公开(公告)号：US4943750A

公开(公告)日：1990-07-24

申请号：US376208

申请日：1989-07-03

Applicant: Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia

Inventor： Roger T. Howe ,  Jeffrey H. Lang ,  Martin F. Schlecht ,  Martin A. Schmidt ,  Stephen D. Senturia

IPC: H02N1/00

CPC classification number: H02N1/004

Abstract: An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element with the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.

Abstract translation: 静电驱动微致动器在单片工艺中被微加工。 牺牲层被放置在移动元件和定子结构层之间。 牺牲层的移除在定子内留​​下自由站立的移动元件和微米宽的气隙。 大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障，并且能够在定子和移动元件之间产生高能量的转矩密度。 一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极，该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。 在牺牲层在移动元件结构层的边缘上层叠期间，轴承与具有定子的移动元件对齐。 轴承和定子横向稳定移动元件。 垂直稳定性是通过移动元件，电子电路或衬套的空气动力学成形。 微致动器的应用包括线性滑动快门，光学调制器，陀螺仪和空气泵。

公开(公告)号：US4942767A

公开(公告)日：1990-07-24

申请号：US360325

申请日：1989-06-02

Applicant: Joseph H. Haritonidis ,  Stephen D. Senturia ,  David J. Warkentin ,  Mehran Mehregany

Inventor： Joseph H. Haritonidis ,  Stephen D. Senturia ,  David J. Warkentin ,  Mehran Mehregany

IPC: H04R23/00

CPC classification number: H04R23/008

Abstract: A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a transmitted part which is subsequently reflected from the diaphragm, and a locally reflected part which interferes with the subsequently diaphragm reflected part. The interference of the two reflective parts forms an interference light pattern carried back through the fiber to a light detector. The interference pattern provides an indication of diaphragm deflection as a function of applied pressure across the exposed side of the diaphragm. A detection of magnitude and direction of diaphragm deflection is provided by use of a second fiber positioned across the gap from the diaphragm. The second fiber provides an interference pattern in the same manner as the first fiber but with a phase shift. An opening allowing communication between ambient and the gap enables use of the interferometer sensor as a shear stress measuring device.

Abstract translation: 微加工膜片位于与光纤端部的间隙上。 光纤和隔膜一体安装。 光纤的端部提供了一个局部参考平面，它将穿过光纤的光分成隔膜。 光被分割成随后从光阑反射的透射部分和与随后的光阑反射部分干涉的局部反射部分。 两个反射部件的干涉形成通过光纤带回光检测器的干涉光图案。 干涉图形提供了膜片偏转的指示，作为横跨隔膜的暴露侧的施加压力的函数。 通过使用位于隔膜间隙的第二纤维来提供膜片偏转的幅度和方向的检测。 第二光纤以与第一光纤相同的方式提供干涉图案，但是具有相移。 允许环境和间隙之间的通信的开口使得能够使用干涉仪传感器作为剪切应力测量装置。

公开(公告)号：US4926696A

公开(公告)日：1990-05-22

申请号：US932780

申请日：1986-11-19

Applicant: Joseph H. Haritonidis ,  Stephen D. Senturia ,  David J. Warkentin ,  Mehran Mehregany

Inventor： Joseph H. Haritonidis ,  Stephen D. Senturia ,  David J. Warkentin ,  Mehran Mehregany

IPC: H04R23/00

CPC classification number: G01L9/0079 ,  H04R23/008

Abstract: A thin diaphragm receives pressure across one side and faces a beam splitter on the other side. The beam splitter is integrally attached to the diaphragm and serves as a local optical reference plane for the entire assembly. Coherent light from a light source is partially reflected at the beam splitter. The remainder of the light is reflected from the diaphragm. The reflected beams recombine at a detection point and have a phase difference which is a function of the amount of deflection of the diaphragm. The detected recombined beams are indicative of the deflection of the diaphragm. Optical calibration of the aseembly is a function of the distance between the diaphragm and beam splitter which remains as predefined because the beam splitter is integral with the diaphragm. A vent in the small cavity formed between the diaphragm and beam splitter enables the diaphragm to sense small pressures with increased sensitivity. Through micro-fabrication techniques, the diaphragm is made sensitive to dynamic and static pressure. Detection of the thermal expansion of the assembly as well as deflection of the diaphragm enables a sensed pressure measurement as a differential between the detected thermal expansion and deflection.

