公开(公告)号：US11898240B2

公开(公告)日：2024-02-13

申请号：US17216466

申请日：2021-03-29

申请人： ASM IP Holding B.V.

发明人： Andrea Illiberi ,  Giuseppe Alessio Verni ,  Shaoren Deng ,  Daniele Chiappe ,  Eva Tois ,  Marko Tuominen ,  Michael Givens

IPC分类号： C23C16/04 ,  B01J21/02 ,  C23C22/82 ,  C23C22/77 ,  C23C16/40

CPC分类号： C23C16/04 ,  B01J21/02 ,  C23C16/402 ,  C23C22/77 ,  C23C22/82

摘要： Methods for selective deposition of silicon oxide films on dielectric surfaces relative to metal surfaces are provided. A metal surface of a substrate may be selectively passivated relative to the dielectric surface, such as with a polyimide layer or thiol SAM. Silicon oxide is selectively deposited on the dielectric surface relative to the passivated metal surface by contacting the dielectric surface with a metal catalyst and a silicon precursor comprising a silanol.

公开(公告)号：US11450544B2

公开(公告)日：2022-09-20

申请号：US16845914

申请日：2020-04-10

申请人： EBARA CORPORATION

发明人： Itsuki Kobata ,  Keita Yagi ,  Katsuhide Watanabe ,  Yoichi Shiokawa ,  Toru Maruyama ,  Nobuyuki Takahashi

IPC分类号： H01L21/67 ,  H01L21/677 ,  C23C22/83 ,  C23C22/77 ,  H01L21/3105 ,  H01L21/311 ,  H01L21/306 ,  H01L21/321 ,  H01L21/3213 ,  B24B37/04 ,  H01L21/66 ,  B24B37/20 ,  H01L21/683

摘要： An object of the present invention is to improve a substrate processing apparatus using the CARE method.
The present invention provides a substrate processing apparatus for polishing a processing target region of a substrate by bringing the substrate and a catalyst into contact with each other in the presence of processing liquid. The substrate processing apparatus includes a substrate holding unit configured to hold the substrate, a catalyst holding unit configured to hold the catalyst, and a driving unit configured to move the substrate holding unit and the catalyst holding unit relative to each other with the processing target region of the substrate and the catalyst kept in contact with each other. The catalyst is smaller than the substrate.

公开(公告)号：US20190330744A1

公开(公告)日：2019-10-31

申请号：US16418530

申请日：2019-05-21

申请人： ArcelorMittal

发明人： Mathias Stouff ,  David Glijer ,  Guillaume Lequippe ,  Thibault Leclerc ,  Marc Friedrich ,  Thierry Marquais

IPC分类号： C23C22/73 ,  F26B15/10 ,  B05C1/08 ,  F26B3/04 ,  B05D1/28 ,  C23C22/30 ,  C23C22/78 ,  C23C22/82 ,  C23C22/00 ,  C23C22/36 ,  G01B7/06 ,  C23C22/77

摘要： An apparatus for the implementation of a process for the continuous manufacturing of steel strips for packaging coated with a passivation layer is provided. An apparatus contains a transfer roller; a coating roller contacting the transfer roller, a surface of the coating roller having a plurality of hexagonally shaped cells with a line count being from 50 to 200 lines per centimeter and a volume being from 5·10−6 to 10·10−6 m3 per square meter of the coating roller surface; and a tank containing an aqueous passivation solution, the tank providing the aqueous passivation solution to the coating roller.

公开(公告)号：US5518555A

公开(公告)日：1996-05-21

申请号：US396942

申请日：1995-03-01

申请人： Jiangbo Ouyang ,  William L. Harpel

发明人： Jiangbo Ouyang ,  William L. Harpel

IPC分类号： C23C22/60 ,  C23C22/68 ,  C23F11/173 ,  C23C22/77

CPC分类号： C23F11/173 ,  C23C22/60 ,  C23C22/68

摘要： A heavy metal and fluoride free pretreatment for a metal surface which enhances corrosion resistance and surface adhesion properties is described. The pretreatment is an aqueous solution of an anionic polyacrylamide which can be rinsed or dried in place.

