RESONANT SENSOR SYSTEM AND METHOD FOR OPERATING A RESONANT SENSOR SYSTEM

    公开(公告)号:US20240337491A1

    公开(公告)日:2024-10-10

    申请号:US18616295

    申请日:2024-03-26

    申请人: Robert Bosch GmbH

    发明人: Antonios Nikas

    摘要: A resonant sensor system and a method for operating the resonant sensor system. The resonant sensor system includes: a drive circuit configured to generate an analog drive signal to drive an oscillatable seismic element of the MEMS gyroscope; a detection circuit coupled to the drive circuit and the oscillatable seismic element, wherein the detection circuit is configured to detect an analog signal from a motion of the oscillatable seismic element, wherein the analog signal includes an analog rotation-rate signal component and an analog quadrature signal component; and a digital processing arrangement having at least one digital-to-analog converter and a further digital-to-analog converter.

    Temperature Distribution of Microheater
    6.
    发明公开

    公开(公告)号:US20240336476A1

    公开(公告)日:2024-10-10

    申请号:US18297949

    申请日:2023-04-10

    IPC分类号: B81B7/00 H05B3/26 H05B6/44

    摘要: Example methods and devices for improving uniformity of temperature distribution of a microheater or a microheater array are disclosed. One example method includes determining that a temperature of a first coil segment of multiple coil segments of a microheater is lower than a temperature of a second coil segment of the multiple coil segments, where the first coil segment is closer to an edge of the microheater than the second coil segment, and the microheater is a heating component of a microelectromechanical systems (MEMS) based device. A resistance of the first coil segment is increased through a reduction of a width of the first coil segment. After the reduction of the width of the first coil segment, a width of the second coil segment is adjusted based on a difference between the temperature of the first coil segment and the temperature of the second coil segment.

    DIRECTIONAL MEMS MICROPHONE
    8.
    发明公开

    公开(公告)号:US20240327204A1

    公开(公告)日:2024-10-03

    申请号:US18307017

    申请日:2023-04-26

    IPC分类号: B81B7/02 H04R19/04

    摘要: A directional microelectromechanical systems (MEMS) microphone, including a first layer, a second layer, and a third layer stacked in sequence and multiple adhesive members formed between the first layer, the second layer, and the third layer, is provided. The adhesive members include an outer adhesive member disposed surrounding a periphery of the first layer, the second layer, and the third layer and an inner adhesive member disposed within a range surrounded by the outer adhesive member. The outer adhesive member and the inner adhesive member form at least two slits between the first layer, the second layer, and the third layer. An external sound is transmitted to a sound sensing element after passing through two receiving holes of the directional MEMS microphone respectively along two paths. One of the two paths passes through the at least two slits.