公开(公告)号：US06960270B2

公开(公告)日：2005-11-01

申请号：US10258288

申请日：2002-02-08

申请人： Yutaka Matsumoto ,  Hironobu Nishimura ,  Masahiko Kotoyori ,  Koji Yamaguchi ,  Yoshihiko Naito

发明人： Yutaka Matsumoto ,  Hironobu Nishimura ,  Masahiko Kotoyori ,  Koji Yamaguchi ,  Yoshihiko Naito

IPC分类号： B29C65/48 ,  G11B7/26

CPC分类号： G11B7/265 ,  Y10T156/1744

摘要： A molding machine 1 which molds two sheets of disc substrates on which the information is recorded simultaneously, a cooling mechanism 3 for cooling each of the disc substrates, first movably mounting means 2 for movably mounting the disc substrate from the molding machine onto the cooling mechanism, and a second movably mounting means 4 for mounting each of the disc substrates onto a receiving portion of the turn table 5 are provided. In addition, a film forming device 8 for receiving sequentially each of the disc substrates from this movably mounting means 6 and forming a reflective film on one of the surfaces of each of the received disc substrates on which the information is recorded; a turn table 10 having a plurality of receiving portions on which the disc substrates are mounted and which rotates intermittently through each constant angle; a reversing mechanism 11 which reverses 180 degrees each of the disc substrates; and an overlapping mechanism for overlapping the reversed disc substrates over the other disc substrates are provided. Furthermore, spinners 15, 16 for rotating the overlapped two sheets of disc substrates and a curing device 23 which radiates ultra-violet rays onto the disc substrates which are rotated by the spinners to cure the liquid adhesive. According to the above-described structure, an optical disc which is compact, is fast in a production speed, and has a high quality can be achieved.

摘要翻译： 一个成型机1，其对同时记录有信息的两片光盘基板进行模制;冷却机构3，用于冷却每个光盘基板;第一可移动安装装置2，用于将光盘基板从成型机可移动地安装到冷却机构 ，以及用于将每个盘基板安装在转台5的接收部分上的第二可移动安装装置4。 另外，一种成膜装置8，用于从该可移动安装装置6顺次地接收每个盘基片，并在其中记录有信息的每个接收的盘基片的一个表面上形成反射膜; 具有多个接收部的转台10，盘基板安装在该转接台上并且每个恒定角度间歇地旋转; 反转机构11，其使每个盘基板反转180度; 并且提供了用于将反转的盘基板重叠在其它盘基板上的重叠机构。 此外，用于旋转重叠的两片光盘基板的旋转器15,16和将紫外线辐射到由旋转器旋转以固化液体粘合剂的盘基底上的固化装置23。 根据上述结构，紧凑的光盘以生产速度快，可以实现高质量。

公开(公告)号：US5743965A

公开(公告)日：1998-04-28

申请号：US641791

申请日：1996-05-02

申请人： Hironobu Nishimura ,  Yoshihiko Naito ,  Naozumi Mizutani ,  Masahiko Kotoyori ,  Katumi Yamaguchi

发明人： Hironobu Nishimura ,  Yoshihiko Naito ,  Naozumi Mizutani ,  Masahiko Kotoyori ,  Katumi Yamaguchi

IPC分类号： B05C9/12 ,  B05C11/08 ,  G03F7/16 ,  G11B7/26 ,  B05C5/00

CPC分类号： B05C11/08 ,  G03F7/162 ,  G11B7/265 ,  Y10S414/135 ,  Y10S414/139

摘要： To improve the reliability, operating speed, size of equipment and economy, a disk coating system for forming a coating on a disk such as a compact disk is arranged to transfer disks to and from a pair of spinners with first and second disk transfer mechanisms. The coating system further has an intermittently rotating turntable, an apparatus for supplying a coating material to each disk on the turntable at a predetermined position, and a system for curing a coating layer on each disk. The spinners for removing an excess amount of the coating material are placed between the turntable and the curing system. The first transfer mechanism is for transferring disks from the turntable to the spinners, and the second transfer mechanism is for transferring disks from the spinners to the curing system. The two spinners are substantially equidistant from a predetermined disk position on the turntable. The first transfer mechanism has two arms extending in two directions diverging from a pivot at a predetermined angle. With both arms, this transfer mechanism can transfer disks from the predetermined disk position on the turntable alternately to the first and second spinners at a high speed.

