-
公开(公告)号：USRE38256E1
公开(公告)日：2003-09-23
申请号：US09448977
申请日：1999-11-24
申请人： Toru Ushirogouchi , Naomi Shida , Takuya Naito , Koji Asakawa , Akinori Hongu , Makoto Nakase , Hirokazu Niki
发明人： Toru Ushirogouchi , Naomi Shida , Takuya Naito , Koji Asakawa , Akinori Hongu , Makoto Nakase , Hirokazu Niki
IPC分类号： G03F7021
CPC分类号： G03F7/039 , G03F7/0045 , G03F7/0215 , G03F7/038 , Y10S430/107 , Y10S430/11 , Y10S430/111
摘要： Disclosed are a safe slurry photosensitive composition superior in image formation capabilities such as resolution and sensitivity and containing no harmful compound, and a safe water-soluble photosensitive composition capable of being dissolved in water without using any organic solvent while maintaining a sufficient sensitivity as a resist and containing no harmful substance. The slurry photosensitive composition contains a compound which generates an acid when irradiated with light or ionizing radiation, at least one type of a resin with acid-crosslinkability or acid-decomposability, and a powder. Various devices can be manufactured by forming a layer of this photosensitive composition on a substrate, exposing the layer to light in accordance with a desired pattern, and heating the layer. The water-soluble photosensitive composition contains a compound which generates an acid when irradiated with light or ionizing radiation, and an acetal resin. This water-soluble photosensitive composition is coated on a substrate and irradiated with light or ionizing radiation in accordance with a desired pattern. The resultant substrate is chemically amplified by heating and developed with water. This makes it possible to safely form a pattern without using any ventilator.
-
公开(公告)号：US5691101A
公开(公告)日：1997-11-25
申请号：US644395
申请日：1996-05-09
申请人： Toru Ushirogouchi , Naomi Shida , Takuya Naito , Koji Asakawa , Akinori Hongu , Makoto Nakase , Hirokazu Niki
发明人： Toru Ushirogouchi , Naomi Shida , Takuya Naito , Koji Asakawa , Akinori Hongu , Makoto Nakase , Hirokazu Niki
CPC分类号： G03F7/039 , G03F7/0045 , G03F7/0215 , G03F7/038 , Y10S430/107 , Y10S430/11 , Y10S430/111
摘要： Disclosed are a safe slurry photosensitive composition superior in image formation capabilities such as resolution and sensitivity and containing no harmful compound, and a safe water-soluble photosensitive composition capable of being dissolved in water without using any organic solvent while maintaining a sufficient sensitivity as a resist and containing no harmful substance. The slurry photosensitive composition contains a compound which generates an acid when irradiated with light or ionizing radiation, at least one type of a resin with acid-crosslinkability or acid-decomposability, and a powder. Various devices can be manufactured by forming a layer of this photosensitive composition on a substrate, exposing the layer to light in accordance with a desired pattern, and heating the layer. The water-soluble photosensitive composition contains a compound which generates an acid when irradiated with light or ionizing radiation, and an acetal resin. This water-soluble photosensitive composition is coated on a substrate and irradiated with light or ionizing radiation in accordance with a desired pattern. The resultant substrate is chemically amplified by heating and developed with water. This makes it possible to safely form a pattern without using any ventilator.
