公开(公告)号：US20110303361A1

公开(公告)日：2011-12-15

申请号：US13153796

申请日：2011-06-06

申请人： Tadahiro OHMI ,  Yasuyuki Shirai ,  Hirohisa Imada ,  Tsutomu Yoshida

发明人： Tadahiro OHMI ,  Yasuyuki Shirai ,  Hirohisa Imada ,  Tsutomu Yoshida

IPC分类号： C23F1/00 ,  B65D51/00

CPC分类号： H01J37/32513 ,  C23C16/4409

摘要： Because an O-ring of synthetic resin is pyrolyzed in the atmosphere at a high temperature of 150° C. or more, the airtightness cannot be maintained. In an outside air shut-off container according to the present invention, an inert gas is supplied between an O-ring, which hermetically seals a process chamber and a cover member, and the outside air while a gas passage formed between the O-ring and the outside air is covered with a sealing cover. Additionally, an aluminum oxide layer is formed on a contact surface of the O-ring to increase the pyrolysis temperature of the O-ring.

摘要翻译： 因为合成树脂的O型圈在大气中在150℃以上的高温下被热解，所以不能保持气密性。 在根据本发明的外部空气切断容器中，在形成在O形环之间的气体通道的同时，将惰性气体供给到气密地密封处理室和盖构件的O形环与外部空气之间 并且外部空气被密封盖覆盖。 此外，在O形环的接触表面上形成氧化铝层以增加O形环的热解温度。

公开(公告)号：US20100166956A1

公开(公告)日：2010-07-01

申请号：US12715222

申请日：2010-03-01

申请人： Tadahiro OHMI ,  Yasuyuki SHIRAI ,  Akihiro MORIMOTO

发明人： Tadahiro OHMI ,  Yasuyuki SHIRAI ,  Akihiro MORIMOTO

IPC分类号： C23C16/44 ,  C23C16/00

CPC分类号： C23C14/564

摘要： It has been found that an organic component is emitted from a member such as a crucible or a gasket constituting an apparatus for vacuum treatment and an element is contaminated with said organic component emitted, and, as a result, members of the apparatus for vacuum treatment are subjected to a treatment for reducing the emission of an organic component. For example, a crucible is made from a material having a reduced catalytic activity to a material for use in the vapor deposition in question and a gasket is used after a treatment for reducing the bleeding of an organic component or is made from a material containing a reduced amount of an organic component.

摘要翻译： 已经发现，有机组分从诸如坩埚或构成真空处理装置的垫圈的构件发射，并且元件被所发射的有机组分污染，结果是真空处理装置的构件 经受用于减少有机组分的发射的处理。 例如，坩埚由对所使用的气相沉积中使用的材料具有降低的催化活性的材料制成，并且在用于减少有机组分渗出的处理之后使用垫圈，或者由含有 减少有机成分的量。

公开(公告)号：US20090218044A1

公开(公告)日：2009-09-03

申请号：US12393724

申请日：2009-02-26

申请人： Tadahiro OHMI ,  Masaki HIRAYAMA ,  Tetsuya GOTO ,  Yasuyuki SHIRAI ,  Masafumi KITANO ,  Kohei WATANUKI ,  Takaaki MATSUOKA ,  Shigemi MURAKAWA

发明人： Tadahiro OHMI ,  Masaki HIRAYAMA ,  Tetsuya GOTO ,  Yasuyuki SHIRAI ,  Masafumi KITANO ,  Kohei WATANUKI ,  Takaaki MATSUOKA ,  Shigemi MURAKAWA

IPC分类号： H01L21/306 ,  C23C16/513 ,  B32B9/04 ,  B05D5/06

CPC分类号： H01J37/32192 ,  H01J37/32238

摘要： A conventional microwave plasma processing apparatus, even when krypton (Kr) is used as a plasma-generation gas, can only obtain an oxide film or a nitride film having the same level of characteristics as those obtained when a rare gas such as argon (Ar) is used as a plasma-generation gas. Accordingly, instead of forming a dielectric window of a microwave plasma processing apparatus with only a ceramic member, a planarization film capable of obtaining a stoichiometric SiO2 composition by thermal treatment is coated on one of a plurality of surfaces of the ceramic member, the surface facing a process space, and then thermally-treated, thereby forming a planarization insulation film having a very flat and dense surface. A corrosion-resistant film is formed on the planarization insulation film.