摘要翻译： 描述了一种用于金属表面的重金属和无氟化物预处理，其提高了耐腐蚀性和表面粘合性能。 预处理是阴离子聚丙烯酰胺的水溶液，其可以在适当的位置进行漂洗或干燥。

公开(公告)号：US5451270A

公开(公告)日：1995-09-19

申请号：US307970

申请日：1994-09-16

申请人： Jiangbo Ouyang ,  William L. Harpel

发明人： Jiangbo Ouyang ,  William L. Harpel

IPC分类号： C23C22/34 ,  C23C22/77 ,  C23C22/00

CPC分类号： C23C22/34 ,  C23C22/77

摘要： A process for measuring the coating weight of a dried-in-place non-chromate polyacrylamide/surfactant based conversion coating is disclosed. An ammonium hexafluorotitanate tracer added to such a conversion coating was found to not adversely affect coating properties. The tracer was found to remain proportional to the polymer matrix when the coating was analyzed by X-ray fluorescence.

摘要翻译： 公开了一种测量原位干燥的非铬酸盐聚丙烯酰胺/表面活性剂的转化涂层的涂层重量的方法。 发现添加到这种转化涂层中的六氟钛酸铵示踪剂对涂层性能没有不利影响。 当通过X射线荧光分析涂层时，发现示踪剂与聚合物基质成比例。

公开(公告)号：US5117370A

公开(公告)日：1992-05-26

申请号：US288648

申请日：1988-12-22

申请人： Michael J. DeCello ,  LeRoy C. Westwood

发明人： Michael J. DeCello ,  LeRoy C. Westwood

IPC分类号： C23C22/77 ,  G01N27/403 ,  G01N35/08

CPC分类号： C23C22/77 ,  G01N35/085

摘要： This invention is directed to a detection system for the quantitative analysis of chemical components of an aqueous phosphate conversion-coating bath, in particular, to a system for determining the concentration of zinc ions, phosphate ions, nitrite ions, and the pH of a purified sample of the bath. Optionally, the concentrations of other ions which might be present such as fluoride ions and nickel ions also can be determined. This detection system is preferably an automated on-line detection system employing X-ray fluorescence analysis, and flow injection analysis comprising specific ion electrodes and a flow through colorimeter or spectrophotometer. The automated, on-line detection system comprises computer means for automating said detection system and the computer means may be adapted for recording the resultant determinations and maintaining the chemical components at chosen concentrations in the bath.

公开(公告)号：US4849031A

公开(公告)日：1989-07-18

申请号：US92951

申请日：1987-09-04

申请人： Dieter Hauffe ,  Gisela Beege ,  Peter Mischke ,  Werner Rausch

发明人： Dieter Hauffe ,  Gisela Beege ,  Peter Mischke ,  Werner Rausch

IPC分类号： C23C22/36 ,  C23C22/77 ,  C23C22/12

CPC分类号： C23C22/362 ,  C23C22/77

摘要： Disclosed is a process of producing phosphate coatings on surfaces which consist of aluminum or its alloys and of at least one of the materials steel and galcanized steel by spraying or by spraying and dipping. Uniform phosphate layers having a high cover factor are obtained by the use of a phosphating solution which contains about 0.4 to about 0.8 g/l Zn, about 10 to about 20 g/l P.sub.2 O.sub.5, at least one accelerator and about 80 to about 220 mg/l fluoride ("F(el)"), as determined by a fluoride-sensitive electrode immersed into the bath solution and in which the content of free acid (FA) (in points) has been adjusted to and is maintained at a value corresponding to FA=(0.5 to 1.0)+K wherein K is calculated as K=(0.002 to 0.012).times.F(el). The free acid (FA) content is preferably adjusted to and maintained at FA=(0.04 to 0.06).times.C.sub.P.sbsb.2.sub.O.sbsb.5 +K and the content of free acid (FA) is determined using K=(0.003 to 0.009).times.F(el). The process is particularly suitable for preparing the surfaces for being painted, preferably by electrophoretic dip painting.