摘要翻译： 公开了一种安全的浆料感光性组合物，其成像能力如分辨率和灵敏度优异且不含有害化合物，以及能够在不使用任何有机溶剂的情况下溶解在水中的安全的水溶性光敏组合物，同时保持足够的灵敏度作为抗蚀剂 不含有害物质。 浆料光敏组合物含有当用光或电离辐射照射时产生酸的化合物，至少一种具有酸交联性或酸分解性的树脂和粉末。 可以通过在基板上形成这种感光性组合物的层来制造各种装置，根据期望的图案将该层曝光，并加热该层。 水溶性光敏组合物含有当用光或电离辐射照射时产生酸的化合物和缩醛树脂。 将该水溶性感光性组合物涂布在基材上，并根据期望的图案用光或电离辐射照射。 所得到的底物通过加热化学放大并用水显影。 这使得可以安全地形成图案而不使用任何呼吸机。
-
公开(公告)号：US5372914A
公开(公告)日：1994-12-13
申请号：US36254
申请日：1993-03-24
申请人： Takuya Naito , Osamu Sasaki , Tsukasa Tada , Naoko Kihara , Toru Ushirogouchi , Satoshi Saito , Takashi Jonai , Hirokazu Niki
发明人： Takuya Naito , Osamu Sasaki , Tsukasa Tada , Naoko Kihara , Toru Ushirogouchi , Satoshi Saito , Takashi Jonai , Hirokazu Niki
CPC分类号： G03F7/0045 , G03F7/094 , Y10S430/122
摘要： On a substrate a protective layer is formed which can suppress the diffusion of a contaminant from the substrate. On the protective layer, thus formed, a resin layer is formed. The resin layer comprises a photosensitive composition containing a compound which has a substituent group capable of being decomposed or cross-linked in the presence of an acid, and a compound which can generate an acid when exposed to light. The resin layer is pattern-exposed to light and then baked at a predetermined temperature. The resin layer is developed, whereby the exposed portions of the resin layer are removed or left, thus forming a pattern comprising lines and spaces each having a predetermined width. Each of the lines of the pattern has a cross-section having neither sloped profile nor undercut profile, and the pattern therefore has an improved resolution.
摘要翻译： 在基板上形成保护层，其可以抑制污染物从基板的扩散。 在形成的保护层上形成树脂层。 树脂层包含含有在酸存在下具有能够分解或交联的取代基的化合物的光敏组合物和在暴露于光时可产生酸的化合物。 将树脂层图案曝光，然后在预定温度下烘烤。 树脂层被显影，由此树脂层的暴露部分被去除或留下，从而形成包括具有预定宽度的线和间隔的图案。 图案的每条线具有既不具有倾斜轮廓也不具有底切轮廓的横截面，因此，该花纹具有改进的分辨率。
-
公开(公告)号：US5432023A
公开(公告)日：1995-07-11
申请号：US238703
申请日：1994-05-05
申请人： Shuji Yamada , Motoya Kanda , Masao Yamamoto , Nobukazu Suzuki , Yoshiko Kanazawa , Akinori Hongu , Yuu Kondou , Ken Uchida , Koji Hashimoto , Hirokazu Niki , Kunihiko Sasaki , Shinji Tsuruta
发明人： Shuji Yamada , Motoya Kanda , Masao Yamamoto , Nobukazu Suzuki , Yoshiko Kanazawa , Akinori Hongu , Yuu Kondou , Ken Uchida , Koji Hashimoto , Hirokazu Niki , Kunihiko Sasaki , Shinji Tsuruta
CPC分类号： H01M8/0204 , H01M4/86 , H01M4/925 , H01M4/926 , H01M8/023 , H01M8/0245 , H01M8/0271 , H01M8/04156 , H01M8/04186 , H01M8/04291 , H01M8/1004 , H01M8/2455 , H01M8/247 , H01M2300/0082
摘要： In a fuel cell comprising a stack having superposed a plurality of electromotive parts composed of a fuel electrode, an oxidizing electrode, and an electrolyte layer nipped by the two electrodes and using a liquid fuel as the fuel for the fuel cell, this invention contemplates forming a liquid fuel introducing path destined to be directly exposed to the liquid fuel on terminal surfaces of the component parts of the electromotive parts in a direction perpendicular to the flow of an oxidizing gas along at least one of the outer peripheral surfaces of the stack including the terminal surface of the fuel electrode and lying parallelly to the flow of the oxidizing gas and enabling the liquid fuel in the liquid fuel introducing path to be supplied to the fuel electrodes by a capillary attraction. A fuel cell provided with means for recovery of the water produced by the cell reaction in the oxidizing electrodes is also disclosed, which fuel cell effects the removal of the water produced in the oxidizing electrodes during the operation of the fuel cell by a capillary attraction generated by two porous members, i.e. a first porous member disposed in the oxidizing electrodes and a second porous member adjoined to the first porous member and possessed of a smaller average pore diameter than the first porous member.
