公开(公告)号：US06726814B2

公开(公告)日：2004-04-27

申请号：US10056092

申请日：2002-01-28

申请人： Tadahiro Ohmi ,  Kazuyuki Harada ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Kazuyuki Harada ,  Nobuyoshi Tanaka

IPC分类号： C23C1434

CPC分类号： C23C14/10 ,  C23C14/0694 ,  C23C14/081 ,  C23C14/083 ,  G02B1/115

摘要： A process for producing an optical article includes laminating a first optically transparent thin layer and a second optically transparent thin layer having a higher refractive index than that of the first optically transparent thin layer on a surface of a substrate. At least one of the first and second optically transparent thin layers is deposited by sputtering using a sputtering gas comprising atoms of at least one selected from the group consisting of krypton, xenon and radon.

摘要翻译： 一种光学制品的制造方法，包括在基板的表面上层叠第一光学透明薄膜和具有比第一光学透明薄层的折射率高的折射率的第二光学透明薄层。 使用包含选自氪，氙和氡中的至少一种的原子的溅射气体通过溅射沉积第一和第二光学透明薄层中的至少一个。

公开(公告)号：US5981075A

公开(公告)日：1999-11-09

申请号：US598807

申请日：1996-02-09

申请人： Tadahiro Ohmi ,  Kazuyuki Harada ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Kazuyuki Harada ,  Nobuyoshi Tanaka

IPC分类号： G02B5/28 ,  C23C14/06 ,  C23C14/08 ,  C23C14/10 ,  G02B1/11 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01S3/101 ,  B32B9/04

CPC分类号： C23C14/10 ,  C23C14/0694 ,  C23C14/081 ,  C23C14/083 ,  G02B1/115

摘要： An optical article includes an optical thin film laminated on a surface of a substrate. The optical thin film includes atoms of at least one selected from the group consisting of krypton, xenon and radon. The optical thin film is a film of oxides or fluorides and the content of the atoms is within 0.5 atomic ppm to 1 atomic %.

摘要翻译： 光学制品包括层叠在基板的表面上的光学薄膜。 光学薄膜包括选自氪，氙和氡中的至少一种的原子。 光学薄膜是氧化物或氟化物的膜，原子的含量在0.5原子ppm〜1原子％的范围内。

公开(公告)号：US06372646B1

公开(公告)日：2002-04-16

申请号：US09386358

申请日：1999-08-31

申请人： Tadahiro Ohmi ,  Kazuyuki Harada ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Kazuyuki Harada ,  Nobuyoshi Tanaka

IPC分类号： H01L21302

摘要： An exposure apparatus having an illumination light source and a stage for an exposed object to be mounted thereon, in which at least one of an illumination optical system and a projection optical system includes a plurality of optical articles in each of which a first optically transparent thin layer and a second optically transparent thin layer having a higher refractive index than that of the first optically transparent thin layer are laminated on a surface of a substrate. At least one of the first and second optically transparent thin layers includes a layer of oxides or fluorides and atoms of at least one selected from the group consisting of krypton, xenon and radon, in which the content of the atoms is within a range of from 0.5 atomic ppm to 1 atomic %, inclusive.

公开(公告)号：US06929830B2

公开(公告)日：2005-08-16

申请号：US10449106

申请日：2003-06-02

申请人： Goushu Tei ,  Nobuyoshi Tanaka ,  Tadahiro Ohmi ,  Masaki Hirayama

发明人： Goushu Tei ,  Nobuyoshi Tanaka ,  Tadahiro Ohmi ,  Masaki Hirayama

IPC分类号： C23C16/44 ,  C23C16/455 ,  C23C16/511 ,  H01J37/32 ,  B05D5/06 ,  C03C17/245 ,  H05H1/46

CPC分类号： C23C16/45565 ,  C23C16/511 ,  H01J37/32192

摘要： A method for treating a non-planar surface of an object by employing a plasma treatment apparatus in which a microwave dielectric has a non-planar surface corresponding to the surface of the object. A method for forming an optical part is also provided.

