公开(公告)号：US20070236313A1

公开(公告)日：2007-10-11

申请号：US11211623

申请日：2005-08-26

Applicant: Andrew Wallis ,  John Foster ,  Paul Rubel ,  Kimon Rybnicek ,  Michael Shillinger ,  Jeffery Summers

Inventor： Andrew Wallis ,  John Foster ,  Paul Rubel ,  Kimon Rybnicek ,  Michael Shillinger ,  Jeffery Summers

IPC: H01F7/08

CPC classification number: H01H59/0009

Abstract: Systems and methods for forming an electrostatic MEMS switch include forming a cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.

Abstract translation: 用于形成静电MEMS开关的系统和方法包括在第一基板上形成悬臂梁，在第二基板上形成电触头，并且使用气密密封来连接两个基板。 气密密封可以是金/铟合金，通过加热镀在一层金上的铟层而形成。 可以通过形成穿过第二基板的厚度的通孔来进行对静电MEMS开关的电接入。

公开(公告)号：US20060062698A1

公开(公告)日：2006-03-23

申请号：US11260367

申请日：2005-10-28

Applicant: John Foster ,  John Harley ,  Steven Hovey ,  Richard Martin ,  Hung Nguyen ,  Paul Rubel

Inventor： John Foster ,  John Harley ,  Steven Hovey ,  Richard Martin ,  Hung Nguyen ,  Paul Rubel

IPC: B01L3/00

CPC classification number: B01L3/502707 ,  A61M1/3633 ,  A61M1/3678 ,  B01L3/5027 ,  B01L3/50273 ,  B01L3/502761 ,  B01L2200/0647 ,  B01L2300/0864 ,  B01L2400/0484 ,  C12M47/04 ,  G01N21/6428 ,  G01N2015/0288 ,  G01N2015/149 ,  Y10T436/11 ,  Y10T436/112499 ,  Y10T436/2575

Abstract: A micromechanical particle sorting chip uses an actuator divided into two parts to direct a component of interest into one of a plurality of possible exit paths, based on detection of a fluorescent signal emanating from the component of interest. The two-part actuator may include a force-generating portion and a microactuator portion. The microactuator portion may be disposable, whereas the force-generating portion may be reuseable. By bringing the force-generating portion into proximity to the microactuator portion, the microactuator is induced to move, thereby separating the component of interest from the rest of the fluid stream. The force-generating portion and the microactuator portion may be optimized and fabricated separately, thereby leading to faster, more reliable and less expensive particle sorting.

Abstract translation: 微机械粒子分选芯片基于从感兴趣的部件发出的荧光信号的检测，使用分成两部分的致动器将感兴趣的部件引导到多个可能的出口路径中的一个。 两部分致动器可以包括力产生部分和微致动器部分。 微致动器部分可以是一次性的，而力产生部分可以是可再利用的。 通过使力产生部分靠近微致动器部分，微致动器被诱导移动，从而将感兴趣的部件与流体流的其余部分分离。 力产生部分和微致动器部分可以分开优化和制造，从而导致更快，更可靠和更便宜的颗粒分选。

公开(公告)号：US20070196998A1

公开(公告)日：2007-08-23

申请号：US11359558

申请日：2006-02-23

Applicant: John Foster ,  Paul Rubel ,  Kimon Rybnicek ,  Paulo Motta

Inventor： John Foster ,  Paul Rubel ,  Kimon Rybnicek ,  Paulo Motta

IPC: H01L21/30 ,  H01L21/46

CPC classification number: B81C1/00936 ,  B81C2201/0132

Abstract: A method for forming moveable features suspended over a substrate is described, wherein a cavity beneath the moveable feature is first formed using a liquid etchant applied through one or more release holes. After formation of the cavity, the outline of the moveable feature is formed using a dry etch process. Since the moveable feature is free to move upon its formation using the dry etch process, no stiction issues arise using the systems and methods described here.

Abstract translation: 描述了一种用于形成悬挂在衬底上的可移动特征的方法，其中首先使用通过一个或多个释放孔施加的液体蚀刻剂形成可移动特征之下的空腔。 在形成空腔之后，使用干蚀刻工艺形成可移动特征的轮廓。 由于可移动特征在使用干蚀刻工艺形成时可以自由移动，所以不使用本文所述的系统和方法产生静电问题。

公开(公告)号：US20060277997A1

公开(公告)日：2006-12-14

申请号：US11151442

申请日：2005-06-14

Applicant: John Foster ,  Paul Rubel

Inventor： John Foster ,  Paul Rubel

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/0831

Abstract: A teeter-totter apparatus uses a curved beam to generate a differential output which may be indicative of an acceleration applied to the apparatus. The curved-beam teeter-totter apparatus can be combined with an x-axis and y-axis accelerometer, to produce a tri-axis accelerometer which is sensitive to an acceleration applied in any direction Damping plates may be added to the accelerometers to reduce unwanted motion.