摘要翻译： 在包括由燃料电极，氧化电极和由两个电极夹持并且使用液体燃料作为燃料电池的燃料的电解质层组成的多个电动部分叠置的燃料电池中，本发明考虑到形成 液体燃料导入路径，其特征在于，所述液体燃料导入路径旨在直接暴露于所述电动部件的所述构成部件的端子面的液体燃料，所述液体燃料导向路径沿与所述氧化气体的流动方向垂直的方向沿着所述堆叠体的至少一个外周面， 燃料电极的端子表面并且与氧化气体的流动平行地放置，并且能够通过毛细吸引力将液体燃料引入路径中的液体燃料供应到燃料电极。 还公开了一种燃料电池，其具有用于回收由氧化电极中的电池反应产生的水的装置，该燃料电池通过产生毛细管吸引力而在燃料电池的操作期间实现氧化电极中产生的水的去除 通过两个多孔构件，即设置在氧化电极中的第一多孔构件和与第一多孔构件相邻并且具有比第一多孔构件更小的平均孔径的第二多孔构件。
-
公开(公告)号：US5364711A
公开(公告)日：1994-11-15
申请号：US41427
申请日：1993-03-31
申请人： Shuji Yamada , Motoya Kanda , Masao Yamamoto , Nobukazu Suzuki , Yoshiko Kanazawa , Akinori Hongu , Yuu Kondou , Ken Uchida , Koji Hasimoto , Hirokazu Niki , Kunihiko Sasaki , Shinji Tsuruta
发明人： Shuji Yamada , Motoya Kanda , Masao Yamamoto , Nobukazu Suzuki , Yoshiko Kanazawa , Akinori Hongu , Yuu Kondou , Ken Uchida , Koji Hasimoto , Hirokazu Niki , Kunihiko Sasaki , Shinji Tsuruta
CPC分类号： H01M8/0204 , H01M4/86 , H01M4/925 , H01M4/926 , H01M8/023 , H01M8/0245 , H01M8/0271 , H01M8/04156 , H01M8/04186 , H01M8/04291 , H01M8/1004 , H01M8/2455 , H01M8/247 , H01M2300/0082
摘要： In a fuel cell comprising a stack having superposed a plurality of electromotive parts composed of a fuel electrode, an oxidizing electrode, and an electrolyte layer nipped by the two electrodes and using a liquid fuel as the fuel for the fuel cell, this invention contemplates forming a liquid fuel introducing path destined to be directly exposed to the liquid fuel on terminal surfaces of the component parts of the electromotive parts in a direction perpendicular to the flow of an oxidizing gas along at least one of the outer peripheral surfaces of the stack including the terminal surface of the fuel electrode and lying parallelly to the flow of the oxidizing gas and enabling the liquid fuel in the liquid fuel introducing path to be supplied to the fuel electrodes by a capillary attraction. A fuel cell provided with means for recovery of the water produced by the cell reaction in the oxidizing electrodes is also disclosed, which fuel cell effects the removal of the water produced in the oxidizing electrodes during the operation of the fuel cell by a capillary attraction generated by two porous members.
