Heat-resistant resin
    7.
    发明授权
    Heat-resistant resin 失效
    耐热树脂

    公开(公告)号:US08541099B2

    公开(公告)日:2013-09-24

    申请号:US12350764

    申请日:2009-01-08

    IPC分类号: B32B27/06

    摘要: The present invention provides a low-modulus low-stress resin which has such heat resistance that cohesive force and reliability can be retained even at high temperatures and which is applicable as various functional materials. The resin is a thermoplastic resin having a modulus of elasticity at room temperature, 25° C., of 1 GPa or lower and a modulus of elasticity at 250° C. of 1 MPa or higher, or a precursor resin thereof.

    摘要翻译: 本发明提供一种低模量低应力树脂,其具有这样的耐热性,即使在高温下也可以保持内聚力和可靠性,并且可用作各种功能材料。 树脂是在室温,25℃,1GPa以下的弹性模量和250℃下的弹性模量为1MPa以上的热塑性树脂或其前体树脂。

    Cleaning sheet, transfer member provided with cleaning function, and method for cleaning substrate processing apparatus
    8.
    发明授权
    Cleaning sheet, transfer member provided with cleaning function, and method for cleaning substrate processing apparatus 失效
    具有清洁功能的清洁片,转印部件以及清洗基板处理装置的方法

    公开(公告)号:US08524007B2

    公开(公告)日:2013-09-03

    申请号:US12977762

    申请日:2010-12-23

    IPC分类号: B08B7/00 B32B3/30 B32B17/10

    摘要: A cleaning sheet including a cleaning layer which has a microasperity shape having an arithmetic average roughness Ra of 0.05 μm or less and a maximum height Rz of 1.0 μm or less. Preferably, a substantial surface area of the cleaning layer per a flat surface of 1 mm2 is 150% or more of a substantial surface area of a silicon wafer mirror surface per a flat area of 1 mm2. The cleaning sheet may be provided on at least one surface of a transfer member so that the transfer member has a cleaning function. When the cleaning sheet or the transfer member having a cleaning function is transferred in a substrate processing apparatus in place of a substrate to be processed therein, the cleaning sheet contacts and cleans a site of the substrate processing apparatus.

    摘要翻译: 一种清洁片,包括具有0.05微米以下的算术平均粗糙度Ra和1.0mum以下的最大高度Rz的微细度形状的清洁层。 优选地,每1mm平坦表面的清洁层的基本表面积为1mm 2的平坦区域的硅晶片镜表面的基本表面积的150%或更多。 清洁片可以设置在转印构件的至少一个表面上,使得转印构件具有清洁功能。 当清洁片或具有清洁功能的转印元件在衬底处理设备中转移以代替待处理衬底时,清洁片接触并清洁衬底处理设备的位置。

    THERMALLY CONDUCTIVE ADHESIVE SHEET
    9.
    发明申请
    THERMALLY CONDUCTIVE ADHESIVE SHEET 审中-公开
    导热粘合片

    公开(公告)号:US20130041093A1

    公开(公告)日:2013-02-14

    申请号:US13642918

    申请日:2011-05-13

    IPC分类号: C09J133/08

    摘要: An object is to provide a thermally conductive adhesive sheet capable of making a heat generating body and a heat radiating body adhere to each other easily and with a sufficient adhesive force. Provided is a thermally conductive adhesive sheet including an adhesive agent layer formed by molding a thermally conductive adhesive agent composition including an acrylic polymer component into a sheet-like shape, wherein the adhesive force at the time of 180° peeling is 1 N/20 mm or more and the contact thermal resistance is 0.6 cm2·K/W or less when the adhesive sheet is pressure bonded to an adherend with a pressure of 200 kPa.

    摘要翻译: 本发明的目的是提供一种能够使发热体和散热体容易地并且以足够的粘合力彼此附着的导热性粘合片。 提供了一种导热性粘合片,其包括通过将包含丙烯酸类聚合物组分的导热性粘合剂组合物成型为片状形成的粘合剂层,其中180°剥离时的粘合力为1N / 20mm 以上,粘合片在压力为200kPa的被粘物上粘合时,接触热阻为0.6cm 2·K / W以下。

    METHOD FOR PRODUCING THERMALLY-CONDUCTIVE ADHESIVE SHEET
    10.
    发明申请
    METHOD FOR PRODUCING THERMALLY-CONDUCTIVE ADHESIVE SHEET 审中-公开
    生产导热粘合片的方法

    公开(公告)号:US20120309879A1

    公开(公告)日:2012-12-06

    申请号:US13578318

    申请日:2011-01-27

    摘要: Provided is a method for producing a thermally-conductive adhesive sheet including a thermally-conductive adhesive agent layer by performing: a composition preparation step of preparing a thermally-conductive adhesive agent composition including a thermally-conductive particle and an acrylic polymer component; and an adhesive agent layer formation step of forming a sheet-shaped thermally-conductive adhesive agent layer with the thermally-conductive adhesive agent composition, wherein in the composition preparation step, a cyclic organic compound of 8 or less carbon atoms, or an organic compound of 3 or less carbon atoms having a hydroxy, ketone, aldehyde, carboxyl or nitrile group is mixed as a constitutional component of the thermally-conductive adhesive agent composition.

    摘要翻译: 本发明提供一种制造导热性粘合剂片的方法,该导热性粘合片包括导热性粘合剂层,其通过以下步骤:制备包含导热颗粒和丙烯酸类聚合物组分的导热粘合剂组合物的组合物制备步骤; 以及粘合剂层形成步骤,用导热粘合剂组合物形成片状导热粘合剂层,其中在组合物制备步骤中,将碳原子数为8以下的环状有机化合物或有机化合物 具有羟基,酮,醛,羧基或腈基的3个以下碳原子作为导热性粘合剂组合物的构成成分混合。