Abstract translation: 跷跷板装置使用弯曲光束来产生差分输出，其可以指示施加到装置的加速度。 弯梁式跷跷板装置可以与x轴和y轴加速度计组合，以产生对任何方向施加的加速度敏感的三轴加速度计阻尼板可以添加到加速度计，以减少不必要的 运动。

公开(公告)号：US20060063307A1

公开(公告)日：2006-03-23

申请号：US11272689

申请日：2005-11-15

Applicant: Patrick Feierabend ,  John Foster ,  Richard Martin ,  Paul Rubel ,  John Stocker ,  Jeffery Summers ,  Andrew Wallis

Inventor： Patrick Feierabend ,  John Foster ,  Richard Martin ,  Paul Rubel ,  John Stocker ,  Jeffery Summers ,  Andrew Wallis

IPC: G02B6/26

CPC classification number: B81C3/008 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3586 ,  Y10T29/41

Abstract: The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electromechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

Abstract translation: 本发明描述了一种用于在与装置的原始制造平面正交的平面中展开微机械加工的致动器的方法和装置。 利用微加工机电系统（MEMS）技术中已知的分批处理，光刻工艺，多个器件被构造在合适的衬底上。 然后通过锯切和切割原始制造晶片来将器件彼此分离。 将装置旋转成正交取向并固定到第二晶片。 第二晶片还包含用于独立于其它装置寻址和操纵每个装置的电路。 利用这种方法和装置，构造致动器阵列，其致动平面垂直于阵列的平面。 本发明对于构造NxM光纤开关是有用的，其将来自N个输入光纤的光引导到M个输出光纤中。

公开(公告)号：US20070110866A1

公开(公告)日：2007-05-17

申请号：US11600364

申请日：2006-11-15

Applicant: Paul Rubel

Inventor： Paul Rubel

IPC: A23P1/00

CPC classification number: A47J37/1295

Abstract: A tortilla cooking apparatus comprising inner pillars arranged to support one or more tortillas in an inverted U-shape and to prevent the tortillas from closing during cooking. Outer pillars are included on the outside of the inner pillars and arranged to prevent the tortillas from opening during cooking. The inner and outer pillars positioned so that a respective one of the U-shape sides of each of the supported tortillas is between one of the inner pillars and one of the outer pillars. A method for cooking a tortilla comprises supporting the tortilla in an inverted U-shape such that the tortilla does not open or close during cooking. A liquid is held near the tortilla. The tortilla and liquid are heated to cook the tortilla and to evaporate the water with the evaporated liquid moisturizing the tortilla during cooking.

Abstract translation: 一种玉米粉烹饪器具，包括设置成支撑倒U形的一个或多个玉米粉圆饼并且防止玉米饼圆饼在烹饪期间关闭的内柱。 外柱子包括在内柱的外侧，并布置成防止玉米饼在烹饪过程中打开。 内柱和外柱定位成使得每个支撑的玉米粉圆饼的U形侧中的相应一个位于一个内柱和一个外柱之间。 用于烹饪玉米粉圆饼的方法包括以倒U形的方式支撑玉米粉圆饼，使得玉米粉饼在烹饪过程中不打开或关闭。 液体在玉米饼圆饼附近。 玉米饼和液体被加热烹饪玉米粉圆饼，并在烹饪过程中用蒸发的液体保湿玉米粉圆饼蒸发水分。

公开(公告)号：US20060278942A1

公开(公告)日：2006-12-14

申请号：US11151415

申请日：2005-06-14

Applicant: Paul Rubel

Inventor： Paul Rubel

IPC: H01L29/84 ,  H01L21/00 ,  C23C16/00

CPC classification number: C23C16/56 ,  B81B3/0005 ,  B81B3/001 ,  B81C2201/112 ,  C23C16/345

Abstract: A composite wafer for fabricating MEMS devices is provided with a plurality of antistiction bumps, buried under a device layer of the composite wafer. The antistiction bumps are prepared lithographically, by patterning an antistiction material prior to the assembly of the composite wafer.