Abstract translation: 薄隔膜承受一侧的压力，并面对另一侧的分束器。 分束器一体地附接到隔膜，并用作整个组件的局部光学参考平面。 来自光源的相干光部分地在分束器处反射。 剩余的光从隔膜反射。 反射光束在检测点复合，并具有作为光阑偏转量的函数的相位差。 检测到的重组光束表示膜片的偏转。 组件的光学校准是隔膜和分束器之间的距离的函数，其保持为预定义，因为分束器与隔膜成一体。 在隔膜和分束器之间形成的小空腔中的通风口使得隔膜能够以更高的灵敏度感测小压力。 通过微型制造技术，膜片对动态和静态压力敏感。 检测组件的热膨胀以及隔膜的偏转使得能够将检测到的压力测量作为检测到的热膨胀和挠曲之间的差。

公开(公告)号：US4896098A

公开(公告)日：1990-01-23

申请号：US273106

申请日：1988-11-16

Applicant: Joseph H. Haritonidis ,  Roger T. Howe ,  Martin A. Schmidt ,  Stephen D. Senturia

Inventor： Joseph H. Haritonidis ,  Roger T. Howe ,  Martin A. Schmidt ,  Stephen D. Senturia

IPC: G01N13/00

CPC classification number: G01N13/00

Abstract: A microbridge is used for the accurate measuring of time varying shear forces in the presence of fluctuating pressure. A microdimensioned plate is suspended by arms to form a microbridge. The microdimensions enable the smallest turbulence scales of interest to be sensed uniformally throughout the entire surface of the plate. The cavity beneath the microbridge is so small that a viscous drag is created in the air within the cavity and dampens normal movement of the plate. The microdimensions in conjunction with the damping effect of the cavity enable the sensor to be substantially insensitive to pressure and thus sense lateral forces independent of normal forces. The microbridge sensor is fabricated by surface micromachining. A sacrificial layer is deposited over a substrate. A structural layer is deposited and patterned to form the plate and support arms over the sacrificial layer. The cavity is formed by a selective etchant removing the sacrificial layer and leaving the rest of the microbridge structure suspended above the substrate. In a differential capacitance readout scheme, a conducting layer in the plate of the microbridge is capacitively coupled with conductors in the substrate. A sensed change in capacitive coupling generates an indication of plate deflection and thereby shear stress independent of vertical movement. Optic readout schemes may also be employed and are readily incorporated in the fabrication process. A mounting member presses the microbridge sensor into a holding plate which fits in a matching slot flush with the target wall.

Abstract translation: 在存在波动压力的情况下，使用微桥来精确测量时变剪切力。 通过臂悬挂微尺寸板以形成微桥。 微尺寸使得能够在板的整个表面均匀地感测到感兴趣的最小湍流尺度。 微桥下面的空腔很小，使得在空腔内的空气中产生粘性阻力并阻尼板的正常运动。 结合腔的阻尼效应的微尺寸使得传感器对压力基本上不敏感，并因此感测与法向力无关的侧向力。 微桥传感器通过表面微加工制造。 牺牲层沉积在衬底上。 沉积并图案化结构层以在牺牲层上形成板和支撑臂。 通过选择性蚀刻剂除去该牺牲层并使悬浮在衬底上方的微桥结构的其余部分形成空腔。 在差分电容读出方案中，微桥板中的导电层与衬底中的导体电容耦合。 感测到的电容耦合变化产生板偏转的指示，从而产生与垂直运动无关的剪切应力。 也可以采用光学读出方案，并且容易地结合在制造过程中。 安装构件将微桥传感器压入保持板，该保持板适合与目标壁齐平的匹配槽。