摘要翻译： 为了提高可靠性，操作速度，设备尺寸和经济性，用于在诸如光盘的盘上形成涂层的磁盘涂覆系统被布置成将磁盘传送到具有第一和第二磁盘传送机构的一对旋转器。 涂布系统还具有间歇旋转的转盘，用于向预定位置的转盘上的每个盘供给涂料的装置和用于固化每个盘上的涂层的系统。 用于去除过量涂层材料的旋转器被放置在转台和固化系统之间。 第一传送机构用于将盘从转盘传送到旋转器，第二传送机构用于将盘从旋转器传送到固化系统。 两个旋转器与转台上的预定盘位置基本上等距。 第一传送机构具有沿预定角度从枢轴分叉的两个方向延伸的两个臂。 使用这两个臂，该转移机构可以将盘从转盘上的预定盘位置高速转移到第一和第二旋转器。

公开(公告)号：US08624182B2

公开(公告)日：2014-01-07

申请号：US13195927

申请日：2011-08-02

申请人： Kenji Watanabe ,  Masahiro Hatakeyama ,  Yoshihiko Naito ,  Tatsuya Kohama ,  Kenji Terao ,  Takeshi Murakami ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Hiroshi Sobukawa ,  Norio Kimura

发明人： Kenji Watanabe ,  Masahiro Hatakeyama ,  Yoshihiko Naito ,  Tatsuya Kohama ,  Kenji Terao ,  Takeshi Murakami ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Hiroshi Sobukawa ,  Norio Kimura

IPC分类号： H01J37/244 ,  H01J37/285 ,  H01J37/29

CPC分类号： H01J37/22 ,  H01J37/265 ,  H01J37/29 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/2817

摘要： An electro-optical inspection apparatus prevents adhesion of dust or particles to a sample surface, wherein a stage on which a sample is placed is disposed inside a vacuum chamber that can be evacuated, and a dust collecting electrode is disposed to surround a periphery of the sample. The dust collecting electrode is applied with a voltage having the same polarity as a voltage applied to the sample and an absolute value that is the same or larger than an absolute value of the voltage. Because dust or particles adhere to the dust collecting electrode, adhesion of the dust or particles to the sample surface can be reduced. Instead of using the dust collecting electrode, it is possible to form a recess on a wall of the vacuum chamber, or to dispose on the wall a metal plate having a mesh structure to which a predetermined voltage is applied.

摘要翻译： 电光检查装置防止灰尘或颗粒附着到样品表面，其中放置样品的阶段设置在可以抽真空的真空室内，并且集尘电极被设置成围绕 样品。 集尘电极施加与施加到样品的电压极性相同的电压，绝对值等于或大于电压的绝对值。 由于灰尘或颗粒附着在集尘电极上，所以可以减少灰尘或颗粒附着到样品表面。 代替使用集尘电极，可以在真空室的壁上形成凹部，或者在壁上设置具有施加了预定电压的网状结构的金属板。

公开(公告)号：US08497476B2

公开(公告)日：2013-07-30

申请号：US13420731

申请日：2012-03-15

申请人： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Yoshihiko Naito ,  Yasushi Toma ,  Tsutomu Karimata ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Tatsuya Kohama ,  Noboru Kobayashi

发明人： Masahiro Hatakeyama ,  Shoji Yoshikawa ,  Takeshi Murakami ,  Kenji Watanabe ,  Yoshihiko Naito ,  Yasushi Toma ,  Tsutomu Karimata ,  Takehide Hayashi ,  Kiwamu Tsukamoto ,  Tatsuya Kohama ,  Noboru Kobayashi

IPC分类号： G01N23/225

CPC分类号： H01J37/073 ,  G01N23/22 ,  G01N23/223 ,  G01N23/2251 ,  G01N2223/611 ,  H01J1/34 ,  H01J37/09 ,  H01J37/10 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J37/29 ,  H01J2237/0048 ,  H01J2237/022 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/045 ,  H01J2237/0458 ,  H01J2237/0473 ,  H01J2237/0492 ,  H01J2237/061 ,  H01J2237/06333 ,  H01J2237/166 ,  H01J2237/186 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/2448 ,  H01J2237/2482 ,  H01J2237/2485 ,  H01J2237/2817 ,  H01J2237/2855 ,  H01J2237/2857

摘要： An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a beam, a primary optical system capable of guiding and irradiating the beam to the inspection object supported within a working chamber, a secondary optical system capable of including a first movable numerical aperture and a first detector which detects secondary charge particles generated from the inspection object, the secondary charge particles passing through the first movable numerical aperture, an image processing system capable of forming an image based on the secondary charge particles detected by the first detector; and a second detector arranged between the first movable numerical aperture and the first detector and which detects a location and shape at a cross over location of the secondary charge particles generated from the inspection object.

