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公开(公告)号：US20130187246A1
公开(公告)日：2013-07-25
申请号：US13354705
申请日：2012-01-20
申请人： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
发明人： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
CPC分类号： H01L41/293 , G06F17/5063 , G06F17/5068 , H01L21/76898 , H01L23/481 , H01L23/66 , H01L24/03 , H01L24/05 , H01L24/24 , H01L25/16 , H01L27/0694 , H01L28/40 , H01L41/0815 , H01L41/25 , H01L2224/03009 , H01L2224/0401 , H01L2224/04105 , H01L2224/0557 , H01L2224/05572 , H01L2224/06181 , H01L2224/12105 , H01L2224/14181 , H01L2224/16145 , H01L2224/24145 , H01L2225/06548 , H03H9/64
摘要： A design structure for an integrated radio frequency (RF) filter on a backside of a semiconductor substrate includes: a device on a first side of a substrate; a radio frequency (RF) filter on a backside of the substrate; and at least one substrate conductor extending from the front side of the substrate to the backside of the substrate and electrically coupling the RF filter to the device.
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公开(公告)号：US20130187729A1
公开(公告)日：2013-07-25
申请号：US13358172
申请日：2012-01-25
申请人： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
发明人： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
CPC分类号： H03H9/13 , G06F17/5081 , H01L41/08 , H03H3/08 , H03H9/02543 , H03H9/64 , H03H9/6403 , H03H9/6413 , H03H2003/0071 , H03H2009/02299 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49147 , Y10T29/49155
摘要： Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a fixed electrode with a plurality of fingers on the piezoelectric substrate. The method further includes forming a moveable electrode with a plurality of fingers over the piezoelectric substrate. The method further includes forming actuators aligned with one or more of the plurality of fingers of the moveable electrode.
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公开(公告)号：US20130169383A1
公开(公告)日：2013-07-04
申请号：US13342375
申请日：2012-01-03
申请人： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
发明人： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
CPC分类号： H03H3/04 , B81B7/008 , B81B7/02 , G06F17/5045 , H01L41/094 , H01L41/0973 , H03H3/08 , H03H9/0542 , H03H9/0547 , H03H9/1064 , H03H9/1092 , H03H9/48 , H03H9/542 , H03H9/6403 , H03H9/6423 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49147 , Y10T29/49156
摘要： Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.
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公开(公告)号：US20130147319A1
公开(公告)日：2013-06-13
申请号：US13323285
申请日：2011-12-12
申请人： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
发明人： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Jeffrey P. GAMBINO , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
IPC分类号： H01L41/053 , H01L21/50 , H01L21/66
CPC分类号： H03H3/04 , C23C16/401 , C23C16/402 , H03H3/007 , H03H3/02 , H03H9/1007 , H03H9/105 , H03H9/1085 , H03H9/1092 , H03H9/173 , H03H2003/021 , H03H2003/0428 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49155
摘要： Manufacturing a semiconductor structure including modifying a frequency of a Film Bulk Acoustic Resonator (FBAR) device though a vent hole of a sealing layer surrounding the FBAR device.
摘要翻译： 制造半导体结构，包括通过围绕FBAR器件的密封层的通气孔来修改膜体声波谐振器（FBAR）器件的频率。
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公开(公告)号：US20130214877A1
公开(公告)日：2013-08-22
申请号：US13401418
申请日：2012-02-21
申请人： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
发明人： James W. ADKISSON , Panglijen CANDRA , Thomas J. DUNBAR , Mark D. JAFFE , Anthony K. STAMPER , Randy L. WOLF
CPC分类号： H03H3/007 , G06F17/5063 , H03H3/02 , H03H3/08 , H03H9/02007 , H03H9/02244 , H03H9/02992 , H03H9/1071 , H03H9/2447 , H03H9/2452 , H03H9/2457 , H03H9/2463 , H03H9/54 , H03H9/56 , H03H9/64 , H03H2003/022 , H03H2003/023 , H03H2003/027 , H03H2009/155 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
摘要： Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.
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