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    Flash memory system using complementary voltage supplies
    202.
    发明授权
    Flash memory system using complementary voltage supplies 有权
    闪存系统使用互补电源

    公开(公告)号：US09508443B2

    公开(公告)日：2016-11-29

    申请号：US15135346

    申请日：2016-04-21

    Applicant: Silicon Storage Technology, Inc.

    Inventor： Hieu Van Tran ,  Anh Ly ,  Thuan Vu ,  Hung Quoc Nguyen

    IPC: G11C16/06 ,  G11C16/14 ,  G11C16/10 ,  G11C16/26 ,  G11C16/08

    CPC classification number: G11C16/30 ,  G11C5/14 ,  G11C5/145 ,  G11C5/147 ,  G11C8/08 ,  G11C16/0408 ,  G11C16/0425 ,  G11C16/08 ,  G11C16/10 ,  G11C16/14 ,  G11C16/16 ,  G11C16/26 ,  G11C2216/04 ,  H01L27/11521

    Abstract: A non-volatile memory device comprises a semiconductor substrate of a first conductivity type. An array of non-volatile memory cells is located in the semiconductor substrate and arranged in a plurality of rows and columns. Each memory cell comprises a first region on a surface of the semiconductor substrate of a second conductivity type, and a second region on the surface of the semiconductor substrate of the second conductivity type. A channel region is between the first region and the second region. A word line overlies a first portion of the channel region and is insulated therefrom, and adjacent to the first region and having little or no overlap with the first region. A floating gate overlies a second portion of the channel region, is adjacent to the first portion, and is insulated therefrom and is adjacent to the second region. A coupling gate overlies the floating gate. A bit line is connected to the first region. During the operations of program, read, or erase, a negative voltage can be applied to the word lines and/or coupling gates of the selected or unselected memory cells.

    Abstract translation: 非易失性存储器件包括第一导电类型的半导体衬底。 非易失性存储单元的阵列位于半导体衬底中并且被布置成多个行和列。 每个存储单元包括第二导电类型的半导体衬底的表面上的第一区域和第二导电类型的半导体衬底的表面上的第二区域。 沟道区域在第一区域和第二区域之间。 字线覆盖在沟道区域的第一部分上，并且与第一区域绝缘，并且与第一区域相邻并且与第一区域几乎没有或没有重叠。 浮动栅极覆盖沟道区域的第二部分，与第一部分相邻，并与第二部分绝缘并与第二区域相邻。 耦合栅极覆盖浮栅。 位线连接到第一区域。 在程序，读取或擦除的操作期间，负电压可以被施加到所选择的或未选择的存储单元的字线和/或耦合门。

    Method of forming split-gate memory cell array along with low and high voltage logic devices
    203.
    发明授权
    Method of forming split-gate memory cell array along with low and high voltage logic devices 有权
    与低压和高压逻辑器件一起形成分离栅极存储单元阵列的方法

    公开(公告)号：US09496369B2

    公开(公告)日：2016-11-15

    申请号：US15002307

    申请日：2016-01-20

    Applicant: Silicon Storage Technology, Inc.

    Inventor： Man-Tang Wu ,  Jeng-Wei Yang ,  Chien-Sheng Su ,  Chun-Ming Chen ,  Nhan Do

    IPC: H01L21/336 ,  H01L29/66 ,  H01L29/423 ,  H01L27/115

    CPC classification number: H01L29/66537 ,  H01L21/28273 ,  H01L27/11519 ,  H01L27/11546 ,  H01L29/42328 ,  H01L29/66825

    Abstract: A method of forming a memory device on a substrate having memory, LV and HV areas, including forming pairs of spaced apart memory stacks in the memory area, forming a first conductive layer over and insulated from the substrate, forming a first insulation layer on the first conductive layer and removing it from the memory and HV areas, performing a conductive material deposition to thicken the first conductive layer in the memory and HV areas, and to form a second conductive layer on the first insulation layer in the LV area, performing an etch to thin the first conductive layer in the memory and HV areas and to remove the second conductive layer in the LV area, removing the first insulation layer from the LV area, and patterning the first conductive layer to form blocks of the first conductive layer in the memory, LV and HV areas.

