Semiconductor device and method for manufacturing the same
    2.
    发明授权
    Semiconductor device and method for manufacturing the same 有权
    半导体装置及其制造方法

    公开(公告)号:US09449883B2

    公开(公告)日:2016-09-20

    申请号:US13376081

    申请日:2009-06-05

    摘要: First protective films are formed to cover side surfaces of gate electrode portions. In an nMOS region, an extention implantation region is formed by causing a portion of the first protective film located on the side surface of the gate electrode portion to function as an offset spacer and using the offset spacer as a mask, and then, cleaning is done. Since silicon nitride films are formed on surfaces of the first protective films, the resistance to chemical solutions is improved. Furthermore, second protective films are formed on the first protective films, respectively. In a pMOS region, an extention implantation region is formed by causing a portion of the first protective film and a portion of the second protective film located on the side surface of the gate electrode portion to function as an offset spacer and using the offset spacer as the mask, and then, cleaning is done.

    摘要翻译: 形成第一保护膜以覆盖栅电极部分的侧表面。 在nMOS区域中,通过使位于栅极电极部分的侧表面上的第一保护膜的一部分用作偏移间隔物并使用偏移间隔物作为掩模来形成延伸注入区域,然后清洁 完成了 由于在第一保护膜的表面上形成氮化硅膜,因此提高了对化学溶液的耐性。 此外,在第一保护膜上分别形成第二保护膜。 在pMOS区域中,通过使第一保护膜的一部分和位于栅极电极部分的侧表面上的第二保护膜的一部分用作偏移间隔物并使用偏移间隔物形成延伸注入区 面具,然后进行清洁。

    Semiconductor device
    4.
    发明授权
    Semiconductor device 有权
    半导体器件

    公开(公告)号:US08487402B2

    公开(公告)日:2013-07-16

    申请号:US12869323

    申请日:2010-08-26

    IPC分类号: H01L29/00

    摘要: The semiconductor device which has an electric straight line-like fuse with a small occupying area is offered.A plurality of projecting portions 10f are formed in the position shifted from the middle position of electric fuse part 10a, and, more concretely, are formed in the position distant from via 10e and near via 10d. A plurality of projecting portions 20f are formed in the position shifted from the middle position of electric fuse part 20a, and, more concretely, are formed in the position distant from via 20d and near 20e. That is, projecting portions 10f and projecting portions 20f are arranged in the shape of zigzag.

    摘要翻译: 提供具有小占用面积的电直线状熔断器的半导体器件。 多个突出部10f形成在从电熔丝部10a的中间位置偏离的位置,更具体地,形成在远离通孔10e和靠近通孔10d的位置。 多个突出部20f形成在从电熔丝部20a的中间位置偏移的位置,更具体地,形成在远离通孔20d和靠近20e的位置。 也就是说,突出部分10f和突出部分20f被布置成Z字形。

    SEMICONDUCTOR DEVICE
    5.
    发明申请
    SEMICONDUCTOR DEVICE 有权
    半导体器件

    公开(公告)号:US20110006392A1

    公开(公告)日:2011-01-13

    申请号:US12878977

    申请日:2010-09-09

    IPC分类号: H01L23/525

    摘要: The semiconductor device which has an electric straight line-like fuse with a small occupying area is offered.A plurality of projecting portions 10f are formed in the position shifted from the middle position of electric fuse part 10a, and, more concretely, are formed in the position distant from via 10e and near via 10d. A plurality of projecting portions 20f are formed in the position shifted from the middle position of electric fuse part 20a, and, more concretely, are formed in the position distant from via 20d and near 20e. That is, projecting portions 10f and projecting portions 20f are arranged in the shape of zigzag.

    摘要翻译: 提供具有小占用面积的电直线状熔断器的半导体器件。 多个突出部10f形成在从电熔丝部10a的中间位置偏离的位置,更具体地,形成在远离通孔10e和靠近通孔10d的位置。 多个突出部20f形成在从电熔丝部20a的中间位置偏移的位置,更具体地,形成在远离通孔20d和靠近20e的位置。 也就是说,突出部分10f和突出部分20f被布置成Z字形。

    SEMICONDUCTOR DEVICE
    9.
    发明申请
    SEMICONDUCTOR DEVICE 有权
    半导体器件

    公开(公告)号:US20080164969A1

    公开(公告)日:2008-07-10

    申请号:US11958360

    申请日:2007-12-17

    IPC分类号: H01H37/76

    摘要: The semiconductor device which has an electric straight line-like fuse with a small occupying area is offered.A plurality of projecting portions 10f are formed in the position shifted from the middle position of electric fuse part 10a, and, more concretely, are formed in the position distant from via 10e and near via 10d. A plurality of projecting portions 20f are formed in the position shifted from the middle position of electric fuse part 20a, and, more concretely, are formed in the position distant from via 20d and near 20e. That is, projecting portions 10f and projecting portions 20f are arranged in the shape of zigzag.

    摘要翻译: 提供具有小占用面积的电直线状熔断器的半导体器件。 多个突出部分10f形成在从电熔丝部分10a的中间位置偏移的位置,更具体地,形成在远离通孔10e和靠近通孔10d的位置。 多个突出部分20f形成在从电熔丝部分20a的中间位置移位的位置,更具体地,形成在远离通孔20d和靠近20e的位置。 也就是说,突出部分10f和突出部分20f被布置成Z字形。