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    Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatus
    1.
    发明授权
    Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatus 有权

    公开(公告)号：US12123089B2

    公开(公告)日：2024-10-22

    申请号：US17108666

    申请日：2020-12-01

    申请人： ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA

    发明人： Jiao Duan ,  Sheng Guo ,  Xiang Sun ,  Xingjian Chen

    IPC分类号： C23C14/08 ,  C23C14/06 ,  C23C14/26 ,  C23C14/30 ,  C23C14/46 ,  C23C28/04

    CPC分类号： C23C14/083 ,  C23C14/0694 ,  C23C14/26 ,  C23C14/30 ,  C23C14/46 ,  C23C28/042

    摘要： Disclosed are a method of forming a plasma coating on a component, an apparatus for forming the coating, a component, and a processing apparatus; the apparatus for forming the coating includes: a vacuum chamber; a first coating material source, a second coating material source, and a component, which are disposed in the vacuum chamber; wherein the first coating material source includes oxygen atoms and yttrium atoms, and the second coating material source includes one of yttrium fluoride, aluminum-oxygen compound, or zirconium-oxygen compound; a first exciting device configured for exciting out the yttrium atoms and oxygen atoms from within the first coating material source; a second exciting device configured for exciting out atoms from within the second coating material source; wherein collision of the yttrium atoms and oxygen atoms excited out of the first coating material source and the atoms excited out of the second coating material source produces a chemical reaction to form on the component a plasma resistant coating including a stable phase of yttrium-based multi-element metal oxide or yttrium-based oxyfluoride. The coating formed using the apparatus has a strong plasma corrosion resistance property.

    Coated cutting tool
    7.
    发明授权
    Coated cutting tool 有权

    公开(公告)号：US12031207B2

    公开(公告)日：2024-07-09

    申请号：US16500854

    申请日：2018-03-26

    申请人： SANDVIK INTELLECTUAL PROPERTY AB

    发明人： Erik Lindahl ,  Linus Von Fieandt

    IPC分类号： C23C16/36 ,  C23C16/40 ,  C23C28/04 ,  C23C30/00

    CPC分类号： C23C16/36 ,  C23C16/403 ,  C23C28/044 ,  C23C30/005 ,  B23B2224/32

    摘要： A coated cutting tool includes a substrate coated with a multi-layered wear resistant coating having a layer of α-Al2O3 and a layer of titanium carbonitride TixCyN1-y, with 0.85≤x≤1.3 and 0.4≤y≤0.85, deposited on the α-Al2O3 layer. The TixCyN1-y exhibits a texture coefficient TC(hkl), measured by X-ray diffraction using CuKα radiation and θ-2θ scan. The TC(hkl) is defined according to Harris formula:






    TC
    ⁡

    (
    hkl
    )


    =




    I
    ⁡

    (
    hkl
    )




    I
    0

    ⁡

    (
    hkl
    )



    ⁡

    [


    1
    n

    ⁢


    ∑

    n
    =
    1

    n

    ⁢


    I
    ⁡

    (
    hkl
    )




    I
    0

    ⁡

    (
    hkl
    )





    ]



    -
    1



    ,




    wherein



    I(hkl) is the measured intensity (integrated area) of the (hkl) reflection;
    I0(hkl) is standard intensity of the standard powder diffraction data according to JCPDS card no. 42-1489;
    n is the number of reflections used in the calculation, and where the (hkl) reflections used are (1 1 1), (2 0 0), (2 2 0), (3 1 1), (3 3 1), (4 2 0) and (4 2 2), and wherein TC(1 1 1)≥3.

    CUTTING TOOL
    8.
    发明公开
    CUTTING TOOL 审中-公开

    公开(公告)号：US20240218504A1

    公开(公告)日：2024-07-04

    申请号：US17924366

    申请日：2021-05-21

    申请人： Sumitomo Electric Hardmetal Corp.

    发明人： Susumu OKUNO ,  Takato YAMANISHI ,  Masahito HIKIJI ,  Fumiyoshi KOBAYASHI

    IPC分类号： C23C16/40 ,  C23C16/32 ,  C23C16/34 ,  C23C28/04

    CPC分类号： C23C16/403 ,  C23C16/32 ,  C23C16/34 ,  C23C28/042 ,  C23C28/044

    摘要： A cutting tool comprises a substrate and a coating provided on the substrate, the coating including a first alumina layer provided on the substrate, a titanium compound layer provided directly on the first alumina layer, and a second alumina layer provided directly on the titanium compound layer, in which a portion adjacent to the titanium compound layer in the first alumina layer serves as an interface region, a portion that is not the interface region in the first alumina layer serves as a non-interface region, a content of nitrogen in the interface region is 0.2 at % or more and 11 at % or less, and a content of nitrogen in the non-interface region is 0 at % or more and 0.15 at % or less; and the titanium compound layer comprises a layer of titanium carbonitroxide adjacent to the first alumina layer.