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公开(公告)号：US06309981B1
公开(公告)日：2001-10-30
申请号：US09557668
申请日：2000-04-25
申请人： Steven T. Mayer , Carl Russo , Evan Patton
发明人： Steven T. Mayer , Carl Russo , Evan Patton
IPC分类号： H01L2100
CPC分类号： H01L21/76877 , C23F1/08 , H01L21/02063 , H01L21/32134 , H01L21/67051 , H01L21/6708
摘要： Chemical etching methods and associated modules for performing the removal of metal from the edge bevel region of a semiconductor wafer are described. The methods and systems apply liquid etchant in a precise manner at the edge bevel region of the wafer under viscous flow conditions, so that the etchant is applied on to the front edge area and flows over the side edge and onto the back edge in a viscous manner. The etchant thus does not flow or splatter onto the active circuit region of the wafer.
摘要翻译： 描述了用于从半导体晶片的边缘斜面区域去除金属的化学蚀刻方法和相关模块。 这些方法和系统在粘性流动条件下在晶片的边缘斜面区域以精确的方式施加液体腐蚀剂，使得蚀刻剂施加到前边缘区域上并且以粘性流过侧边缘并在后边缘上流动 方式。 因此，蚀刻剂不会流动或溅射到晶片的有源电路区域。
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公开(公告)号：US5908896A
公开(公告)日：1999-06-01
申请号：US586038
申请日：1996-01-16
CPC分类号： H01G9/155 , B01J13/00 , B01J13/0091 , Y02E60/13 , Y10T428/2982
摘要： Organic aerogel microspheres which can be used in capacitors, batteries, thermal insulation, adsorption/filtration media, and chromatographic packings, having diameters ranging from about 1 micron to about 3 mm. The microspheres can be pyrolyzed to form carbon aerogel microspheres. This method involves stirring the aqueous organic phase in mineral oil at elevated temperature until the dispersed organic phase polymerizes and forms nonsticky gel spheres. The size of the microspheres depends on the collision rate of the liquid droplets and the reaction rate of the monomers from which the aqueous solution is formed. The collision rate is governed by the volume ratio of the aqueous solution to the mineral oil and the shear rate, while the reaction rate is governed by the chemical formulation and the curing temperature.
摘要翻译： 可用于电容器，电池，绝热，吸附/过滤介质和色谱填料的有机气凝胶微球，其直径范围为约1微米至约3毫米。 微球可以热解形成碳气凝胶微球。 该方法包括在升高的温度下在矿物油中搅拌含水有机相，直到分散的有机相聚合并形成不粘的凝胶球。 微球的大小取决于液滴的碰撞速率和形成水溶液的单体的反应速率。 碰撞率由水溶液与矿物油的体积比和剪切速率决定，反应速率由化学配方和固化温度决定。
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公开(公告)号：US5789338A
公开(公告)日：1998-08-04
申请号：US619393
申请日：1996-03-20
CPC分类号： H01G9/155 , C04B38/0022 , C08G8/04 , C08G8/20 , H01G11/34 , C04B2111/00844 , Y02E60/13
摘要： A high energy density capacitor incorporating a variety of carbon foam electrodes is described. The foams, derived from the pyrolysis of resorcinol-formaldehyde and related polymers, are high density (0.1 g/cc-1.0 g/cc) electrically conductive and have high surface areas (400 m.sup.2 /g-1000 m.sup.2 /g). Capacitances on the order of several tens of farad per gram of electrode are achieved.
摘要翻译： 描述了包含各种碳泡沫电极的高能量密度电容器。 衍生自间苯二酚 - 甲醛和相关聚合物的热解的泡沫体具有高密度（0.1g / cc-1.0g / cc）的导电性，并具有高的表面积（400m2 / g-1000m2 / g）。 实现了每克电极数十法拉的数量级。
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公开(公告)号：US5601938A
公开(公告)日：1997-02-11
申请号：US183876
申请日：1994-01-21
CPC分类号： H01M4/96 , H01M8/08 , H01M2300/0082 , H01M4/92
摘要： A direct energy conversion device, such as a fuel cell, using carbon aerogel electrodes, wherein the carbon aerogel is loaded with a noble catalyst, such as platinum or rhodium and soaked with phosphoric acid, for example. A separator is located between the electrodes, which are placed in a cylinder having plate current collectors positioned adjacent the electrodes and connected to a power supply, and a pair of gas manifolds, containing hydrogen and oxygen positioned adjacent the current collectors. Due to the high surface area and excellent electrical conductivity of carbon aerogels, the problems relative to high polarization resistance of carbon composite electrodes conventionally used in fuel cells are overcome.
