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公开(公告)号:US20190109247A1
公开(公告)日:2019-04-11
申请号:US15728417
申请日:2017-10-09
Applicant: Teledyne Scientific & Imaging, LLC
Inventor: Majid Zandian
IPC: H01L31/0352 , H01L31/0216 , H01L31/0296 , H01L31/0336 , H01L31/18
CPC classification number: H01L31/035281 , G01J1/42 , H01L31/02161 , H01L31/02966 , H01L31/0336 , H01L31/03529 , H01L31/1032 , H01L31/1832 , H01L31/1868 , H01L31/1892
Abstract: A light sensor includes an N-type semiconductor. The light sensor further includes a P-type semiconductor stacked on at least a portion of the N-type semiconductor, partially defining a trench extending into the P-type semiconductor, and having a trench portion aligned with the trench and extending farther into the N-type semiconductor than other portions of the P-type semiconductor. The light sensor also includes a passivation layer stacked on and contacting the P-type semiconductor and partially defining the trench that extends through the passivation layer and into the P-type semiconductor. The light sensor further includes an electrical contact stacked on the passivation layer, positioned within the trench, and extending through the passivation layer into the P-type semiconductor such that photons received by the N-type semiconductor generate photocurrent resulting in a voltage at the electrical contact.
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公开(公告)号:US11581355B2
公开(公告)日:2023-02-14
申请号:US17060575
申请日:2020-10-01
Applicant: Teledyne Scientific & Imaging, LLC
Inventor: Majid Zandian
IPC: H01L27/146 , H01L33/58 , H01L31/0232
Abstract: A curved FPA comprises an array of detectors, with mesas etched between the detectors such that they are electrically and physically isolated from each other. Metallization deposited at the bottom of the mesas reconnects the detectors electrically and thereby provides a common ground between them. Strain induced by bending the FPA into a curved shape is across the metallization and any backfill epoxy, rather than across the detectors. Indium bumps are evaporated onto respective detectors for connection to a readout integrated circuit (ROIC). An ROIC coupled to the detectors is preferably thinned, and the backside of the ROIC may also include mesas such that the ROIC is reticulated.
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公开(公告)号:US10553735B2
公开(公告)日:2020-02-04
申请号:US15728417
申请日:2017-10-09
Applicant: Teledyne Scientific & Imaging, LLC
Inventor: Majid Zandian
IPC: H01L31/0352 , H01L31/0216 , H01L31/0296 , H01L31/0336 , H01L31/18 , H01L31/103 , G01J1/42
Abstract: A light sensor includes an N-type semiconductor. The light sensor further includes a P-type semiconductor stacked on at least a portion of the N-type semiconductor, partially defining a trench extending into the P-type semiconductor, and having a trench portion aligned with the trench and extending farther into the N-type semiconductor than other portions of the P-type semiconductor. The light sensor also includes a passivation layer stacked on and contacting the P-type semiconductor and partially defining the trench that extends through the passivation layer and into the P-type semiconductor. The light sensor further includes an electrical contact stacked on the passivation layer, positioned within the trench, and extending through the passivation layer into the P-type semiconductor such that photons received by the N-type semiconductor generate photocurrent resulting in a voltage at the electrical contact.
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公开(公告)号:US10801895B2
公开(公告)日:2020-10-13
申请号:US15697934
申请日:2017-09-07
Applicant: Teledyne Scientific & Imaging, LLC
Inventor: Majid Zandian
IPC: H01L21/20 , G01J5/20 , H04N5/33 , H01L21/02 , G01J3/28 , C23C14/54 , H01L27/146 , C23C14/02 , C23C14/06 , C23C14/48 , G01N21/17 , G01N21/84 , G01N21/21
Abstract: A semiconductor material emitting device is positioned such that its output flux impinges on a substrate at a non-perpendicular angle, so as to grow a first epilayer which is linearly graded in the direction perpendicular to the growth direction. The linear grading can be arranged such that, for example, each row of pixels has a different cutoff wavelength, thereby making it possible to provide a spectroscopic FPA without the use of filters. The non-perpendicular angle and/or the flux intensity can be adjusted to achieve a desired compositional grading. A spectral ellipsometer may be used to monitor the composition of the epilayer during the fabrication process, and to control the intensity of the flux.