摘要翻译： 用于使用光束检查检查对象的表面的检查装置包括能够产生电荷粒子或电磁波之一作为光束的光束发生器，能够将所述光束引导并照射到被检查对象的主光学系统 在工作室内，能够包括第一可移动数值孔径的二次光学系统和检测从检查对象产生的二次电荷粒子的第一检测器，通过第一可移动数值孔径的二次电荷粒子，能够 基于由所述第一检测器检测到的次级电荷粒子形成图像; 以及第二检测器，其布置在第一可移动数值孔径和第一检测器之间，并且检测在从检查对象生成的次级充电颗粒的交叉位置处的位置和形状。

公开(公告)号：US5565680A

公开(公告)日：1996-10-15

申请号：US517793

申请日：1995-08-22

申请人： Yoshihiko Naito ,  Osamu Horita ,  Kazutoshi Nagai

发明人： Yoshihiko Naito ,  Osamu Horita ,  Kazutoshi Nagai

IPC分类号： H01J49/36 ,  B01D59/44 ,  H01J49/00

CPC分类号： H01J49/401

摘要： A compact mass spectrometer apparatus is presented to enable accurate qualitative and quantitative analyses of target ions. The apparatus can operate in a relatively poor vacuum in the range of 10.sup.-2 to 10.sup.-3 torr compared with the conventional requirement of 10.sup.-6 to 10.sup.-8 torr while providing precision results with lesser number of electrodes than the conventional mass spectrometer. The separation of the ionic species is achieved through two effects: flight time differentials produced by varying mass/charge ratios of the sample ions; as well as high frequency resonance separation by synchronizing the injection of ions with high frequency electric field applied to an electrode system having equi-potential space and high frequency space. The resulting dispersion in the wide energy spectra of the sample ions serves to accurately identify the sample ions both qualitatively and quantitatively. The spectra dispersion is achieved by modulating the ion beam with application of suitable magnitude and phase angle of the high frequency voltage, and allowing only those ions having the maximum kinetic energy to pass through to a collector electrode. The analyses are based on measurements of the maximum ion current flowing in the collector electrode.

摘要翻译： 提出了一种紧凑的质谱仪装置，以实现目标离子的准确定性和定量分析。 该设备可以在10-2至10-3托的范围内的相对较差的真空中操作，与传统的10-6至10-8托的要求相比，同时提供比常规质谱仪更少数量的电极的精确结果。 离子物质的分离通过两种效应来实现：通过改变样品离子的质量/电荷比产生的飞行时间差; 以及通过使离子注入与施加到具有等势空间和高频空间的电极系统的高频电场同步的高频谐振分离。 在样品离子的宽能谱中产生的分散物用于在定性和定量上准确地鉴定样品离子。 通过施加适当的高频电压幅度和相位角调制离子束，并且只允许具有最大动能的那些离子通过到集电极来实现光谱色散。 分析基于在集电极中流动的最大离子电流的测量。

公开(公告)号：US08274047B2

公开(公告)日：2012-09-25

申请号：US12537414

申请日：2009-08-07

申请人： Yoshihiko Naito ,  Norio Kimura ,  Kenji Terao ,  Masahiro Hatakeyama ,  Masamitsu Itoh

发明人： Yoshihiko Naito ,  Norio Kimura ,  Kenji Terao ,  Masahiro Hatakeyama ,  Masamitsu Itoh

IPC分类号： G01N23/00

CPC分类号： G01N23/203 ,  G01N2223/652

摘要： A substrate surface inspection method inspects for a defect on a substrate including a plurality of materials on a surface thereof. The inspection method comprises: irradiating the surface of the substrate with an electron beam, a landing energy of the electron beam set such that a contrast between at least two types of materials of the plurality of materials is within a predetermined range; detecting electrons generated by the substrate to acquire a surface image of the substrate, with a pattern formed thereon from the at least two types of materials eliminated or weakened; and detecting the defect from the acquired surface image by detecting as the defect an object image having a contrast by which the object image can be distinguished from a background image in the surface image. Defects present on the substrate surface can be detected easily and precisely by using a cell inspection.