公开(公告)号：US4236121A

公开(公告)日：1980-11-25

申请号：US893552

申请日：1978-04-05

Applicant: Stephen D. Senturia

Inventor： Stephen D. Senturia

IPC: H03K3/02 ,  G01N27/414 ,  H01L27/088 ,  H01L29/423 ,  H01L29/49 ,  H03K3/354 ,  H03K3/356 ,  H03K3/36 ,  H03K19/094 ,  H03K19/0944 ,  H03K3/282 ,  H03K3/353

CPC classification number: H01L29/4983 ,  G01N27/4148 ,  H01L27/088 ,  H01L29/42312 ,  H01L29/4966 ,  H03K19/094 ,  H03K3/354 ,  H03K3/356017

Abstract: Oscillators that include charge-flow transistor logic elements, each logic element including a charge-flow transistor and a load element, in combination. The charge-flow transistors have TURN-ON times t.sub.on and TURN-OFF times t.sub.off that can be very different from one another (e.g., t.sub.on can range from milliseconds to hundreds of seconds; whereas in the charge-flow transistors shown herein t.sub.off is typically less than one microsecond). The magnitude of t.sub.on is sensitive to the environment; hence, the period of oscillation can be used as a measure of an environmental condition.

Abstract translation: 振荡器包括电荷流量晶体管逻辑元件，每个逻辑元件包括电荷流量晶体管和负载元件。 电荷流量晶体管具有TURN-ON时间吨和TURN-OFF时间toff，其可以彼此非常不同（例如，ton可以在几毫秒到几百秒的范围内;而在本文中所示的电荷流量晶体管中，通常 小于1微秒）。 吨的大小对环境敏感; 因此，振荡周期可以用作环境条件的度量。

公开(公告)号：US5932940A

公开(公告)日：1999-08-03

申请号：US749454

申请日：1996-11-15

Applicant: Alan H. Epstein ,  Stephen D. Senturia ,  Ian A. Waitz ,  Jeffrey H. Lang ,  Stuart A. Jacobson ,  Fredric F. Ehrich ,  Martin A. Schmidt ,  G. K. Ananthasuresh ,  Mark S. Spearing ,  Kenneth S. Breuer ,  Steven F. Nagle

Inventor： Alan H. Epstein ,  Stephen D. Senturia ,  Ian A. Waitz ,  Jeffrey H. Lang ,  Stuart A. Jacobson ,  Fredric F. Ehrich ,  Martin A. Schmidt ,  G. K. Ananthasuresh ,  Mark S. Spearing ,  Kenneth S. Breuer ,  Steven F. Nagle

IPC: F01D5/28 ,  F01D15/06 ,  F01D25/20 ,  F01K13/00 ,  F02C3/05 ,  F02K9/48 ,  F23R3/42 ,  H01L29/84 ,  F02C3/04 ,  H02K29/00

CPC classification number: F23R3/42 ,  F01D15/06 ,  F01D25/20 ,  F01D5/28 ,  F01K13/00 ,  F02C3/05 ,  F02K9/48 ,  F05D2220/50 ,  F05D2230/14 ,  F05D2250/82 ,  F05D2250/84 ,  F05D2300/2261 ,  F05D2300/2283 ,  F05D2300/607 ,  F23C2900/03001

Abstract: The invention provides a micro-gas turbine engine and associated microcomponentry. The engine components, including, e.g., a compressor, a diffuser having diffuser vanes, a combustion chamber, turbine guide vanes, and a turbine are each manufactured by, e.g., microfabrication techniques, of a structural material common to all of the elements, e.g., a microelectronic material such as silicon or silicon carbide. Vapor deposition techniques, as well as bulk wafer etching techniques, can be employed to produce the engine. The engine includes a rotor having a shaft with a substantially untapered compressor disk on a first end, defining a centrifugal compressor, and a substantially untapered turbine disk on the opposite end, defining a radial inflow turbine. The rotor is preferably formed of a material characterized by a strength-to-density ratio that enables a rotor speed of at least about 500,000 rotations per minute. An annular, axial-flow combustion chamber is provided that is located axially between the compressor and turbine disks and that has a ratio of annular height to axial length of at least about 0.5. The micro-gas turbine engine can be configured with an integral microgenerator as a source of electrical power, and can be employed for a wide range of power, propulsion, and thermodynamic cycle applications.

