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公开(公告)号：US08080836B2
公开(公告)日：2011-12-20
申请号：US11825809
申请日：2007-07-09
IPC分类号： H01L21/02
CPC分类号： H01L21/02376 , H01L21/02378 , H01L21/02389 , H01L21/02529 , H01L21/02576 , H01L21/02579 , H01L21/0262 , H01L21/02631 , H01L21/02636
摘要： A process is disclosed for in-situ fabricating a semiconductor component imbedded in a substrate. A substrate is ablated with a first laser beam to form a void therein. A first conductive element is formed in the void of the substrate with a second laser beam. A semiconductor material is deposited upon the first conductive element with a third laser beam operating in the presence of a depositing atmosphere. A second conductive element is formed on the first semiconductor material with a fourth laser beam. The process may be used for fabricating a Schottky barrier diode or a junction field effect transistor and the like.
摘要翻译： 公开了一种用于原位制造嵌入衬底中的半导体组件的工艺。 用第一激光束烧蚀衬底以在其中形成空隙。 第一导电元件用第二激光束形成在衬底的空隙中。 在存在沉积气氛的情况下，第三激光束在第一导电元件上沉积半导体材料。 第二导电元件用第四激光束形成在第一半导体材料上。 该工艺可用于制造肖特基势垒二极管或结型场效应晶体管等。
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公开(公告)号：US07603883B2
公开(公告)日：2009-10-20
申请号：US11821640
申请日：2007-06-25
IPC分类号： B21B45/00
CPC分类号： B21C37/042 , B21C1/003 , B21C1/02 , B21C1/12 , B21C37/047 , Y10S72/70
摘要： An apparatus and method is disclosed for drawing continuous metallic wire having a first diameter to a metallic fiber having a reduced second diameter. A feed mechanism moves the wire at a first linear velocity. A laser beam heats a region of the wire to an elevated temperature. A draw mechanism draws the heated wire at a second and greater linear velocity for providing a drawn metallic fiber having the reduced second diameter.
摘要翻译： 公开了一种用于将具有第一直径的连续金属丝拉制成具有减小的第二直径的金属纤维的装置和方法。 进给机构以第一线速度移动线。 激光束将导线的区域加热到升高的温度。 牵引机构以第二和更大的线速度牵引加热的线，以提供具有减小的第二直径的拉伸金属纤维。
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公开(公告)号：US07419887B1
公开(公告)日：2008-09-02
申请号：US11189266
申请日：2005-07-26
申请人： Nathaniel R. Quick , Aravinda Kar
发明人： Nathaniel R. Quick , Aravinda Kar
CPC分类号： B82Y30/00 , H01L21/02381 , H01L21/02587 , H01L21/02592 , H01L21/02628 , H01L21/02675 , H01L21/288 , H01L21/76838 , Y10S977/70 , Y10S977/712 , Y10S977/773 , Y10S977/786
摘要： An apparatus and method is disclosed for forming a nano structure on a substrate with nano particles. The nano particles are deposited through a nano size pore onto the substrate. A laser beam is directed through a concentrator to focus a nano size laser beam onto the deposited nano particles on the substrate. The apparatus and method is suitable for fabricating patterned conductors, semiconductors and insulators on semiconductor wafers of a nano scale line width by direct nanoscale deposition of materials.
摘要翻译： 公开了一种在具有纳米颗粒的衬底上形成纳米结构的装置和方法。 将纳米颗粒通过纳米尺寸的孔沉积到基底上。 将激光束引导通过聚光器将纳米尺寸激光束聚焦到基底上沉积的纳米颗粒上。 该装置和方法适用于通过材料的直接纳米尺度沉积在纳米尺度线宽度的半导体晶片上制造图案化的导体，半导体和绝缘体。
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公开(公告)号：US07237422B2
公开(公告)日：2007-07-03
申请号：US11264877
申请日：2005-11-01
IPC分类号： B21D37/16
CPC分类号： B21C37/042 , B21C1/003 , B21C1/02 , B21C1/12 , B21C37/047 , Y10S72/70
摘要： An apparatus and method is disclosed for drawing continuous metallic wire having a first diameter to a metallic fiber having a reduced second diameter. A feed mechanism moves the wire at a first linear velocity. A laser beam heats a region of the wire to an elevated temperature. A draw mechanism draws the heated wire at a second and greater linear velocity for providing a drawn metallic fiber having the reduced second diameter.