摘要翻译： 基板表面检查方法检查在其表面上包括多种材料的基板上的缺陷。 检查方法包括：用电子束照射基板的表面，电子束的着陆能量设定为使得多种材料中的至少两种类型的材料之间的对比度在预定范围内; 检测由所述基板产生的电子以获得所述基板的表面图像，其中从所述至少两种类型的材料形成在其上的图案被消除或削弱; 并且通过将所述对象图像与所述表面图像中的背景图像区分开来的对比度检测作为缺陷来检测来自所获取的表面图像的缺陷。 通过使用细胞检查，可以容易且准确地检测出存在于基板表面上的缺陷。

公开(公告)号：US07952071B2

公开(公告)日：2011-05-31

申请号：US12162071

申请日：2007-01-24

申请人： Nobuharu Noji ,  Yoshihiko Naito ,  Hirosi Sobukawa ,  Masahiro Hatakeyama ,  Kenji Terao ,  Takeshi Murakami ,  Katsuya Okumura ,  Tatsuhiko Higashiki

发明人： Nobuharu Noji ,  Yoshihiko Naito ,  Hirosi Sobukawa ,  Masahiro Hatakeyama ,  Kenji Terao ,  Takeshi Murakami ,  Katsuya Okumura ,  Tatsuhiko Higashiki

IPC分类号： G01N23/00

CPC分类号： H01J37/29 ,  H01J37/045 ,  H01J2237/2446

摘要： Provided is a defect inspection apparatus and an inspection (or evaluation) method with highly improved accuracy, which would not be provided by the prior art, in the defect inspection apparatus used in a manufacturing process of a semiconductor device.Provided is a method for inspecting a sample surface with a projection type electron beam inspection apparatus, comprising the steps of: forming such an irradiation area on the sample surface by an electron beam generated from an electron gun 21 that has approximately a circular or elliptical shape of a size larger than a pattern on the sample surface; irradiating the electron beam substantially onto a center of the pattern on the sample surface; and forming an image on an electron detection plane of a detector from secondary electrons emanating from the sample surface in response to the irradiation of the electron beam for inspecting the sample surface.

摘要翻译： 提供了在半导体器件的制造工艺中使用的缺陷检查装置中，现有技术不能提供高精度的缺陷检查装置和检查（或评价）方法。 提供一种用投影型电子束检查装置检查样品表面的方法，包括以下步骤：通过由具有大致圆形或椭圆形的电子枪21产生的电子束在样品表面上形成这样的照射区域 尺寸大于样品表面上的图案; 将电子束基本上照射到样品表面上的图案的中心; 以及响应于用于检查样品表面的电子束的照射，从从样品表面发射的二次电子在检测器的电子检测平面上形成图像。

公开(公告)号：US20090152595A1

公开(公告)日：2009-06-18

申请号：US12066470

申请日：2006-09-08

申请人： Toru Kaga ,  Yoshihiko Naito ,  Masatoshi Tsuneoka ,  Kenji Terao ,  Nobuharu Noji ,  Ryo Tajima

发明人： Toru Kaga ,  Yoshihiko Naito ,  Masatoshi Tsuneoka ,  Kenji Terao ,  Nobuharu Noji ,  Ryo Tajima

IPC分类号： H01L23/522 ,  G01R31/302

CPC分类号： G01R31/307 ,  G01R31/2884 ,  G11C29/02 ,  G11C29/025

摘要： There are provided a semiconductor device having a pattern which allows electric failures to be sensitively detected at high speeds, and a method of testing the same. In one embodiment, the semiconductor device comprises a pair of row wires including a plurality of first wires arranged in a first layer at predetermined intervals in a row direction, where the first wires have ends connected to second wires arranged in a second layer at a predetermined intervals through vias, and the first wire and second wire are at the same potential. In the pair of row wires, a first wire positioned at a right end of one row wire is connected to a first conductor, and a first wire positioned at a left end in the other row wire is connected to a second conductor. By sequentially scanning the first conductor and second conductor using an electron beam, a change in the amount of emitted secondary electrons due to a difference in potential between these conductors is detected to detect electric anomalies.

