公开(公告)号：US5461237A

公开(公告)日：1995-10-24

申请号：US280535

申请日：1994-07-26

申请人： Shinji Wakamoto ,  Yuji Imai ,  Yasuaki Tanaka

发明人： Shinji Wakamoto ,  Yuji Imai ,  Yasuaki Tanaka

IPC分类号： G03F7/20 ,  G03F7/207 ,  G03F9/00 ,  G01N21/86

CPC分类号： G03F9/7026 ,  G03F7/707 ,  G03F7/70716 ,  G03F9/7003 ,  G03F9/7011 ,  G03F9/7034

摘要： In an apparatus which positions an average plane thereof parallel to a best focus plane of a projection optical system even if there is unevenness on a wafer, a leveling stage is tilted on the basis of detection signal from an auto-leveling system and a surface of a shot area on a wafer is positioned in a predetermined tilt position relative to a focus plane of the projection optical system. While such a position being kept unchanged, a deviation between the focus plane of the projection optical system and the surface of the shot area is detected at each of multi-points. Within the shot area, by the use of auto-focus system, an amount of relative tilt between an average plane of the shot area obtained from plural deviations and the focus plane of the projection optical system is calculated, and by the use of thus calculated amount of tilt and the detection signal of auto-leveling system, the focus plane of the projection optical system is positioned in parallel with the average plane of the shot area.

摘要翻译： 即使在晶片上存在不均匀性的情况下，平均平面平行于投影光学系统的最佳聚焦平面的装置中，也可以根据来自自动调平系统的检测信号和 晶片上的照射区域相对于投影光学系统的聚焦平面定位在预定的倾斜位置。 当这样的位置保持不变时，在多点处检测出投影光学系统的聚焦平面与拍摄区域的表面之间的偏差。 在拍摄区域内，通过使用自动对焦系统，计算从多个偏差获得的拍摄区域的平均平面与投影光学系统的对焦面之间的相对倾斜量，并且通过使用这样计算 自动调平系统的倾斜量和检测信号，投影光学系统的聚焦平面与拍摄区域的平均平面平行。

公开(公告)号：US5502311A

公开(公告)日：1996-03-26

申请号：US421026

申请日：1995-04-13

申请人： Yuji Imai ,  Yasuaki Tanaka ,  Shinji Wakamoto

发明人： Yuji Imai ,  Yasuaki Tanaka ,  Shinji Wakamoto

IPC分类号： G03F7/20 ,  G03F7/207 ,  G03F9/00 ,  G01N2/86

CPC分类号： G03F9/7026 ,  G03F7/70858 ,  G03F7/70883 ,  G03F9/7034

摘要： A plane positioning apparatus comprises a projector for projecting beams to a given portion on the surface of a substrate in a diagonal direction, a light receiving device to receive beams reflected from the substrate surface and output photoelectric signals in accordance with variation of the light receiving position, a calculating circuit to output deviation signals in accordance with the deviation amount of the substrate surface with respect to a predetermined fiducial plane based on the deviation signals, a substrate shifting device to shift and set the substrate at a given position in a direction perpendicular to the fiducial plane in accordance with the deviation signals, a level variation detecting device to detect level variation of the deviation signals generated when the substrate surface and the fiducial plane are displaced interrelatedly, an inclination calculating device to calculate, in accordance with the level variation characteristics, the value of the inclination of the level variation characteristics at a point where the substrate surface and the fiducial plane are substantially matched, and a correction device to correct the allowable range set for the level variation characteristics in order to control the substrate shifting device in accordance with the difference between the inclination value and the fiducial value thus calculated.

摘要翻译： 平面定位装置包括投影仪，用于将光束投影到对角线方向上的基板表面上的给定部分;光接收装置，用于接收从基板表面反射的光束，并根据光接收位置的变化输出光电信号 基于所述偏差信号，根据所述基板表面相对于预定基准面的偏移量输出偏差信号的计算电路;基板移位装置，用于将基板沿垂直于所述基板的方向移位并设定在给定位置 根据偏差信号的基准平面;电平变化检测装置，用于检测当基板表面和基准面相互偏移时产生的偏差信号的电平变化;倾斜计算装置，用于根据电平变化特性 ，t的倾斜度值 在基板表面和基准面基本匹配的点处的电平变化特性，以及校正装置，用于校正为电平变化特性设定的允许范围，以便根据倾斜度之间的差异来控制衬底移位装置 值和由此计算的基准值。

