Selective patterning of metallization on a dielectric substrate
    145.
    发明授权
    Selective patterning of metallization on a dielectric substrate 失效
    电介质基片上金属化的选择性图案化

    公开(公告)号:US5830533A

    公开(公告)日:1998-11-03

    申请号:US985663

    申请日:1992-12-04

    CPC classification number: H05K3/182 H01L2224/02333

    Abstract: A method of selectively fabricating metallization on a dielectric substrate is disclosed. A seed layer is sputtered on a polymer dielectric, a patterned photoresist mask is disposed over the seed layer, exposed portions of the seed layer are etched, the photoresist is stripped, and copper is deposited without a mask by electroless plating on the unetched seed layer to form well-adhering high density copper lines without exposing the photoresist to the electroless bath.

    Abstract translation: 公开了一种在电介质基片上选择性地制造金属化的方法。 将种子层溅射在聚合物电介质上,将图案化的光致抗蚀剂掩模设置在种子层上,蚀刻种子层的暴露部分,剥离光致抗蚀剂,并且通过在未蚀刻的种子层上进行化学镀而不用掩模沉积铜 以形成良好粘附的高密度铜线,而不将光致抗蚀剂暴露于无电镀浴。

    Apparatus for electroplating electrical contacts
    147.
    发明授权
    Apparatus for electroplating electrical contacts 失效
    电触点电镀设备

    公开(公告)号:US5223110A

    公开(公告)日:1993-06-29

    申请号:US805131

    申请日:1991-12-11

    CPC classification number: C25D7/12 C25D17/004 H05K13/0465 H05K3/241 H05K3/3473

    Abstract: A method and apparatus for selectively electroplating a metallic coating, such as solder, onto a plurality of small and closely spaced electrical contacts. The method includes sealingly enclosing the contacts in an electroplating cell having an anode, a cathode and a chamber, forming an electrical connection between the cathode and the contacts and electroplating the contacts.

    Abstract translation: 一种用于选择性地将诸如焊料的金属涂层电镀到多个小且紧密间隔的电触点上的方法和装置。 该方法包括将触点密封地封装在具有阳极,阴极和室的电镀单元中,在阴极和触点之间形成电连接并电镀触点。

    Method for patterning electroless plated metal on a polymer substrate
    148.
    发明授权
    Method for patterning electroless plated metal on a polymer substrate 失效
    在聚合物基材上构图化学镀金属的方法

    公开(公告)号:US5084299A

    公开(公告)日:1992-01-28

    申请号:US600361

    申请日:1990-10-19

    Abstract: A method for patterning electroless plated metal on a polymer substrate. In a first embodiment a substrate is first coated with a polymer suitable for complexing a seed metal which can initiate electroless plating. The polymer is then mixed with a seed metal such as palladium, selectively irradiated to form the desired conductor pattern, and then etched so that the desired pattern remains. The substrate is subsequently placed in an electroless plating bath to form a metal pattern. In a second embodiment, before applying the seed metal a substrate immersed in a polymer solution suitable for complexing a seed metal can be selectively irradiated to selectively deposit polymer on the substrate, followed by applying a seed metal to form a polymer-seed metal mixture and an electroless plating bath. In addition, an alkaline chemical may be added to an acidic polymer to prevent the polymer from etching metal on the substrate.

    Abstract translation: 一种在聚合物基材上构图化学镀金属的方法。 在第一实施方案中,首先用适于络合可以引发化学镀的种子金属的聚合物涂覆基材。 然后将聚合物与种子金属如钯混合,选择性地照射以形成所需的导体图案,然后进行蚀刻,使得所需图案保留。 然后将衬底放置在化学镀浴中以形成金属图案。 在第二实施例中,在施加种子金属之前,可以选择性地照射浸渍在适合于种子金属络合的聚合物溶液中的基底以选择性地沉积在基底上的聚合物,然后施加种子金属以形成聚合物种子金属混合物, 化学镀浴。 此外,可以向酸性聚合物中加入碱性化学物质以防止聚合物在基材上蚀刻金属。

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