MICROELECTRONIC SUBSTRATES HAVING COPPER ALLOY CONDUCTIVE ROUTE STRUCTURES
    2.
    发明公开
    MICROELECTRONIC SUBSTRATES HAVING COPPER ALLOY CONDUCTIVE ROUTE STRUCTURES 审中-公开
    具有铜合金导电线路结构的微电子基片

    公开(公告)号:EP3231266A1

    公开(公告)日:2017-10-18

    申请号:EP14907696.0

    申请日:2014-12-09

    申请人: Intel Corporation

    IPC分类号: H05K3/46 H01L23/12

    摘要: Microelectronic substrates having copper alloy conductive routes to reduce warpage due to differing coefficient of thermal expansion of the components used to form the microelectronic substrates. In one embodiment, the conductive routes of the microelectronic substrate may comprise an alloy of copper and an alloying metal of tungsten, molybdenum, or a combination thereof. In another embodiment, the conductive routes of the microelectronic substrate may comprise an alloy of copper, an alloying metal of tungsten, molybdenum, or a combination thereof, and a co-deposition metal of nickel, cobalt, iron, or a combination thereof. In still another embodiment, the copper alloy conductive routes may have copper concentrations which are graded therethrough, which may enable better pattern formation during a subtractive etching process used to form the copper alloy conductive routes.

    摘要翻译: 具有铜合金导电路径的微电子衬底,以减少由于用于形成微电子衬底的组件的不同热膨胀系数而导致的翘曲。 在一个实施例中,微电子衬底的导电路线可以包括铜和钨,钼或其组合的合金化金属的合金。 在另一个实施例中,微电子衬底的导电路径可以包括铜,钨,钼或其组合的合金化金属以及镍,钴,铁或其组合的共沉积金属的合金。 在又一个实施例中,铜合金导电线路可以具有通过其中渐变的铜浓度,这可以在用于形成铜合金导电路线的减去蚀刻工艺期间实现更好的图案形成。

    INTEGRATED HIGH VOLTAGE CAPACITOR
    6.
    发明公开

    公开(公告)号:EP4404254A3

    公开(公告)日:2024-09-04

    申请号:EP24172898.9

    申请日:2019-04-10

    摘要: A semiconductor device comprises a semiconductor die and an integrated capacitor formed over the semiconductor die. The integrated capacitor is configured to receive a high voltage signal. A transimpedance amplifier is formed in the semiconductor die. An avalanche photodiode is disposed over or adjacent to the semiconductor die. The integrated capacitor is coupled between the avalanche photodiode and a ground node. A resistor is coupled between a high voltage input and the avalanche photodiode. The resistor is an integrated passive device (IPD) formed over the semiconductor die. A first terminal of the integrated capacitor is coupled to a ground voltage node. A second terminal of the integrated capacitor is coupled to a voltage greater than 20 volts. The integrated capacitor comprises a plurality of interdigitated fingers in one embodiment. In another embodiment, the integrated capacitor comprises a plurality of vertically aligned plates.