公开(公告)号：US09091920B2

公开(公告)日：2015-07-28

申请号：US14117449

申请日：2012-05-17

申请人： Takashi Sekito ,  Daishi Yokoyama ,  Takashi Fuke ,  Yuki Tashiro ,  Toshiaki Nonaka ,  Yasuaki Tanaka

发明人： Takashi Sekito ,  Daishi Yokoyama ,  Takashi Fuke ,  Yuki Tashiro ,  Toshiaki Nonaka ,  Yasuaki Tanaka

IPC分类号： G03F7/075 ,  H01L21/02 ,  H01L21/311 ,  G03F7/20

CPC分类号： G03F7/0757 ,  C08G77/045 ,  C08G77/18 ,  C08G77/80 ,  C09D183/04 ,  G03F7/023 ,  G03F7/20 ,  H01L21/02126 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/311 ,  C08K5/159

摘要： [Object]To provide a photosensitive siloxane resin composition excellent in alkali-solubility and in sensitivity, and also to provide a pattern-formation method employing that.[Means]The present invention provides a photosensitive siloxane resin composition comprising: a siloxane resin having silanol groups or alkoxysilyl groups, a crown ether, a photosensitive material, and an organic solvent. This photosensitive composition is cast on a substrate, subjected to imagewise exposure, treated with an alkali aqueous solution, and cured to form a pattern.

摘要翻译： 本发明提供碱溶性和灵敏度优异的感光性硅氧烷树脂组合物，并提供使用该感光性硅氧烷树脂组合物的图案形成方法。 本发明提供一种光敏性硅氧烷树脂组合物，其包含：具有硅烷醇基或烷氧基甲硅烷基的硅氧烷树脂，冠醚，感光材料和有机溶剂。 将该感光性组合物浇铸在基材上，进行成像曝光，用碱水溶液处理，固化形成图案。

公开(公告)号：US08906993B2

公开(公告)日：2014-12-09

申请号：US14110322

申请日：2012-04-11

申请人： Takashi Sekito ,  Daishi Yokoyama ,  Takashi Fuke ,  Yuji Tashiro ,  Toshiaki Nonaka ,  Yasuaki Tanaka

发明人： Takashi Sekito ,  Daishi Yokoyama ,  Takashi Fuke ,  Yuji Tashiro ,  Toshiaki Nonaka ,  Yasuaki Tanaka

IPC分类号： C08K5/06 ,  C08K5/053 ,  C09D183/06 ,  G02B1/10 ,  G02B1/11 ,  C09D7/00 ,  C09D7/12 ,  C09D183/04 ,  C08G77/04

CPC分类号： C09D183/06 ,  C08G77/045 ,  C08G77/16 ,  C09D7/20 ,  C09D7/65 ,  C09D183/04 ,  G02B1/105 ,  G02B1/111 ,  G02B1/14 ,  C08K5/053

摘要： [Object]To provide a coating composition excellent in coatability and free from viscosity increase caused by degradation over time, and also to provide a hardened film-formation method employing that.[Means]The present invention provides a coating composition comprising: a siloxane resin having silanol groups or alkoxysilyl groups, and a polyol having hydroxyl groups at both ends of a straight 2 to 5 carbon atom hydrocarbon chain. This coating composition enables to form a hardened film of high transparency, of high insulation and of low dielectricity.

摘要翻译： 本发明提供一种涂布性优异且不随着时间的劣化而引起的粘度增加的涂料组合物，并提供使用该涂料组合物的硬化成膜方法。 本发明提供一种涂料组合物，其包含：具有硅烷醇基或烷氧基甲硅烷基的硅氧烷树脂，以及在直链2〜5个碳原子的烃链的两端具有羟基的多元醇。 该涂料组合物能够形成高透明度，高绝缘性和低介电性的硬化膜。

公开(公告)号：US06471781B1

公开(公告)日：2002-10-29

申请号：US09343702

申请日：1999-06-30

申请人： Ryoki Tobe ,  Yasuaki Tanaka ,  Atsushi Sekiguchi ,  Hitoshi Jimba ,  So Won Kim