摘要翻译： 传统的微波等离子体处理装置即使使用氪（Kr）作为等离子体产生气体，也只能得到与稀有气体例如氩气（Ar）相同的特性水平的氧化膜或氮化物膜 ）用作等离子体发生气体。 因此，代替形成仅具有陶瓷构件的微波等离子体处理装置的介电窗口，可以通过热处理获得化学计量的SiO 2组成的平坦化膜涂覆在陶瓷构件的多个表面中的一个表面上， 处理空间，然后热处理，从而形成具有非常平坦和致密表面的平坦化绝缘膜。 在平坦化绝缘膜上形成耐腐蚀膜。

公开(公告)号：US20130189423A1

公开(公告)日：2013-07-25

申请号：US13556193

申请日：2012-07-23

申请人： Tadahiro OHMI ,  Shozo Nakayama ,  Hironori Ito

发明人： Tadahiro OHMI ,  Shozo Nakayama ,  Hironori Ito

IPC分类号： C23C16/44

CPC分类号： C23C16/44 ,  C23C14/12 ,  C23C14/228 ,  C23C14/243 ,  C23C14/56 ,  C23C14/562 ,  H01L51/0008 ,  H01L51/56

摘要： Disclosed is a method for prediction of a film material such as a raw material for organic EL. In the method, a film material having an evaporation rate (V (%)) represented by the formula below can be predicted based on the values of the constant (Ko) and the activation energy (Ea). V=(Ko/P)×e−Ea/kT wherein Ko represents a constant (%·Torr), P represents a pressure (Torr), Ea represents an activation energy (eV), k represents a Boltzmann constant, and T represents an absolute temperature.

摘要翻译： 公开了一种用于预测有机EL原料的薄膜材料的方法。 在该方法中，可以基于常数（Ko）和活化能（Ea）的值来预测具有由下式表示的蒸发速率（V（％））的膜材料。 V =（Ko / P）×e-Ea / kT其中Ko表示常数（％·Torr），P表示压力（Torr），Ea表示活化能（eV），k表示玻尔兹曼常数，T表示 绝对温度。

公开(公告)号：US20130017686A1

公开(公告)日：2013-01-17

申请号：US13620497

申请日：2012-09-14

申请人： Tadahiro OHMI ,  Kazuhide INO ,  Takahiro ARAKAWA

发明人： Tadahiro OHMI ,  Kazuhide INO ,  Takahiro ARAKAWA

IPC分类号： H01L21/3065 ,  C23C16/511

CPC分类号： H01L22/10 ,  H01J37/32192 ,  H01L21/67017 ,  H01L21/67069

摘要： A plasma processing apparatus for processing an object to be processed using a plasma. The apparatus includes a processing chamber defining a processing cavity for containing an object to be processed and a process gas therein, a microwave radiating antenna having a microwave radiating surface for radiating a microwave in order to excite a plasma in the processing cavity, and a dielectric body provided so as to be opposed to the microwave radiating surface, in which the distance D between the microwave radiating surface and a surface of the dielectric body facing away from the microwave radiating surface, which is represented with the wavelength of the microwave being a distance unit, is determined to be in the range satisfying the inequality 0.7×n/4≦D≦1.3×n/4 (n being a natural number).

摘要翻译： 一种等离子体处理装置，用于使用等离子体处理待处理物体。 该装置包括：处理室，其限定用于容纳待处理物体和处理气体的处理腔;微波辐射天线，具有用于辐射微波的微波辐射表面，以激发处理空腔中的等离子;以及电介质 本体设置为与微波辐射表面相对，其中以微波的波长表示的微波辐射表面和远离微波辐射表面的电介质体的表面之间的距离D为距离 单位确定在满足不等式0.7×n / 4＆nlE; D＆nlE; 1.3×n / 4（n为自然数）的范围内。

公开(公告)号：US20120292743A1

公开(公告)日：2012-11-22

申请号：US13565868

申请日：2012-08-03

申请人： Tadahiro OHMI ,  Akinobu TERAMOTO ,  Tomoyuki SUWA

发明人： Tadahiro OHMI ,  Akinobu TERAMOTO ,  Tomoyuki SUWA

IPC分类号： F27B9/00 ,  H01L29/06 ,  F26B7/00

CPC分类号： H01L21/3247 ,  F27B17/0025 ,  H01L21/02052 ,  H01L21/02238 ,  H01L21/02252 ,  H01L21/302 ,  H01L21/67017 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/67757

摘要： In a silicon wafer which has a surface with a plurality of terraces formed stepwise by single-atomic-layer steps, respectively, no slip line is formed.

摘要翻译： 在具有分别通过单原子层阶梯逐步形成的多个台阶的表面的硅晶片中，不形成滑移线。

公开(公告)号：US20120237684A1

公开(公告)日：2012-09-20

申请号：US13465665

申请日：2012-05-07

申请人： Tadahiro OHMI ,  Naoki Tanahashi ,  Keiichi Nii

发明人： Tadahiro OHMI ,  Naoki Tanahashi ,  Keiichi Nii

IPC分类号： B05D3/04

CPC分类号： C08J7/126 ,  C08J2365/00 ,  Y10T428/24612 ,  Y10T428/24628 ,  Y10T428/31504 ,  Y10T428/31855

摘要： A plastic member, for example, a hydrocarbon-based transparent polymer molded product is subjected to fluorination processing in a fluorine gas within a reaction device 8 to fluorinate only a surface layer thereof. Thus, a refractive index can be lowered, a surface reflection can be lowered, and light transmittance of a base material can be improved.