Abstract translation: 本发明提供了一种微型燃气涡轮发动机和相关的微型部件。 包括例如压缩机，具有扩散器叶片的扩散器，燃烧室，涡轮引导叶片和涡轮机的发动机部件各自通过例如微细加工技术制造所有元件共有的结构材料，例如 ，微电子材料如硅或碳化硅。 可以采用气相沉积技术以及体晶片蚀刻技术来生产发动机。 发动机包括具有轴的转子，该轴具有在第一端上具有基本上未经紧固的压缩机盘，限定离心式压缩机，以及在相对端上限定径向流入涡轮机的基本上未配套的涡轮盘。 转子优选由特征在于强度与密度之比的材料形成，其能够使转子速度为每分钟至少约50万转。 提供了一种环形的轴向流动燃烧室，其轴向位于压缩机和涡轮盘之间，并且具有至少约0.5的环形高度与轴向长度的比率。 微型燃气涡轮发动机可以配置有作为电力源的整体微型发电机，并且可以用于广泛的功率，推进和热力循环应用。

公开(公告)号：US5757536A

公开(公告)日：1998-05-26

申请号：US521559

申请日：1995-08-30

Applicant: Antonio J. Ricco ,  Michael A. Butler ,  Michael B. Sinclair ,  Stephen D. Senturia

Inventor： Antonio J. Ricco ,  Michael A. Butler ,  Michael B. Sinclair ,  Stephen D. Senturia

IPC: G02B5/18 ,  G02B26/08 ,  G02B26/00

CPC classification number: G02B5/1828 ,  G02B26/0808

Abstract: An electrically-programmable diffraction grating. The programmable grating includes a substrate having a plurality of electrodes formed thereon and a moveable grating element above each of the electrodes. The grating elements are electrostatically programmable to form a diffraction grating for diffracting an incident beam of light as it is reflected from the upper surfaces of the grating elements. The programmable diffraction grating, formed by a micromachining process, has applications for optical information processing (e.g. optical correlators and computers), for multiplexing and demultiplexing a plurality of light beams of different wavelengths (e.g. for optical fiber communications), and for forming spectrometers (e.g. correlation and scanning spectrometers).

Abstract translation: 电可编程衍射光栅。 可编程光栅包括其上形成有多个电极的基板和每个电极上方的可移动光栅元件。 光栅元件是静电可编程的，以形成衍射光栅，用于在入射光束从光栅元件的上表面反射时衍射入射光束。 通过微加工过程形成的可编程衍射光栅具有用于光学信息处理（例如光学相关器和计算机）的应用，用于对不同波长的多个光束（例如用于光纤通信）进行多路复用和解复用，并且用于形成光谱仪 例如相关和扫描光谱仪）。

公开(公告)号：US5106461A

公开(公告)日：1992-04-21

申请号：US632364

申请日：1990-12-21

Applicant: David Volfson ,  Stephen D. Senturia

Inventor： David Volfson ,  Stephen D. Senturia

IPC: H01L23/538 ,  H05K3/00 ,  H05K3/06 ,  H05K3/10 ,  H05K3/20 ,  H05K3/38 ,  H05K3/42 ,  H05K3/46

CPC classification number: H05K3/4682 ,  H01L23/5383 ,  H01L23/5384 ,  H01L23/5387 ,  H05K3/423 ,  H01L2221/68345 ,  H01L2224/1147 ,  H01L2924/01019 ,  H01L2924/3011 ,  H05K2201/0154 ,  H05K2201/0355 ,  H05K2201/0394 ,  H05K2201/09563 ,  H05K2201/096 ,  H05K2203/016 ,  H05K2203/0733 ,  H05K2203/095 ,  H05K3/002 ,  H05K3/0023 ,  H05K3/0041 ,  H05K3/062 ,  H05K3/108 ,  H05K3/205 ,  H05K3/388 ,  H05K3/467 ,  Y10S438/977