摘要翻译： 直接能量转换装置，例如使用碳气凝胶电极的燃料电池，其中碳气凝胶装载有贵金属催化剂，例如铂或铑，并用磷酸浸泡。 分离器位于电极之间，其被放置在具有邻近电极定位并且连接到电源的板集流器的气缸中，以及一对包含位于集流器附近的氢和氧的气体歧管。 由于碳气凝胶的高表面积和优异的导电性，克服了常规用于燃料电池中的碳复合电极的高极化电阻的问题。
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95.发明授权Method for forming a cell separator for use in bipolar-stack energy storage devices 失效用于形成用于双极堆叠储能装置的电池隔板的方法
公开(公告)号：US5336274A
公开(公告)日：1994-08-09
申请号：US90881
申请日：1993-07-08
CPC分类号： H01G9/155 , H01M6/48 , H01M8/0213 , Y02E60/13 , Y10T29/49114
摘要： An improved multi-cell electrochemical energy storage device, such as a battery, fuel cell, or double layer capacitor using a cell separator which allows cells to be stacked and interconnected with low electrical resistance and high reliability while maximizing packaging efficiency. By adding repeating cells, higher voltages can be obtained. The cell separator is formed by applying an organic adhesive on opposing surfaces of adjacent carbon electrodes or surfaces of aerogel electrodes of a pair of adjacent cells prior to or after pyrolysis thereof to form carbon aerogel electrodes. The cell separator is electronically conductive, but ionically isolating, preventing an electrolytic conduction path between adjacent cells in the stack.
摘要翻译： 改进的多单元电化学能量存储装置，例如电池，燃料电池或使用电池隔板的双层电容器，其允许电池以低电阻和高可靠性堆叠和互连，同时最大限度地提高包装效率。 通过添加重复单元，可以获得更高的电压。 通过在热分解之前或之后，在相邻的碳电极或一对相邻电池的气凝胶电极的表面的相对表面上施加有机粘合剂来形成电池隔板，以形成碳气凝胶电极。 细胞分离器是电子导电的，但是离子隔离，防止堆叠中相邻细胞之间的电解传导路径。
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公开(公告)号：US08795482B1
公开(公告)日：2014-08-05
申请号：US13572483
申请日：2012-08-10
申请人： Steven T. Mayer , Marshall R. Stowell , John S. Drewery , Richard S. Hill , Timothy M. Archer , Avishai Kepten
发明人： Steven T. Mayer , Marshall R. Stowell , John S. Drewery , Richard S. Hill , Timothy M. Archer , Avishai Kepten
CPC分类号： B23H5/08 , C25F3/16 , H01L21/02068 , H01L21/2885 , H01L21/32115 , H01L21/7684
摘要： Methods and apparatus are provided for planar metal plating on a workpiece having a surface with recessed regions and exposed surface regions; comprising the steps of: causing a plating accelerator to become attached to said surface including the recessed and exposed surface regions; selectively removing the plating accelerator from the exposed surface regions without performing substantial metal plating on the surface; and after removal of plating accelerator is at least partially complete, plating metal onto the surface, whereby the plating accelerator remaining attached to the surface increases the rate of metal plating in the recessed regions relative to the rate of metal plating in the exposed surface regions.
摘要翻译： 提供了用于在具有凹陷区域和暴露表面区域的表面的工件上进行平面金属电镀的方法和装置; 包括以下步骤：使电镀加速器附着到包括凹入和暴露的表面区域的所述表面; 选择性地从暴露的表面区域去除电镀加速器，而不在表面上进行实质的金属电镀; 在去除电镀促进剂至少部分完成后，将金属镀在表面上，由此保持附着在表面上的电镀加速剂相对于露出的表面区域中的金属电镀速率增加凹陷区域中的金属电镀速率。
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97.发明申请公开(公告)号：US20140190529A1
公开(公告)日：2014-07-10
申请号：US13857883
申请日：2013-04-05
CPC分类号： H01L21/6708 , H01L21/02068 , H01L21/02087 , H01L21/0209 , H01L21/32134 , H01L21/67745 , H01L21/68735 , H01L21/68785
摘要： Chemical etching methods and associated modules for performing the removal of metal from the edge bevel region of a semiconductor wafer are described. The methods and systems provide the thin layer of pre-rinsing liquid before applying etchant at the edge bevel region of the wafer. The etchant is less diluted and diffuses faster through a thinned layer of rinsing liquid. An edge bevel removal embodiment involving that is particularly effective at reducing process time, narrowing the metal taper and allowing for subsequent chemical mechanical polishing, is disclosed.