发明人： Ryoki Tobe ,  Yasuaki Tanaka ,  Atsushi Sekiguchi ,  Hitoshi Jimba ,  So Won Kim

IPC分类号： C23C1600

CPC分类号： C23C16/45565 ,  C23C16/34 ,  C23C16/45502 ,  C23C16/45561 ,  C23C16/45576 ,  H01L21/28568

摘要： A CVD apparatus for fabricating a titanium nitride thin film is provided. The apparatus comprises an evacuatable reaction vessel having an interior, a pumping apparatus capable of exhausting the reaction vessel and maintaining the interior of the reaction vessel at a prescribed pressure, a gas feeder for introducing a mixed gas into the reaction vessel, a substrate holder in the reaction vessel for holding a substrate to be coated with a titanium nitride thin film, and a heater for heating the substrate. The gas feeder is equipped with the following components: (a) a vaporizer for vaporizing tetrakis(dialkylamino)titanium (TDAAT) from a liquid source material, (b) a first flow controller capable of setting a flow rate of the vaporized TDAAT to any level within a range of 0.004-02 g/min, (c) a second flow controller capable of setting a flow rate of a first carrier gas mixed with the TDAAT to any level within a range of 100-1000 sccm, (d) a third flow controller capable of setting a flow rate of an added gas reactable with the TDAAT to any level within a range of 10-100 sccm, (e) a fourth flow controller capable of setting a flow rate of a second carrier gas being mixed with the added gas to any level within a range of 10-500 sccm, (f) a first supply conduit for mixing the TDAAT and the first carrier gas to create a first mixed gas and guiding the resulting first mixed gas into the reaction vessel, (g) a second supply conduit for mixing the added gas and the second carrier gas to create a second mixed gas and guiding the resulting second mixed gas into the reaction vessel, and (h) a shower head which is provided with a plurality of first nozzles connected to the first supply conduit, and a plurality of second nozzles connected to the second supply conduit, and which is configured such that the first and second mixed gases are fed into the reaction vessel through the nozzles.

公开(公告)号：US10174392B2

公开(公告)日：2019-01-08

申请号：US14130568

申请日：2012-07-02

申请人： Jun Haga ,  Takuya Nishio ,  Masayuki Wakita ,  Yasuaki Tanaka ,  Norio Imai ,  Toshiro Tomida ,  Mitsuru Yoshida ,  Kengo Hata

发明人： Jun Haga ,  Takuya Nishio ,  Masayuki Wakita ,  Yasuaki Tanaka ,  Norio Imai ,  Toshiro Tomida ,  Mitsuru Yoshida ,  Kengo Hata

IPC分类号： C21D8/02 ,  C22C38/00 ,  C22C38/02 ,  C22C38/04 ,  C22C38/06 ,  C22C38/12 ,  C21D8/12

摘要： A method for producing a high-tensile cold-rolled steel sheet includes subjecting a slab having a composition containing C: more than 0.020% and less than 0.30%, Si: more than 0.10% and 3.00% or less, and Mn: more than 1.00% and 3.50% or less to hot rolling wherein the roll draft of the final one pass is higher than 15%, and rolling is finished in the temperature region of Ar3 point or higher, optionally annealing wherein the hot-rolled steel sheet is heated to 300° C. or higher after being cooled to 780° C. or lower, coiling higher than 400° C. or lower than 400° C., cold rolling the hot-rolled steel sheet or the annealed steel sheet, and annealing wherein the cold-rolled steel sheet is soaked in the temperature region of (Ac3 point−40° C.) or higher, cooling to 500° C. or lower and 300° C. or higher, and holding in that temperature region for 30 seconds or longer.

公开(公告)号：US09970073B2

公开(公告)日：2018-05-15

申请号：US13879074

申请日：2010-10-18

申请人： Kaori Kawano ,  Yasuaki Tanaka ,  Toshiro Tomida

发明人： Kaori Kawano ,  Yasuaki Tanaka ,  Toshiro Tomida

IPC分类号： C21D8/02 ,  C21D8/04 ,  C21D9/46 ,  C21D9/48 ,  C22C38/00 ,  C22C38/02 ,  C22C38/06 ,  C22C38/38 ,  C23C2/02 ,  C23C2/28 ,  C22C38/24 ,  C22C38/26 ,  C22C38/28