Abstract translation: 用于制造MEMS器件的复合晶片设置有埋在复合晶片的器件层下方的多个抗静电凸块。 通过在复合晶片的组装之前图案化抗静电材料，制备抗静电凸块。

公开(公告)号：US20050003631A1

公开(公告)日：2005-01-06

申请号：US10866123

申请日：2004-06-12

Applicant: Patrick Feierabend ,  Richard Martin ,  Jeffery Summers ,  Andrew Wallis ,  Paul Rubel ,  John Foster ,  John Stocker

Inventor： Patrick Feierabend ,  Richard Martin ,  Jeffery Summers ,  Andrew Wallis ,  Paul Rubel ,  John Foster ,  John Stocker

IPC: G02B6/35 ,  H01L21/30 ,  H01L21/44 ,  H01L29/06

CPC classification number: B81C3/008 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3586 ,  Y10T29/41

Abstract: The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

Abstract translation: 本发明描述了一种用于在与装置的原始制造平面正交的平面中展开微机械加工的致动器的方法和装置。 利用微加工机电系统（MEMS）技术中已知的分批处理，光刻工艺，多个器件被构造在合适的衬底上。 然后通过锯切和切割原始制造晶片来将器件彼此分离。 将装置旋转成正交取向并固定到第二晶片。 第二晶片还包含用于独立于其它装置寻址和操纵每个装置的电路。 利用这种方法和装置，构造致动器阵列，其致动平面垂直于阵列的平面。 本发明对于构造NxM光纤开关是有用的，其将来自N个输入光纤的光引导到M个输出光纤中。

公开(公告)号：US20070170811A1

公开(公告)日：2007-07-26

申请号：US11334438

申请日：2006-01-19

Applicant: Paul Rubel

Inventor： Paul Rubel

IPC: H02N10/00

CPC classification number: H02N10/00 ,  F03G7/06 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49204

Abstract: A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second segment by a joint. Heating two respective drive beams causes the first segment to bend in a direction substantially about the anchor point and the second segment to bend in a direction substantially about the joint. By cooling the first drive beam faster than the second drive beam, the motion of the MEMS thermal device may be hysteretic. The MEMS hysteretic thermal device may be used for example, as an electrical switch or as a valve or piston.

Abstract translation: MEMS迟滞热装置可以具有悬臂梁，其在至少两个基本上不同的方向上围绕一个或多个点弯曲。 在一个示例性实施例中，MEMS滞后热装置由耦合到锚定点的第一段制成，并且还通过接头耦合到第二段。 加热两个相应的驱动梁使得第一段在基本上围绕锚点的方向上弯曲，而第二段在基本上围绕接头的方向上弯曲。 通过比第二驱动光束更快地冷却第一驱动光束，MEMS热装置的运动可能是滞后的。 MEMS迟滞热装置可以例如用作电开关或阀或活塞。

公开(公告)号：US20060266692A1

公开(公告)日：2006-11-30

申请号：US11136552

申请日：2005-05-25

Applicant: John Foster ,  John Harley ,  Steven Hovey ,  Richard Martin ,  Paul Rubel ,  Hung Nguyen

Inventor： John Foster ,  John Harley ,  Steven Hovey ,  Richard Martin ,  Paul Rubel ,  Hung Nguyen

IPC: B01D63/00

CPC classification number: B01D61/14 ,  B01D63/00 ,  B01D65/08 ,  B01D67/0062 ,  B01D69/02 ,  B01D2321/2058 ,  G01N1/4077

Abstract: A microfabricated cross flow filter may have multiple filtration stages. The filtration stages may include microfabricated filter barriers and gaps created in a substrate, thereby allowing very tight tolerances in the filter barrier and gap dimensions to be maintained. Using the microfabrication techniques, the filter barriers can be made having arbitrary shapes, and arranged at an angle or curved with respect to the flow direction, making the pressure drop across the filtration stage more uniform in the cross flow direction.

Abstract translation: 微制造的交叉流过滤器可以具有多个过滤阶段。 过滤阶段可以包括微制造的过滤器屏障和在衬底中产生的间隙，从而允许保持过滤器屏障和间隙尺寸的非常严格的公差。 使用微细加工技术，过滤器屏障可以制成具有任意形状，并且以相对于流动方向成一定角度或弯曲的方式布置，使跨越过滤台的压降在横向方向上更均匀。