摘要翻译： 在包括由燃料电极，氧化电极和由两个电极夹持并且使用液体燃料作为燃料电池的燃料的电解质层组成的多个电动部分叠置的燃料电池中，本发明考虑到形成 液体燃料导入路径，其特征在于，所述液体燃料导入路径旨在直接暴露于所述电动部件的所述构成部件的端子面的液体燃料，所述液体燃料导向路径沿与所述氧化气体的流动方向垂直的方向沿着所述堆叠体的至少一个外周面， 燃料电极的端子表面并且与氧化气体的流动平行地放置，并且能够通过毛细吸引力将液体燃料引入路径中的液体燃料供应到燃料电极。 还公开了一种燃料电池，其具有用于回收由氧化电极中的电池反应产生的水的装置，该燃料电池通过产生毛细管吸引力而在燃料电池的操作期间实现氧化电极中产生的水的去除 由两个多孔构件。
-
公开(公告)号：US5091282A
公开(公告)日：1992-02-25
申请号：US504300
申请日：1990-04-03
CPC分类号： G03F7/0757 , G03F7/0045 , G03F7/038 , G03F7/0755 , G03F7/0758 , Y10S430/124 , Y10S430/125
摘要： This invention includes a photosensitive composition containing an alkali-soluble resin and a compound represented by formula (I), (II) or (III) described in the claims and the specification, a photosensitive composition containing an alkali-soluble polymer, a compound represented by formula (IV) described in the claims and the specification and a basic compound, and a photosensitive composition containing an alkali-soluble polymer, a compound represented by formula (VI) described in the claims and the specification and a compound which produces an acid upon radiation of light. A pattern formation method using these photosensitive compositions includes the steps of dissolving any one of the above photosensitive compositions in an organic solvent to prepare a photosensitive resin solution, coating the photosensitive resin solution on a substrate to form a photosensitive resin layer on the substrate, pattern-exposing the photosensitive resin layer, and developing the exposed resin layer with an aqueous alkaline solution. When the first or second photosensitive composition is used, a good pattern can also be formed by a method including the steps of dissolving either the first or second photosensitive composition in an organic solvent to prepare a photosensitive resin solution, coating the photosensitive resin solution on a substrate to form a photosensitive resin layer on the substrate, pattern-exposing the photosensitive resin layer, heating the pattern-exposed resin layer, exposing the entire surface of the heated resin layer, and developing the entirely exposed resin layer with an aqueous alkaline solution.
-
7.发明授权Pattern forming method utilizing material with photoresist film underlayer and contrast enhancement overlayer containing photosensitive diazonium salt 失效图案形成方法利用具有光致抗蚀剂膜底层和含有光敏重氮盐的对比度增强覆盖层的材料
公开(公告)号：US5188924A
公开(公告)日：1993-02-23
申请号：US777449
申请日：1991-10-16
IPC分类号： G03F7/095
CPC分类号： G03F7/095
摘要： A pattern forming method, comprising the steps of providing a resist film on a substrate; providing a photosensitive film containing a photosensitive diazonium salt on the resist film; and then subjecting the resultant composite to pattern exposure by use of a light to which both of the resist film and the photosensitive diazonium salt are sensitive, can employ a composition for pattern formation which comprises a photosensitive diazonium salt, a resin binder and a solvent. By this method, a minute pattern of 1 .mu.m or less can be formed, utilizing effectively the UV-ray exposure technique of the prior art, with good dimensional precision and stability.
摘要翻译： 一种图案形成方法，包括以下步骤：在基底上提供抗蚀剂膜; 在抗蚀剂膜上提供含有光敏重氮盐的感光膜; 然后使用所述抗蚀剂膜和感光重氮盐两者都敏感的光来对所得复合材料进行图案曝光，可以使用包含光敏重氮盐，树脂粘合剂和溶剂的图案形成用组合物。 通过该方法，可以有效利用现有技术的紫外线照射技术形成1μm以下的微小图案，具有良好的尺寸精度和稳定性。
-
8.发明授权Resist composition for forming a pattern comprising a pyridinium compound as an additive 失效用于形成包含吡啶化合物作为添加剂的图案的抗蚀剂组合物
公开(公告)号：US5658706A
公开(公告)日：1997-08-19
申请号：US302319
申请日：1994-09-08
申请人： Hirokazu Niki , Hiromitsu Wakabayashi , Rumiko Hayase , Naohiko Oyasato , Yasunobu Onishi , Kazuo Sato , Kenji Chiba , Takao Hayashi
发明人： Hirokazu Niki , Hiromitsu Wakabayashi , Rumiko Hayase , Naohiko Oyasato , Yasunobu Onishi , Kazuo Sato , Kenji Chiba , Takao Hayashi
CPC分类号： G03F7/0045 , G03F7/039 , Y10S430/111
摘要： A resist composition for forming a pattern, which comprises (a) a compound represented by the following formula (1) and satisfying the following inequalities, ##STR1## wherein R.sup.1 is hydrogen atom or methyl group, R.sup.2 is a monovalent organic group, m is 0 or a positive integer, n is a positive integer, and m and n satisfying a condition of 0.03.ltoreq.n/(m+n).ltoreq.1, (b) a compound capable of generating an acid when irradiated with light, and (c) a nitrogen-containing compound, wherein a weight-average molecular weight, Mw and a number-average molecular weight, Mn satisfy the following inequality, 4,000.ltoreq.Mw.ltoreq.50,000, 1.10.ltoreq.Mw/Mn.ltoreq.2.50 (Mw and Mn respectively represent value converted in styrene).
