METHOD OF MANUFACTURING SEMICONDUCTOR SUBSTRATE
    11.
    发明申请
    METHOD OF MANUFACTURING SEMICONDUCTOR SUBSTRATE 有权
    制造半导体基板的方法

    公开(公告)号:US20170069785A1

    公开(公告)日:2017-03-09

    申请号:US15183869

    申请日:2016-06-16

    Abstract: A method of manufacturing a semiconductor substrate may include forming a first semiconductor layer on a growth substrate, forming a second semiconductor layer on the first semiconductor layer, forming a plurality of voids in the first semiconductor layer by removing portions of the first semiconductor layer that are exposed by a plurality of trenches in the second semiconductor layer, forming a third semiconductor layer on the second semiconductor layer and covering the plurality of trenches, and separating the second and third semiconductor layers from the growth substrate. on the first semiconductor layer. The third semiconductor layer are grown from the second semiconductor layer and extend above the second semiconductor layer.

    Abstract translation: 制造半导体衬底的方法可以包括在生长衬底上形成第一半导体层,在第一半导体层上形成第二半导体层,在第一半导体层中形成多个空隙,通过去除第一半导体层的部分 在所述第二半导体层中由多个沟槽暴露,在所述第二半导体层上形成第三半导体层并覆盖所述多个沟槽,以及从所述生长衬底分离所述第二和第三半导体层。 在第一半导体层上。 第三半导体层从第二半导体层生长并在第二半导体层上方延伸。

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