    Abstract translation: 一种在具有存储器，LV和HV区域的衬底上形成存储器件的方法，包括在存储区域中形成间隔开的存储堆叠对，在衬底上形成第一导电层并与衬底绝缘，在第一绝缘层上形成第一绝缘层 第一导电层并将其从存储器和HV区域中移除，执行导电材料沉积以增厚存储器和HV区域中的第一导电层，并在LV区域的第一绝缘层上形成第二导电层， 蚀刻以使存储器和HV区域中的第一导电层变薄，并且去除LV区域中的第二导电层，从LV区域移除第一绝缘层，以及图案化第一导电层以形成第一导电层的块 记忆，LV和HV区域。

    Formation of self-aligned source for split-gate non-volatile memory cell
    204.
    发明授权
    Formation of self-aligned source for split-gate non-volatile memory cell 有权
    分离门非易失性存储单元的自对准源的形成

    公开(公告)号：US09484261B2

    公开(公告)日：2016-11-01

    申请号：US14319893

    申请日：2014-06-30

    Applicant: Silicon Storage Technology, Inc.

    Inventor： Chien-Sheng Su ,  Jeng-Wei Yang ,  Yueh-Hsin Chen

    IPC: H01L21/336 ,  H01L21/8234 ,  H01L29/423 ,  H01L27/115 ,  H01L29/66 ,  H01L21/28

    CPC classification number: H01L27/11521 ,  H01L21/28273 ,  H01L21/823425 ,  H01L29/1608 ,  H01L29/42328 ,  H01L29/66825

    Abstract: A memory device having a pair of conductive floating gates with inner sidewalls facing each other, and disposed over and insulated from a substrate of first conductivity type. A pair of spaced apart conductive control gates each disposed over and insulated from one of the floating gates, and each including inner sidewalls facing each other. A pair of first spacers of insulation material extending along control gate inner sidewalls and over the floating gates. The floating gate inner sidewalls are aligned with side surfaces of the first spacers. A pair of second spacers of insulation material each extend along one of the first spacers and along one of the floating gate inner sidewalls. A trench formed into the substrate having sidewalls aligned with side surfaces of the second spacers. Silicon carbon disposed in the trench. Material implanted into the silicon carbon forming a first region having a second conductivity type.

    Abstract translation: 一种具有一对导电浮动栅极的存储器件，所述导电浮动栅极具有彼此相对的内侧壁，并且设置在第一导电类型的衬底上并与其绝缘。 一对间隔开的导电控制栅极，每个导电控制栅极设置在浮动栅极中的一个上并与其绝缘，并且每个包括面向彼此的内侧壁。 一对绝缘材料的第一间隔物，沿着控制栅极内侧壁和浮动栅极延伸。 浮动门内侧壁与第一间隔件的侧表面对准。 绝缘材料的一对第二间隔物各自沿着第一间隔件中的一个并且沿着浮动栅极内侧壁中的一个延伸。 形成在衬底中的沟槽，其具有与第二间隔物的侧表面对齐的侧壁。 设置在沟槽中的硅碳。 材料注入到硅碳中，形成具有第二导电类型的第一区域。

    Split Gate Non-volatile Memory Cell With 3D FINFET Structure, And Method Of Making Same
    205.
    发明申请
    Split Gate Non-volatile Memory Cell With 3D FINFET Structure, And Method Of Making Same 有权
    具有3D FINFET结构的分离门非易失性存储单元及其制作方法

    公开(公告)号：US20160276357A1

    公开(公告)日：2016-09-22

    申请号：US15050309

    申请日：2016-02-22

    Applicant: Silicon Storage Technology, Inc.

    Inventor： Chien-Sheng Su ,  Jeng-Wei Yang ,  Man-Tang Wu ,  Chun-Ming Chen ,  Hieu Van Tran ,  Nhan Do

    IPC: H01L27/115 ,  H01L29/78 ,  H01L29/66 ,  H01L27/105

    CPC classification number: H01L27/11521 ,  H01L21/28273 ,  H01L27/1052 ,  H01L27/11551 ,  H01L29/0847 ,  H01L29/42328 ,  H01L29/66795 ,  H01L29/66818 ,  H01L29/66825 ,  H01L29/785 ,  H01L29/7856 ,  H01L29/7881

    Abstract: A non-volatile memory cell including a semiconductor substrate having a fin shaped upper surface with a top surface and two side surfaces. Source and drain regions are formed in the fin shaped upper surface portion with a channel region there between. A conductive floating gate includes a first portion extending along a first portion of the top surface, and second and third portions extending along first portions of the two side surfaces, respectively. A conductive control gate includes a first portion extending along a second portion of the top surface, second and third portions extending along second portions of the two side surfaces respectively, a fourth portion extending up and over at least some of the floating gate first portion, and fifth and sixth portions extending out and over at least some of the floating gate second and third portions respectively.

