Bending transducer device for generating electrical energy from deformations and circuit module
    11.
    发明申请
    Bending transducer device for generating electrical energy from deformations and circuit module 有权
    用于从变形和电路模块产生电能的弯曲传感器装置

    公开(公告)号:US20100007246A1

    公开(公告)日:2010-01-14

    申请号:US12455428

    申请日:2009-06-01

    IPC分类号: H02N2/18

    摘要: A bending transducer device for generating electrical energy includes at least one elastically deformable support structure, one piezoelectric element, and a bearing device. The piezoelectric element is configured and situated on the support structure in such a way that the piezoelectric element is deformable due to a deformation of the support structure caused by vibration, and the support structure is supported vibration-capably in at least one bearing of the bearing device, the bearing being configured as an articulated receptacle, e.g., a hinge.

    摘要翻译: 用于产生电能的弯曲换能器装置包括至少一个可弹性变形的支撑结构,一个压电元件和一个轴承装置。 压电元件被构造并位于支撑结构上,使得压电元件由于由振动引起的支撑结构的变形而变形,并且支撑结构在轴承的至少一个轴承中可振动地支撑 装置,所述轴承被配置为铰接容器,例如铰链。

    Component having a micromechanical microphone structure, and method for operating such a microphone component
    12.
    发明授权
    Component having a micromechanical microphone structure, and method for operating such a microphone component 有权
    具有微机械麦克风结构的部件,以及用于操作这种麦克风组件的方法

    公开(公告)号:US08885849B2

    公开(公告)日:2014-11-11

    申请号:US13138276

    申请日:2010-01-11

    IPC分类号: H04B15/00 H04R19/01 H04R3/00

    CPC分类号: H04R3/007 H04R19/016

    摘要: A concept is proposed for a MEMS microphone which may be operated at a relatively low voltage level and still have comparatively high sensitivity. The component according to the present invention includes a micromechanical microphone structure having an acoustically active diaphragm which functions as a deflectable electrode of a microphone capacitor (1), and a stationary acoustically permeable counterelement which functions as a counter electrode of the microphone capacitor (1). The component also includes means for applying a high-frequency clock signal (2) to the microphone capacitor (1) and for applying the inverted clock signal (2′) to an adjustable but acoustically inactive compensation capacitor (7), an integrating operational amplifier (3) which integrates the sum of the current flow through the microphone capacitor (1) and the current flow through the compensation capacitor (7), a demodulator (4) for the output signal of the integrating operational amplifier (3), the demodulator being synchronized with the clock signal (2), and a low-pass filter for obtaining a microphone signal which corresponds to the changes in capacitance of the microphone capacitor (1), based on the output signal of the demodulator (4).

    摘要翻译: 对于可以在相对低的电压水平操作且仍具有较高灵敏度的MEMS麦克风提出了一个概念。 根据本发明的部件包括具有用作麦克风电容器(1)的可偏转电极的声学活动膜片的微机械麦克风结构和用作麦克风电容器(1)的对电极的静止声透射反射器, 。 该组件还包括用于将高频时钟信号(2)施加到麦克风电容器(1)并用于将反相时钟信号(2')施加到可调谐但无声补偿电容器(7)的装置,积分运算放大器 (3),其集成了通过麦克风电容器(1)的电流和通过补偿电容器(7)的电流之和,用于积分运算放大器(3)的输出信号的解调器(4),解调器 与时钟信号(2)同步,以及低通滤波器,用于基于解调器(4)的输出信号获得与麦克风电容器(1)的电容变化相对应的麦克风信号。

    Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof
    18.
    发明授权
    Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof 有权
    具有硅层和钝化层的层和系统,在硅层上制造钝化层的方法及其用途

    公开(公告)号:US07642545B2

    公开(公告)日:2010-01-05

    申请号:US10520886

    申请日:2003-05-06

    IPC分类号: H01L21/00

    摘要: A layer system and a method for producing the layer system are provided, the layer system having a silicon layer, on which at least regionally a passivating layer is superficially deposited, the passivating layer having a first, at least largely inorganic partial layer and a second, at least largely polymer partial layer. The method includes producing on the silicon layer, a first, inorganic partial layer, and producing on this first partial layer a second, polymer partial layer, which form the passivating layer. The production of the intermediate layer occurs in such a way that the intermediate layer in its surface area adjoining the first partial layer is composed as the first partial layer, and the intermediate layer in its surface area adjoining the second partial layer is composed as the second partial layer. The composition of the intermediate layer transitions, either continuously or in steps, from the composition corresponding to the first partial layer into the composition corresponding to the second partial layer.

    摘要翻译: 提供了一种用于制造层系统的层系统和方法,所述层系统具有硅层,其上至少区域地表面钝化钝化层,所述钝化层具有第一至少大部分无机部分层和第二层 ,至少主要是聚合物部分层。 该方法包括在硅层上制备第一无机部分层,并在该第一部分层上制备形成钝化层的第二聚合物部分层。 中间层的制造以与第一部分层相邻的表面区域的中间层构成为第一部分层的方式发生,并且与其邻接的第二部分层的表面区域中的中间层构成为第二部分层 部分层。 中间层的组成可以从对应于第一部分层的组合物连续地或逐步地转变成对应于第二部分层的组合物。