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122 条记录 (耗时 0.015 秒)

    Atomic force microscope employing beam-tracking
    91.
    发明授权
    Atomic force microscope employing beam-tracking 失效
    原子力显微镜采用光束跟踪

    公开(公告)号：US5763767A

    公开(公告)日：1998-06-09

    申请号：US717767

    申请日：1996-09-23

    申请人： Pan S. Jung ,  Daphna R. Yaniv

    发明人： Pan S. Jung ,  Daphna R. Yaniv

    IPC分类号： G01B21/30 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/00 ,  G01Q30/20 ,  G01Q60/24 ,  G01B5/22

    CPC分类号： G01Q20/02 ,  B82Y35/00 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/861 ,  Y10S977/863 ,  Y10S977/868 ,  Y10S977/869 ,  Y10S977/87 ,  Y10S977/873 ,  Y10S977/875 ,  Y10S977/878 ,  Y10S977/881 ,  Y10S977/954

    摘要： A scanning probe microscope such as an atomic force microscope for measuring a feature of a sample surface with a sharp probe over an area of interest by means of a collimated light beam reflected from a reflective surface responsive to movement of the sharp probe relative to the sample surface, the movement detected by a position sensitive photodetector, includes a scanner having one end fixed and another end free and attached to the sharp probe for moving the sharp probe. Also fixed to the free end of the scanner is a mount for a beam tracking lens which is interposed into the collimated light beam to cause a focus spot of the light beam to track translational movement of the reflective surface caused by the scanner. In this way, a wide range of scanning ranges up to about 100.times.100 square micrometers is accommodated as is scanner head and scanner mode switching without the need to disturb the sample. Preferably the beam tracking lens is bi-convex and the source of the collimated light beam is a diode laser.

    摘要翻译： 一种扫描探针显微镜，例如原子力显微镜，用于通过尖锐探针相对于样品的移动从反射表面反射的准直光束，在感兴趣区域上用尖锐的探针测量样品表面的特征 由位置敏感光电检测器检测到的运动包括扫描器，其一端固定，另一端自由并附着到尖锐的探针上，用于移动尖锐的探针。 也固定到扫描器的自由端的是用于光束跟踪透镜的安装件，其被插入到准直光束中，以使光束的聚焦点跟踪由扫描仪引起的反射表面的平移运动。 以这种方式，可以容纳高达约100×100平方微米的宽范围的扫描范围，如扫描仪头和扫描仪模式切换，而不需要打扰样品。 优选地，光束跟踪透镜是双凸的，并且准直光束的源是二极管激光器。

    Atomic force microscope employing beam tracking
    92.
    发明授权
    Atomic force microscope employing beam tracking 失效
    原子力显微镜采用光束跟踪

    公开(公告)号：US5587523A

    公开(公告)日：1996-12-24

    申请号：US427353

    申请日：1995-02-15

    申请人： Pan S. Jung ,  Daphna R. Yaniv

    发明人： Pan S. Jung ,  Daphna R. Yaniv

    IPC分类号： G01B21/30 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/00 ,  G01Q30/20 ,  G01Q60/24 ,  G01B5/28

    CPC分类号： G01Q20/02 ,  B82Y35/00 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/861 ,  Y10S977/863 ,  Y10S977/868 ,  Y10S977/869 ,  Y10S977/87 ,  Y10S977/873 ,  Y10S977/875 ,  Y10S977/878 ,  Y10S977/881 ,  Y10S977/954

    摘要： A scanning probe microscope such as an atomic force microscope for measuring a feature of a sample surface with a sharp probe over an area of interest by means of a collimated light beam reflected from a reflective surface responsive to movement of the sharp probe relative to the sample surface, the movement detected by a position sensitive photodetector, includes a scanner having one end fixed and another end free and attached to the sharp probe for moving the sharp probe. Also fixed to the free end of the scanner is a mount for a beam tracking lens which is interposed into the collimated light beam to cause a focus spot of the light beam to track translational movement of the reflective surface caused by the scanner. In this way, a wide range of scanning ranges up to about 100.times.100 square micrometers is accommodated as is scanner head and scanner mode switching without the need to disturb the sample. Preferably the beam tracking lens is bi-convex and the source of the collimated light beam is a diode laser.