摘要翻译： 一种通过采用等离子体处理装置处理物体的非平面表面的方法，其中微波介电体具有对应于物体表面的非平面表面。 还提供了一种用于形成光学部件的方法。

公开(公告)号：US06690702B1

公开(公告)日：2004-02-10

申请号：US09528183

申请日：2000-03-17

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka ,  Masaki Hirayama

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka ,  Masaki Hirayama

IPC分类号： H01S304

CPC分类号： H01S3/225 ,  H01S3/03 ,  H01S3/034 ,  H01S3/036 ,  H01S3/0973

摘要： In an excimer laser oscillation apparatus including a laser chamber (20) constituted by a laser tube (2) for storing a laser gas containing a gas mixture of at least one inert gas selected from the group consisting of Kr, Ar, and Ne, He and F2 gas, and an optical resonator consisting of a pair of reflection mirrors (5, 6) arranged to sandwich the laser chamber (20) therebetween, the inner surface of the laser chamber (20) for storing the laser gas has a reflection-free surface with respect to light of a desired wavelength of 248 nm, 193 nm, or 157 nm, and the uppermost surface of the inner surface consists of a fluoride, and a means (waveguide 1) for introducing a microwave for exciting the laser gas in the laser chamber (20) is prepared. With this arrangement, an excimer laser oscillation apparatus, an oscillation method, and an exposure apparatus can be provided, which can reduce the load on the lens material and its surface, can simplify the mirror or laser scanning control system, and are satisfactorily used in mass production since the service life of an excimer laser can be sufficiently prolonged.

摘要翻译： 在包括由激光管（2）构成的激光室（20）的准分子激光振荡装置中，所述激光管（2）用于存储含有选自Kr，Ar和Ne的至少一种惰性气体的气体混合物的激光气体，He 和F2气体，以及由设置成将激光室（20）夹在其间的一对反射镜（5,6）构成的光谐振器，用于存储激光气体的激光室（20）的内表面具有反射 - 相对于248nm，193nm或157nm的所需波长的光的自由表面，并且内表面的最上表面由氟化物组成，并且用于引入微波激励激光气体的装置（波导1） 在激光室（20）中。 通过这种布置，可以提供准分子激光振荡装置，振荡方法和曝光装置，其可以减少透镜材料及其表面上的负载，可以简化镜子或激光扫描控制系统，并且令人满意地使用 由于准分子激光器的使用寿命可以充分延长，因此大量生产。

公开(公告)号：US06650678B1

公开(公告)日：2003-11-18

申请号：US09512075

申请日：2000-02-24

申请人： Tadahiro Ohmi ,  Nobumasa Suzuki ,  Hiroshi Ohsawa ,  Nobuyoshi Tanaka ,  Toshikuni Shinohara ,  Masaki Hirayama

发明人： Tadahiro Ohmi ,  Nobumasa Suzuki ,  Hiroshi Ohsawa ,  Nobuyoshi Tanaka ,  Toshikuni Shinohara ,  Masaki Hirayama

IPC分类号： A01S3097

CPC分类号： H01S3/0315 ,  G03F7/70383 ,  H01S3/0385 ,  H01S3/0975 ,  H01S3/225

摘要： A plasma is excited uniformly as a whole over the length of each slot. A laser oscillating apparatus is designed to excite a laser gas in a laser tube (2) by introducing electromagnetic waves into the laser tube through a plurality of slots (10) formed in a waveguide wall and generate a laser beam by resonating the light generated from the laser gas. A least one electrode (13) is placed near the slot (10). By giving a predetermined current density to the electrode (13), the intensity distribution of light generated from the laser gas above the slot (10) is controlled.

摘要翻译： 等离子体在每个槽的长度上作为整体被均匀地激发。 激光振荡装置被设计成通过在波导壁中形成的多个槽（10）将电磁波引入到激光管中来激发激光管（2）中的激光气体，并通过使从 激光气体。 至少一个电极（13）放置在槽（10）附近。 通过向电极（13）施加预定的电流密度，控制从狭槽（10）上方的激光气体产生的光的强度分布。

公开(公告)号：US06258244B1

公开(公告)日：2001-07-10

申请号：US09076834

申请日：1998-05-13

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka ,  Takeo Ushiki ,  Toshikuni Shinohara ,  Takahisa Nitta

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka ,  Takeo Ushiki ,  Toshikuni Shinohara ,  Takahisa Nitta

IPC分类号： C25D900

CPC分类号： H01L21/3063 ,  C25D11/005 ,  C25D11/32 ,  H01L21/76256

摘要： In order to effectively remove gas molecules of a by-product in a chemical reaction in a solution so as to achieve high efficiency, high rate, and uniformity of the chemical reaction in the solution and in order to realize formation of a semiconductor substrate applicable to production of SOI structure and realize formation of a semiconductor substrate in which a light-emitting element or a gas sensor can be formed, on the basis of an inexpensive silicon substrate, the chemical reaction is performed while the concentration of a gas dissolved in a reaction solution in a reaction vessel is always controlled to be not more than the solubility thereof during the reaction.