摘要翻译： 描述了用于从半导体晶片的边缘斜面区域去除金属的化学蚀刻方法和相关模块。 在晶片的边缘斜面区域上施加蚀刻剂之前，该方法和系统提供了薄层的预漂洗液体。 蚀刻剂较少稀释，并通过稀薄的冲洗液层更快地扩散。 公开了一种边缘斜面去除实施例，其涉及在减少加工时间，使金属锥度变窄并允许随后的化学机械抛光方面特别有效。
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公开(公告)号：US08268154B1
公开(公告)日：2012-09-18
申请号：US12860787
申请日：2010-08-20
IPC分类号： C25D5/02
CPC分类号： B23H5/08 , C25F3/16 , H01L21/02068 , H01L21/2885 , H01L21/32115 , H01L21/7684
摘要： Methods and apparatus are provided for planar metal plating on a workpiece having a surface with recessed regions and exposed surface regions; comprising the steps of: causing a plating accelerator to become attached to said surface including the recessed and exposed surface regions; selectively removing the plating accelerator from the exposed surface regions without performing substantial metal plating on the surface; and after removal of plating accelerator is at least partially complete, plating metal onto the surface, whereby the plating accelerator remaining attached to the surface increases the rate of metal plating in the recessed regions relative to the rate of metal plating in the exposed surface regions.
摘要翻译： 提供了用于在具有凹陷区域和暴露表面区域的表面的工件上进行平面金属电镀的方法和装置; 包括以下步骤：使电镀加速器附着到包括凹入和暴露的表面区域的所述表面; 选择性地从暴露的表面区域去除电镀加速器，而不在表面上进行实质的金属电镀; 在去除电镀促进剂至少部分完成后，将金属镀在表面上，由此保持附着在表面上的电镀加速剂相对于露出的表面区域中的金属电镀速率增加凹陷区域中的金属电镀速率。
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99.发明授权公开(公告)号：US08262871B1
公开(公告)日：2012-09-11
申请号：US12640992
申请日：2009-12-17
申请人： Steven T. Mayer , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Jingbin Feng
发明人： Steven T. Mayer , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Jingbin Feng
CPC分类号： C25D17/001 , C25D5/08 , C25D17/002 , C25D17/008
摘要： An apparatus for electroplating a layer of metal onto a work piece surface includes a membrane separating the chamber of the apparatus into a catholyte chamber and an anolyte chamber. In the catholyte chamber is a catholyte manifold region that includes a catholyte manifold and at least one flow distribution tube. The catholyte manifold and at least one flow distribution tube serve to mix and direct catholyte flow in the catholyte chamber. The provided configuration effectively reduces failure and improves the operational ranges of the apparatus.
摘要翻译： 用于将金属层电镀到工件表面上的装置包括将装置的室分离成阴极电解液室和阳极电解液室的膜。 在阴极电解液室中是阴极电解液歧管区域，其包括阴极电解液歧管和至少一个流量分布管。 阴极电解液歧管和至少一个分流管用于混合和引导阴极电解液在阴极电解液室中的流动。 所提供的配置有效地减少故障并改善设备的操作范围。
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100.发明授权公开(公告)号：US08147660B1
公开(公告)日：2012-04-03
申请号：US11731706
申请日：2007-03-30
申请人： Steven T. Mayer , Jonathan D. Reid
发明人： Steven T. Mayer , Jonathan D. Reid
CPC分类号： C25D17/002 , C25D17/001 , C25D17/005 , C25D17/008 , C25D17/06 , C25D17/10 , C25D17/12 , C25D21/12 , C25F7/00 , H01L21/2885 , H01L21/76877 , Y10S204/07
摘要： A semiconductive counter electrode covers a highly electronically conductive electric current buss. The semiconductive counter electrode is impervious to ion flow. A substrate holder is operable to hold a substrate and to form a thin fluid gap between the semiconductive counter electrode and a substrate surface. A thin liquid electrolyte layer is located in the thin fluid gap. A power supply connected to the electric current buss and a peripheral edge of a conductive substrate surface is able to generate a potential difference between the electric current buss and the semiconductive counter electrode, on one side of the electrolyte layer, and the substrate on the other side. The semiconductive counter electrode provides a substantial resistance in the various current flow paths between the electric current buss and the semiconductive counter electrode, on one side, and the conductive substrate surface, on the other, thereby enhancing control of current distribution.
摘要翻译： 半导体对电极覆盖高度电子导电的电流总线。 半导体对电极不受离子流的影响。 衬底保持器可操作以保持衬底并且在半导体对电极和衬底表面之间形成薄的流体间隙。 薄的液体电解质层位于薄的液体间隙中。 连接到电流母线的电源和导电衬底表面的外围边缘能够在电解质层的一侧上产生电流母线和半导体对电极之间的电位差，并且在另一侧上产生衬底 侧。 半导体对电极在电流总线和半导体对电极之间的一侧和导电基板表面上的各种电流流动路径中提供了显着的电阻，从而增强了电流分布的控制。
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