    摘要翻译： 一种扫描探针显微镜，例如原子力显微镜，用于通过尖锐探针相对于样品的移动从反射表面反射的准直光束，在感兴趣区域上用尖锐的探针测量样品表面的特征 由位置敏感光电检测器检测到的运动包括扫描器，其一端固定，另一端自由并附着到尖锐的探针上，用于移动尖锐的探针。 也固定到扫描器的自由端的是用于光束跟踪透镜的安装件，其被插入到准直光束中，以使光束的聚焦点跟踪由扫描仪引起的反射表面的平移运动。 以这种方式，可以容纳高达约100×100平方微米的宽范围的扫描范围，如扫描仪头和扫描仪模式切换，而不需要打扰样品。 优选地，光束跟踪透镜是双凸的，并且准直光束的源是二极管激光器。

    Micro-electro-mechanical device and method of manufacturing the same
    98.
    发明授权
    Micro-electro-mechanical device and method of manufacturing the same 有权
    微机电装置及其制造方法

    公开(公告)号：US08168461B2

    公开(公告)日：2012-05-01

    申请号：US12963483

    申请日：2010-12-08

    申请人： Kaoru Tsuchiya ,  Takafumi Mizoguchi

    发明人： Kaoru Tsuchiya ,  Takafumi Mizoguchi

    IPC分类号： H01L21/00

    CPC分类号： B81B3/007 ,  B81B2201/0264 ,  B81B2203/0315 ,  Y10S977/724 ,  Y10S977/732 ,  Y10S977/733 ,  Y10T428/249953

    摘要： The present invention improves mechanical strength of a micro-electro-mechanical device (MEMS) having a movable portion to improve reliability. In a micro-electro-mechanical device (MEMS) having a movable portion, a portion which has been a hollow portion in the case of a conventional structure is filled with a filler material. As the filler material, a block copolymer that is highly flexible is used, for example. By filling the hollow portion, mechanical strength improves. Besides, warpage of an upper portion of a structure body in the manufacture process is prevented, whereby yield improves. A micro-electro-mechanical device thus manufactured is highly reliable.

    摘要翻译： 本发明提高了具有可移动部分的微机电装置（MEMS）的机械强度，以提高可靠性。 在具有可移动部分的微机电装置（MEMS）中，在常规结构的情况下已经是中空部分的部分填充有填充材料。 作为填充材料，例如使用高度柔性的嵌段共聚物。 通过填充中空部分，机械强度提高。 此外，防止了制造过程中的结构体的上部的翘曲，从而产率提高。 这样制造的微机电装置是高度可靠的。

    Radio frequency device comprising a vibratile carbon nanotube and a vibratile tuning electrode
    99.
    发明授权
    Radio frequency device comprising a vibratile carbon nanotube and a vibratile tuning electrode 有权
    包括振动性碳纳米管和振动调谐电极的射频装置

    公开(公告)号：US08022791B2

    公开(公告)日：2011-09-20

    申请号：US12495579

    申请日：2009-06-30

    申请人： Chull Won Ju ,  Jonghyurk Park ,  Yong Il Jun ,  Hee-Bum Jung

    发明人： Chull Won Ju ,  Jonghyurk Park ,  Yong Il Jun ,  Hee-Bum Jung

    IPC分类号： H03H9/24 ,  H03H9/46 ,  H04B1/16

    CPC分类号： H03H9/02417 ,  Y10S977/732 ,  Y10S977/742 ,  Y10S977/932 ,  Y10S977/949

    摘要： An RF device is provided. The RF device includes a vibratile carbon nanotube having a nanotube natural frequency (f0), a negative electrode fixed to a first end of the carbon nanotube, a vibratile tuning electrode having a variable resonance frequency and facing a second end of the carbon nanotube, and a positive electrode electrically connected to a first end of the tuning electrode. A second end of the tuning electrode is adjacent to the second end of the carbon nanotube, and the carbon nanotube vibrates at a carrier frequency according to an external electromagnetic wave having the carrier frequency, and the tuning electrode having variable resonance frequency characteristics amplifies distance variation between the second end of the carbon nanotube and the second end of the tuning electrode to increase an electron emission sensitivity according to field emission.

    摘要翻译： 提供RF设备。 RF装置包括具有纳米管固有频率（f0）的振动性碳纳米管，固定在碳纳米管的第一端的负极，具有可变谐振频率且面向碳纳米管的第二端的振动调谐电极，以及 电极连接到调谐电极的第一端的正电极。 调谐电极的第二端与碳纳米管的第二端相邻，并且碳纳米管根据具有载波频率的外部电磁波以载波频率振动，并且具有可变谐振频率特性的调谐电极放大距离变化 在碳纳米管的第二端和调谐电极的第二端之间，以根据场发射增加电子发射灵敏度。