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公开(公告)号:US10038032B2
公开(公告)日:2018-07-31
申请号:US15062672
申请日:2016-03-07
Applicant: Toshiba Memory Corporation
Inventor: Kiwamu Sakuma , Shosuke Fujii , Masumi Saitoh , Toshiyuki Sasaki
CPC classification number: H01L27/249 , H01L27/2454 , H01L29/66666 , H01L29/78642 , H01L45/085 , H01L45/1226 , H01L45/145 , H01L45/146
Abstract: According to one embodiment, a semiconductor memory device includes a plurality of first wirings, second wirings, a plurality of memory cells, selection gate transistors, and a third wiring. The first wirings are disposed in a first direction along a surface of a substrate and in a second direction intersecting with the surface of the substrate. The selection gate transistors are connected to respective one ends of the second wirings. The third wiring is connected in common to one end of the selection gate transistors. The selection gate transistor includes first to third semiconductor layers laminated on the third wiring and a gate electrode. The gate electrode is opposed to the second semiconductor layer in the first direction. The second semiconductor layer has a length in the first direction smaller than lengths of the first semiconductor layer and the third semiconductor layer in the first direction.
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公开(公告)号:US09997569B2
公开(公告)日:2018-06-12
申请号:US15227053
申请日:2016-08-03
Applicant: Toshiba Memory Corporation
Inventor: Marina Yamaguchi , Shosuke Fujii , Yuuichi Kamimuta , Takayuki Ishikawa , Masumi Saitoh
CPC classification number: H01L27/249 , H01L27/2463 , H01L27/2481 , H01L45/08 , H01L45/085 , H01L45/1233 , H01L45/1246 , H01L45/1253 , H01L45/145
Abstract: According to one embodiment, a memory device includes a first electrode, a second electrode, a first layer, and a second layer. The first electrode includes a first element. The first layer is provided between the first electrode and the second electrode. The first layer includes at least one of an insulator or a first semiconductor. The second layer is provided between the first layer and the second electrode. The second layer includes a first region and a second region. The second region is provided between the first region and the second electrode. The second region includes a second element. A standard electrode potential of the second element is lower than a standard electrode potential of the first element. A concentration of nitrogen in the first region is higher than a concentration of nitrogen in the second region.
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公开(公告)号:US09805927B2
公开(公告)日:2017-10-31
申请号:US15134969
申请日:2016-04-21
Applicant: Toshiba Memory Corporation
Inventor: Shosuke Fujii , Kiwamu Sakuma , Masumi Saitoh
IPC: H01L27/115 , H01L21/02 , H01L27/11524 , H01L27/1157 , H01L29/78 , H01L21/3105 , H01L21/311 , H01L21/3065 , H01L21/308 , H01L21/306 , H01L27/11519 , H01L27/11548 , H01L27/11551 , H01L27/11565 , H01L27/11575 , H01L27/11578
CPC classification number: H01L21/02238 , H01L21/02164 , H01L21/02255 , H01L21/02271 , H01L21/30604 , H01L21/3065 , H01L21/3081 , H01L21/31055 , H01L21/31116 , H01L21/31144 , H01L27/11519 , H01L27/11524 , H01L27/11548 , H01L27/11551 , H01L27/11565 , H01L27/1157 , H01L27/11575 , H01L27/11578 , H01L29/7843
Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a first structure having a first insulating layer, a semiconductor layer, and a second insulating layer stacked in this order in a first direction, the first structure extending in a second direction, memory cells provided on a surface of the semiconductor layer facing in a third direction, and connected in series in the second direction, and a third insulating layer contacting at least one of first and second end portions of the first structure in the second direction and not covering at least a part of an area between the first and second end portions. A lattice spacing of semiconductor atoms in the semiconductor layer in the second direction is larger than a lattice spacing of the semiconductor atoms in the semiconductor layer in the first direction.
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公开(公告)号:US10249818B1
公开(公告)日:2019-04-02
申请号:US15912613
申请日:2018-03-06
Applicant: Toshiba Memory Corporation
Inventor: Marina Yamaguchi , Shosuke Fujii , Riichiro Takaishi , Yuuichi Kamimuta , Shoichi Kabuyanagi , Masumi Saitoh
Abstract: According to one embodiment, a memory element includes a first layer, a second layer, and a third layer. The first layer is conductive. The second layer is conductive. The third layer includes hafnium oxide and is provided between the first layer and the second layer. The first layer includes a first region, a second region, and a third region. The first region includes a first element and a first metallic element. The first element is selected from a group consisting of carbon and nitrogen. The second region includes a second metallic element and is provided between the first region and the third layer. The third region includes titanium oxide and is provided between the second region and the third layer.
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公开(公告)号:US09865809B2
公开(公告)日:2018-01-09
申请号:US13967885
申请日:2013-08-15
Applicant: TOSHIBA MEMORY CORPORATION
Inventor: Hidenori Miyagawa , Akira Takashima , Shosuke Fujii
CPC classification number: H01L45/1253 , G11C13/0011 , G11C2213/33 , G11C2213/34 , G11C2213/77 , H01L27/101 , H01L27/2472 , H01L27/2481 , H01L45/085 , H01L45/12 , H01L45/1233 , H01L45/1266 , H01L45/145 , H01L45/148
Abstract: According to one embodiment, a nonvolatile resistance change element includes a first electrode, a second electrode and a first layer. The first electrode includes a metal element. The second electrode includes an n-type semiconductor. The first layer is formed between the first electrode and the second electrode and includes a semiconductor element. The first layer includes a conductor portion made of the metal element. The conductor portion and the second electrode are spaced apart.