    Abstract translation: 一种非易失性存储单元，包括具有上表面和两个侧表面的鳍形上表面的半导体衬底。 源极和漏极区域形成在鳍状上表面部分中，其间具有沟道区域。 导电浮栅包括沿着顶表面的第一部分延伸的第一部分，以及分别沿两个侧表面的第一部分延伸的第二和第三部分。 导电控制栅极包括沿着顶表面的第二部分延伸的第一部分，分别沿两个侧表面的第二部分延伸的第二部分和第三部分，第一部分和第二部分， 以及分别延伸至少一些所述浮动栅极第二和第三部分的第五和第六部分。

    Integration Of Split Gate Flash Memory Array And Logic Devices
    207.
    发明申请
    Integration Of Split Gate Flash Memory Array And Logic Devices 有权
    分流门闪存阵列和逻辑器件的集成

    公开(公告)号：US20160260728A1

    公开(公告)日：2016-09-08

    申请号：US15057590

    申请日：2016-03-01

    Applicant: Silicon Storage Technology, Inc.

    Inventor： Chun-Ming Chen ,  Jeng-Wei Yang ,  Chien-Sheng Su ,  Man-Tang Wu ,  Nhan Do

    IPC: H01L27/115 ,  H01L29/423

    CPC classification number: H01L27/11531 ,  G11C16/0425 ,  H01L21/28273 ,  H01L27/11534 ,  H01L29/42328 ,  H01L29/66825

    Abstract: A memory device and method including a semiconductor substrate with memory and logic device areas. A plurality of memory cells are formed in the memory area, each including first source and drain regions with a first channel region therebetween, a floating gate disposed over a first portion of the first channel region, a control gate disposed over the floating gate, a select gate disposed over a second portion of the first channel region, and an erase gate disposed over the source region. A plurality of logic devices formed in the logic device area, each including second source and drain regions with a second channel region therebetween, and a logic gate disposed over the second channel region. The substrate upper surface is recessed lower in the memory area than in the logic device area, so that the taller memory cells have an upper height similar to that of the logic devices.

    Abstract translation: 一种存储器件和方法，包括具有存储器和逻辑器件区域的半导体衬底。 多个存储单元形成在存储区域中，每个存储单元包括第一源极和漏极区域，其间具有第一沟道区域，布置在第一沟道区域的第一部分上方的浮置栅极，设置在浮置栅极上的控制栅极， 设置在第一通道区域的第二部分上的选择栅极和设置在源极区域上的擦除栅极。 形成在逻辑器件区域中的多个逻辑器件，每个逻辑器件包括在其间具有第二沟道区域的第二源极和漏极区域以及设置在第二沟道区域上的逻辑门极。 衬底上表面在存储器区域中比在逻辑器件区域中凹陷更低，使得较高的存储器单元具有与逻辑器件类似的上部高度。

    Method Of Forming Split-Gate Memory Cell Array Along With Low And High Voltage Logic Devices
    209.
    发明申请
    Method Of Forming Split-Gate Memory Cell Array Along With Low And High Voltage Logic Devices 有权
    与低和高电压逻辑器件一起形成分离栅极存储器单元阵列的方法

    公开(公告)号：US20160218195A1

    公开(公告)日：2016-07-28

    申请号：US15002307

    申请日：2016-01-20

    Applicant: Silicon Storage Technology, Inc.

    Inventor： Man-Tang Wu ,  Jeng-Wei Yang ,  Chien-Sheng Su ,  Chun-Ming Chen ,  Nhan Do

    IPC: H01L29/66 ,  H01L27/115

    CPC classification number: H01L29/66537 ,  H01L21/28273 ,  H01L27/11519 ,  H01L27/11546 ,  H01L29/42328 ,  H01L29/66825

    Abstract: A method of forming a memory device on a substrate having memory, LV and HV areas, including forming pairs of spaced apart memory stacks in the memory area, forming a first conductive layer over and insulated from the substrate, forming a first insulation layer on the first conductive layer and removing it from the memory and HV areas, performing a conductive material deposition to thicken the first conductive layer in the memory and HV areas, and to form a second conductive layer on the first insulation layer in the LV area, performing an etch to thin the first conductive layer in the memory and HV areas and to remove the second conductive layer in the LV area, removing the first insulation layer from the LV area, and patterning the first conductive layer to form blocks of the first conductive layer in the memory, LV and HV areas.

    Abstract translation: 一种在具有存储器，LV和HV区域的衬底上形成存储器件的方法，包括在存储区域中形成间隔开的存储堆叠对，在衬底上形成第一导电层并与衬底绝缘，在第一绝缘层上形成第一绝缘层 第一导电层并将其从存储器和HV区域中移除，执行导电材料沉积以增厚存储器和HV区域中的第一导电层，并在LV区域的第一绝缘层上形成第二导电层， 蚀刻以使存储器和HV区域中的第一导电层变薄，并且去除LV区域中的第二导电层，从LV区域移除第一绝缘层，以及图案化第一导电层以形成第一导电层的块 记忆，LV和HV区域。

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