摘要翻译： 公开了一种用于将具有第一直径的连续金属丝拉制成具有减小的第二直径的金属纤维的装置和方法。 进给机构以第一线速度移动线。 激光束将导线的区域加热到升高的温度。 牵引机构以第二和更大的线速度牵引加热的线，以提供具有减小的第二直径的拉伸金属纤维。
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公开(公告)号：US07013695B2
公开(公告)日：2006-03-21
申请号：US10828711
申请日：2004-04-20
IPC分类号： B21D37/16
CPC分类号： B21C37/042 , B21C1/003 , B21C1/02 , B21C1/12 , B21C37/047 , Y10S72/70
摘要： An apparatus and method is disclosed for drawing continuous metallic wire having a first diameter to a metallic fiber having a reduced second diameter. A feed mechanism moves the wire at a first linear velocity. A laser beam heats a region of the wire to an elevated temperature. A draw mechanism draws the heated wire at a second and greater linear velocity for providing a drawn metallic fiber having the reduced second diameter.
摘要翻译： 公开了一种用于将具有第一直径的连续金属丝拉制成具有减小的第二直径的金属纤维的装置和方法。 进给机构以第一线速度移动线。 激光束将导线的区域加热到升高的温度。 牵引机构以第二和更大的线速度牵引加热的线，以提供具有减小的第二直径的拉伸金属纤维。
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公开(公告)号：US06203861B1
公开(公告)日：2001-03-20
申请号：US09221553
申请日：1998-12-28
IPC分类号： B05D306
CPC分类号： C23C26/02 , B22F3/1055 , B29C64/00 , B33Y10/00 , B33Y30/00 , B33Y50/02 , B33Y70/00 , B33Y80/00 , C04B35/622 , C23C4/12 , Y02P10/295
摘要： A one-step rapid manufacuring process is used to create three dimensional prototyping parts. Material such as metal, ceramics and the like powder, and wire, and the like, is delivered to a laser beam-material interaction region where it is melted and deposited on a substrate. The melted and deposited material is placed on a XYZ workstation. Three dimensional parts are created by moving the XYZ workstation relative to the laser beam while simultaneously feeding powdered alloys, first in the XY and then in the Z plane. Beam shaping focussing optics can be used to tailor the intensity distribution of the laser beam to the requirements of the deposition layers, and can be used to create parts with desired mechanical or thermodynamic properties. Additional beam splitting and recombining optics can be used to allow powder to be fed at a perpendicular angle to the substrate.
摘要翻译： 使用一步快速制造工艺来创建三维原型零件。 材料如金属，陶瓷等粉末和线等被输送到激光束材料相互作用区域，在该区域中熔化并沉积在基底上。 将熔融和沉积的材料放置在XYZ工作站上。 通过相对于激光束移动XYZ工作站来创建三维部件，同时首先在XY中并在Z平面中投入粉末状合金。 光束成形聚焦光学元件可用于根据沉积层的要求调整激光束的强度分布，并可用于产生具有所需机械或热力学性质的部件。 可以使用附加的光束分离和重组光学器件来允许粉末以与基底垂直的角度进给。
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公开(公告)号：US20220371128A1
公开(公告)日：2022-11-24
申请号：US17766041
申请日：2020-10-03
申请人： Michael Carl CHASE , Dave WOLFE , John Madden MATHY , Xinpeng DU , Xiaoming YU , Aravinda KAR , Arifur RAHAMAN , ELSNER ENGINEERING WORKS, INC.