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公开(公告)号:US10916654B2
公开(公告)日:2021-02-09
申请号:US16549540
申请日:2019-08-23
Applicant: Toshiba Memory Corporation
Inventor: Shosuke Fujii
IPC: H01L29/78 , H01L27/11 , G11C5/06 , H01L27/11524 , H01L27/1157 , H01L27/11582 , H01L27/11556 , G11C11/22 , H01L27/11585
Abstract: The semiconductor memory device of the embodiment includes a stacked body including interlayer insulating layers and gate electrode layers alternately stacked in a first direction; a semiconductor layer provided in the stacked body and extending in the first direction; a first insulating layer provided between the semiconductor layer and the gate electrode layers; conductive layers provided between the first insulating layer and the gate electrode layers; and second insulating layers provided between the conductive layers and the gate electrode layers and the second insulating layers containing ferroelectrics. Two of the conductive layers adjacent to each other in the first direction are separated by one of the interlayer insulating layers interposed between the two of the conductive layers, and a first thickness of one of the gate electrode layers in the first direction is smaller than a second thickness of one of the conductive layers in the first direction.
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公开(公告)号:US10784312B1
公开(公告)日:2020-09-22
申请号:US16564667
申请日:2019-09-09
Applicant: TOSHIBA MEMORY CORPORATION
Inventor: Shoichi Kabuyanagi , Shosuke Fujii , Masumi Saitoh
Abstract: A semiconductor memory device includes a first wiring extending in a first direction, a second wiring extending in a second direction, a variable resistance film provided between these, a third wiring extending in a third direction, a first semiconductor section connected to the first wiring and the third wiring, a first gate electrode facing the first semiconductor section, a contact connected to the second wiring, a fourth wiring further from the substrate than the contact is, a second semiconductor section connected to the contact and the fourth wiring, and a second gate electrode facing the second semiconductor section. The first semiconductor section, the first gate electrode, the second semiconductor section, and the second gate electrode respectively include a portion included in a cross section extending in the second direction and the third direction.
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公开(公告)号:US10153326B2
公开(公告)日:2018-12-11
申请号:US14958309
申请日:2015-12-03
Applicant: Toshiba Memory Corporation
Inventor: Masato Koyama , Harumi Seki , Shosuke Fujii , Hidenori Miyagawa
Abstract: According to one embodiment, a memory device includes a first conductive layer, a second conductive layer, a first insulating layer and a first layer. The first conductive layer includes a first metal capable of forming a compound with silicon. The second conductive layer includes at least one selected from a group consisting of tungsten, molybdenum, platinum, tungsten nitride, molybdenum nitride, and titanium nitride. The first insulating layer is provided between the first conductive layer and the second conductive layer. The first layer is provided between the first insulating layer and the second conductive layer. The first layer includes silicon.
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9.
公开(公告)号:US09954167B2
公开(公告)日:2018-04-24
申请号:US15266181
申请日:2016-09-15
Applicant: Toshiba Memory Corporation
Inventor: Shosuke Fujii , Takayuki Ishikawa
IPC: H01L45/00 , H01L27/105 , H01L49/00
CPC classification number: H01L45/14 , G11C13/0007 , H01L27/105 , H01L27/2436 , H01L45/00 , H01L45/04 , H01L45/12 , H01L45/1253 , H01L45/146 , H01L49/00
Abstract: According to one embodiment, a memory device includes a first layer, a second layer, and a third layer provided between the first layer and the second layer. The first layer includes first interconnections and a first insulating portion. The first interconnections extend in a first direction. The first insulating portion is provided between the first interconnections. The second layer includes a plurality of second interconnections and a second insulating portion. The second interconnections extend in a second direction crossing the first direction. The second insulating portion is provided between the second interconnections. The third layer includes a ferroelectric portion and a paraelectric portion. The ferroelectric portion and the paraelectric portion include hafnium oxide.
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公开(公告)号:US09842990B2
公开(公告)日:2017-12-12
申请号:US15387207
申请日:2016-12-21
Applicant: Toshiba Memory Corporation
Inventor: Marina Yamaguchi , Shosuke Fujii , Masumi Saitoh , Hiromichi Kuriyama , Takuya Konno
CPC classification number: H01L45/1206 , G11C13/0004 , G11C13/0007 , G11C13/0097 , H01L27/2436 , H01L45/085 , H01L45/1266 , H01L45/1273 , H01L45/141 , H01L45/145 , H01L45/165 , H01L45/1675
Abstract: According to one embodiment, a semiconductor memory device includes a semiconductor layer, a gate electrode, a metal containing portion, and an insulating portion. The semiconductor layer includes a first region and a second region. The second region has at least one of a region being amorphous or a region having a crystallinity lower than a crystallinity of the first region. The gate electrode is apart from the first region in a first direction. The first direction crosses a second direction connecting the first region and the second region. The metal containing portion is apart from the second region in the first direction. At least a part of the metal containing portion overlaps the gate electrode in the second direction. The insulating portion is provided between the gate electrode and the first region and between the metal containing portion and the second region.
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