CPC分类号： C21D8/0221 ,  C21D8/04 ,  C21D8/0426 ,  C21D8/0436 ,  C21D8/0463 ,  C21D9/46 ,  C21D9/48 ,  C21D2211/001 ,  C21D2211/002 ,  C21D2211/005 ,  C21D2211/008 ,  C22C38/001 ,  C22C38/02 ,  C22C38/06 ,  C22C38/24 ,  C22C38/26 ,  C22C38/28 ,  C22C38/38 ,  C23C2/02 ,  C23C2/28

摘要： A multi-phase hot-rolled steel sheet has a metallurgical structure having a main phase of ferrite with an average grain diameter of at most 3.0 μm and a second phase including at least one of martensite, bainite, and austenite. In the surface layer, the average grain diameter of the second phase is at most 2.0 μm, the difference (ΔnHav) between the average nanohardness of the main phase (nHαav) and the average nanohardness of the second phase (nH2nd av) is 6.0-10.0 GPa, the difference (ΔσnH) of the standard deviation of the nanohardness of the second phase from the standard deviation of the nanohardness of the main phase is at most 1.5 GPa, and in the central portion, the difference (ΔnHav) between the average nanohardnesses is at least 3.5 GPa to at most 6.0 GPa and the difference (ΔσnH) between the standard deviations of the nanohardnesses is at least 1.5 GPa.

公开(公告)号：US09523139B2

公开(公告)日：2016-12-20

申请号：US14130552

申请日：2012-06-27

申请人： Jun Haga ,  Takuya Nishio ,  Masayuki Wakita ,  Yasuaki Tanaka ,  Norio Imai ,  Toshiro Tomida

发明人： Jun Haga ,  Takuya Nishio ,  Masayuki Wakita ,  Yasuaki Tanaka ,  Norio Imai ,  Toshiro Tomida

IPC分类号： C22C38/02 ,  C22C38/04 ,  C22C38/06 ,  C22C38/12 ,  C22C38/14 ,  C22C38/26 ,  C22C38/38 ,  C22C38/00 ,  C21D9/48 ,  C21D1/673

CPC分类号： C22C38/38 ,  C21D1/673 ,  C21D9/48 ,  C21D2211/001 ,  C21D2211/002 ,  C21D2211/005 ,  C21D2211/008 ,  C22C38/001 ,  C22C38/002 ,  C22C38/005 ,  C22C38/02 ,  C22C38/04 ,  C22C38/06 ,  C22C38/12 ,  C22C38/14 ,  C22C38/26

摘要： A high-strength cold-rolled steel sheet excellent in ductility, work hardenability, and stretch flangeability, and having tensile strength of 780 MPa or more includes: a chemical composition containing, in mass percent, C: more than 0.020% to less than 0.30%, Si: more than 0.10% to 3.00% or less, Mn: more than 1.00% to 3.50% or less; and metallurgical structure whose main phase is a low-temperature transformation product, and whose secondary phase contains retained austenite. The retained austenite has a volume fraction relative to overall structure of more than 4.0% to less than 25.0% and an average grain size of less than 0.80 μm, and of the retained austenite, the number density of retained austenite grains whose grain size is 1.2 μm or more is 3.0×10−2 grains/μm2 or less.

摘要翻译： 具有优异的延展性，工作淬透性和拉伸凸缘性的拉伸强度为780MPa以上的高强度冷轧钢板包括：以质量％计含有C：大于0.020％至小于0.30的化学组成 ％，Si：大于0.10％〜3.00％以下，Mn：大于1.00％〜3.50％以下; 主要相为低温相变产物，二相为残余奥氏体的冶金结构。 残余奥氏体相对于总体结构的体积分数大于4.0％至小于25.0％，平均粒径小于0.80μm，残余奥氏体的晶粒尺寸为1.2的残余奥氏体晶粒的数量密度 μm以上为3.0×10 -2个/μm2以下。

公开(公告)号：US20130098515A1

公开(公告)日：2013-04-25

申请号：US13643696

申请日：2011-04-07

申请人： Yasuaki Tanaka ,  Toshiro Tomida ,  Kaori Kawano

发明人： Yasuaki Tanaka ,  Toshiro Tomida ,  Kaori Kawano

IPC分类号： C22C38/58 ,  C22C38/00 ,  C22C38/38 ,  C22C38/04 ,  C22C38/50 ,  C22C38/28 ,  C22C38/24 ,  C22C38/22 ,  C22C38/20 ,  C22C38/40 ,  C21D8/02 ,  C22C38/02

