반도체 웨이퍼 고정 장치
    86.
    发明公开
    반도체 웨이퍼 고정 장치 失效
    半导体波形固定装置

    公开(公告)号:KR1020080026400A

    公开(公告)日:2008-03-25

    申请号:KR1020060091381

    申请日:2006-09-20

    IPC分类号: H01L21/60 H01L21/00 H01L23/48

    摘要: An apparatus for fixing semiconductor wafer is provided to improve a yield in a die separation process by preventing adhesion of divided dies. An apparatus for fixing semiconductor wafer includes a dicing stage(120) and a die attaching film(130). The dicing stage is formed to fix a semiconductor wafer(110). The die attaching film comes in contact with an upper surface of the dicing stage to attach the semiconductor wafer on the dicing stage. The die attaching film is attached on the dicing stage by using cohesion with the dicing stage. The apparatus for fixing semiconductor wafer further includes a wafer ring(150) which is attached to the dicing stage through a wafer ring attaching member(145). The wafer ring is formed to transfer the dicing stage.

    摘要翻译: 提供一种用于固定半导体晶片的装置,以通过防止分开的模具的粘附来提高模具分离过程中的产量。 一种用于固定半导体晶片的设备包括切割台(120)和管芯附着膜(130)。 形成切割台以固定半导体晶片(110)。 芯片附着膜与切割台的上表面接触,以将半导体晶片固定在切割台上。 通过与切割台的内聚力将贴片膜附着在切割台上。 用于固定半导体晶片的装置还包括通过晶片环安装部件(145)附接到切割台的晶片环(150)。 形成晶片环以转移切割级。