公开(公告)号：US4319256A

公开(公告)日：1982-03-09

申请号：US146163

申请日：1980-05-02

申请人： Yoshinobu Tarutani ,  Hirozi Yamada ,  Ushio Kawabe

发明人： Yoshinobu Tarutani ,  Hirozi Yamada ,  Ushio Kawabe

IPC分类号： H01L39/12 ,  H01L39/22 ,  H01L27/12

CPC分类号： H01L39/223 ,  H01L39/12 ,  Y10S505/874

摘要： A sandwich-type Josephson junction element wherein a counter electrode is made of a Mo-Re alloy which contains 10-90 atomic-% of Re. The Josephson junction element has a high operating temperature, and any deterioration thereof attributed to a thermal cycle is not noted.

摘要翻译： 夹层型约瑟夫逊结元件，其中对电极由含有10-90原子％Re的Mo-Re合金制成。 约瑟夫逊结元件具有高的工作温度，并且没有注意到归因于热循环的任何劣化。

公开(公告)号：US4904619A

公开(公告)日：1990-02-27

申请号：US150796

申请日：1988-02-01

申请人： Hirozi Yamada ,  Sachiko Kizaki ,  Hiroyuki Mori ,  Yoshinobu Tarutani ,  Mikio Hirano

发明人： Hirozi Yamada ,  Sachiko Kizaki ,  Hiroyuki Mori ,  Yoshinobu Tarutani ,  Mikio Hirano

IPC分类号： H01L21/302 ,  H01L21/3065 ,  H01L39/24

CPC分类号： H01L39/2493 ,  Y10S148/089 ,  Y10S505/82 ,  Y10S505/832

摘要： A method of producing a Josephson junction device consisting of thin films of superconducting materials such as niobium and niobium nitride that work at cryogenic temperatures, in which a base electrode layer, tunnel barrier layer and a counterelectrode layer constituting a Josephson junction are formed on a substrate. In order to form a desired electrode pattern on the counterelectrode layer, a resist pattern is used as a mask for dry etching, followed by a plasma ashing process for ablating part of the resist in order to form a terrace-shaped portion at the edges and corners of the counterelectrode pattern by reforming and shrinking the cross-sectional geometry of the resist. Then, a thin insulating film for covering the edged layers is deposited over the entire surface of substrate, followed by the removal of said resist pattern together with said insulating film deposited on said resist pattern in order to form a protecting layer around the counterelectrode pattern. The substrate further undergoes subsequent stages to produce a Josephson junction device.

摘要翻译： 一种制造约瑟夫逊结器件的方法，该器件由在低温下工作的诸如铌和氮化铌的超导材料的薄膜构成，其中基底电极层，隧道势垒层和构成约瑟夫逊结的反电极层形成在衬底上 。 为了在反电极层上形成期望的电极图案，使用抗蚀剂图案作为干蚀刻的掩模，接着进行用于烧蚀部分抗蚀剂的等离子体灰化处理，以便在边缘处形成平台状部分， 通过重整和收缩抗蚀剂的横截面几何形状，反电极图案的拐角。 然后，在衬底的整个表面上沉积用于覆盖边缘层的薄绝缘膜，然后与沉积在抗蚀剂图案上的所述绝缘膜一起去除所述抗蚀剂图案，以形成围绕反电极图案的保护层。 衬底进一步经历后续阶段以产生约瑟夫逊结器件。

公开(公告)号：US3977243A

公开(公告)日：1976-08-31

申请号：US600024

申请日：1975-07-29

申请人： Hirozi Yamada ,  Hiroshi Ogawa ,  Satoru Aono ,  Hironori Hirano

发明人： Hirozi Yamada ,  Hiroshi Ogawa ,  Satoru Aono ,  Hironori Hirano

IPC分类号： G01M17/02

CPC分类号： G01M17/022

摘要： A testing machine for a tire on an imitation road in which a tire to be tested is urged against a crawler with the aid of a cantilever arm connected through a crosshead to a lifting and lowering disc engaged with screw threaded rods rotatably mounted in a machine frame. The crawler is composed of an endless chain and a road surface forming rods detachably mounted on the endless chain and replaceable by new rods made of different kind of material. In the crosshead are incorporated slip and camber angle setting mechanisms. Provision is made of load cells such as a strain gauge operatively connected to a tire supporting shaft, driving and driven shafts of the crawler and a guide rail of the crawler and for detecting a vertical load subjected to the tire, a torque for driving the crawler under various load conditions and a transverse component of force subjected to the crawler when the tire having a given slip angle or a camber angle is urged against the crawler.