Abstract: A multi-layer interconnect structure of alternating dielectric (e.g., polyimide) and metal (e.g., copper) is built on a substrate supporting a continuous layer of metal. This metal layer is used as an electrode for plating vias through all the dielectric layers. Once the desired number of layers are formed, the substrate is removed and the continuous metal layer is patterned. Solid metal vias having nearly vertical side walls can be stacked vertically, producing good electrical and thermal transfer paths and permitting small, closely-spaced conductors. Further, by mixing geometrical shapes of conductors, a variety of useful structures can be achieved, such as controlled impedance transmission lines and multiconductor TAB tape with interconnects on tape of different dimensions than TAB fingers.

Abstract translation: 在支撑连续金属层的基板上建立交替电介质（例如聚酰亚胺）和金属（例如铜）的多层互连结构。 该金属层用作通过所有介电层电镀通孔的电极。 一旦形成了期望数量的层，就去除衬底并且连续的金属层被图案化。 具有几乎垂直侧壁的固体金属通孔可以垂直堆叠，产生良好的电和热传递路径并允许小的，紧密间隔的导体。 此外，通过混合导体的几何形状，可以实现各种有用的结构，例如受控阻抗传输线和具有与TAB指不同的尺寸的带上的互连的多导体TAB带。

公开(公告)号：US4908509A

公开(公告)日：1990-03-13

申请号：US263545

申请日：1988-10-27

Applicant: Stephen D. Senturia

Inventor： Stephen D. Senturia

IPC: G01L5/00 ,  G01N19/04

CPC classification number: G01N19/04 ,  G01L5/00

Abstract: A force sensor detects adhesion between a subject and a substrate through an adhesive. The sensor is embedded in the adhesive and is formed by two members which are displaceable relative to each other. A readout scheme detects displacement of the two members due to a force and reaction forces acting upon the sensor through the adhesive. Fiber optics may be employed in the readout scheme to provide an indication of displacement of the two members and thereby adhesion of the subject to the substrate.

Abstract translation: 力传感器通过粘合剂检测被检体和基底之间的粘附。 传感器嵌入粘合剂中，并且由相对于彼此移位的两个构件形成。 读出方案由于通过粘合剂作用在传感器上的力和反作用力来检测两个构件的位移。 可以在读出方案中采用光纤来提供两个部件的位移的指示，从而使受试者与基底的粘附。

公开(公告)号：US4614119A

公开(公告)日：1986-09-30

申请号：US709870

申请日：1985-03-08

Applicant: Paul M. Zavracky ,  Stephen D. Senturia ,  Richard H. Morrison, Jr.

Inventor： Paul M. Zavracky ,  Stephen D. Senturia ,  Richard H. Morrison, Jr.

IPC: B81C1/00 ,  G01L9/00 ,  H01L21/20 ,  G01L11/00 ,  B44C1/22 ,  C23F1/02 ,  H01L21/306

CPC classification number: B81C1/0015 ,  G01L9/002 ,  H01L21/2007 ,  B81C2201/0136 ,  B81C2201/019

Abstract: A microminiature resonant hollow beam sensor is manufactured by micromachining and microfabrication techniques. Specifically, a sensor is formed by etching troughs in a pair of silicon substrates, joining the substrates face-to-face, and etching away unwanted material to free the resonant hollow beam sensors.

Abstract translation: 微型共振空心光束传感器通过微加工和微细加工技术制造。 具体地，通过在一对硅衬底中蚀刻槽形成传感器，将衬底面对面地接合，并且蚀刻掉不想要的材料以释放共振中空束传感器。