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    Metal oxide temperature monitor
    3.
    发明授权
    Metal oxide temperature monitor 失效
    金属氧化物温度监测仪

    公开(公告)号：US06759260B2

    公开(公告)日：2004-07-06

    申请号：US10421986

    申请日：2003-04-23

    申请人： Arne W. Ballantine ,  Edward C. Cooney, III ,  Jeffrey D. Gilbert ,  Robert G. Miller ,  Amy L. Myrick ,  Ronald A. Warren

    发明人： Arne W. Ballantine ,  Edward C. Cooney, III ,  Jeffrey D. Gilbert ,  Robert G. Miller ,  Amy L. Myrick ,  Ronald A. Warren

    IPC分类号： H01L2166

    CPC分类号： H01L21/67248 ,  H01L21/67098

    摘要： A method, and associated structure, for monitoring temperature and temperature distributions in a heating chamber for a temperature range of 200 to 600° C., wherein the heating chamber may be used in the fabrication of a semiconductor device. A copper layer is deposited over a surface of a semiconductor wafer. Next, the wafer is heated in an ambient oxygen atmosphere to a temperature in the range of 200-600° C. The heating of the wafer oxidizes a portion of the copper layer, which generates an oxide layer. After being heated, the wafer is removed and a sheet resistance is measured at points on the wafer surface. Since the local sheet resistance is a function of the local thickness of the oxide layer, a spatial distribution of sheet resistance over the wafer surface reflects a distribution of wafer temperature across the wafer surface during the heating of the wafer. The measured spatial distribution of sheet resistance may be utilized to readjust the spatial distribution of heat input to another wafer in order to achieve a more uniform temperature across the other wafer's surface. In addition, the monitor may be reconditioned for repeated use by heating the monitor in a hydrogen ambient environment to convert the oxide layer to unoxidized copper. Additionally, the oxide layer has a color that is a function of the oxide layer thickness, where the color may be used to estimate the temperature at which the wafer was heated in the ambient oxygen atmosphere.

    摘要翻译： 一种用于监测加热室中温度范围为200至600℃的温度和温度分布的方法和相关结构，其中加热室可用于制造半导体器件。 铜层沉积在半导体晶片的表面上。 接下来，将晶片在环境氧气氛中加热到200-600℃的温度。晶片的加热使生成氧化物层的铜层的一部分氧化。 加热后，去除晶片，并在晶片表面上的点测量薄层电阻。 由于局部薄层电阻是氧化物层的局部厚度的函数，所以晶片表面上的薄层电阻的空间分布反映了在晶片加热期间晶片温度跨晶片表面的分布。 测量的薄层电阻的空间分布可以用于重新调整输入到另一晶片的热空间分布，以便在另一晶片的表面上实现更均匀的温度。 此外，可以通过在氢环境环境中加热监测器来重新使用监视器以重新使用以将氧化物层转化为未氧化的铜。 此外，氧化物层具有作为氧化物层厚度的函数的颜色，其中可以使用颜色来估计晶片在环境氧气氛中被加热的温度。

    Metal oxide temperature monitor
    4.
    发明授权
    Metal oxide temperature monitor 失效

    公开(公告)号：US06580140B1

    公开(公告)日：2003-06-17

    申请号：US09665584

    申请日：2000-09-18

    申请人： Arne W. Ballantine ,  Edward C. Cooney, III ,  Jeffrey D. Gilbert ,  Robert G. Miller ,  Amy L. Myrick ,  Ronald A. Warren

    发明人： Arne W. Ballantine ,  Edward C. Cooney, III ,  Jeffrey D. Gilbert ,  Robert G. Miller ,  Amy L. Myrick ,  Ronald A. Warren

    IPC分类号： H01L31058

    CPC分类号： H01L21/67248 ,  H01L21/67098

    摘要： A method, and associated structure, for monitoring temperature and temperature distributions in a heating chamber for a temperature range of 200 to 600° C., wherein the heating chamber may be used in the fabrication of a semiconductor device. A copper layer is deposited over a surface of a semiconductor wafer. Next, the wafer is heated in an ambient oxygen atmosphere to a temperature in the range of 200-600° C. The heating of the wafer oxidizes a portion of the copper layer, which generates an oxide layer. After being heated, the wafer is removed and a sheet resistance is measured at points on the wafer surface. Since the local sheet resistance is a function of the local thickness of the oxide layer, a spatial distribution of sheet resistance over the wafer surface reflects a distribution of wafer temperature across the wafer surface during the heating of the wafer. The measured spatial distribution of sheet resistance may be utilized to readjust the spatial distribution of heat input to another wafer in order to achieve a more uniform temperature across the other wafer's surface. In addition, the monitor may be reconditioned for repeated use by heating the monitor in a hydrogen ambient environment to convert the oxide layer to unoxidized copper. Additionally, the oxide layer has a color that is a function of the oxide layer thickness, where the color may be used to estimate the temperature at which the wafer was heated in the ambient oxygen atmosphere.