公开(公告)号：US5124583A

公开(公告)日：1992-06-23

申请号：US650933

申请日：1991-02-05

申请人： Yuji Hatano ,  Shinichiro Yano ,  Hiroyuki Mori ,  Hirozi Yamada ,  Mikio Hirano

发明人： Yuji Hatano ,  Shinichiro Yano ,  Hiroyuki Mori ,  Hirozi Yamada ,  Mikio Hirano

IPC分类号： H01L39/22 ,  G06F7/38 ,  H01L27/18 ,  H03K3/38 ,  H03K19/195

CPC分类号： H01L27/18 ,  G06F7/381 ,  H03K19/1952 ,  H03K3/38 ,  Y10S505/861 ,  Y10S505/865

摘要： A DC powered integrated circuit includes a plurality of magnetic flux coupling type Josephson elements. First and second Josephson elements are connected in series to form a first element series circuit of Josephson elements. Third and fourth Josephson elements are connected in series to form a second element series circuit of Josephson elements. The first and second element series circuits are connected in series to form a huffle circuit, with a load inductance, three resistors and a DC current source.

公开(公告)号：US06889431B2

公开(公告)日：2005-05-10

申请号：US10078448

申请日：2002-02-21

申请人： Hiroshi Okabe ,  Hirozi Yamada ,  Eriko Takeda ,  Kazunori Yamamoto ,  Hiroyuki Kuriya ,  Masanori Yamaguchi ,  Kazuhisa Otsuka ,  Yoshitaka Hirata ,  Yasushi Shimada

发明人： Hiroshi Okabe ,  Hirozi Yamada ,  Eriko Takeda ,  Kazunori Yamamoto ,  Hiroyuki Kuriya ,  Masanori Yamaguchi ,  Kazuhisa Otsuka ,  Yoshitaka Hirata ,  Yasushi Shimada

IPC分类号： H01G4/33 ,  H01L21/48 ,  H01L23/498 ,  H05K1/02 ,  H05K1/16 ,  H05K3/42 ,  H05K3/46 ,  H05K3/02

CPC分类号： H01L21/4857 ,  H01L23/49822 ,  H01L24/48 ,  H01L2224/05553 ,  H01L2224/05599 ,  H01L2224/45099 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/85399 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/0102 ,  H01L2924/01046 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/12042 ,  H01L2924/19041 ,  H01L2924/19105 ,  H05K1/0206 ,  H05K1/162 ,  H05K3/427 ,  H05K3/4602 ,  H05K3/4652 ,  H05K2201/0175 ,  H05K2201/0179 ,  H05K2201/0317 ,  H05K2201/0355 ,  H05K2201/09509 ,  H05K2201/09763 ,  H05K2203/0338 ,  Y10T29/435 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49156 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207

摘要： The present invention provides a manufacturing method of an electronic circuit device including a multi-layer circuit board incorporated with a thin film capacitor small in size and of high performance capable of attaining higher capacitance value with a thin dielectric film of high dielectric constant and with favorable film quality. A first electrode layer and a thin film dielectric layer are laminated continuously in this order in one identical to laminate each of the layers on a leveled substrate in one identical chamber and then the first electrode layer is fabricated a conductor pattern.

摘要翻译： 本发明提供一种电子电路器件的制造方法，该电子电路器件包括多层电路板，该多层电路板结合有小型和高性能的薄膜电容器，能够用高介电常数的薄电介质膜获得较高的电容值 电影质量。 将第一电极层和薄膜电介质层依次层叠在一个相同的层中，在一个相同的室中的层叠基板上层叠，然后将第一电极层制成导体图案。

公开(公告)号：US06757178B2

公开(公告)日：2004-06-29

申请号：US10044910

申请日：2002-01-15

申请人： Hiroshi Okabe ,  Hirozi Yamada

发明人： Hiroshi Okabe ,  Hirozi Yamada

IPC分类号： H05K111

CPC分类号： H01L21/4857 ,  H01L23/49822 ,  H01L23/49883 ,  H01L23/49894 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/05553 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48465 ,  H01L2924/0102 ,  H01L2924/01039 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/10161 ,  H01L2924/19041 ,  H01L2924/3011 ,  H05K1/0206 ,  H05K1/162 ,  H05K3/429 ,  H05K3/4644 ,  H05K2201/0175 ,  H05K2201/0179 ,  H05K2201/09509 ,  H05K2201/09536 ,  H01L2924/00014 ,  H01L2924/00

摘要： In an electronic circuit equipment using a multilayer circuit board on which a semiconductor chip is mounted, a thin film capacitor is provided on the multilayer circuit board. Moreover, a first electrode of the thin film capacitor and a first wiring of the multilayer circuit board are electrically connected to each other, and a second electrode of the thin film capacitor and a second wiring of the multilayer circuit board are electrically connected to each other, respectively. Furthermore, a thin film dielectric of the thin film capacitor was grown epitaxially with the first electrode as its base. The employment of the multilayer circuit board makes it possible to provide the electronic circuit equipment using the multilayer circuit board that includes the built-in thin film capacitor having the high dielectric-constant thin film dielectric.

