Method for polishing a silicon surface
    6.
    发明授权
    Method for polishing a silicon surface 失效
    抛光硅表面的方法

    公开(公告)号:US3615955A

    公开(公告)日:1971-10-26

    申请号:US3615955D

    申请日:1969-02-28

    Applicant: IBM

    CPC classification number: H01L21/02024 B24B37/102 C23F3/06

    Abstract: A silicon surface is polished by a simultaneous application of mechanical and chemical polishing procedures. The silicon surface to be polished is maintained continuously wetted with an excess quantity of a displacement plating solution containing a mercury cation and a fluoride anion. Mercury is deposited on the surface by the displacement of silicon and a simultaneous and continuous wiping of the surface removes the mercury from the high areas on the silicon surface.

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