发明人： Michael Carl CHASE , Dave WOLFE , John Madden MATHY, Jr. , Xinpeng DU , Xiaoming YU , Aravinda KAR , Arifur RAHAMAN
IPC分类号： B23K26/38 , B23K26/08 , B23K26/082 , B23K26/046 , B23K26/70 , B23K26/0622 , D06M10/00
摘要： An apparatus for laser processing of very wide non-woven fabric materials at high speeds. This invention enables a laser beam to sever, perforate and pattern a large piece of fabric materials planarly disposed at regular or irregular spatial intervals over the entire width while the fabric passes from one roller to another roller at high speeds by precisely managing focus and intensity of the beam at the focal point on the web. A control system managing the laser processing system enables rapid reconfiguration of perforation patterns. The fabric can be woven or nonwoven, homogeneous or nonhomogeneous material with uniform or nonuniform thickness. An optical sensor is provided to sense the laser processing as it is performed and provide feedback to a system controller to optimize laser processing performance in real time.
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公开(公告)号：US20170131556A1
公开(公告)日：2017-05-11
申请号：US14938194
申请日：2015-11-11
摘要： A method includes generating a laser beam and applying the beam to a substrate to form a via in the substrate. The laser beam has an intensity profile taken at a cross-section transverse to the direction of propagation of the beam. The intensity profile has a first substantially uniform level across an interior region of the cross-section and a second substantially uniform level across an exterior region of the cross-section. The second intensity level is greater than the first intensity level.
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公开(公告)号：US09211609B2
公开(公告)日：2015-12-15
申请号：US11319824
申请日：2005-12-28
IPC分类号： B23K26/00 , B23K26/38 , B23K26/073 , H01L21/311 , H05K3/00 , B23K26/40
CPC分类号： B23K26/386 , B23K26/0734 , B23K26/382 , B23K26/389 , B23K26/40 , B23K26/402 , B23K2101/40 , B23K2103/30 , B23K2103/50 , B23K2103/52 , H01L21/31138 , H05K3/0026
摘要： A method includes generating a laser beam and applying the beam to a substrate to form a via in the substrate. The laser beam has an intensity profile taken at a cross-section transverse to the direction of propagation of the beam. The intensity profile has a first substantially uniform level across an interior region of the cross-section and a second substantially uniform level across an exterior region of the cross-section. The second intensity level is greater than the first intensity level.
摘要翻译： 一种方法包括产生激光束并将光束施加到衬底以在衬底中形成通孔。 激光束具有在横向于横梁的传播方向的横截面处获得的强度分布。 强度分布在横截面的内部区域上具有第一基本上均匀的水平，并且横跨横截面的外部区域具有第二基本均匀的水平。 第二强度水平大于第一强度水平。
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公开(公告)号：US08617669B1
公开(公告)日：2013-12-31
申请号：US12928229
申请日：2010-12-07
申请人： Nathaniel R. Quick , Aravinda Kar
发明人： Nathaniel R. Quick , Aravinda Kar
CPC分类号： H01L21/02381 , H01L21/02378 , H01L21/0242 , H01L21/02527 , H01L21/02529 , H01L21/0254 , H01L21/02612 , H01L21/02675 , H01L21/02689 , H01L21/0405 , H01L21/0445 , H01L21/268 , H01L23/367 , H01L23/373 , H01L23/3738 , H01L29/1606 , H01L2924/0002 , H01L2924/00
摘要： An apparatus and method is disclosed for synthesizing graphene comprising the steps of providing a substrate and focusing a laser beam in the presence of a carbon doping gas to induce photolytic decomposition of the gas to atomic carbon. The carbon is photolytically reacted with the substrate to grow graphene.
摘要翻译： 公开了一种用于合成石墨烯的装置和方法，包括以下步骤：在存在碳掺杂气体的情况下提供衬底并聚焦激光束，以引起气体对原子碳的光解作用。 碳与基板光解反应生长石墨烯。
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