摘要翻译： 用于形成图案的抗蚀剂组合物，其包含（a）由下式（1）表示的化合物并满足以下不等式，其中R 1是氢原子或甲基，R 2是一价有机基团 基团，m为0或正整数，n为正整数，m和n满足0.03≤n/（m + n）≤1的条件，（b）能够产生酸的化合物 当用光照射时，和（c）含氮化合物，其中重均分子量Mw和数均分子量Mn满足以下不等式：4,000
-
公开(公告)号：US4037033A
公开(公告)日：1977-07-19
申请号：US650782
申请日：1976-01-20
CPC分类号： H01M4/244 , H01M10/34 , H01M2/1666
摘要： An improved rechargeable nickel-zinc battery is described which is capable of undergoing many charge-discharge cycles (cycle life), with deep discharge, and of high performance with heavy drain discharge during use. The increased cycle life is accomplished by a suitable combination of electrochemical generating elements. The high performance with heavy drain discharge service is obtained by an improved zinc electrode construction. The battery of this invention has a sheet-like kneaded zinc electrode, a sheet-like nickel oxide electrode with limited capacity ratio thereof, a separator, an electrolyte absorber, and a concentrated alkaline electrolyte in limited amounts.
摘要翻译： 描述了一种改进的可再充电镍锌电池，其能够经受许多充放电循环（循环寿命），具有深度放电，并且在使用期间具有高排放放电的高性能。 增加的循环寿命通过电化学发生元件的合适组合实现。 通过改进的锌电极结构获得具有高排放排放服务的高性能。 本发明的电池具有有限量的片状捏合锌电极，容量比有限的片状氧化镍电极，隔膜，电解液吸收剂和浓缩碱性电解质。
-
10.再颁专利
公开(公告)号：USRE35821E
公开(公告)日：1998-06-09
申请号：US639973
申请日：1996-04-29
申请人： Hirokazu Niki , Rumiko Hayase , Naohiko Oyasato , Yasunobu Onishi , Akitoshi Kumagae , Kazuo Sato , Masataka Miyamura , Yoshihito Kobayashi
发明人： Hirokazu Niki , Rumiko Hayase , Naohiko Oyasato , Yasunobu Onishi , Akitoshi Kumagae , Kazuo Sato , Masataka Miyamura , Yoshihito Kobayashi
CPC分类号： G03F7/09 , G03F7/11 , G03F7/0045
摘要： A radiation-sensitive layer comprising as a main component a radiation-sensitive composition containing a compound capable of generating an acid when exposed to a chemical radiation and a compound having at least one linkage decomposable by an acid is formed on a substrate. An acidic coating layer is formed on the radiation-sensitive layer. The radiation-sensitive layer and the acidic coating layer are pattern-exposed to a chemical radiation. The radiation-sensitive layer and the acidic coating layer are baked and developed by using an aqueous alkaline solution to obtain a pattern comprising lines and spaces, each having a predetermined width. A fine pattern of a rectangular sectional shape can be formed without producing eaves caused by a surface inhibition layer layer, which is produced on the film surface.
摘要翻译： 一种辐射敏感层，其包含作为主要成分的含有当暴露于化学辐射时能够产生酸的化合物的辐射敏感性组合物和具有至少一个可被酸分解的键的化合物。 在辐射敏感层上形成酸性涂层。 辐射敏感层和酸性涂层图案暴露于化学辐射。 通过使用碱性水溶液来烘烤和显影辐射敏感层和酸性涂层，以获得每个具有预定宽度的线和间隔的图案。 可以形成矩形截面形状的精细图案，而不会在膜表面上产生由表面抑制层形成的檐。
-
-
-
-
-
-
-
-
-
搜索结果
17 条记录 (耗时 0.034 秒)