    Dynamically Adjusting Power Of Non-Core Processor Circuitry
    5.
    发明申请
    Dynamically Adjusting Power Of Non-Core Processor Circuitry 审中-公开
    动态调整非核心处理器电路的功率

    公开(公告)号：US20130179716A1

    公开(公告)日：2013-07-11

    申请号：US13780052

    申请日：2013-02-28

    申请人： Krishnakanth Sistla ,  Dean Mulla ,  Vivek Garg ,  Mark Rowland ,  Suresh Doraiswamy ,  Ganapati Srinivasa ,  Jeffrey D. Gilbert

    发明人： Krishnakanth Sistla ,  Dean Mulla ,  Vivek Garg ,  Mark Rowland ,  Suresh Doraiswamy ,  Ganapati Srinivasa ,  Jeffrey D. Gilbert

    IPC分类号： G06F1/32

    CPC分类号： G06F1/324 ,  G06F13/4022 ,  Y02D10/126

    摘要： In one embodiment, the present invention includes a multicore processor having a variable frequency domain including a plurality of cores and at least a portion of non-core circuitry of the processor. This non-core portion can include a cache memory, a cache controller, and an interconnect structure. In addition to this variable frequency domain, the processor can further have a fixed frequency domain including a power control unit (PCU). This unit may be configured to cause a frequency change to the variable frequency domain without draining the non-core portion of pending transactions. Other embodiments are described and claimed.

    摘要翻译： 在一个实施例中，本发明包括具有包括多个核心的可变频域和该处理器的至少一部分非核心电路的多核处理器。 该非核心部分可以包括高速缓冲存储器，高速缓存控制器和互连结构。 除了该可变频域之外，处理器还可以具有包括功率控制单元（PCU）的固定频域。 该单元可以被配置为引起对可变频域的频率改变，而不会排除待处理事务的非核心部分。 描述和要求保护其他实施例。

    Exclusive ownership snoop filter
    7.
    发明授权
    Exclusive ownership snoop filter 有权
    独家所有权窥探过滤器

    公开(公告)号：US07581068B2

    公开(公告)日：2009-08-25

    申请号：US11479327

    申请日：2006-06-29

    申请人： Jeffrey D. Gilbert ,  Kai Cheng ,  Liqun Cheng

    发明人： Jeffrey D. Gilbert ,  Kai Cheng ,  Liqun Cheng

    IPC分类号： G06F13/00

    CPC分类号： G06F12/0833

    摘要： A snoop filter maintains data coherency information for multiple caches in a multi-processor system. The Exclusive Ownership Snoop Filter only stores entries that are exclusively owned by a processor. A coherency engine updates the entries in the snoop filter such that an entry is removed from the snoop filter if the entry exits the exclusive state. To ensure data coherency, the coherency engine implements a sequencing rule that decouples a read request from a write request.

    摘要翻译： 监听过滤器在多处理器系统中维护多个高速缓存的数据一致性信息。 独占所有权侦听过滤器仅存储由处理器专有的条目。 一致性引擎更新窥探过滤器中的条目，以便如果条目退出独占状态，则会从窥探过滤器中删除条目。 为了确保数据一致性，一致性引擎实现将读请求与写请求分离的排序规则。

    Method and apparatus for improved performance for priority agent requests when symmetric agent bus parking is enabled
    8.
    发明授权
    Method and apparatus for improved performance for priority agent requests when symmetric agent bus parking is enabled 有权
    当启用对称代理总线停车时，用于改进优先级代理请求的性能的方法和装置

    公开(公告)号：US07124229B2

    公开(公告)日：2006-10-17

    申请号：US10980737

    申请日：2004-11-02

    申请人： Jeffrey D. Gilbert ,  Harris D. Joyce

    发明人： Jeffrey D. Gilbert ,  Harris D. Joyce

    IPC分类号： G06F13/00

    CPC分类号： G06F13/364

    摘要： A method and apparatus for improved performance for handling priority agent bus requests when symmetric agent bus parking is enabled is disclosed. In one embodiment, a modified priority agent may be used. The modified priority agent may assert an unused symmetric agent bus request when it asserts its priority agent bus request. When a symmetric agent parks on the bus, continually asserting its symmetric agent bus request, the assertion of the otherwise unused symmetric agent bus request may cause the symmetric agent to withdraw its symmetric agent bus request. This may reduce bus response time for subsequent modified priority agent bus requests.

    摘要翻译： 公开了一种用于在对称代理总线驻停被启动时用于处理优先代理总线请求的改进性能的方法和装置。 在一个实施例中，可以使用修改的优先权代理。 修改的优先级代理可以在断言其优先级代理总线请求时断言未使用的对称代理总线请求。 当对称代理驻留在总线上时，不断地断言其对称代理总线请求，则断言否则未使用的对称代理总线请求可能导致对称代理撤销其对称代理总线请求。 这可以减少后续修改的优先级代理总线请求的总线响应时间。