02063 ,  H01L21/31058 ,  H01L21/31138 ,  H01L21/76826 ,  H01L21/76828 ,  H01L21/76831 ,  H01L21/76898

摘要： The method includes forming a hole penetrating from one surface of a substrate to an electrode formed on the other surface of the substrate; forming an organic insulating film in the hole; removing at least a part of the organic insulating film formed in a bottom portion of the hole and not the organic insulating film formed on a side wall portion of the hole, to expose the electrode; cleaning an exposed surface of the electrode by using plasma of an inert gas; filling a conductive metal in the hole; removing at least a part of a surface of the organic insulating film by the reaction of oxygen plasma; and annealing the substrate in a dysoxidative atmosphere.

摘要翻译： 该方法包括形成从衬底的一个表面穿透到形成在衬底的另一个表面上的电极的孔; 在孔中形成有机绝缘膜; 除去形成在孔的底部的有机绝缘膜的至少一部分，而不是形成在孔的侧壁部上的有机绝缘膜，以露出电极; 通过使用惰性气体的等离子体清洁电极的暴露表面; 在孔中填充导电金属; 通过氧等离子体的反应去除有机绝缘膜的至少一部分表面; 并在氧化性气氛中退火底物。