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12 条记录 (耗时 0.032 秒)

    Integrated tunable fabry-perot filter and method of making same
    1.
    发明授权
    Integrated tunable fabry-perot filter and method of making same 有权
    集成可调式fabry-perot滤波器及其制作方法

    公开(公告)号：US06836366B1

    公开(公告)日：2004-12-28

    申请号：US09645200

    申请日：2000-08-25

    申请人： Dale C. Flanders ,  Peter S. Whitney ,  Michael F. Miller ,  Stanley R. Shanfield ,  David B. West ,  Minh Van Le

    发明人： Dale C. Flanders ,  Peter S. Whitney ,  Michael F. Miller ,  Stanley R. Shanfield ,  David B. West ,  Minh Van Le

    IPC分类号： G02B528

    CPC分类号： G02B26/001 ,  G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  Y10S359/90

    摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

    摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

    Integrated tunable fabry-perot filter and method of making same
    2.
    发明授权
    Integrated tunable fabry-perot filter and method of making same 有权
    集成可调式fabry-perot滤波器及其制作方法

    公开(公告)号：US06525880B2

    公开(公告)日：2003-02-25

    申请号：US09797529

    申请日：2001-03-01

    申请人： Dale C. Flanders ,  Peter S. Whitney ,  Minh Van Le ,  Michael F. Miller ,  Stanley R. Shanfield

    发明人： Dale C. Flanders ,  Peter S. Whitney ,  Minh Van Le ,  Michael F. Miller ,  Stanley R. Shanfield

    IPC分类号： G02B2700

    CPC分类号： G02B26/001 ,  G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  Y10S359/90

    摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

    摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

    Ion beam coating apparatus
    7.
    发明授权
    Ion beam coating apparatus 失效
    离子束涂装置

    公开(公告)号：US4440108A

    公开(公告)日：1984-04-03

    申请号：US423454

    申请日：1982-09-24

    申请人： Roger G. Little ,  Stanley R. Shanfield

    发明人： Roger G. Little ,  Stanley R. Shanfield

    IPC分类号： C04B35/5831 ,  C23C16/34 ,  C23C16/509 ,  H01J37/08 ,  H01J37/32 ,  C23C13/08

    CPC分类号： H01J37/32431 ,  C04B35/5831 ,  C23C16/342 ,  C23C16/509 ,  H01J37/08

    摘要： A coating apparatus and method for coating industrial cutting and turning tools of any desired shape and configuration and the like significantly to improve the tools' working properties. The coating is formed of cubic boron nitride, with a preferred thickness not exceeding ten microns. The coating apparatus includes an rf excited plasma source chamber having a gas feed ring for ionizing a gas admitted into the chamber via the ring. The preferred feed gas is a borazine and benzene vapor mixture. A coating chamber is mounted adjacent to and contiguous with the plasma source chamber via a neck portion. The coating chamber includes a vacuum interlock to permit the entry and removal of a tool transport. At least one vacuum pump is operatively connected to the chamber. Preferably, a plurality of permanent magnets and electron supply filaments are arranged circumferentially about the plasma source chamber. Preferably, the tool transport is rotatable during coating. Preferably, the apparatus is microprocessor controlled.

    摘要翻译： 一种涂覆设备和方法，用于显着地涂覆任何所需形状和构造等的工业切割和车刀，以改善工具的工作性能。 涂层由立方氮化硼形成，优选厚度不超过10微米。 涂覆装置包括具有气体进料环的rf激发等离子体源室，该气体供给环用于经由环离子化进入该室的气体。 优选的进料气体是环硼氮烷和苯蒸气混合物。 涂覆室经由颈部部分与等离子体源室相邻并邻接地安装。 涂覆室包括真空互锁以允许进入和移除工具输送。 至少一个真空泵可操作地连接到腔室。 优选地，围绕等离子体源室周向地布置多个永磁体和电子供应细丝。 优选地，刀具输送在涂覆期间是可旋转的。 优选地，该装置是微处理器控制的。