CPC分类号： C22C38/58 ,  C21D6/005 ,  C21D8/02 ,  C21D8/0226 ,  C21D9/46 ,  C21D2211/002 ,  C21D2211/005 ,  C21D2211/008 ,  C22C38/001 ,  C22C38/02 ,  C22C38/04 ,  C22C38/06 ,  C22C38/20 ,  C22C38/22 ,  C22C38/24 ,  C22C38/28 ,  C22C38/38 ,  C22C38/40 ,  C22C38/50

摘要： A multi-phase hot-rolled steel sheet having improved strength in an intermediate strain rate region has a chemical composition comprising, in mass percent, C: 0.07-0.2%, Si+Al: 0.3-1.5%, Mn: 1.0-3.0%, P: at most 0.02%, S: at most 0.005%, Cr: 0.1-0.5%, N: 0.001-0.008%, at least one of Ti: 0.002-0.05% and Nb: 0.002-0.05%, and a remainder of Fe and impurities. The area fraction of ferrite is 7-35%, the grain diameter of ferrite is in the range of 0.5-3.0 μm, and the nanohardness of ferrite is in the range of 3.5-4.5 GPa. A second phase which is the remainder other than ferrite contains martensite and bainitic ferrite and/or bainite. The average nanohardness of the second phase is 5-12 GPa, and the second phase contains a high-hardness phase of 8-12 GPa with an area fraction of 5-35% based on the overall structure.

摘要翻译： 具有中间变形率区域的强度提高的多相热轧钢板具有质量％C：0.07〜0.2％，Si + Al：0.3〜1.5％，Mn：1.0〜3.0％的化学成分， ，P：0.02％以下，S：0.005％以下，Cr：0.1-0.5％，N：0.001-0.008％，Ti：0.002〜0.05％，Nb：0.002〜0.05％中的至少一种，余量 的铁和杂质。 铁素体的面积率为7-35％，铁素体的晶粒直径在0.5-3.0μm的范围内，铁素体的纳米硬度在3.5-4.5GPa的范围内。 作为铁素体以外的剩余部分的第二相包含马氏体和贝氏体铁素体和/或贝氏体。 第二相的平均纳米硬度为5-12GPa，第二相包含8-12GPa的高硬度相，基于总体结构的面积分数为5-35％。

公开(公告)号：US08244399B2

公开(公告)日：2012-08-14

申请号：US12644615

申请日：2009-12-22

申请人： Hidehiro Maeda ,  Kazuya Okamoto ,  Yasuaki Tanaka

发明人： Hidehiro Maeda ,  Kazuya Okamoto ,  Yasuaki Tanaka

IPC分类号： G06F7/00 ,  G06F19/00 ,  H01L21/68 ,  H01L23/544 ,  B29C65/00 ,  G01B11/00

CPC分类号： H01L21/677 ,  H01L21/67092 ,  H01L21/67259 ,  H01L21/68 ,  H01L24/34 ,  H01L2924/00014 ,  Y10T156/10 ,  H01L2224/37099 ,  H01L2224/84

摘要： Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on acceleration of the substrate holders. Whether there is the possibility of misalignment may be judged based on acceleration of a transporting section that transports the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of (i) a transporting section that transports the pair of substrate holders and (ii) one of the pair of substrate holders.

摘要翻译： 提供了一种传送方法，包括判断是否存在由被对准部对准和堆叠的一对基板保持器保持的要分层的基板之间的大于或等于阈值的偏移的可能性， 一对基板支架从对准部分输送到压力施加部分; 并且如果判断表示存在不对准的可能性，则将一对基板保持器传送到除压力施加部以外的区域。 可以基于基板保持器的加速度判断是否存在未对准的可能性。 可以基于输送基板保持器的输送部的加速度判断是否存在未对准的可能性。 可以基于基板保持器的相对位置来判断是否存在未对准的可能性。 可以基于（i）输送一对基板保持器的输送部和（ii）一对基板保持件中的一个的相对位置来判断是否存在未对准的可能性。