摘要翻译： 将例如烃类透明聚合物成型体的塑料部件在反应装置8内的氟气中进行氟化处理，仅氟化其表面层。 因此，可以降低折射率，可以降低表面反射，并且可以提高基材的透光率。

公开(公告)号：US20120211465A1

公开(公告)日：2012-08-23

申请号：US13459628

申请日：2012-04-30

申请人： Akihiro SATO ,  Masahiro SASAKI ,  Tadahiro OHMI ,  Akihiro MORIMOTO

发明人： Akihiro SATO ,  Masahiro SASAKI ,  Tadahiro OHMI ,  Akihiro MORIMOTO

IPC分类号： H05K3/00 ,  B32B37/14 ,  B32B38/08 ,  B32B38/10

CPC分类号： H05K3/4691 ,  C23F1/02 ,  C23F1/18 ,  C23F4/00 ,  C23F4/04 ,  H05K3/064 ,  H05K3/243 ,  H05K3/4652 ,  H05K2201/09736 ,  H05K2203/0369 ,  Y10T29/49117 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T156/10

摘要： A flex-rigid printed wiring board is provided which can retain flexibility of a flexible portion while increasing durability of the flexible portion against folding, and can ensure conduction in a rigid portion, and a method of manufacturing the printed wiring board. The flex-rigid printed wiring board includes a conductor layer provided on at least one face of a base film, one region of the wiring board containing the base film being a rigid region, an another region containing the base film being a flexible region. The average thickness “tf” of the conductor layer on the base film formed in the flexible region and the average thickness “tR” of the conductor layer on the base film formed in the rigid region satisfy the relationship of tf

摘要翻译： 提供柔性刚性印刷线路板，其可以保持柔性部分的柔性，同时增加柔性部分的折叠的耐久性，并且可以确保刚性部分中的导电性，以及制造印刷线路板的方法。 柔性刚性印刷电路板包括设置在基膜的至少一个面上的导体层，所述布线基板的一个区域包含基膜为刚性区域，另一区域包含基膜为柔性区域。 形成在柔性区域的基底膜上的导体层的平均厚度“tf”和形成在刚性区域中的基底膜上的导体层的平均厚度“tR”满足tf

公开(公告)号：US20120186638A1

公开(公告)日：2012-07-26

申请号：US13188848

申请日：2011-07-22

申请人： Tadahiro OHMI

发明人： Tadahiro OHMI

IPC分类号： H01L31/075

CPC分类号： H01L31/022466 ,  H01L31/022483 ,  H01L31/028 ,  H01L31/03682 ,  H01L31/03762 ,  H01L31/03921 ,  H01L31/046 ,  H01L31/052 ,  H01L31/075 ,  Y02E10/546 ,  Y02E10/547 ,  Y02E10/548

摘要： Provided is a photoelectric conversion element that has an nip structure formed of amorphous silicon and that is improved in energy conversion efficiency by a structure in which an n+-type a-Si layer is in contact with a transparent electrode formed by an n+-type ZnO layer. This makes it possible to realize photoelectric conversion elements and a solar cell module or facility with large area and high power with an influence on the global resources minimized.

摘要翻译： 提供一种具有由非晶硅形成的压区结构的光电转换元件，其通过n +型a-Si层与由n +型ZnO形成的透明电极接触的结构而提高能量转换效率 层。 这使得可以实现光电转换元件和具有大面积和大功率的太阳能电池模块或设备，从而影响全球资源的最小化。

公开(公告)号：US20130307404A1

公开(公告)日：2013-11-21

申请号：US13934488

申请日：2013-07-03

申请人： Tadahiro OHMI ,  Akihiro MORIMOTO

发明人： Tadahiro OHMI ,  Akihiro MORIMOTO

IPC分类号： H01J9/395 ,  H01J21/00

CPC分类号： H01J9/395 ,  H01J7/02 ,  H01J9/38 ,  H01J9/385 ,  H01J17/20 ,  H01J21/00 ,  H01J37/18 ,  H01J61/20 ,  H01J61/24

摘要： With respect to a vacuum tube having a reduced pressure vessel containing an electric discharge gas sealed therein, problems such as the lowering of discharge efficiency owing to an organic material, moisture or oxygen remaining in the reduced pressure vessel have taken place conventionally. It has been now found that the selection of the number of water molecules, the number of molecules of an organic gas and the number of oxygen molecules remaining in the reduced pressure vessel, in a relation with the number of molecules of a gas contributing the electric discharge allows the reduction of the adverse effect by the above-mentioned remaining gas. Specifically, the selection of the number of molecules of the above electric discharge gas being about ten times that of the above-mentioned remaining gas or more can reduce the adverse effect by the above-mentioned remaining gas.

摘要翻译： 对于具有密封在其中的放电气体的减压容器的真空管，常规地发生诸如由于有机材料引起的排出效率降低，残留在减压容器中的水分或氧气的问题。 现在已经发现，选择水分子的数量，有机气体的分子数和残留在减压容器中的氧分子的数量与导致电气的气体的分子数的关系 放电允许通过上述剩余气体减少不利影响。 具体而言，选择上述放电气体的分子数为上述剩余气体的10倍以上的分子数量，可以减少上述剩余气体的不利影响。