摘要翻译： 公开了一种通过喷涂或喷涂和浸渍在由铝或其合金和至少一种材料钢和镓化钢组成的表面上生产磷酸盐涂层的方法。 通过使用含有约0.4至约0.8g / l的Zn，约10至约20g / l的P 2 O 5，至少一种促进剂和约80至约220mg的磷酸盐溶液获得具有高覆盖系数的均匀磷酸盐层 /氟化物（“F（el）”），其通过浸入浴溶液中的氟化物敏感电极测定，其中游离酸（FA）的含量（以点计）已被调节并保持在值 对应于FA =（0.5〜1.0）+ K，其中K被计算为K =（0.002至0.012）×F（el）。 优选将游离酸（FA）含量调节至FA =（0.04〜0.06）×CP2O5 + K，并且使用K =（0.003〜0.009）×F（el）求出游离酸（FA）的含量。 该方法特别适于制备用于涂漆的表面，优选通过电泳浸涂。

公开(公告)号：US4657600A

公开(公告)日：1987-04-14

申请号：US731523

申请日：1985-05-07

申请人： Shigeki Matsuda

发明人： Shigeki Matsuda

IPC分类号： C23C22/07 ,  C23C22/13 ,  C23C22/73 ,  C23C22/77 ,  C23C22/12

CPC分类号： C23C22/13 ,  C23C22/73 ,  C23C22/77

摘要： A method of forming a chemical phosphate coating on the surface of steel with a treatment bath made without directly adding any oxidizing agent such as nitrite ions or hydrogen peroxide, and maintaining its temperature in a range not exceeding 40.degree. C., its pH in the range of 2.5 to 4.5 and its oxidation-reduction potential (ORP in terms of the normal hydrogen electrode potential) in the range of 150 to 550 mV. The bath is formed from an aqueous solution of the two components, i.e. the first component, an acidic solution consisting mainly of oxo acid ions, such as, NO.sub.3.sup.-, phosphoric ions (H.sub.3 PO.sub.4 or H.sub.2 PO.sub.4.sup.-), and metal ions, such as Zn.sup.2+, and the second component, an alkaline solution containing hydroxide ions (OH.sup.-). Preferably, the bath has a temperature of 20.degree. C. to 30.degree. C., a pH value of 3.0 to 4.0 and an ORP of 350 to 450 mV.

摘要翻译： 在不用直接加入任何氧化剂如亚硝酸根离子或过氧化氢的情况下，用不含直接添加氧化剂（例如亚硝酸根离子或过氧化氢）的处理槽在钢表面上形成化学磷酸盐涂层的方法，并将其温度保持在不超过40℃的范围内 范围为2.5〜4.5，氧化还原电位（正常氢电极电位的ORP）为150〜550mV。 该浴由两种组分的水溶液形成，即第一组分，主要由含氧酸离子组成的酸性溶液，例如NO 3 - ，磷酸根离子（H 3 PO 4或H 2 PO 4 - ），以及金属离子如Zn 2+ ，和第二组分，含有氢氧根离子（OH-）的碱性溶液。 优选地，浴的温度为20℃至30℃，pH值为3.0至4.0，ORP为350至450mV。

公开(公告)号：US4477329A

公开(公告)日：1984-10-16

申请号：US410183

申请日：1982-08-20

申请人： Alisa K. Rogers ,  Kenneth E. Weber

发明人： Alisa K. Rogers ,  Kenneth E. Weber

IPC分类号： C23C22/64 ,  C23C22/77 ,  G01N27/30 ,  G01N27/416 ,  G01N27/46

CPC分类号： C23C22/77 ,  C23C22/64 ,  G01N27/4166 ,  Y10T137/2509

摘要： A modified alkaline peroxide pre-bond process for the surface treatment of titanium is useful as a practical production process. In this modified process, an exceptionally wide range of allowable peroxide concentration, namely, from 0.001 molar to 0.2 molar (and preferably 0.001 molar to 0.01 molar) may be tolerated and a novel real-time peroxide monitoring and control technique is employed. The process is further improved by means of the use of stabilizers such as precipitated magnesium silicate which greatly increases bath life-time and reduces the overall operating cost of the process. Solution operating conditions have been defined which permit titanium adherends to be processed satisfactorily over a wide range of hydrogen peroxide concentration. In particular, the acceptable temperature range is 125.degree. F.-165.degree. F. (51.7.degree. C.-73.8.degree. C.); the treatment period is 15 to 25 minutes and the hydroxide concentration is 0.3 to 0.9 molar. The preferred values are approximately 145.degree. F. (62.7.degree. C.); 20 minutes, and 0.5 molar, respectively. An electrochemical method has been established utilizing a magnesium electrode (114) which provides a stable potential characteristic that is dependent only on the concentration of the peroxide. The resultant capability to reliably monitor the peroxide concentration in real time in turn permits an automated feed system to be effectively utilized for sustaining the peroxide concentration within the desired limits.