摘要翻译： 在使用其上安装有半导体芯片的多层电路板的电子电路设备中，在多层电路板上设置薄膜电容器。 此外，薄膜电容器的第一电极和多层电路板的第一布线彼此电连接，并且薄膜电容器的第二电极和多层电路板的第二布线彼此电连接 ， 分别。 此外，以第一电极为基底外延生长薄膜电容器的薄膜电介质。 使用多层电路板可以提供使用包括具有高介电常数薄膜电介质的内置薄膜电容器的多层电路板的电子电路设备。

公开(公告)号：US4344153A

公开(公告)日：1982-08-10

申请号：US29933

申请日：1979-04-13

申请人： Hideki Nishida ,  Hirozi Yamada ,  Hiroshi Umezaki ,  Yutaka Sugita ,  Norikazu Tsumita

发明人： Hideki Nishida ,  Hirozi Yamada ,  Hiroshi Umezaki ,  Yutaka Sugita ,  Norikazu Tsumita

IPC分类号： G11C11/14 ,  G11C19/08 ,  H01F10/06 ,  H01F41/34

CPC分类号： H01F10/06 ,  G11C19/0808 ,  H01F41/34

摘要： A magnetic bubble memory device and a method of fabricating the device are disclosed in which a conductor pattern lies at least between a film for maintaining magnetic bubbles therein, and a soft magnetic material pattern. Further, the magnetic bubble memory device can be formed precisely without suffering from errors due to mask alignment, by employing a mask provided with a plurality of patterns which are different in transmittance.

摘要翻译： 公开了一种磁性气泡存储装置及其制造方法，其中导体图案至少位于用于保持其中的气泡的薄膜和软磁材料图案之间。 此外，通过采用设置有不同透射率的多个图案的掩模，可以精确地形成磁泡存储器件而不会由于掩模取向而产生误差。

公开(公告)号：US4288283A

公开(公告)日：1981-09-08

申请号：US110445

申请日：1980-01-08

申请人： Hiroshi Umezaki ,  Hideki Nishida ,  Norikazu Tsumita ,  Hirozi Yamada ,  Katsuhiro Kaneko ,  Nagatugu Koiso

发明人： Hiroshi Umezaki ,  Hideki Nishida ,  Norikazu Tsumita ,  Hirozi Yamada ,  Katsuhiro Kaneko ,  Nagatugu Koiso

IPC分类号： H01L21/306 ,  G03F7/09 ,  C23F1/02

CPC分类号： G03F7/091

摘要： A method of forming a microscopic pattern wherein the object to be etched is overlaid with a film made of a material which is highly immune to etching and further provided with a reflection reducing film. Thus, the reflection of the irradiating ultraviolet rays by the underlying layer is effectively prevented.

摘要翻译： 一种形成微观图案的方法，其中待蚀刻的物体被由高度免受蚀刻的材料制成的膜覆盖并且还设置有反射还原膜。 因此，有效地防止了下层对照射紫外线的反射。

公开(公告)号：US4262054A

公开(公告)日：1981-04-14

申请号：US63446

申请日：1979-08-03

申请人： Hiroshi Umezaki ,  Hideki Nishida ,  Hirozi Yamada ,  Yutaka Sugita ,  Katsuhiro Kaneko ,  Nagatugu Koiso ,  Masatake Takahashi, deceased

发明人： Hiroshi Umezaki ,  Hideki Nishida ,  Hirozi Yamada ,  Yutaka Sugita ,  Katsuhiro Kaneko ,  Nagatugu Koiso ,  Masatake Takahashi, deceased

IPC分类号： H01F41/34 ,  H01F10/00

CPC分类号： H01F41/34 ,  Y10S428/90 ,  Y10T428/265 ,  Y10T428/269 ,  Y10T428/31507 ,  Y10T428/31522 ,  Y10T428/31681 ,  Y10T428/31721 ,  Y10T428/31942

摘要： A magnetic bubble memory device is disclosed in which a hardened film made of a heat-resisting highly-polymerized organic resin and having a predetermined thickness is employed for an insulating film interposed between a conductor pattern and a soft magnetic material pattern. In a conventional magnetic bubble memory device in which the above-mentioned insulating film is made of SiO.sub.2, an abrupt step is produced in the soft magnetic material pattern due to the existence of the conductor pattern beneath a portion of the soft magnetic material pattern, and the margin of bias magnetic field is thereby lowered. According to the present invention, the step is reduced and smoothed, and thus the lowering of the margin can be prevented.

摘要翻译： 公开了一种磁性气泡存储装置，其中将介于导体图案和软磁材料图案之间的绝缘膜用于由耐热高分子量有机树脂制成并且具有预定厚度的硬化膜。 在上述绝缘膜由SiO 2制成的常规磁性气泡存储装置中，由于在软磁材料图案的一部分下方存在导体图案，在软磁材料图案中产生突然的台阶， 因此偏置磁场的余量被降低。 根据本发明，减少并平滑了台阶，能够防止边缘的下降。