摘要:
It is an object of the present invention to obtain a vacuum chucking which can vacuum suck a wafer even if dusts attach thereon. The main body of vacuum chuck (101) has a plurality of block grooves (125) on the surface on which the wafer (1) is sucked and fixed, in which vacuum evacuation paths (105) each for vacuum evacuating each block groove (125) are provided for each block groove (125). When the wafer (1) is sucked and fixed under low pressure, even if the degree of vacuum in one of the block grooves (125) decreases due to attachment of dusts on part of the suction surface, or the like, the wafer (1) can surely be sucked and held.
摘要:
It is an object of the present invention to obtain a vacuum chucking which can vacuum suck a wafer even if dusts attach thereon. The main body of vacuum chuck (101) has a plurality of block grooves (125) on the surface on which the wafer (1) is sucked and fixed, in which vacuum evacuation paths (105) each for vacuum evacuating each block groove (125) are provided for each block groove (125). When the wafer(1) is sucked and fixed under low pressure, even if the degree of vacuum in one of the block grooves (125) decreases due to attachment of dusts on part of the suction surface, or the like, the wafer (1) can surely be sucked and held.
摘要:
In a color cathode-ray tube, only a foreign matter adhering to a shadow mask is removed effectively without thermal deformation of the shadow mask or thermal denaturation of phosphors.An electron beam produced by an electron gun incorporated in a cathode-ray tube itself is scanned or irradiated to all over a shadow mask of the color cathode-ray tube. The radiant state of a fluorescent screen at this stage is checked to detect a foreign matter adhering to the shadow mask. The electron beam is deflected to align with the position at which the foreign matter is detected, and then irradiated to the foreign matter in the form of pulses. Thus, the foreign matter is heated and removed.
摘要:
Provided are an agent for the treatment and/or prophylaxis of a mood disorder comprising, as an active ingredient, a thiazole derivative represented by the formula (I) wherein R1 represents aryl or the like, and R2 represents pyridyl or the like, or a pharmaceutically acceptable salt thereof, and the like.
摘要:
Provided are an agent for the treatment and/or prophylaxis of an anxiety disorder comprising, as an active ingredient, a thiazole derivative represented by the formula (I) wherein R1 represents aryl or the like, and R2 represents pyridyl or the like, or a pharmaceutically acceptable salt thereof, and the like.
摘要:
The present invention relates to [1,2,4]triazolo[1,5-c]pyrimidine compounds represented by formula (I): wherein na and nb independently represent an integer of 0 to 4 and Q represents a hydrogen atom or 3,4-dimethoxybenzyl, or salts thereof exhibit activity as adenosine A2A receptor antagonists.
摘要:
A method for producing a hologram recording an interference fringe formed by an object light and a reference light on a photosensitive dry plate, and the object light either having diffusing and scattering characteristics or being passed through an optical diffusion body, mainly includes the following steps: In a first step, a ratio &eegr;RO/&eegr;OO of a first diffraction efficiency &eegr;OO and a second diffraction efficiency &eegr;RO, is calculated. The diffraction efficiency &eegr;OO is dependent on two object light beams. The efficiency &eegr;RO is dependent on the object light and the reference light. In a second step, the intensity EO of the object light and the intensity ER of the reference light is adjusted in such a way that the ratio &eegr;RO/&eegr;OO is set to at least 10 and the efficiency &eegr;OO does not exceed 5%. A display device using the above hologram is structured by a display unit for generating a signal light; a hologram screen formed by either reflection or transmission hologram, and a projecting unit for projecting the signal light to the hologram screen. According to the present invention, it is possible to easily produce a hologram, for example, a screen hologram, having no cloudiness or cloudy state when an observer observes an image displayed on the screen, and to a display device using the above hologram screen.
摘要:
A transmission equipped with a continuously variable ratio-change mechanism CVT and a LOW rotational transmission mechanism GT, which are disposed parallel with each other, comprises a forward clutch 65 and a reverse brake 66, which are used to set a power transmission through the continuously variable ratio-change mechanism, a LOW clutch 46, which is used to set a power transmission through the LOW rotational transmission mechanism, and a control unit ECU and a hydraulic control valve HV, which control the engagement of the clutches and the brake. When the transmission is switched from its neutral mode to its in-gear mode, at first, the forward clutch 65 is brought gradually into engagement, and then it is released before the LOW clutch 46 is brought into engagement in a squat control.
摘要:
In a control apparatus for an automotive continuously variable transmission having a forward-reverse selector mechanism in which a gear ratio for reverse is set closer to a speed reducing side than a gear ratio for forward and a belt type continuously variable transmission mechanism, a PH pressure that is outputted from a first regulator valve and a PL pressure that is outputted from a second regulator valve are changeably supplied to one and the other of a hydraulic cylinder of a drive pulley and a hydraulic cylinder of a driven pulley via a shift control valve. A hydraulic pressure supplied to a reversing hydraulic pressure connecting element from a reversing manual valve is inputted into an oil chamber of a first regulator valve so that the PH pressure is increased with the hydraulic pressure so inputted.
摘要:
A metal surface treatment composition which can improve the corrosion resistance and the tight adhesion to coating films and impart slipperiness. The composition is an aqueous solution, dispersion or emulsion containing both an acrylic resin having nitrogenous heterocycles, amino and/or ammonium groups and hydrophobic groups and a heavy metal or a salt thereof. The amino or ammonium groups have at least one structure selected from among those represented by general formulae (I) (wherein in R.sub.1, R.sub.2 : hydrogen, hydroxyl, substituted or unsubstituted, linear or branched C.sub.1 -C.sub.5 alkyl, or substituted or unsubstituted, linear or branched C.sub.1 -C.sub.5 hydroxyalkyl) and (II) (wherein R.sub.3, R.sub.4, R.sub.5 : hydrogen, hydroxyl, substituted or unsubstituted, linear or branched C.sub.1 -C.sub.5 alkyl, or substituted or unsubstituted, linear or branched C.sub.1 -C.sub.5 hydroxyalkyl).