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公开(公告)号:US20170062396A1
公开(公告)日:2017-03-02
申请号:US14994917
申请日:2016-01-13
Applicant: TELEDYNE SCIENTIFIC & IMAGING, LLC
Inventor: Majid Zandian , Donald E. Cooper , Lisa L. Fischer , Victor Gil , Gerard Sullivan
IPC: H01L25/16 , H01L31/0296 , H01L33/00 , H01L33/30 , H01L33/62 , H01L31/18 , H01L33/38 , H01L33/54 , H01L33/56 , H01L31/024 , H01L31/0203 , H01L27/146 , H01L33/64
CPC classification number: H01L25/167 , H01L25/0753 , H01L25/165 , H01L27/14618 , H01L27/14634 , H01L27/14636 , H01L27/1469 , H01L27/14696 , H01L31/0203 , H01L31/024 , H01L31/02966 , H01L31/186 , H01L33/0045 , H01L33/0095 , H01L33/30 , H01L33/382 , H01L33/54 , H01L33/56 , H01L33/62 , H01L33/642 , H01L2924/351 , H01L2933/0016 , H01L2933/005 , H01L2933/0066
Abstract: A tiled array of hybrid assemblies and a method of forming such an array enables the assemblies to be placed close together. Each assembly comprises first and second dies, with the second die mounted on and interconnected with the first die. Each vertical edge of a second die which is to be located adjacent to a vertical edge of another second die in the tiled array is etched such that the etched edge is aligned with a vertical edge of the first die. Indium bumps are deposited on a baseplate where the hybrid assemblies are to be mounted, and the assemblies are mounted onto respective indium bumps using a hybridizing machine, enabling the assemblies to be placed close together, preferably ≦10 μm. The first and second dies may be, for example. a detector and a readout IC, or an array of LEDs and a read-in IC.
Abstract translation: 混合组件的平铺阵列和形成这种阵列的方法使得组件能够靠近放置在一起。 每个组件包括第一和第二模具,其中第二模具安装在第一模具上并与第一模具互连。 将被定位成邻近平铺阵列中的另一个第二管芯的垂直边缘的第二管芯的每个垂直边缘被蚀刻,使得蚀刻的边缘与第一管芯的垂直边缘对齐。 铟凸块沉积在要安装混合组件的基板上,并且使用杂化机将组件安装到相应的铟凸块上,使组件能够靠近放置,优选≤10μm。 第一和第二模具可以是例如。 检测器和读出IC,或LED阵列和读入IC。
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公开(公告)号:US09570428B1
公开(公告)日:2017-02-14
申请号:US14994917
申请日:2016-01-13
Applicant: TELEDYNE SCIENTIFIC & IMAGING, LLC
Inventor: Majid Zandian , Donald E. Cooper , Lisa L. Fischer , Victor Gil , Gerard Sullivan
IPC: H01L25/16 , H01L27/146 , H01L31/0296 , H01L33/00 , H01L33/30 , H01L33/62 , H01L33/64 , H01L33/38 , H01L33/54 , H01L33/56 , H01L31/024 , H01L31/0203 , H01L31/18
CPC classification number: H01L25/167 , H01L25/0753 , H01L25/165 , H01L27/14618 , H01L27/14634 , H01L27/14636 , H01L27/1469 , H01L27/14696 , H01L31/0203 , H01L31/024 , H01L31/02966 , H01L31/186 , H01L33/0045 , H01L33/0095 , H01L33/30 , H01L33/382 , H01L33/54 , H01L33/56 , H01L33/62 , H01L33/642 , H01L2924/351 , H01L2933/0016 , H01L2933/005 , H01L2933/0066
Abstract: A tiled array of hybrid assemblies and a method of forming such an array enables the assemblies to be placed close together. Each assembly comprises first and second dies, with the second die mounted on and interconnected with the first die. Each vertical edge of a second die which is to be located adjacent to a vertical edge of another second die in the tiled array is etched such that the etched edge is aligned with a vertical edge of the first die. Indium bumps are deposited on a baseplate where the hybrid assemblies are to be mounted, and the assemblies are mounted onto respective indium bumps using a hybridizing machine, enabling the assemblies to be placed close together, preferably ≦10 μm. The first and second dies may be, for example. a detector and a readout IC, or an array of LEDs and a read-in IC.