摘要翻译： 用于表面处理钛的改性碱过氧化物预粘合方法可用作实际的生产方法。 在该改进方法中，可以容许异常宽范围的允许的过氧化物浓度，即0.001摩尔至0.2摩尔（优选0.001摩尔至0.01摩尔），并且采用新的实时过氧化物监测和控制技术。 通过使用稳定剂如沉淀的硅酸镁进一步改进该方法，这大大增加了洗涤池的使用寿命并降低了该方法的总体运行成本。 已经定义了溶液操作条件，其允许钛被粘物在广泛的过氧化氢浓度范围内令人满意地加工。 特别地，可接受的温度范围是125°F-165°F（51.7℃-73.8℃）; 处理时间为15〜25分钟，氢氧化物浓度为0.3〜0.9摩尔。 优选值约为145°F（62.7℃）; 20分钟，0.5摩尔。 已经使用镁电极（114）建立了电化学方法，该电极提供仅依赖于过氧化物浓度的稳定的电位特性。 所得到的实时可靠地监测过氧化物浓度的能力又允许自动进料系统被有效地用于将过氧化物浓度维持在所需的限度内。

公开(公告)号：US4419191A

公开(公告)日：1983-12-06

申请号：US410184

申请日：1982-08-20

申请人： Kenneth E. Weber ,  Steven D. Hoffer

发明人： Kenneth E. Weber ,  Steven D. Hoffer

IPC分类号： C23C22/64 ,  C23C22/77 ,  G01N27/30 ,  G01N27/416 ,  G01N27/46

CPC分类号： C23C22/64 ,  C23C22/77 ,  G01N27/4166

摘要： A modified alkaline peroxide pre-bond process for the surface treatment of titanium is useful as a practical production process. In this modified process, an exceptionally wide range of allowable peroxide concentration, namely, from 0.001 molar to 0.2 molar (and preferably 0.001 molar to 0.01 molar) may be tolerated and a novel real-time peroxide monitoring and control technique is employed. The process is further improved by means of the use of stabilizers such as precipitated magnesium silicate which greatly increases bath life-time and reduces the overall operating cost of the process. Solution operating conditions have been defined which permit titanium adherends to be processed satisfactorily over a wide range of hydrogen peroxide concentration. In particular, the acceptance temperature range is 125.degree. F.-165.degree. F. (51.7.degree. C.-73.8.degree. C.); the treatment period is 15 to 25 minutes and the hydroxide concentration is 0.3 to 0.9 molar. The preferred values are approximately 145.degree. F. (62.7.degree. C.); 20 minutes, and 0.5 molar, respectively. An electromechanical method has been established utilizing a magnesium electrode (114) which provides a stable potential characteristic that is dependent only on the concentration of the peroxide. The resultant capability to reliably monitor the peroxide concentration in real time in turn permits an automated feed system to be effectively utilized for sustaining the peroxide concentration within the desired limits.

摘要翻译： 用于表面处理钛的改性碱过氧化物预粘合方法可用作实际的生产方法。 在该改进方法中，可以容许异常宽范围的允许的过氧化物浓度，即0.001摩尔至0.2摩尔（优选0.001摩尔至0.01摩尔），并且采用新颖的实时过氧化物监测和控制技术。 通过使用稳定剂如沉淀的硅酸镁进一步改进该方法，这大大增加了洗涤池的使用寿命并降低了该方法的总体运行成本。 已经定义了溶液操作条件，其允许钛被粘物在广泛的过氧化氢浓度范围内令人满意地加工。 特别地，接受温度范围为125°F-165°F（51.7℃-73.8℃）; 处理时间为15〜25分钟，氢氧化物浓度为0.3〜0.9摩尔。 优选值约为145°F（62.7℃）; 20分钟，0.5摩尔。 已经使用镁电极（114）建立了机电方法，该电极提供仅依赖于过氧化物浓度的稳定的电位特性。 所得到的实时可靠地监测过氧化物浓度的能力又允许自动进料系统被有效地用于将过氧化物浓度维持在所需的限度内。