WIRE BONDING CAPILLARY APPARATUS AND METHOD
    6.
    发明公开
    WIRE BONDING CAPILLARY APPARATUS AND METHOD 有权
    DRAHTVERBINDUNGSKAPILLARVORRICHTUNG UND -VERFAHREN

    公开(公告)号:EP1904264A4

    公开(公告)日:2009-05-13

    申请号:EP06772731

    申请日:2006-06-09

    摘要: An apparatus (100) and method for bonding a wire, such as a flat rectangular cross sectioned ribbon wire (104), to a workpiece (106) in semiconductor device fabrication. The wire is fed through a passageway (116) of an ultrasonic bond capillary (102) and clamped against an engagement surface (120) of the bond capillary via a clamping jaw (118) operably coupled to the bond capillary. The wire is bonded to the workpiece along a bonding surface (112) of the bond capillary and penetrated, at least partially, between the bonding surface and the engagement surface of the bond capillary by a cutting tool (124). The cutting tool may comprise an elongate member (126) positioned between the bonding surface and engagement surface, and may have a cutting blade (128) positioned at a distal end (130) thereof. The cutting tool may further comprise a ring cutter, wherein the ribbon wire passes through a ring having a cutting surface defined about an inner diameter thereof.

    摘要翻译: 一种用于在半导体器件制造中将诸如扁平矩形横截面带状导线(104)的导线接合到工件(106)的设备(100)和方法。 通过超声波接合毛细管(102)的通路(116)供给金属丝,并通过可操作地联接到接合毛细管的夹爪(118)将金属丝夹紧在接合毛细管的接合表面(120)上。 导线沿着结合毛细管的结合表面(112)结合到工件并且通过切割工具(124)至少部分地穿透结合毛细管的结合表面和结合表面之间。 切割工具可以包括定位在结合表面和接合表面之间的细长构件(126),并且可以具有定位在其远端(130)处的切割刀片(128)。 切割工具可以进一步包括环形切割器,其中带状线穿过具有围绕其内径限定的切割表面的环。