Abstract translation: 混合组件的平铺阵列和形成这种阵列的方法使得组件能够靠近放置在一起。 每个组件包括第一和第二模具,其中第二模具安装在第一模具上并与第一模具互连。 将被定位成邻近平铺阵列中的另一个第二管芯的垂直边缘的第二管芯的每个垂直边缘被蚀刻,使得蚀刻的边缘与第一管芯的垂直边缘对齐。 铟凸块沉积在要安装混合组件的基板上,并且使用杂化机将组件安装到相应的铟凸块上,使组件能够靠近放置,优选≤10μm。 第一和第二模具可以是例如。 检测器和读出IC,或LED阵列和读入IC。
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公开(公告)号:US11118982B2
公开(公告)日:2021-09-14
申请号:US16987194
申请日:2020-08-06
Applicant: Teledyne Scientific & Imaging, LLC
Inventor: Majid Zandian
IPC: H01L27/00 , G01J3/28 , G01J5/20 , H04N5/33 , H01L21/02 , C23C14/54 , H01L27/146 , C23C14/02 , C23C14/06 , C23C14/48 , G01N21/17 , G01N21/84 , G01N21/21
Abstract: A semiconductor material emitting device is positioned such that its output flux impinges on a substrate at a non-perpendicular angle, so as to grow a first epilayer which is linearly graded in the direction perpendicular to the growth direction. The linear grading can be arranged such that, for example, each row of pixels has a different cutoff wavelength, thereby making it possible to provide a spectroscopic FPA without the use of filters. The non-perpendicular angle and/or the flux intensity can be adjusted to achieve a desired compositional grading. A spectral ellipsometer may be used to monitor the composition of the epilayer during the fabrication process, and to control the intensity of the flux.
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公开(公告)号:US20190072432A1
公开(公告)日:2019-03-07
申请号:US15697934
申请日:2017-09-07
Applicant: Teledyne Scientific & Imaging, LLC
Inventor: Majid Zandian
Abstract: A semiconductor material emitting device is positioned such that its output flux impinges on a substrate at a non-perpendicular angle, so as to grow a first epilayer which is linearly graded in the direction perpendicular to the growth direction. The linear grading can be arranged such that, for example, each row of pixels has a different cutoff wavelength, thereby making it possible to provide a spectroscopic FPA without the use of filters. The non-perpendicular angle and/or the flux intensity can be adjusted to achieve a desired compositional grading. A spectral ellipsometer may be used to monitor the composition of the epilayer during the fabrication process, and to control the intensity of the flux.
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公开(公告)号:US09520336B1
公开(公告)日:2016-12-13
申请号:US14994618
申请日:2016-01-13
Applicant: TELEDYNE SCIENTIFIC & IMAGING, LLC
Inventor: Majid Zandian , Donald E. Cooper , Lisa L. Fischer , Victor Gil , Gerard Sullivan
IPC: H01L23/373 , H01L23/367 , H01L25/00 , H01L25/16 , H01L21/48 , H01L25/065
CPC classification number: H01L23/3736 , H01L21/4871 , H01L23/36 , H01L23/3677 , H01L25/0657 , H01L25/167 , H01L25/50 , H01L2225/06506 , H01L2924/351
Abstract: A method of improving the thermal performance of a hybrid assembly which comprises a first die, a second die, and indium bonds which bond and electrically interconnect the first die to the second die. A heat sink plate on which the hybrid assembly is to be mounted is provided. A plurality of indium bumps are deposited on the plate where the assembly is to be mounted. The bottom side of the hybrid assembly is then pressed onto the indium bumps to affix the assembly to the plate. The heat sink plate constrains the lateral coefficient of thermal expansion (CTE) of the second die such that the CTEs of the first and second dies match more closely than they would if the hybrid assembly was not mounted directly to a heat sink plate using indium bumps. The heat sink plate preferably comprises copper tungsten (CuW) or a diamond-metal composite.
Abstract translation: 一种改进混合组件的热性能的方法,其包括将第一管芯与第二管芯结合并电连接的第一管芯,第二管芯和铟焊盘。 提供了要安装混合组件的散热板。 在要安装组件的板上沉积多个铟凸块。 然后将混合组件的底侧按压到铟凸块上以将组件固定到板上。 散热板限制了第二模具的横向热膨胀系数(CTE),使得第一和第二模具的CTE比如果混合组件没有使用铟凸块直接安装到散热板的情况更匹配 。 散热板优选包括铜钨(CuW)或金刚石 - 金属复合材料。
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公开(公告)号:US20210118934A1
公开(公告)日:2021-04-22
申请号:US17060575
申请日:2020-10-01
Applicant: Teledyne Scientific & Imaging, LLC
Inventor: Majid Zandian
IPC: H01L27/146
Abstract: A curved FPA comprises an array of detectors, with mesas etched between the detectors such that they are electrically and physically isolated from each other. Metallization deposited at the bottom of the mesas reconnects the detectors electrically and thereby provides a common ground between them. Strain induced by bending the FPA into a curved shape is across the metallization and any backfill epoxy, rather than across the detectors. Indium bumps are evaporated onto respective detectors for connection to a readout integrated circuit (ROIC). An ROIC coupled to the detectors is preferably thinned, and the backside of the ROIC may also include mesas such that the ROIC is reticulated.
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