摘要翻译： 为了有效地除去溶液中的化学反应中副产物的气体分子，以达到溶液中化学反应的高效率，高速率和均匀性，并且为了实现适用于 制造SOI结构，并且在廉价的硅衬底的基础上实现可以形成发光元件或气体传感器的半导体衬底的形成，同时在溶解在反应中的气体的浓度进行化学反应 反应容器中的溶液总是控制在不大于其在反应期间的溶解度。

公开(公告)号：US06255731B1

公开(公告)日：2001-07-03

申请号：US09123364

申请日：1998-07-28

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka ,  Takeo Ushiki ,  Toshikuni Shinohara ,  Takahisa Nitta

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka ,  Takeo Ushiki ,  Toshikuni Shinohara ,  Takahisa Nitta

IPC分类号： H01L2348

CPC分类号： H01L21/76251 ,  H01L21/2007 ,  H01L23/4825 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/00

摘要： A semiconductor substrate adapted to giga-scale integration (GSI) comprises a support, at least the surface of which is made of semiconductor, an electroconductive material layer, an insulating layer and a semiconductor layer arranged sequentially in the above order. The electroconductive material layer has at least in part thereof an electroconductive reacted layer obtained by causing two metals, a metal and a semiconductor, a metal and a metal-semiconductor compound, a semiconductor and a metal-semiconductor compound, or two metal-semiconductor compounds to react each other. An electroconductive reaction terminating layer that is made of a material that does not react with the reacted layer is arranged between the reacted layer and the insulating layer or the support.

摘要翻译： 适用于千兆级集成（GSI）的半导体衬底包括至少其表面由半导体制成的支撑体，导电材料层，绝缘层和按上述顺序排列的半导体层。 导电材料层至少部分地具有通过使两种金属，金属和半导体，金属和金属 - 半导体化合物，半导体和金属 - 半导体化合物或两种金属 - 半导体化合物形成的导电反应层 互相反应。 在反应层和绝缘层或载体之间设置由不与反应层反应的材料制成的导电反应终止层。

公开(公告)号：US5128735A

公开(公告)日：1992-07-07

申请号：US746812

申请日：1991-08-15

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

IPC分类号： H01L27/146 ,  H01L31/11

CPC分类号： H01L31/1105 ,  H01L27/14681

摘要： A photoelectric converter comprising a photosensor element, a typical example of the photosensor element comprising: a transistor including an n or n.sup.+ collector region an n.sup.- region disposed contiguous to the collector region, a p base region disposed contiguous to the n.sup.- region an n.sup.+ emitter region disposed contiguous to the base region, and a first electrode connected to the emitter region; and a storage capacitor constituted by the base region, an electrically insulating region disposed contiguous to the base region, and a second electrode connected to the electrically insulting region; whereby the base region is held in a floating state. A photogenerated charge is stored in the base region by controlling the potential of the base region and an electric signal corresponding to the charge stored in the base region is subsequently output from the first electrode.

摘要翻译： 一种光电转换器，包括光电传感器元件，所述光电传感器元件的典型示例包括：晶体管，包括n或n +集电极区域，与集电极区域邻接设置的n-区域，邻接于n区域的p基极区域，n +发射极 区域，以及与发射极区域连接的第一电极; 以及由所述基极区域构成的保持电容器，与所述基极区域邻接设置的电绝缘区域和与所述电绝缘区域连接的第二电极; 由此基部区域保持在浮置状态。 通过控制基极区域的电位，在基极区域中存储光生电荷，随后从第一电极输出对应于存储在基极区域中的电荷的电信号。

公开(公告)号：US4847668A

公开(公告)日：1989-07-11

申请号：US275673

申请日：1988-11-23

申请人： Shigetoshi Sugawa ,  Nobuyoshi Tanaka ,  Toshiji Suzuki ,  Tadahiro Ohmi ,  Tadanori Harada

发明人： Shigetoshi Sugawa ,  Nobuyoshi Tanaka ,  Toshiji Suzuki ,  Tadahiro Ohmi ,  Tadanori Harada

IPC分类号： H01L27/146 ,  H04N3/15

CPC分类号： H04N3/1568 ,  H01L27/14681

摘要： A photoelectric transducer device controls a potential of a control electrode region of a semiconductor transistor through a capacitor to perform a storage operation for storing carriers generated upon light excitation of the control electrode region, a read operation for reading a signal from a main electrode region of the semiconductor transistor, the signal being controlled by a storage voltage generated by storage of the carriers, and a refresh operation for electrically neutralizing the carriers stored in the control electrode region. A semiconductor reigon having the same conductivity type as that of the main electrode region and having an impurity concentration lower than that of the main electrode region is formed in the control electrode region independently of the main electrode region. A photoelectric transducer device including a semiconductor region. Two main electrodes and a control electrode are formed between the main electrodes. A capacitor is provided for controlling a potential of the control electrode in a floating state. The photoelectric transducer device is adapted to control the potential of the control electrode in the floating state through the capacitor to store carriers generated by electromagnetic waves incident on the semiconductor region. Control means is provided for controlling the potential of the control electrode through the capacitor to electrically neutralize the carriers and means for injecting carriers into the control electrode immediately prior to electrical neutralization of the carriers by the control means is provided. '