摘要翻译： 提供了具有能够高速灵敏地检测电故障的图案的半导体器件及其测试方法。 在一个实施例中，半导体器件包括一对行导线，其包括以行方向以预定间隔布置在第一层中的多个第一布线，其中第一布线具有以预定的方式连接到布置在第二层中的第二布线 通过通孔的间隔，并且第一线和第二线处于相同的电位。 在一对行配线中，位于一列行的右端的第一配线与第一导体连接，位于另一行配线左端的第一配线与第二导体连接。 通过使用电子束顺序扫描第一导体和第二导体，检测由于这些导体之间的电位差引起的发射二次电子量的变化，以检测电气异常。

公开(公告)号：US09194826B2

公开(公告)日：2015-11-24

申请号：US12103354

申请日：2008-04-15

申请人： Toru Kaga ,  Kenji Terao ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Yoshihiko Naito ,  Takeshi Murakami ,  Norio Kimura

发明人： Toru Kaga ,  Kenji Terao ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Yoshihiko Naito ,  Takeshi Murakami ,  Norio Kimura

IPC分类号： G21K5/04 ,  G01N23/203 ,  G01N23/225 ,  H01J37/28

CPC分类号： G01N23/203 ,  G01N23/2251 ,  G01N2223/6116 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/2446 ,  H01J2237/2817

摘要： The electron beam apparatus is provided with a stage for mounting a sample thereon, a primary optical system for generating an electron beam having an irradiation area and irradiating the electron beam onto the sample, a secondary optical system for detecting electrons which have been generated through the irradiation of the electron beam onto the sample and have acquired structural information of the sample and acquiring an image of the sample about a viewing area and an irradiation area changing section for changing the position of the irradiation area with respect to the viewing area.

摘要翻译： 电子束装置设置有用于在其上安装样品的载物台，用于产生具有照射区域并将电子束照射到样品上的电子束的主光学系统，用于检测通过 将电子束照射到样品上并获取样品的结构信息并获取关于观察区域的样品的图像和用于改变照射区域相对于观察区域的位置的照射区域改变部分。

公开(公告)号：US08937283B2

公开(公告)日：2015-01-20

申请号：US12937145

申请日：2009-04-10

申请人： Masahiro Hatakeyama ,  Takeshi Murakami ,  Yoshihiko Naito ,  Kenji Terao ,  Norio Kimura ,  Kenji Watanabe

发明人： Masahiro Hatakeyama ,  Takeshi Murakami ,  Yoshihiko Naito ,  Kenji Terao ,  Norio Kimura ,  Kenji Watanabe

IPC分类号： H01J37/29 ,  H01J37/28 ,  H01J37/244 ,  H01L21/66

CPC分类号： H01J37/28 ,  H01J37/22 ,  H01J37/244 ,  H01J37/29 ,  H01J2237/24475 ,  H01J2237/24585 ,  H01J2237/24592 ,  H01J2237/2805 ,  H01J2237/2806 ,  H01J2237/2817 ,  H01L22/12

摘要： A technique capable of improving the ability to observe a specimen using an electron beam in an energy region which has not been conventionally given attention is provided. This specimen observation method comprises: irradiating the specimen with an electron beam; detecting electrons to be observed which have been generated and have obtained information on the specimen by the electron beam irradiation; and generating an image of the specimen from the detected electrons to be observed. The electron beam irradiation comprises irradiating the specimen with the electron beam with a landing energy set in a transition region between a secondary emission electron region in which secondary emission electrons are detected and a mirror electron region in which mirror electrons are detected, thereby causing the secondary emission electrons and the mirror electrons to be mixed as the electrons to be observed. The detection of the electrons to be observed comprises performing the detection in a state where the secondary emission electrons and the mirror electrons are mixed. Observation and inspection can be quickly carried out for a fine foreign material and pattern of 100 nm or less.

摘要翻译： 提供了一种技术，其能够提高在未经常被注意的能量区域中使用电子束观察样本的能力。 该样本观察方法包括：用电子束照射样本; 检测已经产生的待观察的电子，并通过电子束照射获得关于样品的信息; 以及从所检测的电子产生待观察的样本的图像。 电子束照射包括用电子束照射样本，其中在其中检测到二次发射电子的二次发射电子区域和其中检测到反射镜电子的镜电子区域之间的过渡区域中设置的着陆能量，从而使次级 发射电子和镜电子作为待观察的电子进行混合。 要观察的电子的检测包括在二次发射电子和镜电子混合的状态下进行检测。 对于100nm以下的细小异物和图案，可以快速进行观察和检查。